JP5461472B2 - 高分子化合物、該高分子化合物を含有するフォトレジスト組成物、およびレジストパターン形成方法 - Google Patents
高分子化合物、該高分子化合物を含有するフォトレジスト組成物、およびレジストパターン形成方法 Download PDFInfo
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- JP5461472B2 JP5461472B2 JP2011111663A JP2011111663A JP5461472B2 JP 5461472 B2 JP5461472 B2 JP 5461472B2 JP 2011111663 A JP2011111663 A JP 2011111663A JP 2011111663 A JP2011111663 A JP 2011111663A JP 5461472 B2 JP5461472 B2 JP 5461472B2
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- -1 4-oxo-adamantane-1-yl group Chemical group 0.000 claims description 88
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 56
- 125000000217 alkyl group Chemical group 0.000 claims description 48
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 38
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- 125000001931 aliphatic group Chemical group 0.000 claims description 26
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- 239000002243 precursor Substances 0.000 description 10
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 9
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- 238000001644 13C nuclear magnetic resonance spectroscopy Methods 0.000 description 8
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- ORILYTVJVMAKLC-UHFFFAOYSA-N adamantane Chemical compound C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 description 8
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- 238000000354 decomposition reaction Methods 0.000 description 8
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 8
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- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 7
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- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 6
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- 125000004183 alkoxy alkyl group Chemical group 0.000 description 6
- 238000001459 lithography Methods 0.000 description 6
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- 239000000047 product Substances 0.000 description 6
- 125000001424 substituent group Chemical group 0.000 description 6
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 6
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- YXHKONLOYHBTNS-UHFFFAOYSA-N Diazomethane Chemical compound C=[N+]=[N-] YXHKONLOYHBTNS-UHFFFAOYSA-N 0.000 description 5
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- KEAYESYHFKHZAL-UHFFFAOYSA-N Sodium Chemical compound [Na] KEAYESYHFKHZAL-UHFFFAOYSA-N 0.000 description 5
- SLINHMUFWFWBMU-UHFFFAOYSA-N Triisopropanolamine Chemical compound CC(O)CN(CC(C)O)CC(C)O SLINHMUFWFWBMU-UHFFFAOYSA-N 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
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- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 4
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Images
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| JP5461503B2 (ja) | 2014-04-02 |
| JP2012056955A (ja) | 2012-03-22 |
| JP2011225885A (ja) | 2011-11-10 |
| JP5778985B2 (ja) | 2015-09-16 |
| JP2011162796A (ja) | 2011-08-25 |
| JP2011190455A (ja) | 2011-09-29 |
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