JP5443171B2 - 分光装置および方法 - Google Patents

分光装置および方法 Download PDF

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Publication number
JP5443171B2
JP5443171B2 JP2009546809A JP2009546809A JP5443171B2 JP 5443171 B2 JP5443171 B2 JP 5443171B2 JP 2009546809 A JP2009546809 A JP 2009546809A JP 2009546809 A JP2009546809 A JP 2009546809A JP 5443171 B2 JP5443171 B2 JP 5443171B2
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JP2010517029A5 (enExample
JP2010517029A (ja
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ベネット ロバート
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Renishaw PLC
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Renishaw PLC
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Surgical Instruments (AREA)
  • Valve Device For Special Equipments (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Microscoopes, Condenser (AREA)
JP2009546809A 2007-01-25 2008-01-25 分光装置および方法 Active JP5443171B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0701477.2 2007-01-25
GBGB0701477.2A GB0701477D0 (en) 2007-01-25 2007-01-25 Spectroscopic apparatus and methods
PCT/GB2008/000252 WO2008090350A1 (en) 2007-01-25 2008-01-25 Spectroscopic apparatus and methods

Publications (3)

Publication Number Publication Date
JP2010517029A JP2010517029A (ja) 2010-05-20
JP2010517029A5 JP2010517029A5 (enExample) 2013-12-12
JP5443171B2 true JP5443171B2 (ja) 2014-03-19

Family

ID=37872808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009546809A Active JP5443171B2 (ja) 2007-01-25 2008-01-25 分光装置および方法

Country Status (7)

Country Link
EP (1) EP2106538B1 (enExample)
JP (1) JP5443171B2 (enExample)
CN (1) CN101589297B (enExample)
AT (1) ATE467104T1 (enExample)
DE (1) DE602008001157D1 (enExample)
GB (1) GB0701477D0 (enExample)
WO (1) WO2008090350A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011510317A (ja) * 2008-01-25 2011-03-31 レニショウ パブリック リミテッド カンパニー ライン走査型分光装置

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8179526B2 (en) 2007-01-25 2012-05-15 Renishaw Plc Spectroscopic apparatus with dispersive device for collecting sample data in synchronism with relative movement of a focus
GB0708582D0 (en) 2007-05-03 2007-06-13 Renishaw Plc Spectroscope apparatus and methods
SE533454C2 (sv) * 2008-12-18 2010-10-05 Portendo Ab Detektion av små mängder av ämnen
JP5765022B2 (ja) * 2011-03-31 2015-08-19 ソニー株式会社 微小粒子分析装置及び微小粒子分析方法
JP5927081B2 (ja) * 2012-08-17 2016-05-25 オリンパス株式会社 分光測定方法
GB201317429D0 (en) * 2013-10-02 2013-11-13 Renishaw Plc Spectroscopy apparatus and method
US10260856B2 (en) 2013-10-03 2019-04-16 Renishaw Plc Method of inspecting an object with a camera probe
WO2015125311A1 (ja) 2014-02-24 2015-08-27 オリンパス株式会社 分光測定方法
US20170160200A1 (en) * 2014-05-26 2017-06-08 Hitachi, Ltd. Optical analysis device
GB201415238D0 (en) 2014-08-28 2014-10-15 Renishaw Plc Spectroscopy apparatus
GB201503911D0 (en) 2015-03-09 2015-04-22 Renishaw Plc Transmission raman spectroscopy
LU93225B1 (de) * 2016-09-16 2018-03-19 Leica Microsystems Verfahren zur Erzeugung von Vorschaubildern mit einem Schiefeebenenmikroskop sowie Schiefeebenemikroskop und Bilderzeugungsvorrichtung für ein Schiefeebenemikroskop
DE102017213419A1 (de) * 2017-08-02 2019-02-07 Deere & Company Spektrometeranordnung
US10707051B2 (en) * 2018-05-14 2020-07-07 Gatan, Inc. Cathodoluminescence optical hub
GB2572662B (en) * 2018-10-05 2020-06-03 Res & Innovation Uk Raman spectrometer
WO2020174239A1 (en) 2019-02-27 2020-09-03 Renishaw Plc Spectroscopic apparatus
JP2023135837A (ja) * 2022-03-16 2023-09-29 浜松ホトニクス株式会社 試料測定装置および試料測定方法
GB202404510D0 (en) 2024-03-28 2024-05-15 Renishaw Plc Spectroscopy
GB202404500D0 (en) 2024-03-28 2024-05-15 Renishaw Plc Spectroscopy
GB202404511D0 (en) 2024-03-28 2024-05-15 Renishaw Plc Spectroscopy

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5442438A (en) * 1988-12-22 1995-08-15 Renishaw Plc Spectroscopic apparatus and methods
DE69227201T2 (de) * 1991-11-16 1999-02-18 Renishaw Plc, Wotton-Under-Edge, Gloucestershire Spektroskopisches Verfahren
US5173748A (en) * 1991-12-05 1992-12-22 Eastman Kodak Company Scanning multichannel spectrometry using a charge-coupled device (CCD) in time-delay integration (TDI) mode
JP3708929B2 (ja) * 2003-03-31 2005-10-19 株式会社東芝 パターン欠陥検査方法及びパターン欠陥検査装置
JP4565119B2 (ja) * 2004-10-18 2010-10-20 学校法人早稲田大学 ラマン分光装置
CN2793720Y (zh) * 2005-04-11 2006-07-05 全友电脑股份有限公司 生物晶片扫描装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011510317A (ja) * 2008-01-25 2011-03-31 レニショウ パブリック リミテッド カンパニー ライン走査型分光装置

Also Published As

Publication number Publication date
EP2106538B1 (en) 2010-05-05
CN101589297A (zh) 2009-11-25
CN101589297B (zh) 2011-06-29
EP2106538A1 (en) 2009-10-07
DE602008001157D1 (de) 2010-06-17
ATE467104T1 (de) 2010-05-15
GB0701477D0 (en) 2007-03-07
WO2008090350A1 (en) 2008-07-31
JP2010517029A (ja) 2010-05-20

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