ATE467104T1 - Spektroskopische vorrichtung und entsprechende verfahren - Google Patents

Spektroskopische vorrichtung und entsprechende verfahren

Info

Publication number
ATE467104T1
ATE467104T1 AT08701925T AT08701925T ATE467104T1 AT E467104 T1 ATE467104 T1 AT E467104T1 AT 08701925 T AT08701925 T AT 08701925T AT 08701925 T AT08701925 T AT 08701925T AT E467104 T1 ATE467104 T1 AT E467104T1
Authority
AT
Austria
Prior art keywords
sample
line focus
data
arrow
ccd
Prior art date
Application number
AT08701925T
Other languages
German (de)
English (en)
Inventor
Robert Bennett
Original Assignee
Renishaw Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw Plc filed Critical Renishaw Plc
Application granted granted Critical
Publication of ATE467104T1 publication Critical patent/ATE467104T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Surgical Instruments (AREA)
  • Valve Device For Special Equipments (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Microscoopes, Condenser (AREA)
AT08701925T 2007-01-25 2008-01-25 Spektroskopische vorrichtung und entsprechende verfahren ATE467104T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0701477.2A GB0701477D0 (en) 2007-01-25 2007-01-25 Spectroscopic apparatus and methods
PCT/GB2008/000252 WO2008090350A1 (en) 2007-01-25 2008-01-25 Spectroscopic apparatus and methods

Publications (1)

Publication Number Publication Date
ATE467104T1 true ATE467104T1 (de) 2010-05-15

Family

ID=37872808

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08701925T ATE467104T1 (de) 2007-01-25 2008-01-25 Spektroskopische vorrichtung und entsprechende verfahren

Country Status (7)

Country Link
EP (1) EP2106538B1 (enExample)
JP (1) JP5443171B2 (enExample)
CN (1) CN101589297B (enExample)
AT (1) ATE467104T1 (enExample)
DE (1) DE602008001157D1 (enExample)
GB (1) GB0701477D0 (enExample)
WO (1) WO2008090350A1 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8179526B2 (en) 2007-01-25 2012-05-15 Renishaw Plc Spectroscopic apparatus with dispersive device for collecting sample data in synchronism with relative movement of a focus
GB0803798D0 (en) * 2008-02-29 2008-04-09 Renishaw Plc Spectroscopic apparatus and methods
GB0708582D0 (en) 2007-05-03 2007-06-13 Renishaw Plc Spectroscope apparatus and methods
SE533454C2 (sv) * 2008-12-18 2010-10-05 Portendo Ab Detektion av små mängder av ämnen
JP5765022B2 (ja) * 2011-03-31 2015-08-19 ソニー株式会社 微小粒子分析装置及び微小粒子分析方法
JP5927081B2 (ja) * 2012-08-17 2016-05-25 オリンパス株式会社 分光測定方法
GB201317429D0 (en) * 2013-10-02 2013-11-13 Renishaw Plc Spectroscopy apparatus and method
CN105793695B (zh) 2013-10-03 2020-04-14 瑞尼斯豪公司 用相机探头探查物体的方法
WO2015125311A1 (ja) 2014-02-24 2015-08-27 オリンパス株式会社 分光測定方法
WO2015181872A1 (ja) * 2014-05-26 2015-12-03 株式会社日立製作所 光学分析装置
GB201415238D0 (en) 2014-08-28 2014-10-15 Renishaw Plc Spectroscopy apparatus
GB201503911D0 (en) * 2015-03-09 2015-04-22 Renishaw Plc Transmission raman spectroscopy
LU93225B1 (de) * 2016-09-16 2018-03-19 Leica Microsystems Verfahren zur Erzeugung von Vorschaubildern mit einem Schiefeebenenmikroskop sowie Schiefeebenemikroskop und Bilderzeugungsvorrichtung für ein Schiefeebenemikroskop
DE102017213419A1 (de) * 2017-08-02 2019-02-07 Deere & Company Spektrometeranordnung
US10707051B2 (en) * 2018-05-14 2020-07-07 Gatan, Inc. Cathodoluminescence optical hub
GB2572662B (en) * 2018-10-05 2020-06-03 Res & Innovation Uk Raman spectrometer
WO2020174239A1 (en) 2019-02-27 2020-09-03 Renishaw Plc Spectroscopic apparatus
JP2023135837A (ja) * 2022-03-16 2023-09-29 浜松ホトニクス株式会社 試料測定装置および試料測定方法
GB202404511D0 (en) 2024-03-28 2024-05-15 Renishaw Plc Spectroscopy
GB202404510D0 (en) 2024-03-28 2024-05-15 Renishaw Plc Spectroscopy
GB202404500D0 (en) 2024-03-28 2024-05-15 Renishaw Plc Spectroscopy

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5442438A (en) * 1988-12-22 1995-08-15 Renishaw Plc Spectroscopic apparatus and methods
DE69203215T2 (de) * 1991-11-16 1995-11-09 Renishaw Plc, Wotton-Under-Edge, Gloucestershire Spektroskopisches Gerät und Verfahren.
US5173748A (en) * 1991-12-05 1992-12-22 Eastman Kodak Company Scanning multichannel spectrometry using a charge-coupled device (CCD) in time-delay integration (TDI) mode
JP3708929B2 (ja) * 2003-03-31 2005-10-19 株式会社東芝 パターン欠陥検査方法及びパターン欠陥検査装置
JP4565119B2 (ja) * 2004-10-18 2010-10-20 学校法人早稲田大学 ラマン分光装置
CN2793720Y (zh) * 2005-04-11 2006-07-05 全友电脑股份有限公司 生物晶片扫描装置

Also Published As

Publication number Publication date
GB0701477D0 (en) 2007-03-07
EP2106538A1 (en) 2009-10-07
JP2010517029A (ja) 2010-05-20
CN101589297A (zh) 2009-11-25
CN101589297B (zh) 2011-06-29
WO2008090350A1 (en) 2008-07-31
EP2106538B1 (en) 2010-05-05
JP5443171B2 (ja) 2014-03-19
DE602008001157D1 (de) 2010-06-17

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