JP5437333B2 - ガラス基板のスクライブ方法及び加工装置 - Google Patents

ガラス基板のスクライブ方法及び加工装置 Download PDF

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Publication number
JP5437333B2
JP5437333B2 JP2011187412A JP2011187412A JP5437333B2 JP 5437333 B2 JP5437333 B2 JP 5437333B2 JP 2011187412 A JP2011187412 A JP 2011187412A JP 2011187412 A JP2011187412 A JP 2011187412A JP 5437333 B2 JP5437333 B2 JP 5437333B2
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Japan
Prior art keywords
glass
glass substrate
scribe
processing apparatus
scribing
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Expired - Fee Related
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JP2011187412A
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English (en)
Japanese (ja)
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JP2013049588A (ja
Inventor
宇航 蘇
剛史 池田
山本　　幸司
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Mitsuboshi Diamond Industrial Co Ltd
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Mitsuboshi Diamond Industrial Co Ltd
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Priority to JP2011187412A priority Critical patent/JP5437333B2/ja
Priority to TW101130387A priority patent/TWI491573B/zh
Priority to KR1020120094034A priority patent/KR101396990B1/ko
Priority to CN201210313553.3A priority patent/CN102964059B/zh
Publication of JP2013049588A publication Critical patent/JP2013049588A/ja
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  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Laser Beam Processing (AREA)
JP2011187412A 2011-08-30 2011-08-30 ガラス基板のスクライブ方法及び加工装置 Expired - Fee Related JP5437333B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011187412A JP5437333B2 (ja) 2011-08-30 2011-08-30 ガラス基板のスクライブ方法及び加工装置
TW101130387A TWI491573B (zh) 2011-08-30 2012-08-22 玻璃基板之刻劃線方法及加工裝置
KR1020120094034A KR101396990B1 (ko) 2011-08-30 2012-08-28 유리 기판의 스크라이브 방법 및 가공 장치
CN201210313553.3A CN102964059B (zh) 2011-08-30 2012-08-29 玻璃基板的刻划方法及加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011187412A JP5437333B2 (ja) 2011-08-30 2011-08-30 ガラス基板のスクライブ方法及び加工装置

Publications (2)

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JP2013049588A JP2013049588A (ja) 2013-03-14
JP5437333B2 true JP5437333B2 (ja) 2014-03-12

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JP2011187412A Expired - Fee Related JP5437333B2 (ja) 2011-08-30 2011-08-30 ガラス基板のスクライブ方法及び加工装置

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JP (1) JP5437333B2 (zh)
KR (1) KR101396990B1 (zh)
CN (1) CN102964059B (zh)
TW (1) TWI491573B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10138155B2 (en) 2013-12-03 2018-11-27 Corning Incorporated Apparatus and method for severing a moving ribbon of inorganic material

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6229411B2 (ja) * 2013-09-30 2017-11-15 日本電気株式会社 レーザ加工装置、及びレーザ加工方法
JP6269830B2 (ja) * 2014-06-11 2018-01-31 株式会社Ihi 脆性材料基板の割断方法及び脆性材料基板の割断装置
CN106687420B (zh) 2014-08-28 2020-03-27 康宁股份有限公司 用于切割玻璃板的设备和方法
JP2016069223A (ja) * 2014-09-30 2016-05-09 三星ダイヤモンド工業株式会社 ブレイク方法並びにブレイク装置
JP2016069222A (ja) * 2014-09-30 2016-05-09 三星ダイヤモンド工業株式会社 ブレイク方法並びにブレイク装置
JP2016102048A (ja) * 2014-11-13 2016-06-02 三星ダイヤモンド工業株式会社 スクライブ方法並びにスクライブ装置
WO2017007868A1 (en) 2015-07-07 2017-01-12 Corning Incorporated Apparatuses and methods for heating moving glass ribbons at separation lines and/or for separating glass sheets from glass ribbons
CN105643112A (zh) * 2016-02-25 2016-06-08 成都亨通兆业精密机械有限公司 玻璃切割设备
KR101826235B1 (ko) * 2016-08-05 2018-02-06 한국미쯔보시다이아몬드공업(주) 글래스기판 시간차 분단방법
CN107116702A (zh) * 2017-06-27 2017-09-01 盐城市宁润玻璃制品有限公司 一种玻璃基板切割设备
KR20200065210A (ko) * 2018-11-29 2020-06-09 주식회사 탑 엔지니어링 스크라이빙 방법

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3088327B2 (ja) * 1997-03-24 2000-09-18 鹿児島日本電気株式会社 ガラス基板分断方法
DE10041519C1 (de) 2000-08-24 2001-11-22 Schott Spezialglas Gmbh Verfahren und Vorrichtung zum Durchschneiden einer Flachglasplatte in mehrere Rechteckplatten
JP5280825B2 (ja) * 2008-12-17 2013-09-04 株式会社リンクスタージャパン 基板テーブルおよびそれを用いたレーザ加工装置
WO2010044217A1 (ja) * 2008-10-17 2010-04-22 株式会社リンクスタージャパン ディスプレイ用マザーガラス基板および脆性材料基板の切断方法、ディスプレイの製造方法
JP2010150068A (ja) * 2008-12-25 2010-07-08 Mitsuboshi Diamond Industrial Co Ltd 脆性材料基板の割断方法
EP2507182B1 (en) 2009-11-30 2014-03-05 Corning Incorporated Methods for laser scribing and separating glass substrates
JP5729604B2 (ja) * 2011-07-20 2015-06-03 株式会社レミ ガラス基板の加工装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10138155B2 (en) 2013-12-03 2018-11-27 Corning Incorporated Apparatus and method for severing a moving ribbon of inorganic material

Also Published As

Publication number Publication date
CN102964059A (zh) 2013-03-13
KR101396990B1 (ko) 2014-05-20
TW201313639A (zh) 2013-04-01
CN102964059B (zh) 2015-08-19
KR20130045166A (ko) 2013-05-03
TWI491573B (zh) 2015-07-11
JP2013049588A (ja) 2013-03-14

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