JP5428141B2 - 電気光学装置、及びこれを備えた電子機器 - Google Patents
電気光学装置、及びこれを備えた電子機器 Download PDFInfo
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- JP5428141B2 JP5428141B2 JP2007235051A JP2007235051A JP5428141B2 JP 5428141 B2 JP5428141 B2 JP 5428141B2 JP 2007235051 A JP2007235051 A JP 2007235051A JP 2007235051 A JP2007235051 A JP 2007235051A JP 5428141 B2 JP5428141 B2 JP 5428141B2
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- 239000003990 capacitor Substances 0.000 claims description 49
- 238000003860 storage Methods 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 15
- 230000008569 process Effects 0.000 claims description 9
- 238000010030 laminating Methods 0.000 claims description 4
- 239000010408 film Substances 0.000 description 127
- 239000000758 substrate Substances 0.000 description 68
- 239000010410 layer Substances 0.000 description 60
- 239000004973 liquid crystal related substance Substances 0.000 description 53
- 230000001443 photoexcitation Effects 0.000 description 29
- 239000004065 semiconductor Substances 0.000 description 19
- 230000000694 effects Effects 0.000 description 15
- 238000010586 diagram Methods 0.000 description 10
- 239000012535 impurity Substances 0.000 description 10
- 239000011159 matrix material Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 239000000969 carrier Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 239000011229 interlayer Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 239000003870 refractory metal Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910018182 Al—Cu Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000004988 Nematic liquid crystal Substances 0.000 description 1
- 229910018594 Si-Cu Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910008465 Si—Cu Inorganic materials 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Images
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- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007235051A JP5428141B2 (ja) | 2007-09-11 | 2007-09-11 | 電気光学装置、及びこれを備えた電子機器 |
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---|---|---|---|
JP2007235051A JP5428141B2 (ja) | 2007-09-11 | 2007-09-11 | 電気光学装置、及びこれを備えた電子機器 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009069246A JP2009069246A (ja) | 2009-04-02 |
JP2009069246A5 JP2009069246A5 (enrdf_load_stackoverflow) | 2010-10-14 |
JP5428141B2 true JP5428141B2 (ja) | 2014-02-26 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007235051A Expired - Fee Related JP5428141B2 (ja) | 2007-09-11 | 2007-09-11 | 電気光学装置、及びこれを備えた電子機器 |
Country Status (1)
Country | Link |
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JP (1) | JP5428141B2 (enrdf_load_stackoverflow) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102595499B1 (ko) * | 2016-08-31 | 2023-10-30 | 엘지디스플레이 주식회사 | 유기발광 표시장치 |
JP7322727B2 (ja) | 2020-01-30 | 2023-08-08 | セイコーエプソン株式会社 | 電気光学装置、および電子機器 |
JP7327184B2 (ja) | 2020-01-30 | 2023-08-16 | セイコーエプソン株式会社 | 電気光学装置、および電子機器 |
JP7409115B2 (ja) | 2020-01-30 | 2024-01-09 | セイコーエプソン株式会社 | 電気光学装置、および電子機器 |
CN115188831B (zh) * | 2022-09-09 | 2022-12-23 | 惠科股份有限公司 | 薄膜晶体管结构、显示面板以及显示装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001075088A (ja) * | 1999-09-02 | 2001-03-23 | Canon Inc | 液晶表示装置及びそれの製造方法 |
JP3937721B2 (ja) * | 2000-11-21 | 2007-06-27 | セイコーエプソン株式会社 | 電気光学装置及びその製造方法並びにプロジェクタ |
JP4654675B2 (ja) * | 2004-12-14 | 2011-03-23 | ソニー株式会社 | 液晶パネル |
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- 2007-09-11 JP JP2007235051A patent/JP5428141B2/ja not_active Expired - Fee Related
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