JP5398837B2 - プラズマｃｖｄ装置、プラズマ電極および半導体膜の製造方法 - Google Patents

プラズマｃｖｄ装置、プラズマ電極および半導体膜の製造方法 Download PDF

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JP5398837B2
JP5398837B2 JP2011526696A JP2011526696A JP5398837B2 JP 5398837 B2 JP5398837 B2 JP 5398837B2 JP 2011526696 A JP2011526696 A JP 2011526696A JP 2011526696 A JP2011526696 A JP 2011526696A JP 5398837 B2 JP5398837 B2 JP 5398837B2
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Prior art keywords
gas
plasma
shower plate
main electrode
heat transfer
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Japanese (ja)
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JPWO2011018912A1 (ja
Inventor
正和 滝
睦 津田
賢治 新谷
謙 今村
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • C23C16/5096—Flat-bed apparatus
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45565—Shower nozzles

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Vapour Deposition (AREA)
JP2011526696A 2009-08-10 2010-04-26 プラズマｃｖｄ装置、プラズマ電極および半導体膜の製造方法 Expired - Fee Related JP5398837B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011526696A JP5398837B2 (ja) 2009-08-10 2010-04-26 プラズマｃｖｄ装置、プラズマ電極および半導体膜の製造方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2009185828 2009-08-10
JP2009185828 2009-08-10
JP2011526696A JP5398837B2 (ja) 2009-08-10 2010-04-26 プラズマｃｖｄ装置、プラズマ電極および半導体膜の製造方法
PCT/JP2010/057383 WO2011018912A1 (ja) 2009-08-10 2010-04-26 プラズマｃｖｄ装置、プラズマ電極および半導体膜の製造方法

Publications (2)

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JPWO2011018912A1 JPWO2011018912A1 (ja) 2013-01-17
JP5398837B2 true JP5398837B2 (ja) 2014-01-29

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JP2011526696A Expired - Fee Related JP5398837B2 (ja) 2009-08-10 2010-04-26 プラズマｃｖｄ装置、プラズマ電極および半導体膜の製造方法

Country Status (4)

Country Link
JP (1) JP5398837B2 (de)
CN (1) CN102473612B (de)
DE (1) DE112010003248B4 (de)
WO (1) WO2011018912A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210002149A (ko) * 2019-06-26 2021-01-07 세메스 주식회사 샤워 헤드 유닛, 이를 포함하는 기판 처리 장치 및 샤워 헤드 유닛 조립 방법
KR20210047375A (ko) * 2018-09-26 2021-04-29 어플라이드 머티어리얼스, 인코포레이티드 플라즈마 프로세싱 챔버용 열 전도성 스페이서

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI480417B (zh) 2012-11-02 2015-04-11 Ind Tech Res Inst 具氣幕之氣體噴灑裝置及其薄膜沉積裝置
JP2018528616A (ja) * 2015-09-22 2018-09-27 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ シャワーヘッド支持構造
WO2017149739A1 (ja) * 2016-03-03 2017-09-08 コアテクノロジー株式会社 プラズマ処理装置及びプラズマ処理用反応容器の構造
JP7224175B2 (ja) * 2018-12-26 2023-02-17 東京エレクトロン株式会社 成膜装置及び方法
CN112837985B (zh) * 2019-11-22 2023-01-24 中微半导体设备(上海)股份有限公司 上电极组件以及等离子体处理设备
CN112030110A (zh) * 2020-08-21 2020-12-04 无锡爱尔华光电科技有限公司 一种基材可分离的真空镀膜设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06338458A (ja) * 1993-05-28 1994-12-06 Kokusai Electric Co Ltd プラズマｃｖｄ装置
JPH09213685A (ja) * 1996-01-30 1997-08-15 Hitachi Electron Eng Co Ltd 半導体装置用プラズマ装置のプラズマ電極
WO2005065186A2 (en) * 2003-12-23 2005-07-21 Lam Research Corporation Showerhead electrode assembly for plasma processing apparatuses
JP2009010101A (ja) * 2007-06-27 2009-01-15 Tokyo Electron Ltd 基板処理装置およびシャワーヘッド
JP2009094380A (ja) * 2007-10-11 2009-04-30 Renesas Technology Corp 半導体装置の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4578694B2 (ja) 2001-02-09 2010-11-10 株式会社カネカ プラズマｃｖｄ装置およびプラズマｃｖｄ装置を用いたシリコン系膜の製造方法
TW200537695A (en) * 2004-03-19 2005-11-16 Adv Lcd Tech Dev Ct Co Ltd Insulating film forming method, insulating film forming apparatus, and plasma film forming apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06338458A (ja) * 1993-05-28 1994-12-06 Kokusai Electric Co Ltd プラズマｃｖｄ装置
JPH09213685A (ja) * 1996-01-30 1997-08-15 Hitachi Electron Eng Co Ltd 半導体装置用プラズマ装置のプラズマ電極
WO2005065186A2 (en) * 2003-12-23 2005-07-21 Lam Research Corporation Showerhead electrode assembly for plasma processing apparatuses
JP2009010101A (ja) * 2007-06-27 2009-01-15 Tokyo Electron Ltd 基板処理装置およびシャワーヘッド
JP2009094380A (ja) * 2007-10-11 2009-04-30 Renesas Technology Corp 半導体装置の製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210047375A (ko) * 2018-09-26 2021-04-29 어플라이드 머티어리얼스, 인코포레이티드 플라즈마 프로세싱 챔버용 열 전도성 스페이서
KR102529845B1 (ko) * 2018-09-26 2023-05-08 어플라이드 머티어리얼스, 인코포레이티드 플라즈마 프로세싱 챔버용 열 전도성 스페이서
KR20210002149A (ko) * 2019-06-26 2021-01-07 세메스 주식회사 샤워 헤드 유닛, 이를 포함하는 기판 처리 장치 및 샤워 헤드 유닛 조립 방법
KR102243897B1 (ko) 2019-06-26 2021-04-26 세메스 주식회사 샤워 헤드 유닛, 이를 포함하는 기판 처리 장치 및 샤워 헤드 유닛 조립 방법

Also Published As

Publication number Publication date
DE112010003248T5 (de) 2013-05-02
DE112010003248B4 (de) 2014-12-24
WO2011018912A1 (ja) 2011-02-17
CN102473612A (zh) 2012-05-23
CN102473612B (zh) 2015-06-10
JPWO2011018912A1 (ja) 2013-01-17

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