JP5337848B2 - 高出力ガスレーザ装置 - Google Patents

高出力ガスレーザ装置 Download PDF

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Publication number
JP5337848B2
JP5337848B2 JP2011155782A JP2011155782A JP5337848B2 JP 5337848 B2 JP5337848 B2 JP 5337848B2 JP 2011155782 A JP2011155782 A JP 2011155782A JP 2011155782 A JP2011155782 A JP 2011155782A JP 5337848 B2 JP5337848 B2 JP 5337848B2
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Japan
Prior art keywords
laser
output
mirror
side mirror
angle
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Expired - Fee Related
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JP2011155782A
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English (en)
Japanese (ja)
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JP2011233918A (ja
JP2011233918A5 (enExample
Inventor
達也 有我
貴仁 熊崎
理 若林
孝昇 中池
伸治 永井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Komatsu Ltd
Ushio Denki KK
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Komatsu Ltd
Ushio Denki KK
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Priority to JP2011155782A priority Critical patent/JP5337848B2/ja
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Publication of JP2011233918A5 publication Critical patent/JP2011233918A5/ja
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Publication of JP5337848B2 publication Critical patent/JP5337848B2/ja
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JP2011155782A 2004-07-06 2011-07-14 高出力ガスレーザ装置 Expired - Fee Related JP5337848B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011155782A JP5337848B2 (ja) 2004-07-06 2011-07-14 高出力ガスレーザ装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004198920 2004-07-06
JP2004198920 2004-07-06
JP2011155782A JP5337848B2 (ja) 2004-07-06 2011-07-14 高出力ガスレーザ装置

Related Parent Applications (1)

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JP2005177192A Division JP5382975B2 (ja) 2004-07-06 2005-06-17 高出力ガスレーザ装置

Publications (3)

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JP2011233918A JP2011233918A (ja) 2011-11-17
JP2011233918A5 JP2011233918A5 (enExample) 2012-09-13
JP5337848B2 true JP5337848B2 (ja) 2013-11-06

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Family Applications (1)

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JP2011155782A Expired - Fee Related JP5337848B2 (ja) 2004-07-06 2011-07-14 高出力ガスレーザ装置

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JP (1) JP5337848B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6182988B2 (ja) * 2013-06-12 2017-08-23 住友電気工業株式会社 分光デバイス及び波長選択スイッチ
US20170271131A1 (en) * 2016-03-16 2017-09-21 Applied Materials, Inc. Oriented laser activated processing chamber
JP7262217B2 (ja) * 2018-12-17 2023-04-21 住友重機械工業株式会社 光共振器
CN119470276B (zh) * 2025-01-08 2025-04-08 碳控科技(杭州)有限公司 一种长光程的co2光学腔及检测装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04301613A (ja) * 1991-03-29 1992-10-26 Toshiba Corp ビーム拡大・縮小器
JPH11330592A (ja) * 1998-05-19 1999-11-30 Nikon Corp レーザ光源装置およびそれを備えた露光装置
JP2001291921A (ja) * 2000-04-07 2001-10-19 Komatsu Ltd 超狭帯域化レーザ装置
JP2001298234A (ja) * 2000-04-13 2001-10-26 Komatsu Ltd 紫外線レーザ装置及びその波長安定化方法
JP3888673B2 (ja) * 2001-12-28 2007-03-07 ウシオ電機株式会社 露光用フッ素分子レーザシステム

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JP2011233918A (ja) 2011-11-17

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