JP5289898B2 - ステージ装置及びプローバ装置 - Google Patents

ステージ装置及びプローバ装置 Download PDF

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Publication number
JP5289898B2
JP5289898B2 JP2008286612A JP2008286612A JP5289898B2 JP 5289898 B2 JP5289898 B2 JP 5289898B2 JP 2008286612 A JP2008286612 A JP 2008286612A JP 2008286612 A JP2008286612 A JP 2008286612A JP 5289898 B2 JP5289898 B2 JP 5289898B2
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JP
Japan
Prior art keywords
axis
support
inclined portion
guide rail
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008286612A
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English (en)
Japanese (ja)
Other versions
JP2010110870A (ja
Inventor
靖仁 中森
俊一 川地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP2008286612A priority Critical patent/JP5289898B2/ja
Priority to KR1020090097499A priority patent/KR101133929B1/ko
Priority to TW098137604A priority patent/TWI406733B/zh
Publication of JP2010110870A publication Critical patent/JP2010110870A/ja
Application granted granted Critical
Publication of JP5289898B2 publication Critical patent/JP5289898B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06—Work-clamping means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/262—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members with means to adjust the distance between the relatively slidable members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/64—Movable or adjustable work or tool supports characterised by the purpose of the movement
    • B23Q1/66—Worktables interchangeably movable into operating positions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q16/00—Equipment for precise positioning of tool or work into particular locations not otherwise provided for
    • B23Q16/001—Stops, cams, or holders therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Machine Tool Units (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2008286612A 2008-11-07 2008-11-07 ステージ装置及びプローバ装置 Expired - Fee Related JP5289898B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008286612A JP5289898B2 (ja) 2008-11-07 2008-11-07 ステージ装置及びプローバ装置
KR1020090097499A KR101133929B1 (ko) 2008-11-07 2009-10-14 스테이지장치 및 프로버장치
TW098137604A TWI406733B (zh) 2008-11-07 2009-11-05 Stage device and probe device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008286612A JP5289898B2 (ja) 2008-11-07 2008-11-07 ステージ装置及びプローバ装置

Publications (2)

Publication Number Publication Date
JP2010110870A JP2010110870A (ja) 2010-05-20
JP5289898B2 true JP5289898B2 (ja) 2013-09-11

Family

ID=42277288

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008286612A Expired - Fee Related JP5289898B2 (ja) 2008-11-07 2008-11-07 ステージ装置及びプローバ装置

Country Status (3)

Country Link
JP (1) JP5289898B2 (zh)
KR (1) KR101133929B1 (zh)
TW (1) TWI406733B (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI458585B (zh) * 2012-04-25 2014-11-01 中原大學 斜向驅動式平台結構
JP2016008404A (ja) * 2014-06-23 2016-01-18 パナソニックＩｐマネジメント株式会社 スペーサー
KR101647500B1 (ko) * 2015-04-14 2016-08-10 (주)파워텍 칩 컨베이어
JP6960352B2 (ja) 2018-02-20 2021-11-05 株式会社日立ハイテク ステージ装置、及び荷電粒子線装置
CN108296800A (zh) * 2018-03-22 2018-07-20 广东工业大学 一种垂直解耦的xz高精运动平台
JP7180895B2 (ja) * 2020-07-22 2022-11-30 ヒーハイスト株式会社 位置決めテーブル
CN112792794B (zh) * 2021-02-04 2022-06-24 广东乐创智能科技有限公司 一种工业机器人安装用水平调节工装
CN117564973B (zh) * 2024-01-16 2024-03-12 常州建富光电仪器有限公司 一种激光测距仪批量检测用智能夹持工装及方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2758340A1 (de) * 1977-12-27 1979-07-05 Pfister Waagen Gmbh Hydrostatische stellvorrichtung
JPS62224543A (ja) * 1986-03-25 1987-10-02 Nagase Iron Works Co Ltd 微細送り装置
US4838515A (en) * 1987-05-18 1989-06-13 Teledyne, Inc. Article positioner and method
JPH0543469Y2 (zh) * 1987-09-30 1993-11-02
JPH02225857A (ja) * 1990-01-06 1990-09-07 Canon Inc ボールネジ装置
JP3216166B2 (ja) * 1991-10-18 2001-10-09 日本精工株式会社 Ｘｙ位置決めテーブル
JPH07122476A (ja) * 1993-10-22 1995-05-12 Hitachi Ltd 移動ステージの位置測定方法と位置決め方法及び装置
EP0972608B1 (fr) * 1998-07-14 2003-12-10 Kummer Frères SA, Fabrique de machines Dispositif d'entraínement d'une plateforme en déplacement dans un plan
JP3732763B2 (ja) * 2001-07-13 2006-01-11 住友重機械工業株式会社 ステージ装置
JP4300003B2 (ja) * 2002-08-07 2009-07-22 東京エレクトロン株式会社 載置台の駆動装置及びプローブ方法
JP2005052822A (ja) * 2003-07-18 2005-03-03 Sumitomo Heavy Ind Ltd テーブルコータ機用ステージ装置
TWM262638U (en) * 2004-07-15 2005-04-21 Genten Technology Co Ltd Carrying platform structure of image inspecting and measuring system
JP4583960B2 (ja) * 2005-02-16 2010-11-17 倉敷化工株式会社 高さ調整装置及びレべリング装置
TWM298745U (en) * 2006-02-08 2006-10-01 Chi Lin Technology Co Ltd Touch panel tester
JP4836640B2 (ja) * 2006-04-14 2011-12-14 株式会社日本マイクロニクス プローバ

Also Published As

Publication number Publication date
KR20100051540A (ko) 2010-05-17
TW201036752A (en) 2010-10-16
JP2010110870A (ja) 2010-05-20
TWI406733B (zh) 2013-09-01
KR101133929B1 (ko) 2012-04-24

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