JP5282481B2 - Ozone cleaning tank and ozone cleaning device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ozone cleaning tank constituted so that ozone waterwhich has high ozone concentration, and contains no ozone bubbles at all or scarcely contains ozone bubbles, and to provide an ozone cleaning apparatus. <P>SOLUTION: Ultrapure water and ozone gas are supplied to an ozone water producing device 1 to produce ozone water-ozone gas mixed water. The mixed water is introduced into a gas-liquid separation chamber 4 via a pipe 2 and a receiving port 3 to float and separate bubbles of undissolved ozone gas in the mixed water. The ozone water containing no bubbles by the gas-liquid separation in the gas-liquid separation chamber 4 is introduced into a cleaning chamber 7 from a communication part 6. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to an ozone cleaning tank and an ozone cleaning apparatus for cleaning an object to be cleaned with ozone water, and in particular, an ozone cleaning tank and an ozone cleaning apparatus suitable for use in a manufacturing process of electronic devices such as semiconductors and liquid crystals. About.

  It is known to clean electronic device parts such as silicon wafers with ozone water in which ozone is dissolved in ultrapure water (for example, Japanese Patent Application Laid-Open No. 2005-186067).

In JP-A-2005-186067, ozone-containing ultrapure water in which ozone is dissolved in ultrapure water is supplied to a use point by piping, and gas-liquid separation is performed immediately before this use point.
JP2005-186067

  When ozone-dissolved water is transported by piping as in JP-A-2005-186067, the amount of ozone released from the water during the transportation increases, and the ozone concentration of ozone water supplied to the use point decreases.

  Moreover, even if gas-liquid separation is performed immediately before the use point, the ozone water concentration is lowered on the way from the gas-liquid separator to the use point. When a silicon wafer or the like is cleaned with ozone water having a reduced ozone water concentration in this way, the cleaning performance is lowered.

  The present invention solves the above problems and provides an ozone cleaning tank and an ozone cleaning apparatus configured to supply ozone water having a high ozone concentration and containing no or almost no ozone bubbles to a cleaning unit. Objective.

The ozone cleaning tank of the present invention (Claim 1) is an ozone cleaning tank that cleans an object to be cleaned with ozone water. The ozone cleaning tank is a gas that separates the tank body and the tank body by receiving ozone water-ozone gas mixed water. a partition plate for partitioning into a liquid separation chamber and the cleaning chamber, provided under the partition plate includes a communicating portion for communicating the the cleaning chamber gas-liquid separating chamber, the side walls of the gas-liquid separation chamber The ozone water-ozone gas mixed water inlet is provided at the upper part of the communication part, and the communication part has a downward slope from the gas-liquid separation chamber side toward the cleaning room. The baffle which becomes is characterized by being provided .
According to a second aspect of the present invention, there is provided an ozone cleaning tank according to the first aspect, wherein the gas-liquid separation chamber is provided with a top plate straddling the upper end of the tank body and the upper end of the partition plate. Is provided.

Ozone cleaning apparatus according to claim 3, the ozone cleaning tank according to claim 1 or 2, provided in contact with or proximity to the cistern body, ozone water to the gas-liquid separation chamber - for supplying ozone gas mixed water And an ozone water generator that dissolves ozone gas in water to generate ozone water-ozone gas mixed water.

According to a fourth aspect of the present invention, there is provided the ozone cleaning apparatus according to the third aspect , wherein the ozone water generator is an ejector.
The ozone cleaning device according to claim 5 is characterized in that, in claim 3 or 4, the ozone water generator is connected to the receiving port through a short pipe of 1000 mm or less.
The ozone cleaning device of claim 6 is characterized in that, in claim 3 or 4, the ozone water / ozone gas mixed water outlet of the ozone water generator is directly connected to the receiving port.

  In the ozone cleaning tank and the ozone cleaning apparatus of the present invention, ozone water-ozone gas mixed water is introduced into the gas-liquid separation chamber in the tank body. When the ozone water contains ozone bubbles, the ozone bubbles rise in the gas-liquid separation chamber and are gas-liquid separated. Then, ozone water that does not contain ozone bubbles is introduced into the cleaning chamber from the communicating portion. Accordingly, the object to be cleaned is cleaned in the cleaning chamber with ozone water that contains no or almost no ozone bubbles.

  Further, in the ozone cleaning device of the present invention, when the ozone water generator is provided in contact with or close to the tank body, the ozone water generated by the ozone water generator is immediately introduced into the gas-liquid separation chamber. It becomes like this. This makes it possible to introduce ozone water having a higher ozone concentration into the cleaning chamber than when supplying ozone water that has been gas-liquid separated.

  Hereinafter, embodiments will be described with reference to the drawings.

  FIG. 1 is a longitudinal sectional view of an ozone cleaning tank and an ozone cleaning apparatus according to an embodiment. The inside of the tank body 10 is partitioned into a gas-liquid separation chamber 4 and a cleaning chamber 7 by a partition plate 5. It is desirable that the tank body 10 and the partition plate 5 are made of synthetic resin such as PFA or PTFE excellent in ozone resistance or coated with synthetic resin.

  The gas-liquid separation chamber 4 and the cleaning chamber 7 are communicated with each other by a communication portion 6 formed by an opening at the bottom of the partition plate 5. The communication part 6 is provided with a baffle 6a so as to have a downward gradient from the gas-liquid separation chamber 4 side toward the cleaning chamber 7 side. The ozone water generator 1 is connected to the ozone water inlet 3 provided on the side wall of the gas-liquid separation chamber 4 through a short pipe 2 that is preferably 10000 mm or less, particularly preferably 1000 mm or less. The receiving port 3 is preferably provided at a position higher than the communicating portion 6 by 100 mm or more. The ozone water generator 1 is preferably an ejector that is less likely to be contaminated with impurities, but is not limited thereto.

  A canopy 11 is provided in the gas-liquid separation chamber 4 across the upper end of the tank body 10 and the upper end of the partition plate 5. The canopy 11 is provided with an ozone gas outlet 12.

  In the ozone cleaning device configured as described above, water such as ultrapure water and ozone gas are supplied to the ozone water generator 1 to generate ozone water-ozone gas mixed water. This mixed water is introduced into the gas-liquid separation chamber 4 through the pipe 2 and the receiving port 3, and bubbles formed of undissolved ozone gas in the mixed water are floated and separated. The ozone gas separated from the water surface of the gas-liquid separation chamber 4 flows out from the outlet 12 and is recirculated to the ozone water generator 1 or sent to an ozone decomposition treatment apparatus equipped with an ozone decomposition catalyst or the like.

  The ozone water that has been gas-liquid separated in the gas-liquid separation chamber 4 so as not to contain bubbles is introduced into the cleaning chamber 7 from the communication portion 6. In the cleaning chamber 7, the object to be cleaned such as a silicon wafer comes into contact with ozone water, and the object to be cleaned is cleaned. The washing waste water overflows and is discharged from the overflow port 8 provided in the upper part of the side wall of the tank body 10. The washing waste water may be discarded after the treatment or may be reused.

  In this ozone cleaning apparatus, since the gas-liquid separation of the ozone water-ozone gas mixed water is performed in the ozone cleaning apparatus, the ozone in the cleaning chamber 7 is compared with the case where the ozone water that has been gas-liquid separated is supplied to the cleaning apparatus. The ozone concentration in water is high. Further, a gas-liquid separation chamber 4 and a cleaning chamber 7 for cleaning processing are disposed adjacent to each other with a partition plate 5 interposed therebetween. Accordingly, ozone water having a high ozone concentration that contains no or almost no ozone bubbles is introduced from the gas-liquid separation chamber 4 to the cleaning chamber 7, and ozone cleaning is performed efficiently in the cleaning chamber 7.

  In this embodiment, the receiving port 3 is provided above the communication portion 6, and the baffle 6 a that is inclined downward toward the cleaning chamber 7 is provided in the communication portion 6, so that the gas-liquid separation chamber It is also possible to prevent the ozone bubbles in 4 from floating and flowing into the cleaning chamber 7.

  In order to promote gas-liquid separation in the gas-liquid separation chamber 4, the receiving port 3 may be provided upward.

  In the above embodiment, the ozone water generator 1 is slightly separated from the tank body 10, but the ozone water generator 1 is brought into contact with the tank body 10 as shown in FIG. The water outlet may be directly connected to the receiving port 3. The other structure of FIG. 2 is the same as FIG. The ozone cleaning apparatus of FIG. 2 has the same effect as that of FIG.

  Hereinafter, examples and comparative examples will be described.

[Examples 1 and 2]
In the ozone cleaning apparatus shown in FIGS. 1 and 2, the specifications are as follows.
Water depth of the tank 10: 30 cm
Volume of gas-liquid separation chamber 4: 10L
Volume of cleaning chamber 7: 20L
Length of pipe 2 in FIG. 1: 1000 mm

  When ozone water-ozone gas mixed water was supplied from the ozone water generator 1 to the gas-liquid separation chamber 4 and the ozone concentration in the cleaning chamber 7 was measured, both were about 25 mg / L.

[Comparative Examples 1 and 2]
After generating ozone water-ozone gas mixed water using an ejector, gas-liquid separation is performed by a gas-liquid separator, and ozone water (ozone concentration 25 mg / L) after the gas-liquid separation is 1000 mm in tube length (Comparative Example 1) or It was introduced into the cleaning chamber 7 through a 3000 mm pipe (Comparative Example 2). As a result, the ozone concentration in the cleaning chamber 7 was as follows.

Comparative Example 1: 22 mg / L
Comparative Example 2: 15 mg / L

  As is clear from the above examples and comparative examples, according to the present invention, the ozone concentration in the cleaning chamber can be increased.

It is sectional drawing of the ozone cleaning apparatus which concerns on embodiment. It is sectional drawing of the ozone cleaning apparatus which concerns on another embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Ozone water generator 2 Piping 3 Inlet 4 Gas-liquid separation room 5 Partition plate 6 Communication part 7 Washing room 10 Tank 11 Canopy 12 Ozone gas outlet

Claims (6)

In an ozone cleaning tank that cleans an object to be cleaned with ozone water,
Tank body,
A partition plate that divides the tank body into a gas-liquid separation chamber and a cleaning chamber for receiving a mixture of ozone water and ozone gas and separating the gas and liquid;
A communication portion provided at a lower portion of the partition plate, which communicates the gas-liquid separation chamber and the cleaning chamber;
Equipped with a,
A receiving port for the ozone water-ozone gas mixed water is provided on a side wall of the gas-liquid separation chamber,
The receiving port is provided above the communicating portion;
An ozone cleaning tank , wherein the communication part is provided with a baffle having a downward slope from the gas-liquid separation chamber side toward the cleaning chamber. 2. The gas-liquid separation chamber according to claim 1, wherein a top plate is provided across the upper end of the tank body and the upper end of the partition plate, and an ozone gas outlet is provided on the top plate. Ozone cleaning tank. The ozone cleaning tank according to claim 1 or 2 ,
Ozone water for generating ozone water-ozone gas mixed water by dissolving ozone gas in water for supplying ozone water-ozone gas mixed water to the gas-liquid separation chamber provided in contact with or close to the tank body An ozone cleaning device comprising a generator. 4. The ozone cleaning apparatus according to claim 3 , wherein the ozone water generator is an ejector. 5. The ozone cleaning apparatus according to claim 3, wherein the ozone water generator is connected to the receiving port through a short pipe of 1000 mm or less. The ozone cleaning apparatus according to claim 3 or 4, wherein an ozone water-ozone gas mixed water outlet of the ozone water generator is directly connected to the inlet.

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