JP5280218B2 - Slurry regeneration processing apparatus and method - Google Patents

Description

  The present invention relates to a slurry regeneration processing apparatus and method, and more particularly to a waste slurry regeneration processing apparatus and method after cutting processing in a wire saw apparatus.

  Conventionally, in order to reduce costs, waste slurry used in a slurry type processing apparatus such as a wire saw apparatus has been recycled. The waste slurry in the wire saw device is formed of a dispersion medium, abrasive grains and cutting waste mixed therein. In these separations, the abrasive grains and the cutting waste were separated from the dispersion medium using two centrifuges. Specifically, waste slurry is charged into the first centrifuge, and abrasive grains having a specific gravity greater than that of cutting waste are first separated with a low centrifugal force of less than 1500G. After that, a mixed liquid composed of abrasive grains, dispersion medium and cutting waste that could not be collected is put into a second centrifuge, and the cutting waste is separated with a high centrifugal force of 1500 G or more. Thereafter, the dispersion medium and abrasive grains were mixed to regenerate the slurry. However, the use of two centrifuges requires a large installation space, and it is difficult to secure the space.

  On the other hand, it is preferable to supply the waste slurry or mixed liquid to be introduced into the centrifuge at a constant flow rate. For this reason, waste slurry or a mixed liquid has been thrown into the centrifuge through the orifice pot (see, for example, Patent Document 1). The orifice pot adjusts the flow rate by replacing the orifice plate. However, it is necessary to select an optimum orifice plate depending on the properties of the slurry (temperature, viscosity, specific gravity, abrasive grain type, coolant type, etc.). This choice was largely due to the experience of the operator and lacked certainty.

JP 2005-169299 A

  The present invention takes the above-mentioned conventional technology into consideration, and does not require a large installation space, so that the primary separator and the secondary separator can be reliably separated from the waste slurry with only one centrifuge, and the separation is performed. It is an object of the present invention to provide a slurry regenerating apparatus and method capable of mixing a dispersed medium and a primary separated product to generate a slurry again.

  In order to achieve the above object, in the invention of claim 1, waste slurry containing at least one of a primary separator and a secondary separator having different specific gravity to be separated from the separation medium is introduced into a dispersion medium, A centrifuge capable of separating the primary separated material or the secondary separated material from a waste slurry, and the primary separated material or the secondary separated material provided in the centrifugal separator and separated from the centrifugal separator. A primary separator recovery tank that can communicate with the discharge port via a chute for primary separation, and a secondary separation recovery that can communicate with the discharge port via a chute for secondary separation A tank, and a drainage port for draining the dispersion medium after separating the waste slurry from the centrifuge or a mixed liquid of the dispersion medium and the secondary separator, Selective communication with the drainage port A dispersion medium recovery tank and a mixed liquid recovery tank, a regenerated slurry preparation tank that mixes the primary separation with the dispersion medium to generate a regenerated slurry, and the primary separation chute and the second with respect to the discharge port. There is provided a slurry regeneration processing device characterized by comprising switching means for connecting any one of the next separated chute.

  In invention of Claim 2, in invention of Claim 1, it is each provided between the waste slurry storage tank and the centrifuge which store the waste slurry, and between the liquid mixture recovery tank and the centrifuge, Variable control type quantitative supply means for adjusting the flow rate of the waste slurry or the mixed liquid, a mass flow meter provided between the variable control type quantitative supply means and the centrifuge, and a measurement result of the mass flow meter And a PID control unit for controlling the operation of the variable control type quantitative supply means so as to make the flow rate of the waste slurry or the mixed liquid constant.

According to a third aspect of the invention, in the first or second aspect of the invention, the waste slurry storage tank, the mixed liquid recovery tank, and the centrifuge are connected via a three-way valve, and the variable control quantitative supply means And the mass flow meter is disposed between the three-way valve and the centrifuge.
In invention of Claim 4, in any invention of Claims 1-3, the said waste slurry is the slurry used with the wire saw apparatus which presses a workpiece against a wire and cuts, and the said primary separation is said Abrasive grains mixed in the slurry, wherein the secondary separation is a cutting waste of the workpiece.

  Furthermore, the invention of claim 5 is a slurry regeneration processing method using the slurry regeneration processing apparatus according to any one of claims 1 to 4, wherein the waste slurry is charged into the centrifuge and the centrifugal separation is performed. The machine is driven at a predetermined centrifugal force (low G), the primary separated material is centrifuged from the waste slurry, and the centrifuged primary separated material is collected in the primary separated material collecting tank. Recovered in the mixed liquid recovery tank, put the mixed liquid from the mixed liquid recovery tank into the centrifuge, drive the centrifuge with a centrifugal force (high G) higher than the predetermined centrifugal force, The secondary separation is centrifuged from the mixed solution, the centrifuged secondary separation is recovered in the secondary separation recovery tank, the dispersion medium is recovered in the dispersion medium recovery tank, and the regenerated slurry. In the mixing tank, the primary recovered in the primary separation recovery tank And component content, and the dispersion medium recovered in said dispersion medium collection tank was charged with a new primary isolates and new dispersion medium to provide a slurry reproduction processing method characterized by generating a regenerated slurry.

  In the invention of claim 6, in the invention of claim 5, the actual flow rate value of the waste slurry or the mixed liquid is measured by the mass flow meter, and the actual flow rate value and the set flow rate value are compared by the PID control unit. The variable control type quantitative supply means is PID-controlled so that the actual flow rate value becomes the set flow rate value.

  According to the first aspect of the present invention, different centrifugal forces can be generated using the first motor and the second motor. For this reason, it is possible to reliably separate and recover the primary separation and the secondary separation having different specific gravities with only one centrifuge. Therefore, it is only necessary to secure a space for installing one centrifuge, which is efficient in terms of space. In addition, the separated primary separated product or secondary separated product can be collected in separate collection tanks using the switching means. Furthermore, since the dispersion medium can also be recovered in a separate recovery tank, the regenerated slurry can be reliably prepared by mixing the primary separation and the dispersion medium.

  According to the second aspect of the present invention, the supply of the waste slurry or the mixed solution to be introduced into the centrifuge can be made pulsating and quantified by the variable control type quantitative supply means and the PID control of the mass flow meter. For this reason, it is not necessary to adjust the flow rate by human hands, the flow rate can be automatically stabilized, and workability is improved. In addition, in order to perform stable recovery with a centrifuge, it is important to supply the solution in a pulsating and quantitative manner.

According to invention of Claim 3, since a waste slurry storage tank, a liquid mixture collection tank, and a centrifuge are connected via a three-way valve, the pipe | tube with which waste slurry and a liquid mixture are thrown into a centrifuge is provided. Can be shared. Therefore, since the pump and the flow rate control can be used in common, the number of parts can be reduced and the cost is also efficient.
According to invention of Claim 4, the reusable abrasive grain contained in the waste slurry used with the wire saw apparatus is collect | recovered as a primary separated material, and the cutting waste of a workpiece can be separately collect | recovered as a secondary separated material. Therefore, the dispersion medium and the abrasive can be mixed again and reused as a cutting slurry in a wire saw device. For this reason, the slurry can be saved.

According to invention of Claim 5, a primary separator is isolate | separated from waste slurry with a centrifuge, and after that, a 2nd isolate is isolate | separated with the same centrifuge, and these are collect | recovered in another collection tank. Therefore, since two separated matters can be collected by one centrifuge, it is only necessary to secure a space for installing one centrifuge, which is efficient in terms of space.
According to the sixth aspect of the present invention, the variable control type quantitative supply means is PID controlled so that the actual flow rate value of the waste slurry or the mixed solution is fed back and approaches the set flow rate value. The centrifuge can be charged at a flow rate. In addition, a stable centrifugal effect can be obtained by supplying the solution without pulsation and quantification.

It is the schematic of the slurry reproduction | regeneration apparatus which concerns on this invention. It is a schematic plan view of the centrifuge used for the slurry reproduction | regeneration apparatus which concerns on this invention. It is a schematic side view of the centrifuge used for the slurry reproduction | regeneration apparatus which concerns on this invention. It is the schematic which showed the relationship between the branch chute used for the slurry reproduction | regeneration apparatus which concerns on this invention, and a switching means. It is the schematic of a branch chute. It is a flowchart of the slurry reproduction | regeneration processing method which concerns on this invention.

FIG. 1 is a schematic view of a slurry regenerator according to the present invention.
As shown in the figure, a slurry regenerator 1 according to the present invention includes a centrifuge 2, an abrasive (primary separated) recovery tank 3, a cutting waste (secondary separated) recovery tank 4, and a dispersion medium recovery tank. 5, a mixed liquid recovery tank 6, a regenerated slurry preparation tank 7, a branch chute 8, and a switching means 9. The centrifuge 2 includes two motors (first motor 10 and second motor 11), respectively, and can generate centrifugal force different from low G or high G.

  The waste slurry which is a separation object consists of abrasive grains, cutting waste (sludge), and a dispersion medium (oil). The cutting waste is generated when a brittle material (for example, silicon) (not shown) is cut by a wire saw device (not shown) in the wafer ring process of the brittle material. The waste slurry used in the wire saw device is stored in the waste slurry storage tank 16. Generally, abrasive grains have a higher specific gravity than cutting waste. Accordingly, when the waste slurry is centrifuged with a small centrifugal force, abrasive grains having a large specific gravity are mainly separated. Thereafter, when the centrifugal separation is performed with a large centrifugal force, the cutting waste is mainly separated. Thereby, the abrasive grains and cutting waste having different specific gravities can be separated into two stages and separated by one centrifuge 2.

  A discharge port 12 is provided on the lower side of the centrifuge 2. The discharge port 12 drops and discharges the centrifuged abrasive grains or cutting waste. The outlet side of the branch chute 8 is connected to the discharge port 12. The exit side of the branch chute 8 is branched into the abrasive chute 8a and the cutting waste chute 8b on the way. Using the switching means 9, the opening position of the inlet side of the branch chute 8 with respect to the discharge port 12 is changed. By changing this position, the abrasive grains can be passed through the abrasive chute 8a and the cutting waste can be passed through the cutting chute 8b. The abrasive grain recovery tank 3 is connected to an abrasive chute 8a. The cutting waste collection tank 4 is connected to a cutting chute 8b. Therefore, the abrasive grains or cutting waste discharged from the discharge port 12 is collected in the abrasive grain recovery tank 3 or the cutting scrap recovery tank 4 through the abrasive chute 8a or the cutting scrap chute 8b, respectively.

  The dispersion medium recovery tank 5 and the mixed liquid recovery tank 6 are connected to the drainage port 13 of the centrifuge 2 via a three-way valve 14. The three-way valve 14 is an automatic switching valve (the following three-way valves 19, 22, 23, 26, 29, 30, 32, and 37 are all the same). The drainage port 13 is provided on the lower side of the centrifuge 2. When the abrasive grains are centrifuged by primary separation, a mixed liquid (sludge oil) composed of cutting waste and a dispersion medium is recovered from the drain port 13 through the three-way valve 14 into the mixed liquid recovery tank 6. The mixed liquid is put into the centrifuge 2 again for secondary separation, and the cutting waste is centrifuged. Thereafter, the dispersion medium is recovered from the drain port 13 through the three-way valve 14 into the dispersion medium recovery tank 5. When cutting waste remains and is recovered in the dispersion medium, the pump 36 is driven, and the oil in the dispersion medium recovery tank 5 is supplied with the three-way valve 19, the branch pipe 21, the three-way valve 22, the pump 36, the three-way valve 37, and the branch. The tube 38 and the valve 41 are passed through in this order to return to the mixed solution recovery tank 6 and secondary separation is performed again. On the other hand, when only the primary separation is performed and the mixed solution is to be discarded, such as when the secondary separation is not performed, the pump 51 is operated and transferred to the mixed solution disposal tank 52.

  The regenerated slurry blending tank 7 is connected to the abrasive grain collecting tank 3 and the dispersion medium collecting tank 5. A new dispersion medium is accommodated in the abrasive grain recovery tank 3 in advance. The abrasive grains collected in the abrasive grain collection tank 3 are sent to the regenerated slurry blending tank 7 through the pump 15 together with a new dispersion medium. The new abrasive grains S are sent not only to such regenerated abrasive grains but also from a new abrasive grain storage tank (not shown) to the regenerated slurry blending tank 7.

  When the dispersion medium is sent from the dispersion medium recovery tank 5 to the regenerated slurry preparation tank 7, it passes through the following flow path. When the pump 20 is driven, the three-way valve 19, the branch pipe 21, the three-way valve 22, the three-way valve 23, the pump 20, the damper 24, the mass flow meter 25, and the three-way valve 26 are regenerated from the dispersion medium recovery tank 5 in this order. It is sent to the slurry preparation tank 7. The branch pipe 21 is provided with a fluid sensor 27. The fluid sensor 27 detects that the dispersion medium is flowing.

  The dispersion medium is stored in the new dispersion medium storage tanks 28a and 28b in addition to the dispersion medium recovery tank 5. A new dispersion medium is accommodated in the new dispersion medium accommodation tanks 28a and 28b. When a new dispersion medium is sent to the regenerated slurry preparation tank 7, the pump 20 is driven and sent to the three-way valve 19 through the three-way valve 30. Thereafter, the flow path from the dispersion medium recovery tank 5 to the regenerated slurry preparation tank 7 is the same. In this way, recycled abrasive grains and recycled dispersion medium, and in some cases, new abrasive grains and new dispersion medium are sent to the recycled slurry blending tank 7 and stirred in the recycled slurry blending tank 7 to be used in the wire saw apparatus. Regenerated as a slurry for cutting. Stirring is performed using a stirring member 17 that rotates as the motor 18 is driven. The volume of the regenerated slurry at this time is monitored by the ultrasonic sensor 31. The ultrasonic sensor 31 detects the liquid level of the regenerated slurry. Since the size of the mixing tank 7 is known in advance, the volume of the regenerated slurry can be calculated by detecting the liquid level. The abrasive recovery tank 3, the dispersion medium recovery tank 5, the mixed liquid recovery tank 6, and the waste slurry storage tank 16 are also provided with the same stirring member 17, motor 18, and ultrasonic sensor 31. The cutting waste collection tank 4 is provided with an ultrasonic sensor 31.

  The waste slurry storage tank 16 is connected to the centrifuge 2 via a three-way valve 32, a variable control type quantitative supply means 33, and a mass flow meter 34. The variable control type quantitative supply means 33 is, for example, an air driven or electrically driven pump equipped with a function for preventing pulsation. The variable control type quantitative supply means 33 and the mass flow meter 34 are connected to the PID control unit 35 using a PLC or the like by wire. The waste slurry is sent in a non-pulsating manner and in a fixed amount by using the variable control type quantitative supply means 33. This actual flow value is measured by the mass flow meter 34. This actual flow rate value is compared with the set flow rate value by the PID control unit 35. In the PID control unit 35, the variable control type quantitative supply means 33 is controlled so that the actual flow rate value becomes the set flow rate value. For this reason, the variable control type quantitative supply means 33 is PID controlled so that the actual flow rate value of the waste slurry is fed back and approaches the set flow rate value, and the waste slurry is surely put into the centrifuge 2 at a constant flow rate. can do. For this reason, it is not necessary to adjust the flow rate by human hands, the flow rate can be automatically stabilized, and workability is improved. The three-way valve 32 is also connected to the mixed liquid recovery tank 6, and the mixed liquid is also sent to the centrifuge 2 with the same flow rate control. Therefore, the flow rate control of the waste slurry and the mixed liquid can be performed by the same PID control unit 35, so that the number of parts can be reduced and the cost is also efficient.

  In addition, this PID control is an automatic control method using a touch panel and PLC, and can improve operability. You may enable it to select separation modes, such as collection | recovery of only an abrasive grain, and collection | recovery of only a dispersion medium, using a touch panel and PLC. That is, as will be described later, so-called two-stage separation mode in which the primary separated material and the secondary separated material are separated, or so-called first-stage separated abrasive collection such as when only abrasive grains (primary separated material) are collected. A mode or a so-called one-stage separation oil recovery mode in which only oil is recovered may be selected.

  The new dispersion medium is also used for cleaning the apparatus. When used for cleaning, the pump 36 is driven, a new dispersion medium is sent from the three-way valve 22 to the three-way valve 37, the valve 41 is passed through the branch pipe 38, and the inside of the mixed liquid recovery tank 6 is cleaned. In addition, it is used when it is desired to increase the amount of the dispersion medium in the mixed liquid. When the valve 42 is passed through the branch pipe 39, the inside of the centrifuge 2 is washed. When the valve 43 is passed from the branch pipe 40, the discharge port 12 is cleaned and the branch chute 8 is also cleaned. In particular, the discharge port 12 and the branch chute 8 are regularly cleaned during the separation because the abrasive grains are stuck. Further, since the cutting waste has a very high viscosity and remains in the centrifuge 2 or the branch chute 8 (cutting chute 8b), cleaning with a dispersion medium is indispensable. When the dispersion medium is passed through the valve 44, the waste slurry container 16 is washed. This can also be used when it is desired to increase the amount of the dispersion medium in the waste slurry. When the new dispersion medium for cleaning becomes unnecessary, the new dispersion medium is circulated from the three-way valve 37 to the three-way valve 29 and returned to the new dispersion medium storage tank 28a or 28b. In addition, you may use the reproduction | regeneration dispersion medium collect | recovered from the waste slurry with the centrifuge 2 for the said washing | cleaning.

FIG. 2 is a schematic plan view of a centrifuge used in the slurry regenerator according to the present invention, and FIG. 3 is a schematic side view.
As described above, the centrifuge 2 includes the first motor 10 and the second motor 11. 45 is a waste slurry inlet, from which waste slurry flows into the centrifuge 2. As described above, a discharge port 12 and a drain port 13 are provided below the centrifuge 2. Reference numerals 46a and 46b denote new or regenerated dispersion medium inlets, and the inside of the centrifuge 2 is washed by introducing the new or regenerated dispersion medium therefrom. Reference numeral 47 denotes a new or regenerated dispersion medium inlet for cleaning the outlet 12.

FIG. 4 is a schematic diagram showing the relationship between the branch chute and the switching means used in the slurry regenerating apparatus according to the present invention.
The branch chute 8 is surrounded by a frame body 49 having four rollers 48. The switching means 9 is connected to the frame 49. The switching means 9 is a cylinder and is movable in the axial direction (arrow R direction). With the movement of the switching means 9, the roller 48 moves on the rail 50, and the branch chute 8 is also pushed by the frame 49 and moves in the direction of arrow R. Depending on the separation falling from the discharge port 12 (see FIGS. 1 and 3) of the centrifuge 2 located above the branch chute 8, the inlet side of the branch chute 8 is connected to the abrasive chute 8a or the cutting waste. The chute 8b is switched. By surrounding the branch chute 8 with the frame 49, only the branch chute 8 can be repaired or replaced independently and the maintainability is improved.

FIG. 5 is a schematic view of a branch chute.
As illustrated, the branch chute 8 is divided into an abrasive chute 8a and a cutting chute 8b on the outlet side. Since the cutting waste is a lump, the cutting waste chute 8b is formed in the vertical direction from the discharge port 12 so as to be dropped and collected. Since the abrasive grains are recovered with some dispersion medium mixed, they flow even if there is an angle, so the abrasive chute 8a is formed obliquely. The angle θ is about 0 ° to 45 °. The inner surfaces of the abrasive chute 8a and the cutting scrap chute 8b are mirror-finished so that abrasive grains and cutting scraps do not adhere to the inside.

FIG. 6 is a flowchart of the slurry regeneration processing method according to the present invention.
Step S1:
The waste slurry after use is stored in a waste slurry storage tank by a wire saw device.
Step S2:
The waste slurry is put into a centrifuge and primary separation is performed. In this primary separation, only the abrasive grains (primary separation) in the waste slurry are separated. This primary separation is centrifuged at a low G of less than 1500G. The centrifuge is charged without pulsation and quantity by the variable control type quantitative supply means 33. The flow rate is managed by a mass flow meter, and the actual flow rate value is fed back and controlled by the PID control unit 35 (see FIG. 1) so as to approach the set flow rate value. During the primary separation, the inside of the centrifuge and the branch chute (abrasive chute) are washed with a new dispersion medium at an appropriate time. The separated abrasive grains are recovered in the abrasive recovery tank 3 (see FIG. 1). The mixed liquid after the abrasive grain separation is recovered in the mixed liquid recovery tank 6. When the waste slurry storage tank becomes empty, the interior of the storage tank is washed with a dispersion medium, and this is primarily separated again. Thereby, the abrasive grains and cutting waste (sludge) remaining in the waste slurry storage tank can be removed and recovered.

Step S3:
The mixed solution is put into the centrifuge used in step S2 to perform secondary separation. In this secondary separation, the mixed liquid is separated into cutting waste (secondary separated product) and a dispersion medium. This secondary separation is centrifuged at a high G of 1500 G or higher. The input control of the mixed liquid to the centrifugal separator is the same as the flow control of the waste slurry shown in step S2. During the secondary separation, the inside of the centrifuge and the branch chute (chute for cutting waste) are washed with a new dispersion medium at an appropriate time. The separated cutting waste is collected in the cutting waste collection tank 4 (see FIG. 1). The dispersion medium is recovered in the dispersion medium recovery tank 5. When the mixed liquid recovery tank becomes empty, the inside of the storage tank is washed with a dispersion medium, and this is secondarily separated again. Thereby, the cutting waste remaining in the mixed liquid recovery tank can be removed and recovered. Thereafter, the specific gravity in the dispersion medium recovery tank is measured to confirm the recovery of the dispersion medium in the secondary separation.

Step S4:
Abrasive grains recovered by primary separation, a dispersion medium recovered by secondary separation, and new abrasive grains and a new dispersion medium (new oil) are added as necessary to prepare a regenerated slurry. For example, (i) new abrasive grains and new oil are automatically added, or (ii) new abrasive grains are manually supplied and new oil is automatically supplied. (Iii) There is a method in which only new oil is automatically charged, or (iv) a new slurry and new oil which are formed in advance with new abrasive grains and new oil are automatically charged.

  First, the regenerated abrasive grains from the abrasive recovery tank are transferred to a regenerated slurry blending tank. This transfer is performed so that all the abrasive grains are transferred while washing the abrasive recovery tank with the dispersion medium. When the transfer of the abrasive grains is finished, the specific gravity in the regenerated slurry blending tank is measured to determine the abrasive recovery rate in the primary separation. This determination may be performed after the end of step S2. The regenerated slurry has a target volume and specific gravity. The amount of recovered abrasive grains that is insufficient for the set value is replenished with new abrasive grains. In accordance with this, a dispersion medium is also supplied. When it reaches the target specific gravity, it is used again as a regenerated slurry in a wire saw device.

  According to the above, primary separation and secondary separation can be performed by generating different centrifugal forces of low G and high G using the first motor and the second motor. For this reason, abrasive grains (primary separation) and cutting waste (secondary separation) having different specific gravities can be reliably separated and recovered with only one centrifuge. Therefore, when separating, it is only necessary to secure a space for installing a centrifuge for one unit, which is efficient in terms of space.

  Steps S <b> 1 to S <b> 4 described above are steps for performing a so-called two-stage separation mode in which the primary separated product and the secondary separated product are separated. On the other hand, in the case of a so-called single-stage separation abrasive grain recovery mode, such as when only abrasive grains (primary separated matter) are collected, steps S1, S2, and S4 are performed in this order except for step S3. Furthermore, in the so-called one-stage separation oil recovery mode in which only oil is recovered, it can be realized only in step S3.

DESCRIPTION OF SYMBOLS 1 Slurry reproduction | regeneration apparatus 2 Centrifugal separator 3 Abrasive grain collection tank 4 Cutting waste collection tank 5 Dispersion medium collection tank 6 Mixed liquid collection tank 7 Regenerated slurry preparation tank 8 Branch chute 8a Abrasive chute 8b Cutting waste chute 9 Switching means 10 First motor 11 Second motor 12 Discharge port 13 Drain port 14 Three-way valve 15 Pump 16 Waste slurry container 17 Stirring member 18 Motor 19 Three-way valve 20 Pump 21 Branch pipe 22 Three-way valve 23 Three-way valve 24 Damper 25 Mass flow rate Total 26 Three-way valve 27 Fluid sensor 28a New dispersion medium storage tank 28b New dispersion medium storage tank 29 Three-way valve 30 Three-way valve 31 Ultrasonic sensor 32 Three-way valve 33 Variable control type quantitative supply means 34 Mass flow meter 35 PID control unit 36 Pump 37 Three-way valve 38 Branch pipe 39 Branch pipe 40 Branch pipe 41 Valve 42 Valve 43 Valve 44 Valve 45 Waste slurry inlet 4 a new dispersion medium inlet 46b new dispersion medium inlet 47 new dispersion medium inlet 48 rollers 49 frame 50 rail 51 pump 52 mixture disposal tank

Claims (6)

A waste slurry containing at least one of a primary separator and a secondary separator having different specific gravities to be separated from the separation medium is introduced into a dispersion medium, and the primary separator or the secondary separator is removed from the waste slurry. A centrifuge capable of separation,
Provided in the centrifuge, and a discharge port for discharging the primary separated product or the secondary separated product after the separation treatment from the centrifuge;
A primary separation recovery tank capable of communicating with the discharge port via a chute for primary separation;
A secondary separation recovery tank capable of communicating with the outlet through a chute for secondary separation;
A drain port for draining the dispersion medium after the waste slurry is separated from the centrifuge, or a mixed liquid of the dispersion medium and the secondary separation, provided in the centrifuge;
A dispersion medium recovery tank and a mixed liquid recovery tank that can selectively communicate with the drainage port;
A regenerated slurry blending tank that mixes the primary separation and the dispersion medium to produce a regenerated slurry;
A slurry regeneration processing device comprising switching means for connecting either the primary separated chute or the secondary separated chute to the discharge port.   Variable control provided between the waste slurry storage tank for storing the waste slurry and the centrifuge, and between the liquid mixture recovery tank and the centrifuge, respectively, to adjust the flow rate of the waste slurry or the liquid mixture. Constant flow rate of the waste slurry or the mixed liquid based on the measurement result of the mass flow meter, the mass flow meter provided between the variable control quantitative feed unit and the centrifuge, and the measurement result of the mass flow meter The slurry regeneration processing apparatus according to claim 1, further comprising a PID control unit that controls the operation of the variable control type quantitative supply means.   The waste slurry storage tank, the mixed liquid recovery tank, and the centrifuge are connected via a three-way valve, and the variable control quantitative supply means and the mass flow meter are connected to the three-way valve and the centrifuge. The slurry regeneration processing apparatus according to claim 1 or 2, wherein the slurry regeneration processing apparatus is disposed between them.   The waste slurry is a slurry used in a wire saw device that presses and cuts a workpiece against a wire, the primary separation is abrasive grains mixed in the slurry, and the secondary separation is the workpiece. The slurry regeneration processing apparatus according to any one of claims 1 to 3, wherein the slurry regeneration processing apparatus is a cutting waste. A slurry regeneration processing method using the slurry regeneration processing apparatus according to any one of claims 1 to 4,
Throwing the waste slurry into the centrifuge,
Driving the centrifuge at a predetermined centrifugal force (low G) to centrifuge the primary separation from the waste slurry;
The centrifuged primary separation is recovered in the primary separation recovery tank,
The mixed liquid is recovered in the mixed liquid recovery tank,
Throwing the mixture into the centrifuge from the mixture recovery tank,
Driving the centrifuge at a centrifugal force (high G) higher than the predetermined centrifugal force to centrifuge the secondary separation from the mixture;
The centrifuged secondary separation is recovered in the secondary separation recovery tank,
The dispersion medium is recovered in the dispersion medium recovery tank,
The regenerated slurry preparation tank is charged with the primary separation recovered in the primary separation recovery tank, the dispersion medium recovered in the dispersion medium recovery tank, a new primary separation and a new dispersion medium, A slurry regeneration treatment method characterized by producing a regenerated slurry.   The actual flow rate value of the waste slurry or the mixed solution is measured by the mass flow meter, the actual flow rate value is compared with the set flow rate value by the PID control unit, and the actual flow rate value becomes the set flow rate value. 6. The slurry regeneration processing method according to claim 5, wherein the variable control type quantitative supply means is PID controlled.

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