JP3411813B2 - Slurry management system - Google Patents

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a slurry management system that is used Luz lari preparing managed in wire saw or the like.

[0002]

2. Description of the Related Art Generally, in a wire saw, one wire is wound at a predetermined pitch between a plurality of processing rollers. Then, while the wire is running, a slurry containing loose abrasive grains is supplied onto the wire, and in this state, the work is pressed against and brought into contact with the wire, and the work is cut into a wafer shape. .

This type of wire saw is equipped with a slurry tank for circulating and using the slurry. For example, a used slurry is periodically withdrawn to replace a new slurry. A switching device for is connected. A slurry management system for managing the replacement operation of the replacement device and its slurry is additionally provided. And in this slurry management system,
A slurry is prepared by mixing new abrasive grains and a dispersion liquid in a mixing tank, and the slurry is supplied to the wire saw through a supply passage.

Further, the used slurry used in the wire saw is transferred to the separation / recovery mechanism of the slurry management system through the recovery passage, and is used in the first separation / recovery stage of the separation / recovery mechanism to remove the usable abrasive grains. It is separated into a dispersion liquid, and the abrasive grains are collected as a solid content. Further, the separated dispersion liquid is separated into impurities of fine particle components and usable dispersion liquid in the second separation and recovery stage of the separation and recovery mechanism, and the dispersion liquid is recovered. Then, the recovered abrasive particles and the dispersion liquid are returned to the mixing tank to re-prepare the slurry, and the slurry is supplied to the wire saw for reuse.

[0005]

However, in the conventional slurry exchanging device and the slurry managing system, when the slurry exchanging operation is not performed on the slurry tank of the wire saw, such as during the processing operation of the wire saw, the supply passage and the recovery passage are not provided. In addition, there is a problem that the slurry stays inside the pump, valve, etc. on the way and sediments the abrasive grains, making it difficult for the slurry to flow.

The present invention has been made by paying attention to the problems existing in such conventional techniques. And has an object, in the interior, such as a supply passage and the recovery passage of the slurry staying slurry precipitated abrasive grains fraction, provide Angeles library management system can prevent the risk of the slurry it becomes difficult to flow Especially.

[0007]

In order to achieve the above object, in the invention described in claim 1 , abrasive grains and
The dispersion is mixed to prepare a slurry, and the slurry is fed through
Is supplied to the device to be used through a channel and
Separation and recovery mechanism for used slurries through the recovery passage
The available abrasive particles and dispersion from the slurry.
Separate them and return them to the compounding tank for reuse
In the slurry management system
The slurry supply passage to the equipment is used to supply the mixing tank and the slurry.
A circulation passage for circulating the slurry with the supply passage
The slurry circulation passage is connected to the separation recovery mechanism.
Partially shared with used slurry recovery passage
It was formed .

[0008]

[0009]

[0010] In the invention described in claim 2, in slurry management system of claim 1, the common portion between the recovery passage of the circulation passage and spent slurry of the slurry,
A detection means for detecting the property of the slurry is provided.

[0011]

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings. As shown in FIGS. 1 to 3, in this embodiment, a plurality of wire saws 11 are installed as a usage device that uses a slurry. Each wire saw 11 is equipped with a slurry tank 12,
A stirrer 13 is rotatably arranged inside of them and a level sensor 14 is attached to the outside thereof.
Then, a predetermined amount of slurry made of oily or aqueous dispersion liquid and abrasive grains is stored in each slurry tank 12, and is circulated and supplied to each wire saw 11 by the pump 15.

That is, in each of the wire saws 11, although not shown, one wire is wound between a plurality of processing rollers at a predetermined pitch, and while the wire is running, the slurry is slid from the slurry tank 12 onto the wire. Is supplied. In this state, the work is pressed against and brought into contact with the wire, and the work is cut into a wafer by the lapping action. Also, during this cutting process, the used slurry is collected from the wire into the slurry tank 12, and the slurry is supplied again to the running wire,
The slurry can be used repeatedly. Each wire saw 1
1 is connected to the slurry exchange device A shown in FIG. 1, and the used slurry is extracted by the slurry exchange device A and replaced with a new slurry. In this embodiment, a supply tank 16, a recovery tank 24, and a recovery passage 2 described later are provided.
8, transfer passage 39, communication passage 39a, and circulation passage 20
A slurry exchanging device A is composed of a, 28a, 76 and the like.

As shown in FIG. 1, the wire saw 11 is opposed to a slurry supply tank 16 for storing the slurry for supply to the slurry tank 12, and the stirrer 1 is provided inside thereof.
7 is rotatably arranged, and level sensors 18 and 19 are attached to the outside. A valve 2 is provided in the slurry supply passage 20 from the supply tank 16 to the slurry tank 12.
1, a pump 22 and a valve 23 are provided. Then, the new slurry stored in the supply tank 16 is supplied to the slurry tank 12 of each wire saw 11 by the pump 22 via the valve 23 of the supply passage 20. In addition, a circulation passage 20 a for circulating slurry between the supply tank 16 and the supply passage 20 is connected to the supply passage 20.

The wire saw 11 has a slurry tank 12
A collection tank 24 for collecting and storing the used slurry extracted from is oppositely arranged, a stirrer 25 is rotatably arranged inside thereof, and level sensors 26 and 27 are provided outside thereof. ing. A pump 15 and a valve 31 are provided in a recovery passage 28 from the slurry tank 12 to the recovery tank 24, and a valve 29 and a pump 3 are provided in a communication passage 39a from the recovery tank 24 to a slurry transfer passage 39 described later.
0 and a valve 35 are provided. Then, all or a part of the used slurry in the slurry tank 12 of each wire saw 11 is collected by the pump 15 into the collection tank 24 via the valve 31 and the collection passage 28 regularly or at every slice completion. It

Further, according to the amount of the used slurry recovered from the slurry tank 12, the supply slurry is replenished from the supply tank 16 into the slurry tank 12. As a result, with repeated use of the slurry, the amount of cutting chips mixed in the work gradually increases, or the ratio of the abrasive grains crushed by lapping increases, and the amount of abrasive grains having a normal grain size gradually increases. It is possible to prevent the work cutting efficiency from being lowered due to the decrease. In addition, the collection passage 28 and the communication passage 3
A circulation passage 28 a is connected to the valve 35 in 9 a, and the recovery tank 24 and the recovery passage 28 are connected via the valve 35.
The slurry can be circulated between the and.

As shown in FIG. 2, a measuring tank 34 is disposed downstream of the recovery tank 24, and the used slurry in the recovery tank 24 is communicated with the communication passage 39a by the pump 30 shown in FIG.
Is supplied into the measuring tank 34 through the valve 35. On the outside of the measuring tank 34, a level sensor 36,
37 and a temperature sensor 38 are attached, and the level sensor 3
The used slurry for one separation process is weighed by 6, 37, and the temperature of the slurry is detected by the temperature sensor 38.

A separating and collecting mechanism 40 shown in FIG. 3 is connected to the downstream side of the measuring tank 34 through a transfer passage 39.
Valves 41, 42, 43, 44 are provided in the transfer passage 39.
And a pump 45 are provided. The recovery passage 28
Not only that, the transfer passage 39 and the communication passage 39a constitute a recovery passage according to the present invention. Separation and collection mechanism 40
Includes a first decanter 46 as a first separating and collecting mechanism,
It is equipped with a second decanter 47 as a second separation and recovery mechanism. When the used slurry in the measuring tank 34 is transferred to the separation / recovery mechanism 40 via the transfer passage 39, unnecessary components are removed from the used slurry by the decanters 46 and 47 and can be reused. Abrasive grains and dispersion are separated and collected.

That is, the first decanter 46 and the second decanter 46
As the decanter 47, for example, a screw conveyor type centrifugal separator is used, and the rotation speed of the second decanter 47 is set to about 2 to 3 times the rotation speed of the first decanter 46. Then, the used slurry is centrifugally separated by the first decanter 46 into abrasive particles and a turbid dispersion liquid containing fine particle components finer than the abrasive particles as impurities, and the abrasive particles are collected as solid content. The turbid dispersion liquid separated by the first decanter 46 is centrifugally separated by the second decanter 47 into fine particle component impurities smaller than the usable abrasive grains and the usable dispersion liquid, and the dispersion liquid is obtained. Be recovered.

Further, the usable dispersion liquid separated by the second decanter 47 is discharged downstream through the valves 48 and 70 while being mixed with the usable abrasive grains separated by the first decanter 46. And also has the function of promoting the flow of abrasive grains into the piping system thereafter. On the other hand, the impurities of the fine particle component separated by the second decanter 47 are discharged and stored in the storage tank 49.

A first switching valve 50 and a second switching valve 51 are arranged downstream of the first decanter 46. Then, the usable abrasive particles and the dispersion liquid discharged from the first decanter 46 are introduced to either the second switching valve 51 or the measuring tank 34 by switching the first switching valve 50. In addition, the second switching valve 51
The usable abrasive grains and dispersion liquid introduced above are introduced into one of the pair of mixing tanks 54 by switching the second switching valve 51.

A stirrer 55 is rotatably disposed inside each of the mixing tanks 54, and a weight sensor 5 is disposed outside.
6 and a temperature sensor 57 are attached. Then, the weight sensor 56 detects the weight of the slurry in the mixing tank 54, and the temperature sensor 57 detects the temperature of the slurry.

A hopper 58 is provided above each of the mixing tanks 54, and the new abrasive grains contained in the hoppers 58 are supplied into each of the mixing tanks 54 via a screw feeder 59. An air compressor 61 is connected to each hopper 58 via an air supply path 60, and when the abrasive grains are supplied into the mixing tank 54, compressed air is supplied from the air compressor 61 into the hopper 58 to supply the abrasive grains. Is promoted. Each hopper 5
8 and each of the mixing tanks 54 through the suction passage 62.
The fine particle component of the abrasive grains floating in the hopper 58 and the mixing tank 54 is sucked and removed by the dust collector 63.

A plurality of dispersion liquid tanks 64 shown in FIG. 3 are disposed on the side of the mixing tank 54, and the oily or aqueous dispersion liquid stored in these dispersion liquid tanks 64 is controlled by a valve 65 and a pump. It is supplied into each mixing tank 54 via 66 and a valve 67. Then, the new abrasive grains and the dispersion liquid supplied into each of the mixing tanks 54 and the abrasive grains and the dispersion liquid returned from the separating and collecting mechanism 40 are stirred and mixed to prepare a slurry having a predetermined mixing ratio. The slurry preparation operation is alternately executed in the pair of mixing tanks 54.

From the dispersion liquid tank 64, the separating and collecting mechanism 4
A branch supply passage 68 is connected to the supply passage of the dispersion liquid to 0,
Valves 69 and 70 are arranged in the branch supply path 68. The dispersion liquid separated and collected by the second decanter 47 is periodically discharged from the valve 48 to the storage tank 49.
At this time, the valve 69 is opened, the dispersion liquid in the dispersion liquid tank 64 is supplied to the first decanter 46 via the branch supply path 68, and mixed with the usable abrasive grains separated by the first decanter 46. It serves to accelerate the flow of abrasive grains and supplies a new dispersion liquid to the mixing tank 54.

A supply passage 71 is connected between each of the mixing tanks 54 and the supply tank 16, and valves 72, 73, 74 and a pump 75 are arranged in the supply passage 71.
The slurry prepared in the mixing tank 54 is supplied and stored in the supply tank 16 through the supply passage 71, and then supplied to the slurry tank 12 of each wire saw 11.

A circulation passage 76 for circulating the slurry between the mixing tank 54 and the supply passage 71 is connected to the valve 74 in the middle of the slurry supply passage 71. A valve 77 is provided.
In addition, the slurry circulation passage 76 and the separation / recovery mechanism 40
The used slurry transfer passage 39 to the valve 43,
It is partially shared between 44. Then, during and after the preparation of the slurry in the mixing tank 54, the pump 75
With the rotation of the slurry, the slurry in the mixing tank 54
Is circulated through a part of the flow path and the circulation passage 76.

The common portion 39 (7) of the circulation passage 76
A densitometer 78, a flow meter 79, and a viscometer 80 are connected to 6) as detecting means for detecting the property of the slurry. Then, the separation and recovery mechanism 4 is transferred through the transfer passage 39.
When the used slurry is transferred to 0 or when the slurry in the mixing tank 54 is circulated through the circulation passage 76, the specific gravity, the flow rate and the viscosity of the slurry are determined by the specific gravity meter 7
8, detected by flowmeter 79 and viscometer 80.

The specific gravity meter 78, the flow meter 79 and the viscometer 8
On the upstream side of 0, the common portion 39 of the circulation passage 76
A temperature controller 81 is connected to (76). Then, when the used slurry is transferred to the separation / recovery mechanism 40 via the transfer passage 39, and when the slurry in the mixing tank 54 is circulated through a part of the supply passage 71 and the circulation passage 76. The temperature of the slurry is adjusted by the temperature controller 81 based on the detection results of the temperature sensors 38 and 57. As a result, the temperature of the slurry is kept within a predetermined range, and the fluctuation of the viscosity due to the temperature change of the slurry is suppressed.

Next, the structures of the first switching valve 50 and the second switching valve 51 will be described in detail. As shown in FIGS. 4 to 6, each switching valve 50, 51 is provided with a valve case 84, one inflow port 85 is formed in the upper part thereof, and two outflow ports 86, 87 are formed in the lower part thereof. Has been done. A pipe line from the first decanter 46 is connected to the inflow port 85 of the first switching valve 50, and a pipe line to the weighing tank 34 is connected to one outflow port 87 (on the left side in FIG. 4). ing. Further, the other outlet (the right side in FIG. 4) of the first switching valve 50 and the inlet 85 of the second switching valve 51 are connected directly or via a pipeline. Furthermore, 2 of the second switching valve 51
Pipe lines to the respective mixing tanks 54 are connected to the two outlets 86 and 87, respectively.

A rotary shaft 88 is provided on both side walls of the valve case 84, an oilless bush 89 and an oil seal 90.
It is rotatably inserted and supported via. In the valve case 84, the valve body 91 is fixed to the rotary shaft 88,
With the rotation of the rotary shaft 88, the rotary shaft 88 is pivotally arranged between a first switching position P1 shown by a solid line in FIG. 2 and a second switching position P2 shown by a chain line.

An air cylinder 92 is arranged outside the valve case 84, and a piston rod 93 thereof is connected to a rotary shaft 88 via a lever 94. Then, when the air cylinder 92 is retracted due to the air supply from the air compressor 61, the valve body 91 moves to the first position.
It is pivotally arranged at the switching position P1 and the flow path from the inflow port 85 to the other outflow port 86 is opened. When the air cylinder 92 is projected, the valve body 91 is pivotally arranged at the second switching position P2, and the flow path from the inflow port 85 to the other outflow port 87 is opened.

As described above, in the switching valves 50 and 51 of this embodiment, the valve cylinder 91 is switched and rotated between the first switching position P1 and the second switching position P2 by the air cylinder 92 having a large driving torque. It has become so. Therefore, the switching valves 50 and 51 are arranged on the abrasive grain extraction side of the first decanter 46 that separates the abrasive grains and the dispersion liquid, and the ultrahigh viscosity abrasive grains are flowing in the valve case 84. Also,
The valve element 91 can be accurately operated to a predetermined switching position with a large driving force.

Next, the electrical circuit configuration of the slurry management system configured as described above will be described. As shown in FIG. 2, a central processing unit (CPU) 97 controls the operation of each unit of the slurry management system. A read only memory (ROM) 98 stores various control programs necessary for the operation of the slurry management system. The random access memory (RAM) 99 temporarily stores data and the like obtained by executing the control program. The CPU 97, the ROM 98 and the RAM 99 constitute a control means.

To the CPU 97, detection signals from the pycnometer 78, the flowmeter 79 and the viscometer 80, and an operation signal from the operation panel 100 are input. Also, the CPU 97
Through the drive circuits 101, 102 and 103, various valves including valves 41 to 44 and 72 to 74, various pumps including pumps 45 and 75, and decanters 46 and 4 respectively.
An operation signal is output to 7.

When the used slurry is separated from the measuring tank 34, the CPU 97 operates the pump 45 while the transfer passage 39 is formed by switching the valves 41 to 44. Transfer the slurry. At this time, the specific gravity, flow rate 79, and viscometer 80 are used to detect the specific gravity, flow rate, and viscosity of the used slurry, and the supply flow rate of the slurry to the separation / recovery mechanism 40 is adjusted according to the detection signal. Alternatively, the separation efficiency of the abrasive particles usable in the first decanter 46 and the separation efficiency of the dispersion liquid usable in the second decanter 47 are controlled to be constant by adjusting the temperature of the slurry or the like.

Further, the CPU 97 controls the valves 43, 44, 72 to 7 during and after the preparation of the slurry in the mixing tank 54.
In the state where the circulation passage 76 is formed by switching 4, the operation of the pump 75 circulates the slurry in the mixing tank 54 through a part of the supply passage 71 and the circulation passage 76.
At this time, the specific gravity, flow rate 79, and viscometer 80 are used to detect the specific gravity, flow rate, and viscosity of the slurry, and the amount and distribution of abrasive grains from the hopper 58 to the mixing tank 54 are detected according to the detection signals. The supply amount of the dispersion liquid from the liquid 64 is adjusted. As a result, the mixing ratio of the abrasive grains and the dispersion liquid in the prepared slurry is adjusted and controlled to be a predetermined value.

Next, the operation of the slurry management system of this embodiment will be described. Now, in each wire saw 11, when the cutting work of the work is started, the slurry in the slurry tank 12 is circulated between the wire saw 11 and the wire saw 11,
It is supplied onto the wire of the wire saw 11. The slurry used in each wire saw 11 is the slurry tank 12
From the supply tank 16 to the inside of the recovery tank 24 periodically or every time the slice is completed, and new slurry is replenished from the supply tank 16 into the slurry tank 12.

The used slurry recovered in the recovery tank 24 is transferred to the separation / recovery mechanism 40 through the measuring tank 34 and the transfer passage 39, and the slurry is recovered by the first decanter 46 and the second decanter 47. The usable abrasive grains and dispersion liquid are separated and collected from the inside. Then, the recovered abrasive particles and dispersion liquid are returned to the mixing tank 54 and mixed with the abrasive particles supplied from the hopper 58 and the dispersion liquid supplied from the dispersion liquid tank 64 to prepare a slurry having a predetermined mixing ratio. To be done.

Furthermore, during and after the preparation of the slurry, the slurry in the mixing tank 54 is circulated through a part of the supply passage 71 and the circulation passage 76. And the supply tank 16
When the slurry inside falls below a predetermined level, the mixing tank 54
The prepared slurry inside the supply tank 16 through the supply passage 71.
Is supplied to.

Next, the operation of circulating the slurry in the recovery tank 24, the supply tank 16 and the mixing tank 54 will be described with reference to FIGS.
A more detailed description will be given based on the flowchart of FIG. Note that this flowchart proceeds under the control of the CPU 97 based on the control program stored in the ROM 98.

First, the circulation flow of slurry in the recovery tank 24 will be described with reference to FIG. There is no abnormality in the pump 30 due to the start of slurry circulation (S1) (S
2) Is the tank level of the recovery tank 24 too low (S
3) It is always determined whether the slurry is being extracted from the wire saw 11 (S4), and while these conditions are satisfied, the slurry circulation operation is continued. That is, the slurry in the recovery tank 24 is returned to the recovery tank 24 again by the pump 30 through the valve 29, a part of the communication path 39, the valve 35, the circulation path 28a and the recovery path 28. Circulation of the slurry is repeated in this circuit. When the abnormality of the pump 30 or the tank level of the recovery tank 24 reaches a low level while the circulation of the slurry is repeated,
Circulation of the slurry is stopped (S5). Also, the valve 31
Is opened and the pump 15 is driven, the valve 29 is closed when the operation of extracting the slurry from the wire saw 11 is started, the pump 30 is stopped, and the circulation operation of the slurry is stopped (S5). It Then, when the extraction operation of the slurry is completed (S7), the circulation operation of the slurry is started again.

Next, referring to FIG. 9, a circulation flow of the slurry in the supply tank 16 will be described. Is there any abnormality in the pump 30 due to the start of slurry circulation (S8)?
9) Is the tank level of the supply tank 16 too low? (S1
0) is always discriminated, and while these conditions are satisfied, the slurry circulation operation is continued. That is, the supply path 20,
It is returned to the inside of the supply passage 16 through the circulation passage 20a, and the circulation of the slurry is repeated in this circuit. During that time, if the pump 22 is abnormal or the tank level of the supply tank 16 reaches a low level, the circulation of the slurry is stopped (S11).
To be done.

Next, referring to FIG. 10, a circulation flow in the mixing tank 54 will be described. When the circulation button on the operation panel 100 in the slurry management system is turned on (S12), it is determined whether or not the conditions for starting circulation of the slurry are satisfied (S13). That is, whether the slurry management system is operating automatically, the slurry is not being extracted, the slurry is being supplied, the flushing is not being performed, or whether a predetermined amount of slurry is contained in the mixing tank 54, or the like. Is determined. Then, when the circulation start condition is satisfied, the valves 43, 44, 72 to 7
4 and the like are switched to form a circulation passage 76 (S
14). In this state, the pump 75 is rotated at a low speed,
Circulation of the slurry in the mixing tank 54 is started via a part of the supply passage 71 and the circulation passage 76 (S15).

During the circulation of the slurry, it is determined whether the circulation button on the operation panel 100 is turned off (S16), and whether the batch processing is started during the automatic operation (S1).
7) is performed. In addition, the slurry tank 12 during automatic operation
From the recovery tank 24 to the recovery tank 24 and the mixing tank 5
4 is performed to determine whether the operation of supplying the slurry to the supply tank 16 has been started (S18), and whether the flushing for cleaning the inside of the pipeline or the like has been started (S19). If the determination results of S19 are all "NO", the circulation of the slurry is continued. On the other hand, this S
If the determination result of any of 16 to S19 is YES,
The pump 75 is stopped (S20), and the valves 43, 44,
72 to 74 are switched, the circulation passage 76 is blocked, and the circulation operation is stopped (S21). After that, the above S
The operation from 12 is repeated.

The effects expected from the above embodiment will be described below. -In this embodiment, the collection tank 24 and the collection passage 2
8, 39, 39a, and between the supply tank 16 and the supply passage 2
The circulation passages 76 for circulating the slurry are connected to each other. Therefore, the slurry in the recovery tank 24 can be circulated between the recovery passages 28, 39, 39a and the supply passage 20 even when the operation of replacing the slurry in the wire saw 11 is not being performed. Therefore, the passages 20, 28, the valves 21, 29, 35 or the pumps 20,
Since the slurry does not stay inside 33 or the like, sedimentation or clogging of the slurry can be prevented, and it is possible to prevent the slurry from becoming difficult to flow.

In this embodiment, the mixing tank 54
A circulation passage 76 for circulating the slurry in the slurry supply passage 71 from the device to the wire saw 11 as the device to be used.
Are connected. Therefore, during the operation of the wire saw 11 or the like, even when the operation of supplying the slurry from the mixing tank 54 is stopped, the slurry is constantly circulated in the pipe, so that the slurry is kept inside the mixing tank 54 and the supply passage 71. Does not stay. Therefore, it is possible to prevent the abrasive grains from being settled in the retained slurry and making it difficult for the slurry to flow.

In this embodiment, the slurry circulation passage 76 is formed so as to be partially shared with the used slurry transfer passage 39 to the separation / recovery mechanism 40. Therefore, the slurry piping system can be shortened, and the configuration of the slurry management system can be simplified.

In this embodiment, the specific gravity meter 78 as a detection means for detecting the property of the slurry is provided in the shared portion 39 (76) of the slurry circulation passage 76 and the used slurry transfer passage 39. And flowmeter 79 and viscometer 8
0 is set. For this reason, it is not necessary to separately provide a detection means for detecting the properties of the slurry during or after preparation and a detection means for detecting the properties of the used slurry, which simplifies the configuration of the slurry management system. Can be converted. Further, since the slurry does not stay in the shared portion 39 (76) of the circulation passage 76 and the transfer passage 39 in which the detecting means is disposed, the property of the slurry can be accurately detected.

A slurry exchanging device A is provided between the wire saws 11. Therefore, it is not necessary to provide the slurry exchanging device A for each wire saw 11, and the configuration of the slurry management system can be simplified.

Note that this embodiment can be modified and embodied as follows. -It is configured such that the slurry is prepared only by one mixing tank 54 without disposing the two mixing tanks 54.

With such a configuration, the slurry management system can be simplified, and it is effective for managing the slurry when a large number of wire saws 11 are not arranged in parallel.

In the slurry management system provided with one mixing tank 54, the supply tank 16 is omitted and the mixing tank 54
The slurry prepared in 1. is directly supplied to the slurry tank 12 of the wire saw 11.

With such a structure, the slurry management system can be further simplified. In a slurry management system having one mixing tank 54, the recovery tank 24 may be omitted, and used slurry may be directly extracted from the slurry tank 12 of the wire saw 11 into the measuring tank 34.

With this configuration, the slurry management system can be further simplified. In the slurry management system including one mixing tank 54, the outlet side of the measuring tank 34 is connected to the inlet side of the circulation pump 75, and the passage from the connection point to the valve 44 is used as the used slurry transfer passage 39. And the passage 76 for circulating the prepared slurry.

With this structure, the slurry piping system can be further shortened, and the transfer pump 45 in the transfer passage 39 can be omitted, further simplifying the slurry management system. be able to.

An oil cylinder is used instead of the air cylinder 92 of the above embodiment. -Change the flow path switching configuration of each switching valve 50, 51 appropriately. For example, the valves 50 and 51 should be simple 2-way valves, or 4-way valves, 5-way valves.

Further, technical ideas other than the claims grasped by the embodiment will be described below together with their effects. (1) The slurry management system according to claim 2 , wherein the detection means detects at least one of the flow rate, specific gravity, and viscosity of the slurry.

According to this structure, at least one of the flow rate, the specific gravity and the viscosity of the slurry is detected during or after the preparation, and the mixing ratio of the abrasive grains and the dispersion liquid is detected based on the detection result. Can be controlled to be always constant. In addition, when the used slurry is transferred to the separation / recovery mechanism, at least one of the flow rate, specific gravity, and viscosity of the used slurry is detected. The efficiency of separation and recovery from the liquid can be controlled to be always constant.

(2) A valve body for switching the flow path of abrasive grains in a switching valve arranged on the abrasive grain take-out side of a separating and collecting mechanism for separating and collecting the abrasive grains and the dispersion liquid from the used slurry.
A switching valve including an actuator (air cylinder 92) for switching and operating the valve body.

According to this structure, even if the abrasive grains taken out from the separation / recovery mechanism are ultra-high viscosity fluid or the abrasive grains adhere to the valve body, the valve body is driven with a large torque, It can be accurately operated to a predetermined switching position. Therefore,
The switching operation of the valve element does not become difficult unlike the conventional configuration in which the valve element is switched by a small torque drive source such as a solenoid.

(3) The switching valve according to item (2), wherein the actuator is an air cylinder. According to this configuration, since the switching operation of the valve element is performed by the air cylinder, it is possible to avoid an unreasonable operation and prevent damage to the valve element and the like.

[0063]

Since the present invention is constructed as described above, it has the following effects. According to the invention described in claim 1 , the mixing tank and the bag are
Slurry stays inside the lube and inside the supply passage, and the abrasive grains settle.
However, it is possible to prevent the slurry from becoming difficult to flow.
It Also, the slurry piping system can be shortened,
The configuration of the library management system can be simplified.

[0064]

[0065] According to the invention described in 請 Motomeko 2, a detecting means for detecting the properties of the slurry during or after the preparation, and a separate detection means for detecting a property of the used slurry The configuration of the slurry management system can be simplified because it is not necessary to provide it. Further, since the slurry does not stay in the shared portion of the circulation passage and the transfer passage where the detection means is disposed, the property of the slurry can be accurately detected.

[0066]

[Brief description of drawings]

FIG. 1 is a piping diagram partially showing a slurry management system according to an embodiment.

FIG. 2 is a piping diagram showing another part of the slurry management system.

FIG. 3 is a piping diagram showing the other parts of the slurry management system.

FIG. 4 is a sectional view showing a configuration of a switching valve.

FIG. 5 is a plan view of the switching valve.

6 is a partially enlarged sectional view taken along line 6-6 of FIG.

FIG. 7 is a block diagram showing an electric circuit configuration of the slurry management system.

FIG. 8 is a flowchart showing a circulation operation of slurry in a recovery tank.

FIG. 9 is a flowchart showing a circulation operation of slurry in a supply tank.

FIG. 10 is a flowchart showing a slurry circulating operation in the mixing tank.

[Explanation of symbols]

11 ... Wire saw as a slurry using device, 12 ... Slurry tank, 16 ... Supply tank, 20 ... Supply passage, 20a ... Circulation passage, 24 ... Recovery tank, 24a ... Circulation passage, 28 ...
Recovery passage, 34 ... Measuring tank, 39 ... Transfer passage (recovery passage), 39a ... Communication passage (recovery passage), 40 ... Separation / recovery mechanism, 46 ... First decanter, 47 ... Second decanter, 54 ...
Mixing tank, 58 ... Hopper, 64 ... Dispersion tank, 71 ... Supply passage, 76 ... Circulation passage, 78 ... Densitometer constituting detection means, 79 ... Flowmeter constituting detection means, 80 ... Detection means Viscometer constituting 97, CP constituting control means
U, 98 ... ROM constituting control means, 99 ... RAM constituting control means.

─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-9-168971 (JP, A) JP-A-9-29637 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) B24B 57/00-57/04 B24B 27/06 B24B 37/00

Claims (2)

(57) [Claims] 1. An abrasive grain and a dispersion liquid are mixed in a mixing tank to form a slurry.
A device that prepares a slurry and uses that slurry through a supply passage
Used sludge from the equipment used.
Of the slurry to the separation / recovery mechanism via the recovery passageway.
The usable abrasive grains and dispersion liquid are separated and collected from the
Slurry management system in which these are returned to the mixing tank for reuse.
In the stem, the slurry supply passage from the mixing tank to the equipment used is
The slurry was circulated between the mixing tank and the slurry supply passage.
And a circulation passage for the slurry,
Used slurry recovery passageway to the separation and recovery mechanism and partial
Slurry management system designed to be shared by 2. A circulation passage for the slurry and a used soot
The property of the slurry is detected in the shared area with the recovery passage of the slurry.
The slurry according to claim 1, further comprising detection means for
Management system.