WO2010082447A1

WO2010082447A1 - Slurry regenerating device and method

Info

Publication number: WO2010082447A1
Application number: PCT/JP2009/071792
Authority: WO
Inventors: 百中幸久; 池永邦信; 緒方秀敏
Original assignee: 株式会社安永; 株式会社Ｉｈｉ回転機械
Priority date: 2009-01-15
Filing date: 2009-12-28
Publication date: 2010-07-22
Also published as: JP5280218B2; JP2010162640A; CN102281991B; CN102281991A; KR101575924B1; KR20110117081A; TW201036719A

Abstract

A slurry regenerating device provided with a centrifugal separator (2) for allowing waste slurry to be inserted therein, a discharge opening (12) for discharging a primarily separated substance and a secondarily separated substance from the centrifugal separator (2), a first collecting vessel (3) communicating with the discharge opening (12) through a route (8a) for the primarily separated substance, a second collecting vessel (4) communicating with the discharge opening (12) through a route (8b) for the secondarily separated substance, a liquid discharge opening (13) for discharging dispersed soot or a mixed liquid of the dispersed soot and the secondarily separated substance, a third collecting vessel (5) and a fourth collecting vessel (6) which communicate with the liquid discharge opening (13), a blending vessel (7) for generating regenerated slurry, and a switching means (9) for connecting either the route (8a) for the primarily separated substance or the route (8b) for the secondarily separated substance to the discharge opening (12).

Description

Slurry regeneration apparatus and method

The present invention relates to a slurry regenerating apparatus and method, and more particularly to a waste slurry regenerating apparatus and method after cutting in a wire saw apparatus.

Conventionally, waste slurry discharged from a processing apparatus using slurry (for example, a wire saw apparatus) has been recycled for cost reduction. The waste slurry in such a wire saw device is formed of a dispersion medium, abrasive grains and cutting waste mixed therein. In these separations, two centrifuges were used to separate the abrasive grains and the cutting waste from the dispersion medium. Specifically, waste slurry is charged into the first centrifuge, and abrasive grains having a specific gravity greater than that of cutting waste are first separated with a low centrifugal force of less than 1500G. Thereafter, a mixed liquid composed of the dispersion medium and the cutting waste is put into a second centrifuge, and the cutting waste is separated with a high centrifugal force of 1500 G or more. Thereafter, the dispersion medium and abrasive grains were mixed to regenerate the slurry. However, the use of two centrifuges requires a large installation space, and it is difficult to secure the space.

On the other hand, it is preferable to supply the waste slurry or mixed solution to be introduced into the centrifuge at a constant flow rate. For this reason, waste slurry or a mixed liquid has been thrown into the centrifuge through the orifice pot (see, for example, Patent Document 1). The orifice pot adjusts the flow rate by replacing the orifice plate. However, it is necessary to select an optimum orifice plate depending on the properties of the slurry (temperature, viscosity, specific gravity, abrasive grain type, coolant type, etc.). This choice was largely due to the experience of the operator and lacked certainty.

JP 2005-169299 A

The present invention takes the above-mentioned conventional technology into consideration, and does not require a large installation space, so that the primary separator and the secondary separator can be reliably separated from the waste slurry with only one centrifuge, and the separation is performed. It is an object of the present invention to provide a slurry regenerating apparatus and method capable of mixing a dispersed medium and a primary separated product to generate a slurry again.

In order to achieve the above object, in the invention of claim 1, a waste slurry containing at least one of a primary separator and a secondary separator having different specific gravity to be separated from the dispersion medium is introduced into the dispersion medium, A centrifuge capable of separating the primary separated product or the secondary separated product from a waste slurry, and the centrifugal separator provided in the centrifugal separator, and discharging the primary separated product or the secondary separated product from the centrifugal separator. A first recovery tank for recovering the primary separation that can be communicated via a first path for transferring the primary separation to the discharge port; and A second recovery tank for recovering the secondary separator that can be communicated via a second path for transferring the secondary separator; and provided in the centrifuge, from the centrifuge to the waste The dispersion medium after separating the slurry or A drain port for draining the mixed liquid of the dispersion medium and the secondary separated product, a third recovery tank for recovering the dispersion medium that can be selectively communicated with the drain port, and the mixed liquid A fourth recovery tank for recovering the liquid, a preparation tank for mixing the primary separated product and the dispersion medium to generate a regenerated slurry, and the first path and the discharge port. There is provided a slurry regenerating apparatus comprising switching means for connecting any one of the second paths.

In the invention of claim 2, in the invention of claim 1, it is provided between the storage tank for storing the waste slurry and the centrifuge, and between the fourth recovery tank and the centrifuge, respectively. , Variable control quantitative supply means for adjusting the flow rate of the waste slurry or the mixed liquid, a mass flow meter provided between the variable control quantitative supply means and the centrifuge, and measurement of the mass flow meter A PID control unit is further provided for controlling the operation of the variable control type quantitative supply means so as to make the flow rate of the waste slurry or the mixed liquid constant based on the result.

In the invention of claim 3, in the invention of claim 1 or 2, the storage tank, the fourth recovery tank, and the centrifuge are connected via a three-way valve, and the variable control type quantitative supply means and The mass flow meter is arranged between the three-way valve and the centrifuge.
According to a fourth aspect of the present invention, in the invention according to any one of the first to third aspects, the waste slurry is a slurry used in a wire saw device that presses a workpiece against a wire and cuts the wire, and the primary separated is the Abrasive grains mixed in the slurry, wherein the secondary separation is a cutting waste of the workpiece.

Further, the invention of claim 5 is a slurry regeneration method using the slurry regeneration device according to any one of claims 1 to 4, wherein the waste slurry is introduced into the centrifuge, and the centrifuge is Driving with a predetermined centrifugal force (low G), the primary separated product is centrifuged from the waste slurry, the centrifuged primary separated product is collected in the first collection tank, and the mixed solution is collected in the first collection tank. 4 is collected in the collection tank, the mixed solution is charged into the centrifuge from the fourth collection tank, and the centrifuge is driven with a centrifugal force (high G) higher than the predetermined centrifugal force. The secondary separation is centrifuged from the mixed solution, the centrifuged secondary separation is collected in the second collection tank, the dispersion medium is collected in the third collection tank, and the mixture tank is collected. The primary separation recovered in the first recovery tank and the recovery in the third recovery tank Wherein a dispersion medium which is a new primary isolates and a new dispersion medium were placed, to provide a slurry reproducing method characterized by generating a regenerated slurry.

In the invention of claim 6, in the invention of claim 5, the actual flow rate value of the waste slurry or the mixed liquid is measured by the mass flow meter, and the actual flow rate value and the set flow rate value are compared by the PID control unit. The variable control type quantitative supply means is PID-controlled so that the actual flow rate value becomes the set flow rate value.

According to the invention of claim 1, different centrifugal forces can be generated using the first motor and the second motor. For this reason, it is possible to reliably separate and recover the primary separation and the secondary separation having different specific gravities with only one centrifuge. Therefore, it is only necessary to secure a space in which one centrifuge can be installed, and space efficiency is high. Moreover, the separated primary separated product or secondary separated product can be collected in separate first or second collection tanks using the switching means. Furthermore, since the dispersion medium can also be recovered in another third recovery tank, the primary slurry and the dispersion medium can be mixed to reliably prepare the regenerated slurry.

According to the second aspect of the present invention, the supply of the waste slurry or the mixed solution to be introduced into the centrifuge can be made pulsation-free and quantitative by PID control of the variable control type quantitative supply means and the mass flow meter. For this reason, it is not necessary to adjust the flow rate by human hands, the flow rate can be automatically stabilized, and workability is improved. In addition, in order to perform stable recovery with a centrifuge, it is important to supply the solution in a pulsating and quantitative manner.

According to the invention of claim 3, the storage tank for storing the waste slurry, the fourth recovery tank for recovering the mixed liquid, and the centrifuge are connected via the three-way valve. And a pipe through which the mixed solution is introduced into the centrifuge. Therefore, since the pump and the flow rate control can be used in common, the number of parts can be reduced and the cost is also efficient.
According to invention of Claim 4, the reusable abrasive grain contained in the waste slurry used with the wire saw apparatus is collect | recovered as a primary separated material, and the cutting waste of a workpiece can be separately collect | recovered as a secondary separated material. Therefore, the dispersion medium and the abrasive can be mixed again and reused as a cutting slurry in a wire saw device. For this reason, the slurry can be saved.

According to invention of Claim 5, a primary separator is isolate | separated from waste slurry with a centrifuge, and after that, a 2nd isolate | separation is isolate | separated with the same centrifuge, and these are separate 1st or 2nd collection | recovery. Collect in the tank. Therefore, since two separated matters can be collected by one centrifuge, it is only necessary to secure a space for installing one centrifuge, which is efficient in terms of space.
According to the sixth aspect of the present invention, the variable control type quantitative supply means is PID controlled so that the actual flow rate value of the waste slurry or the mixed solution is fed back and approaches the set flow rate value. The centrifuge can be charged at a flow rate. In addition, a stable centrifugal effect can be obtained by supplying the solution without pulsation and quantification.

It is the schematic of the slurry reproduction | regeneration apparatus which concerns on this invention. It is a schematic plan view of the centrifuge used for the slurry reproduction | regeneration apparatus which concerns on this invention. It is a schematic side view of the centrifuge used for the slurry reproduction | regeneration apparatus which concerns on this invention. It is the schematic which showed the relationship between the branch chute used for the slurry reproduction | regeneration apparatus which concerns on this invention, and a switching means. It is the schematic of a branch chute. 3 is a flowchart of a slurry regeneration method according to the present invention.

FIG. 1 is a schematic view of a slurry regenerator according to the present invention.
As shown in the figure, the slurry regenerating apparatus 1 according to the present invention includes a centrifuge 2, a first recovery tank 3 for recovering abrasive grains (primary separation), and cutting waste (secondary separation). Second recovery tank 4 for recovery, third recovery tank 5 for recovering the dispersion medium, fourth recovery tank 6 for recovering the mixed liquid, and preparation for preparing the regenerated slurry A tank 7, a branch chute 8, and switching means 9 are provided. The centrifuge 2 includes two motors (first motor 10 and second motor 11), respectively, and can generate centrifugal force different from low G or high G.

The waste slurry that is the separation target consists of abrasive grains, cutting waste (sludge), and a dispersion medium (oil). Cutting chips are generated when a brittle material (not shown) is cut by a wire saw device (not shown) in a manufacturing process of a wafer ring made of a brittle material (for example, silicon). The waste slurry used in the wire saw device is stored in the storage tank 16. Generally, abrasive grains have a higher specific gravity than cutting waste. Accordingly, when the waste slurry is centrifuged with a small centrifugal force, abrasive grains having a large specific gravity are mainly separated. Thereafter, when the centrifugal separation is performed with a large centrifugal force, the cutting waste is mainly separated. Thereby, the abrasive grains and cutting waste having different specific gravities can be separated into two stages and separated by one centrifuge 2.

A discharge port 12 is provided on the lower side of the centrifuge 2. The discharge port 12 drops and discharges the centrifuged abrasive grains or cutting waste. The outlet side of the branch chute 8 is connected to the discharge port 12. The exit side of the branch chute 8 is branched in the middle into a first path 8a through which abrasive grains (primary separation) are transferred and a second path 8b through which cutting waste (secondary separation) is transferred. . Using the switching means 9, the opening position of the inlet side of the branch chute 8 with respect to the discharge port 12 is changed. By changing this position, the abrasive grains can be passed through the first path 8a and the cutting waste can be passed through the second path 8b. The first collection tank 3 for collecting abrasive grains is connected to the first path 8a. The second recovery tank 4 for recovering cutting waste is connected to the second path 8b. Therefore, the abrasive grains or cutting waste discharged from the discharge port 12 are collected in the first collection tank 3 or the second collection tank 4 through the first path 8a or the second path 8b, respectively.

The third recovery tank 5 for recovering the dispersion medium and the fourth recovery tank 6 for recovering the mixed liquid are connected to the drainage port 13 of the centrifuge 2 via the three-way valve 14. The three-way valve 14 is an automatic switching valve (the following three-

way valves

19, 22, 23, 26, 29, 30, 32, and 37 are all the same). The drainage port 13 is provided on the lower side of the centrifuge 2. When centrifuging the abrasive grains in the primary separation, the mixed liquid composed of the cutting waste and the dispersion medium is collected from the drainage port 13 through the three-way valve 14 into the fourth collection tank 6. The mixed liquid is put into the centrifuge 2 again for secondary separation, and the cutting waste is centrifuged. Thereafter, the dispersion medium is recovered from the drain port 13 through the three-way valve 14 to the third recovery tank 5. When the cutting waste remains in the dispersion medium and is recovered, the pump 36 is driven, and the oil in the third recovery tank 5 is supplied to the three-way valve 19, the branch pipe 21, the three-way valve 22, the pump 36, the three-way valve 37, The branch pipe 38 and the valve 41 are passed in this order to return to the fourth recovery tank 6 and secondary separation is performed again. On the other hand, when only the primary separation is performed and the mixed solution is to be discarded, such as when the secondary separation is not performed, the pump 51 is operated to transfer the mixed solution to the mixed solution disposal tank 52.

The blending tank 7 for blending the regenerated slurry is connected to the first collection tank 3 and the third collection tank 5. A new dispersion medium is accommodated in the first recovery tank 3 in advance. The abrasive grains recovered in the first recovery tank 3 are sent to the preparation tank 7 together with a new dispersion medium via the pump 15. The new abrasive grains S are sent to the mixing tank 7 not only from such regenerated abrasive grains but also from a new abrasive grain storage tank (not shown).

When the dispersion medium is sent from the third collection tank 5 to the preparation tank 7, it passes through the following flow path. When the pump 20 is driven, the three-way valve 19, the branch pipe 21, the three-way valve 22, the three-way valve 23, the pump 20, the damper 24, the mass flow meter 25, and the three-way valve 26 are passed in this order from the third recovery tank 5. It is sent to the mixing tank 7. The branch pipe 21 is provided with a fluid sensor 27. The fluid sensor 27 detects that the dispersion medium is flowing.

A new dispersion medium is accommodated in the new dispersion medium tanks 28a and 28b. When sending a new dispersion medium to the mixing tank 7, the pump 20 is driven and sent to the three-way valve 19 through the three-way valve 30. Thereafter, the flow path from the third recovery tank 5 to the preparation tank 7 is the same. In this way, recycled abrasive grains and recycled dispersion medium, and in some cases, new abrasive grains and new dispersion medium are sent to the mixing tank 7 and stirred in the mixing tank 7 to obtain a cutting slurry used in the wire saw device. Played. Stirring is performed using a stirring member 17 that rotates as the motor 18 is driven. The volume of the regenerated slurry at this time is monitored by the ultrasonic sensor 31. The sensor 31 detects the liquid level of the regenerated slurry. Since the size of the mixing tank 7 is known in advance, the volume of the regenerated slurry can be calculated by detecting the liquid level. The first recovery tank 3, the third recovery tank 5, the fourth recovery tank 6, and the storage tank 16 are also provided with the same stirring member 17, motor 18, and ultrasonic sensor 31. The second collection tank 4 is provided with an ultrasonic sensor 31.

The storage tank 16 is connected to the centrifuge 2 via a three-way valve 32, a variable control type quantitative supply means 33, and a mass flow meter 34. The supply means 33 is, for example, an air-driven or electrically-driven pump equipped with a function for preventing pulsation. The supply means 33 and the mass flow meter 34 are connected by wire using a PID controller 35 and a PLC or the like. The waste slurry is sent in a pulsating manner and in a fixed amount using the supply means 33. This actual flow value is measured by the mass flow meter 34. This actual flow rate value is compared with the set flow rate value by the PID control unit 35. In the PID control unit 35, the supply means 33 is controlled so that the actual flow rate value becomes the set flow rate value. For this reason, the supply means 33 is PID controlled so that the actual flow rate value of the waste slurry is fed back and approaches the set flow rate value, so that the waste slurry can be reliably fed into the centrifuge 2 at a constant flow rate. . For this reason, it is not necessary to adjust the flow rate by human hands, the flow rate can be automatically stabilized, and workability is improved. The three-way valve 32 is also connected to a fourth recovery tank 6 for recovering the mixed liquid, and the mixed liquid is also sent to the centrifuge 2 with the same flow rate control. Therefore, the flow rate control of the waste slurry and the mixed liquid can be performed by the same PID control unit 35, so that the number of parts can be reduced and the cost is also efficient.

In addition, this PID control is an automatic control method using a touch panel and PLC, so that operability can be improved. You may enable it to select separation modes, such as collection | recovery of only an abrasive grain, and collection | recovery of only a dispersion medium, using a touch panel and PLC. That is, as will be described later, so-called two-stage separation mode in which the primary separated material and the secondary separated material are separated, or so-called first-stage separated abrasive collection such as when only abrasive grains (primary separated material) are collected. A mode or a so-called one-stage separation oil recovery mode in which only oil is recovered may be selected.

The new dispersion medium is also used for cleaning the equipment. When used for cleaning, the pump 36 is driven, a new dispersion medium is sent from the three-way valve 22 to the three-way valve 37, and the fourth recovery tank 6 is cleaned through the branch pipe 38 through the valve 41. Such supply of the new dispersion medium is also used when it is desired to increase the amount of the dispersion medium in the mixed liquid. Further, when the valve 42 is passed through the branch pipe 39, the inside of the centrifuge 2 can be washed. Further, when the valve 43 is passed through the branch pipe 40, the discharge port 12 can be cleaned and the branch chute 8 can also be cleaned. In particular, the discharge port 12 and the branch chute 8 are regularly cleaned during the separation because the abrasive grains are stuck. Further, since the cutting waste has a very high viscosity and remains in the centrifuge 2 or the branch chute 8 (second path 8b), cleaning with a dispersion medium is indispensable. When the dispersion medium is passed through the valve 44, the storage tank 16 can be washed. This can also be used when it is desired to increase the amount of the dispersion medium in the waste slurry. When the new dispersion medium for cleaning becomes unnecessary, the new dispersion medium is circulated from the three-way valve 37 to the three-way valve 29 and returned to the new dispersion medium tank 28a or 28b. In addition, you may use the reproduction | regeneration dispersion medium collect | recovered from the waste slurry with the centrifuge 2 for the said washing | cleaning.

FIG. 2 is a schematic plan view of a centrifuge used in the slurry regenerator according to the present invention, and FIG. 3 is a schematic side view.
As described above, the centrifuge 2 includes the first motor 10 and the second motor 11. 45 is an inlet through which the waste slurry flows into the centrifuge 2. As described above, a discharge port 12 and a drain port 13 are provided below the centrifuge 2. 46a and 46b are inflow ports for allowing the new dispersion medium or the regenerated dispersion medium to flow in and washing the inside of the centrifuge 2. Reference numeral 47 denotes an inlet for washing the outlet 12 by introducing a new dispersion medium or a regenerated dispersion medium.

FIG. 4 is a schematic diagram showing the relationship between the branch chute and the switching means used in the slurry regenerating apparatus according to the present invention.
The branch chute 8 is surrounded by a frame body 49 having four rollers 48. The switching means 9 is connected to the frame 49. The switching means 9 is a cylinder and is movable in the axial direction (arrow R direction). With the movement of the switching means 9, the roller 48 moves on the rail 50, and the branch chute 8 is also pushed by the frame 49 and moves in the direction of arrow R. Depending on the separation falling from the discharge port 12 (see FIGS. 1 and 3) of the centrifuge 2 located above the branch chute 8, the inlet side of the branch chute 8 is connected to the first path 8a or second. To the path 8b. By surrounding the branch chute 8 with the frame 49, only the branch chute 8 can be repaired or replaced independently and the maintainability is improved.

FIG. 5 is a schematic view of a branch chute.
As illustrated, the branch chute 8 is divided into a first path 8a and a second path 8b on the exit side. Since the cutting waste is in a lump shape, the second path 8b is formed in the vertical direction from the discharge port 12 so that it can be dropped and collected. On the other hand, since the abrasive grains are collected with some dispersion medium mixed, they flow even if there is a slight angle, so the first path 8a is formed obliquely. The angle θ is about 0 ° to 45 °. The inner surfaces of the first path 8a and the second path 8b are mirror-finished so that abrasive grains and cutting waste do not adhere to the inside.

FIG. 6 is a flowchart of the slurry regeneration method according to the present invention.
Step S1:
The waste slurry after use is stored in a storage tank by a wire saw device.
Step S2:
The waste slurry is put into a centrifuge and primary separation is performed. In this primary separation, only the abrasive grains (primary separation) in the waste slurry are separated. This primary separation is centrifuged at a low G of less than 1500G. The centrifuge is charged without pulsation and quantitatively by the variable control type quantitative supply means 33 (see FIG. 1). The flow rate is managed by a mass flow meter, and the actual flow rate value is fed back and controlled by the PID control unit 35 (see FIG. 1) so as to approach the set flow rate value. During the primary separation, the inside of the centrifuge and the branch chute (first path) are washed with a new dispersion medium at an appropriate time. The separated abrasive grains are recovered in the first recovery tank 3 (see FIG. 1). The mixed liquid after the abrasive grain separation is recovered in the fourth recovery tank 6 (see FIG. 1). When the storage tank becomes empty, the inside of the storage tank is washed with a dispersion medium, and the dispersion medium is primarily separated again. Thereby, the abrasive grains and cutting waste remaining in the storage tank can be removed and recovered.

Step S3:
The mixed liquid recovered in step S2 is again put into the centrifuge used in step S2, and secondary separation is performed. In this secondary separation, the mixed liquid is separated into cutting waste (secondary separated product) and a dispersion medium. This secondary separation is centrifuged at a high G of 1500 G or higher. The input control of the mixed liquid to the centrifugal separator is the same as the flow control of the waste slurry shown in step S2. During the secondary separation, the inside of the centrifuge and the branch chute (second path) are washed with a new dispersion medium at an appropriate time. The separated cutting waste is recovered in the second recovery tank 4 (see FIG. 1). The dispersion medium is recovered in the third recovery tank 5 (see FIG. 1). When the fourth recovery tank becomes empty, the inside of the storage tank is washed with the dispersion medium, and the dispersion medium is secondarily separated again. Thereby, the cutting waste remaining in the fourth recovery tank can be removed and recovered. Thereafter, the specific gravity in the third recovery tank is measured to confirm the recovery of the dispersion medium in the secondary separation.

Step S4:
Abrasive grains recovered by primary separation, a dispersion medium recovered by secondary separation, and new abrasive grains and a new dispersion medium (new oil) are added as necessary to prepare a regenerated slurry. For example, (i) new abrasive grains and new oil are automatically added, or (ii) new abrasive grains are manually supplied and new oil is automatically supplied. (Iii) There is a method in which only new oil is automatically charged, or (iv) a new slurry and new oil which are formed in advance with new abrasive grains and new oil are automatically charged.

First, recycle abrasive grains from the first recovery tank are transferred to the mixing tank. This transfer is performed so that all abrasive grains are transferred while washing the first recovery tank with the dispersion medium. When the transfer of the abrasive grains is finished, the specific gravity in the preparation tank is measured and the abrasive recovery rate in the primary separation is determined. This determination may be performed after the end of step S2. The regenerated slurry has a target volume and specific gravity. The amount of recovered abrasive grains that is insufficient for the set value is replenished with new abrasive grains. In accordance with this, a dispersion medium is also supplied. When it reaches the target specific gravity, it is used again as a regenerated slurry in a wire saw device.

According to the above, primary separation and secondary separation can be performed by generating different centrifugal forces of low G and high G using the first motor and the second motor. For this reason, abrasive grains (primary separation) and cutting waste (secondary separation) having different specific gravities can be reliably separated and recovered with only one centrifuge. Therefore, when separating, it is only necessary to secure a space in which one centrifuge can be installed, and space efficiency is high.

Steps S1 to S4 described above are steps for performing a so-called two-stage separation mode in which the primary separation and the secondary separation are separated. On the other hand, in the case of a so-called single-stage separation abrasive grain recovery mode, such as when only abrasive grains (primary separated matter) are collected, steps S1, S2, and S4 are performed in this order except for step S3. Furthermore, in the so-called one-stage separation oil recovery mode in which only oil is recovered, it can be realized only in step S3.

DESCRIPTION OF SYMBOLS 1 Slurry reproduction | regeneration apparatus 2 Centrifuge 3 1st collection tank 4 2nd collection tank 5 3rd collection tank 6 4th collection tank 7 Mixing tank 8 Branch chute 8a 1st path | route 8b 2nd path | route 9 Switching Means 10 First motor 11 Second motor 12 Discharge port 13 Drain port 14 Three-way valve 15 Pump 16 Storage tank 17 Stirring member 18 Motor 19 Three-way valve 20 Pump 21 Branch pipe 22 Three-way valve 23 Three-way valve 24 Damper 25 Mass flow rate Total 26 Three-way valve 27 Fluid sensor 28a New dispersion medium tank 28b New dispersion medium tank 29 Three-way valve 30 Three-way valve 31 Ultrasonic sensor 32 Three-way valve 33 Variable control type quantitative supply means 34 Mass flow meter 35 PID control unit 36 Pump 37 Three-way valve 38 branch pipe 39 branch pipe 40 branch pipe 41 valve 42 valve 43 valve 44 valve 45 inlet 46a inlet 46b inlet 47 inlet 48 roller 49 Frame 50 Rail 51 Pump 52 Mixed liquid waste tank

Claims

A waste slurry containing at least one of a primary separator and a secondary separator having different specific gravity to be separated from the dispersion medium is introduced into the dispersion medium, and the primary separator or the secondary separator is removed from the waste slurry. A separable centrifuge,
Provided in the centrifuge, and a discharge port for discharging the primary separated product or the secondary separated product after separation from the centrifuge;
A first recovery tank for recovering the primary separator that can be communicated via a first path for transferring the primary separator to the outlet;
A second recovery tank for recovering the secondary separator that can be communicated via a second path for transferring the secondary separator to the discharge port;
A drainage port provided in the centrifuge, for draining the dispersion medium after separating the waste slurry from the centrifuge, or a mixture of the dispersion medium and the secondary separation;
A third recovery tank for recovering the dispersion medium that can selectively communicate with the drainage port, and a fourth recovery tank for recovering the mixed liquid;
A mixing tank for mixing the primary separation and the dispersion medium to produce a regenerated slurry;
A slurry regenerator comprising switching means for connecting either the first path or the second path to the discharge port.
Variable between the storage tank for storing the waste slurry and the centrifuge, and between the fourth recovery tank and the centrifuge, and for adjusting the flow rate of the waste slurry or the mixed liquid. The flow rate of the waste slurry or the mixed liquid is controlled based on the measurement result of the control type quantitative supply unit, the mass flow meter provided between the variable control type quantitative supply unit and the centrifuge, and the mass flow meter. The slurry regenerating apparatus according to claim 1, further comprising a PID control unit that controls the operation of the variable control type quantitative supply unit so as to be constant.
The storage tank, the fourth recovery tank, and the centrifuge are connected via a three-way valve, and the variable control quantitative supply means and the mass flow meter are disposed between the three-way valve and the centrifuge. The slurry regenerator according to claim 1 or 2, wherein
The waste slurry is a slurry used in a wire saw device that presses and cuts a workpiece against a wire, the primary separation is abrasive grains mixed in the slurry, and the secondary separation is the workpiece. The slurry reclaiming device according to any one of claims 1 to 3, wherein the slurry reclaiming device is any of the above.
A slurry regeneration method using the slurry regeneration apparatus according to any one of claims 1 to 4,
Throwing the waste slurry into the centrifuge,
Driving the centrifuge at a predetermined centrifugal force (low G) to centrifuge the primary separation from the waste slurry;
Collecting the centrifuged primary separation in the first collection tank;
The mixed liquid is recovered in the fourth recovery tank;
Throwing the mixed solution from the fourth recovery tank into the centrifuge;
Driving the centrifuge at a centrifugal force (high G) higher than the predetermined centrifugal force to centrifuge the secondary separation from the mixture;
Collecting the centrifuged secondary separation in the second recovery tank;
Collecting the dispersion medium in the third collection tank;
The primary separation collected in the first collection tank, the dispersion medium collected in the third collection tank, a new primary separation and a new dispersion medium are charged into the mixing tank and regenerated. A slurry regeneration method comprising producing a slurry.
The actual flow rate value of the waste slurry or the mixed solution is measured by the mass flow meter, the actual flow rate value is compared with the set flow rate value by the PID control unit, and the actual flow rate value becomes the set flow rate value. 6. The slurry regeneration method according to claim 5, wherein the variable control type quantitative supply means is PID controlled.