201036719 六、發明說明： 【發明所屬之技術領域】 本發明係關於漿料再生裝置及方法，特別是關於在線 鋸裝置進行切斷加工後之廢漿料的再生裝置及方法。 【先前技術】 以往，爲了縮減成本，從使用漿料之加工裝置（例如 0 線鋸裝置等）排出的廢漿料是被實施再生利用。這種線鋸 裝置之廢漿料，是由分散介質、混入其中的磨粒及切削屑 所形成。爲了讓其等分離，是使用2台的離心分離機，而 將磨粒及切削屑分別從分散介質分離出。具體而言，是在 第1台離心機中投入廢漿料，以未達1500G的離心力先分 離出比重比切削屑大的磨粒。然後，將分散介質和切削屑 所組成的混合液投入第2台離心分離機，以1 500G以上的 高離心力將切削屑分離出。然後將分散介質和磨粒混合而 Q 再生出漿料。然而’使用2台的離心分離機必需龐大的設 置空間，因此要確保該空間是困難的。 另一方面’投入離心分離機之廢漿料或混合液，宜以 一定的流量來供應。因此，是透過孔口罐來將廢漿料或混 合液投入離心分離機（例如參照專利文獻1)。孔口罐，是 藉由更換孔口板來調整流量。然而，/必須按照漿料的性質 (溫度、黏度、比重、磨粒種類、冷卻劑種類等）來選擇最 佳的孔口板。這種選擇主要是取決於作業者的經驗而缺乏 確實性。 -5- 201036719 專利文獻1 :日本特開2〇〇5-1 69299號公報 【發明內容】 本發明是考慮上述習知技術而開發完成的，其目的是 爲了提供一種漿料之再生處理裝置及方法，不須龐大的設 置空間僅藉由1台離心分離機即可從廢漿料將一次分離物 及二次分離物確實地分離，並將分離後的分散介質和一次 分離物混合以再度生成漿料。 爲了達成前述目的，請求項1的發明所提供之漿料再 生裝置，其特徵在於具備： 離心分離機，供廢漿料（在分散介質中含有應從前述 分散介質分離之比重彼此不同的一次分離物及二次分離物 的至少一方）投入，可從前述廢漿料將前述一次分離物或 前述二次分離物予以分離； 設置於前述離心分離機之排出口，用來將從前述離心 分離機分離後之前述一次分離物或前述二次分離物排出； 第1回收槽，可透過用來移送前述一次分離物的第1 路徑而連通於該排出口且用來回收前述一次分離物； 第2回收槽，可透過用來移送前述二次分離物的第2 路徑而連通於前述排出口且用來回收前述二次分離物； 設置於前述離心分離機之排液口，用來從前述離心分 離機排出將前述廢漿料分離後的前述分散介質或該分散介 質和前述二次分離物的混合液； 第3回收槽’可選擇性地連通於該排液口且用來回收 -6 - 201036719 前述分散介質； 第4回收槽，可選擇性地連通於該排液口且用 前述混合液； 調合槽，用來將前述一次分離物和前述分散介 而生成再生漿料；以及 切換手段，用來讓前述第1路徑和前述第二路 一者連接於前述排出口。 0 請求項2的發明，是在請求項1的發明中’在 容前述廢漿料之收容槽和前述離心分離機之間、以 第4回收槽和前述離心分離機之間分別進一步設置 調整前述廢漿料或前述混合液的流量之可變控制式 應手段、設置在該可變控制式定量供應手段和前述 離機之間的質量流量計、根據該質量流量計的測定 控制前述可變控制式定量供應手段的動作而使前述 或前述混合液的流量成爲一定之PID控制部。 Q 請求項3的發明，是在請求項1或2的發明中 收容槽和前述第4回收槽及前述離心分離機是透過 連接在一起，前述可變控制式定量供應手段及前述 量計是配置在前述三通閥和前述離心分離機之間。 請求項4的發明，是在請求項1〜3任一項的發 前述廢漿料，是在線鋸裝置（將被加工物按壓在金 而進行切斷加工）所使用的漿料，前述一次分離物 前述漿料的磨粒，前述二次分離物是前述被加工物 屑。 來回收 質混合 徑的任 用來收 及前述 :用來 定量供 離心分 結果來 廢漿料 ，前述 三通閥 質量流 明中， 屬線上 是混入 的切削 201036719 再者’請求項5的發明’是使用請求項中任一項 記載的漿料再生裝置之漿料再生方法，其特徵在於··在前 述離心分離機投入前述廢漿料，將前述離心分離機以既定 的離心力（低G)驅動，將前述一次分離物從前述廢漿料中 離心分離出’將該離心分離後的一次分離物在前述第1回 收槽回收，將前述混合液在前述第4回收槽回收，從該第 4回收槽將前述混合液投入前述離心分離機，將前述離心 分離機以比前述既定離心力更高的離心力（高G)驅動而將 前述二次分離物從前述混合物離心分離出，將該離心分離 後的二次分離物在前述第2回收槽回收，將前述分散介質 在前述第3回收槽回收； 在前述調合槽，將前述第1回收槽所回收之前述一次 分離物、前述第3回收槽所回收之前述分散介質、新的一 次分離物及新的分散介質投入，以生成再生漿料。 在請求項6的發明，是在請求項5的發明中，藉由前 述質量流量計來測定前述廢漿料或前述混合液的實際流量 値，在前述PID控制部將前述實際流量値和設定流量値作 比較，對前述可變控制式定量供應手段進行PID控制以使 前述實際流量値成爲前述設定流量値。 依據請求項1的發明，可使用第1馬達及第2馬達來 產生不同的離心力。因此，僅使用1台的離心分離機即可 將比重不同的一次分離物及二次分離物予以確實地分離回 收。因此，只要確保能設置1台離心分離機的空間即可， 其空間效率佳。此外，可使用切換手段將分離後的一次分 -8 - 201036719 離物或二次分離物分別在不同的第1或第2回收槽回收。 再者，分散介質也能在另外的第3回收槽回收’因此可將 一次分離物和分散介質混合而確實地調合成再生漿料。 依據請求項2的發明，利用可變控制式定量供應手段 和質量流量計的PID控制，可無脈動且定量地進行投入離 心分離機之廢漿料或混合液的供應。因此，不須經由手動 來進行流量調整，可自動進行流量的一定化，而提昇作業 0 性。此外，爲了在離心分離機進行穩定的回收，無脈動且 定量地供應液體是重要的。 依據請求項3的發明，由於收容槽（用來收容廢漿料） 和第4回收槽（用來回收槽混合液）及離心分離機是透過三 通閥連接在一起，因此將廢漿料和混合液投入離心分離機 的配管是可共用的。因此，由於泵和流量控制也能共通使 用，可減少零件數目而使成本更有效率。 依據請求項4的發明，將線鋸裝置所使用的廢漿料當 Q 中可再利用的磨粒當作一次分離物來回收，將被加工物的 切削屑當作二次分離物而另外回收。因此，將分散介質和 磨粒再度混合成切削用漿料後，可再利用於線鋸裝置。如 此可節省漿料。 依據請求項5的發明，是在離心分離機從廢漿料將一 次分離物分離出，接著在該離心分離機將第二分離物分離 出，將其等在不同的第1或第2回收槽回收。因此，可使 用1台離心分離機來回收2個分離物，只要確保1台離心 分離機的設置空間即可，其空間效率佳。 -9 - 201036719 依據請求項6的發明，是對可變控制式定量供應手段 實施PID控制，亦即將廢漿料或混合液的實際流量値反饋 而使其接近設定流量値，因此可確實地將廢漿料或混合液 以一定流量投入離心分離機。此外，能無脈動且定量地供 應液體而獲得穩定的離心分離效果。 【實施方式】 第1圖係本發明的漿料再生裝置的槪略圖。 如圖所示，本發明的漿料再生裝置1係具備：離心分 離機2、用來回收磨粒（一次分離物）之第1回收槽3、用來 回收切削屑（二次分離物）之第2回收槽4、用來回收分散 介質之第3回收槽5、用來回收混合液之第4回收槽6、 用來調合再生漿料之調合槽7、分歧滑槽8、切換手段9。 離心分離機2是具備2台馬達（第1馬達10、第2馬達11) ’可分別產生低G或高G之不同的離心力。 作爲分離對象物之廢漿料，是由磨粒和切削屑 (sludge)和分散介質（油料）所構成。切削屑，是在脆性材料 (例如矽等）所構成的晶圓環的製造過程，將未圖示的脆性 材料藉由線鋸裝置（未圖示）進行切斷加工時所產生的。在 線鋸裝置使用後的廢漿料是收容在收容槽1 6。因此，若對 廢漿料以較小的離心力進行離心分離，主要是比重大的磨 粒會被分離出。然後，若以大離心力進行離心分離，主要 是切削屑會被分離出。如此，比重不同的磨粒和切削屑， 分成2階段而使用1台離心分離機2即可分離。 -10- 201036719 在離心分離機2的下側具備排出口 1 2。排出口 1 2， 是讓離心分離後的磨粒或切削屑落下而排出。在該排出口 1 2連接著分歧滑槽8的入口側。分歧滑槽8的出口側’在 中途分歧成：供移送磨粒（一次分離物）之第1路徑8a、供 移送切削屑（二次分離物）之第2路徑8b。使用切換手段9 來改變：相對於排出口 1 2之分歧滑槽8的入口側開口位 置。藉由改變該位置，能讓磨粒通過第1路徑8a’且讓切 0 削屑通過第2路徑8b。用來回收磨粒的第1回收槽3連接 於第1路徑8a。用來回收切削屑的第2回收槽4連接於第 2路徑8b。因此，從排出口 12排出之磨粒或切削屑可分 別通過第1路徑8a或第2路徑8b而在第1回收槽3或第 2回收槽4回收。 用來回收分散介質之第3回收槽5及用來回收混合液 之第4回收槽6，是透過三通閥14來與離心分離機2的排 液口 13連接。三通閥14是自動切換閥（以下的三通閥19 Q 、22、23、26、29、30、32、37 都是相同的）。排液口 13 是設置在離心分離機2的下側。在一次分離將磨粒實施離 心分離時，切削屑和分散介質所組成的混合液是從排液口 13通過三通閥14而在第4回收槽6回收。爲了進行二次 分離而將混合液再度投入離心分離機2，將切削屑離心分 離出。然後，分散介質是從排液口 13通過三通閥14而在 第3回收槽5回收。分散介質以殘留有切削屑的狀態被回 收的情況，驅動泵36，讓第3回收槽5中的油料依序通過 三通閥19、分歧管21、三通閥22、泵36、三通閥37'分 -11 - 201036719 歧管38、閥41而返回第4回收槽6，並再度進行二次分 離。另一方面’僅實施一次分離而不實施二次分離時等之 要將混合液廢棄的情況’是讓泵5 1動作而將混合液移送 至混合液廢棄槽52。 用來調合再生漿料之調合槽7，是與第1回收槽3及 第3回收槽5連接。在第1回收槽3事先收容著新的分散 介質。在第1回收槽3回收的磨粒，是透過泵15而和新 的分散介質一起送往調合槽7。不僅是再生磨粒，從新磨 粒收容槽（未圖示）也有新磨粒S送往調合槽7。 從第3回收槽5將分散介質送往調合槽7的情況，是 通過以下的流路。藉由驅動泵20，從第3回收槽5依序通 過三通閥19、分歧管21、三通閥22、三通閥23、栗20、 流量調節器（damper)24、質量流量計25、三通閥26而送 往調合槽7。在分歧管2 1設有流體感測器2 7。該流體感 測器27可偵測有分散介質流過。 在新分散介質槽28a、28b內收容著新分散介質。要 將新分散介質送往調合槽7時，是驅動泵20，通過三通閥 3 0而送往三通閥1 9。然後，與從第3回收槽5往調合槽7 的流路相同。如此般，將再生磨粒、再生分散介質，視情 況將新磨粒、新分散介質送往調合槽7，在調合槽7進行 攪拌，藉此作爲線鋸裝置用的切削用漿料而進行再生。攪 拌’是使用攪拌構件17(隨著馬達18的驅動而旋轉）來進 行。這時再生漿料的容量，是藉由超音波感測器31來監 視。感測器3 1是偵測再生漿料的液面水位。由於調合槽7 -12- 201036719 的大小已知，藉由偵測液面水位’即可算出再生漿料的容 量。又在第1回收槽3、第3回收槽5、第4回收槽6、收 容槽i 6也具備同樣的攪拌構件1 7、馬達1 8及超音波感购 器3 1。此外，在第2回收槽4設置超音波感測器3 1。 收容槽16，是透過三通閥32、可變控制式定量供應 手段3 3、質量流量計3 4來與離心分離機2連接。供應季 段3 3，例如是裝載有脈動防止功能之空氣驅動或電力驅動 0 式的泵。供應手段33及質量流量計34，是使用PLC等而 以有線方式來與P ID控制部3 5連接。廢漿料，是使用供 應手段33而以無脈動且定量的方式供應。其實際流量値 是使用質量流量計3 4來測定。該實際流量値是在P ID控 制部35與設定流量値進行比較。在PID控制部35，是控 制供應手段3 3而使實際流量値成爲設定流量値。因此， 是對供應手段3 3進行P ID控制，而將廢漿料的實際流量 値反饋而使其接近設定流量値，如此可確實地將廢漿料以 Q —定流量投入離心分離機2。因此’不須經由手動來進行 流量調整，可自動進行流量的一定化，而提昇作業性。此 外，三通閥32也連接著第4回收槽6(用來回收混合液）， 而將混合液在同樣的流量控制下送往離心分離機2。因此 ，廢漿料和混合液的流量控制能在同一個PID控制部3 5 進行，如此可減少零件數目且成本效率佳。 此外，該PID控制，若採用觸控面板、PLC之自動控 制方式，可提昇操作性。亦可使用觸控面板、P LC，而能 爲可選擇僅磨粒的回收、僅分散介質的回收等的分離模式 -13- Η 201036719 。亦即，如後述般，可選擇2段分離模式（將一次分離物 和二次分離物分離出）、1段分離磨粒回收模式（僅回收磨 粒（一次分離物）的情況）' 1段分離油料回收模式（僅回收 油料的情況）亦可。 新分散介質也能使用於裝置的洗淨。在用於洗淨的情 況，是驅動泵3 6，從三通閥22將新分散介質送往三通閥 37，從分歧管38通過閥41而將第4回收槽6內洗淨。此 外，新分散介質的供應，也能利用在想要增加混合液中的 分散介質量的情況。另外，若從分歧管39通過閥42可將 離心分離機2內洗淨。若從分歧管40通過閥43可將排出 口 1 2洗淨並將分歧滑槽8洗淨。特別是在排出口〗2、分 歧滑槽8會有磨粒固著，因此在分離中實施定期洗淨。此 外，切削屑的黏度非常高，會殘留在離心分離機2內或分 歧滑槽8(第2路徑8b)內，因此使用分散介質進行洗淨是 不可缺的。若分散介質通過閥44可將收容槽16洗淨。如 果洗淨用的分散介質不再需要的話，可讓新分散介質從三 通閥37流過三通閥29，而返回新分散介質槽28a或2 8b ，此外，上述洗淨，也能使用在離心分離機2從廢漿料回 收後的再生分散介質。 第2圖係本發明的漿料再生裝置所使用的離心分離機 的槪略俯視圖，第3圖係槪略側視圖。 如上述般，在離心分離機2具備第1馬達1〇及第2 馬達1 1。符號45代表讓廢漿料流入離心分離機2內的流 入口。在離心分離機2的下側，如上述般設有排出口 1 2、 -14 - 201036719 排液口 13。符號46a、46b代表讓新分散 介質流入而將離心分離機2內洗淨之流入 表讓新分散介質或再生分散介質流入而將 之流入口。 第4圖係本發明的漿料再生裝置所使 切換手段的關係之槪略圖。 分歧滑槽8,是被具有4個輥子48之 0 。在框體49連接著切換手段9。切換手g 箭頭R方向）移動之圓筒體。隨著切換手I 子48會在軌道50上移動，框體49會推! 使其沿箭頭R方向移動。對應於從位於分 離心分離機2的排出口 12(參照第1圖、負 離物，將分歧滑槽8的入口側切換成第1 路徑8b。由於分歧滑槽8是被框體49包 單獨的修理及更換可獨立且容易地進行， ❹昇。 第5圖係分歧滑槽的槪略圖。 如圖所示，分歧滑槽8是在出口側分J 和第2路徑8b。由於切削屑是塊狀的，爲 行回收，第2路徑8b是形成於排出口 1 2 一方面，由於磨粒是以混合有若干分散介 ，即使有若干角度仍能流動，因此第1路 斜的。其角度0爲0°〜45°左右。第1路徑 8b的內面，爲了避免磨粒和切削屑附著於 介質或再生分散 口。符號47代 排出口 12洗淨 用的分歧滑槽和 .框體49所包圍 :9是可沿軸向（ 泛9的移動，輕 訪分歧滑槽8而 歧滑槽8上方之 I 3圖）落下的分 路徑8a或第2 圍，分歧滑槽8 因此其維修性提 g成第1路徑8 a 了讓其落下而進 的給垂方向。另 質的狀態來回收 徑8 a是形成傾 8a及第2路徑 其內側而實施鏡 •15- 201036719 面加工。 第6圖係本發明的漿料再生方法的流程圖。 步驟S 1 : 將在線鋸裝置使用後的廢漿料收容於收容槽。 步驟S2 : 將廢漿料投入離心分離機，進行一次分離。在該〜次 分離’僅將廢漿料中的磨粒（一次分離物）予以分離。該〜 次分離，是以未達1 500G的低G來進行離心分離。藉由 可變控制式定量供應手段33(參照第1圖），無脈動且定量 地對離心分離機進行廢漿料的投入。其流量是藉由質量流 量計進行管理，並藉由PID控制部35(參照第1圖）進行控 制而將實際流量値反饋以使其接近設定流量値。在進行〜 次分離中，適時地使用新分散介質等而將離心分離機內$ 分歧滑槽（第1路徑）內施以洗淨。分離後的磨粒，是被第 1回收槽3 (參照第1圖）回收。將磨粒分離後的混合液，是 被第4回收槽6(參照第1圖）回收。在收容槽空了的情況 ，使用分散介質將收容槽內洗淨，並將該分散介質再度進 行一次分離。如此，可將殘留於收容槽內的磨粒及切削屑 除去並予以回收。 步驟S3 : 將在步驟S2回收後的混合液再度投入步驟§2所使用[Technical Field] The present invention relates to a slurry regenerating apparatus and method, and more particularly to a regenerating apparatus and method for a waste slurry after cutting a wire saw device. [Prior Art] Conventionally, in order to reduce costs, waste slurry discharged from a processing apparatus using a slurry (for example, a 0-wire saw device) is used for recycling. The waste slurry of such a wire saw device is formed by a dispersion medium, abrasive grains mixed therein, and chips. In order to separate them, two centrifugal separators were used, and the abrasive grains and the chips were separated from the dispersion medium. Specifically, the waste slurry is introduced into the first centrifuge, and the abrasive grains having a larger specific gravity than the chips are separated first by a centrifugal force of less than 1500G. Then, the mixed liquid of the dispersion medium and the chips was placed in a second centrifugal separator, and the chips were separated by a high centrifugal force of 1,500 G or more. The dispersion medium and the abrasive particles are then mixed and Q is regenerated from the slurry. However, the use of two centrifuges requires a large installation space, so it is difficult to ensure that the space is difficult. On the other hand, it is preferable to supply the waste slurry or the mixed liquid to the centrifugal separator at a constant flow rate. Therefore, the waste slurry or the mixed liquid is supplied to the centrifugal separator through the orifice tank (see, for example, Patent Document 1). The orifice canister is used to adjust the flow by replacing the orifice plate. However, / the best orifice plate must be selected according to the nature of the slurry (temperature, viscosity, specific gravity, type of abrasive, type of coolant, etc.). This choice is mainly dependent on the operator's experience and lacks certainty. The present invention has been developed in consideration of the above-described conventional techniques, and an object thereof is to provide a slurry regeneration processing apparatus and a slurry thereof. The method can separate the primary separation and the secondary separation from the waste slurry by only one centrifugal separator without using a large installation space, and mix the separated dispersion medium and the primary separation to regenerate Slurry. In order to achieve the above object, a slurry regenerating apparatus according to the invention of claim 1 is characterized by comprising: a centrifugal separator for supplying a waste slurry (containing a primary separation material having a specific gravity different from each other in the dispersion medium; And inputting at least one of the secondary separators, wherein the primary separation product or the secondary separation material is separated from the waste slurry; and is disposed at a discharge port of the centrifugal separator for separating from the centrifugal separator The first primary separation material or the secondary separation material is discharged; the first recovery tank is connected to the discharge port through the first path for transferring the primary separation material and is used for recovering the primary separation material; a tank communicating with the discharge port through the second passage for transferring the second separation material and for recovering the secondary separation material; and a liquid discharge port disposed at the centrifugal separator for using the centrifugal separator Discharging the aforementioned dispersion medium after separating the waste slurry or a mixture of the dispersion medium and the secondary separation material; the third recovery tank is selectable Connected to the liquid discharge port and used to recover the aforementioned dispersion medium of -6 - 201036719; a fourth recovery tank selectively connected to the liquid discharge port and using the foregoing mixed liquid; and a mixing tank for separating the foregoing primary separation material And generating the regenerated slurry by the dispersion; and switching means for connecting the first path and the second path to the discharge port. According to a second aspect of the invention, in the invention of claim 1, in the storage tank of the waste slurry and the centrifugal separator, the fourth recovery tank and the centrifugal separator are further provided to adjust the foregoing a variable control type means for discharging the waste slurry or the foregoing mixed liquid, a mass flow meter disposed between the variable control type quantitative supply means and the aforementioned off-machine, and controlling the variable control according to the measurement of the mass flow meter The operation of the quantitative supply means causes the flow rate of the above-described or mixed liquid to be constant. According to the invention of claim 3, in the invention of claim 1 or 2, the storage tank is connected to the fourth recovery tank and the centrifugal separator, and the variable control type quantitative supply means and the meter are arranged. Between the aforementioned three-way valve and the aforementioned centrifugal separator. The invention of claim 4 is the slurry used in any one of claims 1 to 3, which is a slurry used in a wire saw device (the workpiece is pressed against gold to be cut), and the first separation is performed. The abrasive grains of the slurry described above, wherein the secondary separator is the workpiece scrap. Any of the above-mentioned recycled mixed diameters can be used to collect the waste slurry. The above-mentioned three-way valve mass flow, the above-mentioned three-way valve mass flow, the line is mixed with the cutting 201036719, and the 'invention of claim 5' is used. The slurry regeneration method of the slurry regeneration device according to any one of the above claims, wherein the waste slurry is supplied to the centrifugal separator, and the centrifugal separator is driven at a predetermined centrifugal force (low G). The primary separation product is centrifugally separated from the waste slurry. 'The primary separated product after centrifugation is recovered in the first recovery tank, and the mixed liquid is recovered in the fourth recovery tank, and the fourth recovery tank is collected from the fourth recovery tank. The mixed liquid is supplied to the centrifugal separator, and the centrifugal separator is driven by centrifugal force (high G) higher than the predetermined centrifugal force to centrifugally separate the secondary separated product from the mixture, and the centrifugally separated second time. The separated material is recovered in the second recovery tank, and the dispersion medium is recovered in the third recovery tank; and the first recovery tank is recovered in the mixing tank. Said primary isolates, the dispersion medium is recovered by the recovery reservoir 3, a new time and new isolates into the dispersion medium to produce a slurry regeneration. According to the invention of claim 5, in the invention of claim 5, the actual flow rate of the waste slurry or the mixed liquid is measured by the mass flow meter, and the actual flow rate and the set flow rate are set by the PID control unit. In comparison, the variable control type quantitative supply means is subjected to PID control so that the actual flow rate 値 becomes the set flow rate 値. According to the invention of claim 1, the first motor and the second motor can be used to generate different centrifugal forces. Therefore, the primary separation material and the secondary separation material having different specific gravities can be reliably separated and recovered by using only one centrifugal separator. Therefore, as long as it is possible to secure a space for one centrifuge, the space efficiency is good. Further, the separated primary component -8 - 201036719 can be recovered in a different first or second recovery tank by using a switching means. Further, the dispersion medium can be recovered in another third recovery tank. Therefore, the primary separation material and the dispersion medium can be mixed and the synthetic slurry can be reliably adjusted. According to the invention of claim 2, the variable control type dosing means and the PID control of the mass flow meter can be used to supply the waste slurry or the mixed liquid to the centrifugal separator without pulsation and quantitatively. Therefore, it is not necessary to manually adjust the flow rate, and the flow can be automatically determined to improve the workability. Furthermore, in order to perform stable recovery in the centrifuge, it is important to supply the liquid without pulsation and quantitatively. According to the invention of claim 3, since the storage tank (for accommodating the waste slurry) and the fourth recovery tank (for recovering the tank mixture) and the centrifugal separator are connected through the three-way valve, the waste slurry and The piping in which the mixed liquid is supplied to the centrifugal separator is common. Therefore, since the pump and flow control can also be used in common, the number of parts can be reduced and the cost can be made more efficient. According to the invention of claim 4, the waste slurry used in the wire saw device is recovered as a primary separator in the reusable abrasive grains in Q, and the chips of the workpiece are treated as secondary separators and additionally recovered. . Therefore, the dispersion medium and the abrasive grains are again mixed into a cutting slurry, and then reused in a wire saw device. This saves slurry. According to the invention of claim 5, the primary separation product is separated from the waste slurry by the centrifugal separator, and then the second separation product is separated in the centrifugal separator, and the same is in the first or second recovery tank. Recycling. Therefore, it is possible to recover two separated products by using one centrifugal separator, and it is only necessary to ensure the installation space of one centrifugal separator, and the space efficiency is good. -9 - 201036719 According to the invention of claim 6, the PID control is performed on the variable control type quantitative supply means, that is, the actual flow rate of the waste slurry or the mixed liquid is fed back to the set flow rate, so that it can be surely The waste slurry or mixture is supplied to the centrifuge at a constant flow rate. In addition, a stable centrifugal separation effect can be obtained by supplying the liquid without pulsation and quantitatively. [Embodiment] Fig. 1 is a schematic view showing a slurry reproducing apparatus of the present invention. As shown in the figure, the slurry regenerating apparatus 1 of the present invention includes a centrifugal separator 2, a first recovery tank 3 for recovering abrasive grains (primary separation products), and a collection of cutting chips (secondary separation materials). The second recovery tank 4, the third recovery tank 5 for recovering the dispersion medium, the fourth recovery tank 6 for recovering the mixed liquid, the mixing tank 7 for mixing the recycled slurry, the branching chute 8, and the switching means 9. The centrifugal separator 2 is provided with two motors (the first motor 10 and the second motor 11) which can generate different centrifugal forces of low G or high G, respectively. The waste slurry as the object to be separated is composed of abrasive grains, a sludge, and a dispersion medium (oil). The chips are produced by a process of manufacturing a wafer ring composed of a brittle material (e.g., crucible), and cutting a brittle material (not shown) by a wire saw device (not shown). The waste slurry after use of the wire saw device is housed in the storage tub 16 . Therefore, if the waste slurry is centrifuged with a small centrifugal force, it is mainly that the larger abrasive grains are separated. Then, if centrifugation is carried out with a large centrifugal force, mainly the chips are separated. Thus, the abrasive grains and the chips having different specific gravities can be separated into two stages and separated by one centrifugal separator 2. -10-201036719 A discharge port 1 2 is provided on the lower side of the centrifugal separator 2. The discharge port 1 2 is discharged by dropping the abrasive grains or chips after centrifugation. The discharge port 12 is connected to the inlet side of the branch chute 8. The outlet side ' of the branch chute 8 is divided into a first path 8a for transferring abrasive grains (primary separation) and a second path 8b for transferring chips (secondary separation). The switching means 9 is used to change: the opening side opening position of the branching chute 8 with respect to the discharge port 12. By changing this position, the abrasive grains can pass through the first path 8a' and the cut 0 shavings can pass through the second path 8b. The first recovery tank 3 for recovering the abrasive grains is connected to the first path 8a. The second recovery tank 4 for collecting the chips is connected to the second path 8b. Therefore, the abrasive grains or chips discharged from the discharge port 12 can be recovered in the first recovery tank 3 or the second recovery tank 4 through the first path 8a or the second path 8b, respectively. The third recovery tank 5 for recovering the dispersion medium and the fourth recovery tank 6 for recovering the mixed liquid are connected to the liquid discharge port 13 of the centrifugal separator 2 through the three-way valve 14. The three-way valve 14 is an automatic switching valve (the following three-way valves 19 Q , 22 , 23 , 26 , 29 , 30 , 32 , 37 are all the same). The liquid discharge port 13 is provided on the lower side of the centrifugal separator 2. When the abrasive grains are subjected to centrifugal separation in one separation, the mixed liquid composed of the chips and the dispersion medium is recovered from the liquid discharge port 13 through the three-way valve 14 in the fourth recovery tank 6. The mixture was again introduced into the centrifugal separator 2 for secondary separation, and the chips were separated by centrifugation. Then, the dispersion medium is recovered from the liquid discharge port 13 through the three-way valve 14 in the third recovery tank 5. When the dispersion medium is recovered in a state in which the chips remain, the pump 36 is driven to sequentially pass the oil in the third recovery tank 5 through the three-way valve 19, the branch pipe 21, the three-way valve 22, the pump 36, and the three-way valve. 37' minutes-11 - 201036719 The manifold 38 and the valve 41 return to the fourth recovery tank 6, and are again subjected to secondary separation. On the other hand, the case where the mixture is discarded only when the separation is performed once without performing the secondary separation is performed by operating the pump 5 1 to transfer the mixed liquid to the mixed solution disposal tank 52. The mixing tank 7 for mixing the recycled slurry is connected to the first recovery tank 3 and the third recovery tank 5. A new dispersion medium is previously stored in the first recovery tank 3. The abrasive grains recovered in the first recovery tank 3 are sent to the mixing tank 7 together with the new dispersion medium through the pump 15. Not only the regenerated abrasive grains, but also new abrasive grains S are sent from the new abrasive storage tank (not shown) to the blending tank 7. When the dispersion medium is sent to the mixing tank 7 from the third recovery tank 5, the following flow paths are passed. By driving the pump 20, the three-way valve 19, the branch pipe 21, the three-way valve 22, the three-way valve 23, the pump 20, the flow regulator (damper) 24, the mass flow meter 25, and the like are sequentially passed from the third recovery tank 5. The three-way valve 26 is sent to the mixing tank 7. A fluid sensor 27 is provided in the manifold tube 2 1 . The fluid sensor 27 detects the presence of a dispersion medium. A new dispersion medium is accommodated in the new dispersion medium tanks 28a and 28b. When the new dispersion medium is sent to the mixing tank 7, the pump 20 is driven to be sent to the three-way valve 19 through the three-way valve 30. Then, it is the same as the flow path from the third recovery tank 5 to the mixing tank 7. In the same manner, the regenerated abrasive grains and the regenerated dispersion medium are sent to the mixing tank 7 as needed, and the mixing tank 7 is stirred to regenerate the cutting slurry for the wire saw device. . The stirring ' is carried out using the stirring member 17 (rotating with the driving of the motor 18). At this time, the capacity of the regenerated slurry is monitored by the ultrasonic sensor 31. The sensor 31 is for detecting the liquid level of the regenerated slurry. Since the size of the mixing tank 7 -12- 201036719 is known, the capacity of the regenerated slurry can be calculated by detecting the liquid level . Further, the first recovery tank 3, the third recovery tank 5, the fourth recovery tank 6, and the storage tank i6 are provided with the same stirring member 17 and the motor 18 and the ultrasonic sensor 31. Further, an ultrasonic sensor 3 1 is provided in the second recovery tank 4. The storage tub 16 is connected to the centrifugal separator 2 via a three-way valve 32, a variable control type dosing means 33, and a mass flow meter 34. The supply section 3 3 is, for example, an air driven or electrically driven type 0 pump with a pulsation prevention function. The supply means 33 and the mass flow meter 34 are connected to the P ID control unit 35 by wire using a PLC or the like. The waste slurry is supplied in a pulsation-free and quantitative manner using the supply means 33. The actual flow rate 测定 is measured using a mass flow meter 34. The actual flow rate 比较 is compared with the set flow rate 在 by the P ID control unit 35. The PID control unit 35 controls the supply means 33 to set the actual flow rate 设定 to the set flow rate 値. Therefore, the supply means 3 3 is subjected to P ID control, and the actual flow rate of the waste slurry is fed back to the set flow rate 値, so that the waste slurry can be surely supplied to the centrifugal separator 2 at a constant flow rate of Q. Therefore, it is not necessary to manually adjust the flow rate, and the flow rate can be automatically fixed to improve the workability. Further, the three-way valve 32 is also connected to the fourth recovery tank 6 (for recovering the mixed liquid), and the mixed liquid is sent to the centrifugal separator 2 under the same flow rate control. Therefore, the flow control of the waste slurry and the mixed liquid can be performed in the same PID control unit 35, which can reduce the number of parts and is cost effective. In addition, the PID control can improve the operability by adopting the automatic control method of the touch panel and the PLC. It is also possible to use a touch panel or a P LC, and it is possible to select a separation mode in which only abrasive particles are recovered, only dispersion medium is recovered, etc. -13- Η 201036719. That is, as will be described later, a two-stage separation mode (separating the primary separation and the secondary separation) and a one-stage separation abrasive recovery mode (in the case of recovering only abrasive particles (primary separation)) can be selected. Separate oil recovery mode (only when oil is recovered). The new dispersion medium can also be used for washing the device. In the case of washing, the pump 336 is driven, the new dispersion medium is sent from the three-way valve 22 to the three-way valve 37, and the fourth recovery tank 6 is washed from the branch pipe 38 through the valve 41. In addition, the supply of the new dispersion medium can also be utilized in the case where it is desired to increase the amount of the dispersion medium in the mixed liquid. Further, the inside of the centrifugal separator 2 can be washed by passing through the valve 42 from the branch pipe 39. If the branch pipe 40 passes through the valve 43, the discharge port 1 2 can be washed and the branch chute 8 can be washed. In particular, in the discharge port 2, the dissimilar chute 8 is fixed by the abrasive grains, so that regular washing is performed during the separation. Further, since the viscosity of the chips is extremely high and remains in the centrifugal separator 2 or the separation chute 8 (second path 8b), it is indispensable to use a dispersion medium for washing. The receiving tank 16 can be washed if the dispersion medium passes through the valve 44. If the dispersion medium for washing is no longer necessary, the new dispersion medium can be passed from the three-way valve 37 through the three-way valve 29 to the new dispersion medium tank 28a or 28b, and the above-mentioned washing can also be used. The centrifugal dispersion machine 2 regenerates the dispersion medium after recovery from the waste slurry. Fig. 2 is a schematic plan view of a centrifugal separator used in the slurry regenerating apparatus of the present invention, and Fig. 3 is a schematic side view. As described above, the centrifugal separator 2 includes the first motor 1 and the second motor 11 . Reference numeral 45 represents an inflow port for allowing the waste slurry to flow into the centrifugal separator 2. On the lower side of the centrifuge 2, a discharge port 1 2, -14 - 201036719, a drain port 13 is provided as described above. Reference numerals 46a and 46b denote an inflow table in which the new dispersion medium flows in and the inside of the centrifugal separator 2 is washed, and the new dispersion medium or the regeneration dispersion medium flows in and flows into the inlet. Fig. 4 is a schematic view showing the relationship between switching means by the slurry reproducing apparatus of the present invention. The branch chute 8 is 0 with 4 rollers 48. The switching means 9 is connected to the casing 49. Switch the cylinder of the hand g arrow R direction). As the switching hand I 48 moves on the track 50, the frame 49 pushes it to move in the direction of the arrow R. Corresponding to the discharge port 12 located in the separation core separator 2 (refer to Fig. 1 and the negative object, the inlet side of the branch chute 8 is switched to the first path 8b. Since the branch chute 8 is separately enclosed by the frame 49 The repair and replacement can be carried out independently and easily, soaring. Figure 5 is a schematic diagram of the divergent chute. As shown, the divergent chute 8 is divided on the exit side J and the second path 8b. In the form of a block, it is recovered in rows, and the second path 8b is formed on the discharge port 1 2 . On the one hand, since the abrasive grains are mixed with a plurality of dispersions, even if there are a certain angles, the first path is inclined. 0 is about 0° to 45°. The inner surface of the first path 8b is to prevent the abrasive grains and the cutting chips from adhering to the medium or the regenerating and dispersing port. The four-way discharge port 12 is used for washing the divergent chute and the frame 49. Surrounded by: 9 is a sub-path 8a or a second circumference that can be dropped in the axial direction (the movement of the pan 9 and the light access to the divergent chute 8 and above the chute 8), and the divergent chute 8 is therefore maintainable. It is the first path 8 a to let it fall and the direction of the vertical direction. The quality of the state to recover the diameter 8 a is formed The lens is processed on the inside of the second path and the second path, and the surface processing is performed. Fig. 6 is a flow chart of the slurry regeneration method of the present invention. Step S1: The waste slurry after use of the wire saw device is housed in the container. Step S2: The waste slurry is put into a centrifugal separator to perform one separation. In the time of the separation, only the abrasive grains (primary separation materials) in the waste slurry are separated. Centrifugal separation is carried out at a low G of 1 500 G. The variable-control quantitative supply means 33 (refer to Fig. 1) is used to pulsate and quantitatively input the waste slurry to the centrifuge. The flow rate is by mass flow. The management is performed, and the actual flow rate is fed back to the set flow rate by the PID control unit 35 (see Fig. 1). In the case of the ~ separation, the new dispersion medium or the like is used in a timely manner. The inside of the separator is cleaned in the divergent chute (the first path). The separated abrasive grains are collected by the first recovery tank 3 (see Fig. 1). The mixed liquid after separating the abrasive grains is The fourth recovery tank 6 (see Fig. 1) is recovered. When the tank is empty, the storage tank is washed with a dispersion medium, and the dispersion medium is once again separated. Thus, the abrasive grains and the chips remaining in the storage tank can be removed and recovered. Step S3: The mixture recovered in step S2 is again used in step § 2
-16- 201036719 的離心分離機，進行二次分離。在該二次分離，是將混合 液中的切削屑（二次分離物）和分散介質分離。該二次分離 ，是以1 500G以上的高離心力進行離心分離。離心分離機 中之混合液的投入，是進行與步驟S2的廢漿料的流量控 制相同的控制。在二次分離中，適時地使用新分散介質等 將離心分離機內及分歧滑槽（第2路徑）內洗淨。分離後的 切削屑是被第2回收槽4(參照第1圖）回收。分散介質是 0 被第3回收槽5 (參照第1圖）回收。在第4回收槽空了的 情況，使用分散介質將第4回收槽內洗淨，並將該分散介 質再度進行一次分離。如此，可將殘留於第4回收槽內的 切削屑除去並予以回收。然後，測定第3回收槽內的比重 ，確認二次分離中之分散介質的回收。 步驟S4 : 使用在一次分離所回收的磨粒、在二次分離所回收的 〇 分散介質、按照需要而加入之新磨粒及新分散介質（新油 料）而調合成再生漿料。該新磨粒及新分散介質（新油料）等 的投入方式包括·•例如（i)將新磨粒及新油料自動投入， (1 i)新磨粒以手動投入’新油料自動投入，（i i i)僅新油料 自動投入，（iv)將新漿料（事先由新磨粒和新油料所形成） 和新油料自動投入的方法。 首先’將來自第1回收槽的再生磨粒移送至調合槽。 該移送作業，是一邊使用分散介質將第1回收槽洗淨，一 邊移送全部的磨粒。在磨粒的移送作業完成後，測定調合 -17- 201036719 槽內的比重，判定一次分離之磨粒回收率。該判定是在步 驟S2結束後才進行亦可。設定再生漿料之目標體積和比 重。當回收磨粒未達此設定値時，必須補充新磨粒。並配 合此補充而供應分散介質。當成爲目標比重後，作爲再生 漿料而再度使用於線鋸裝置。 依據以上的說明，使用第1馬達及第2馬達可產生低 G和高G之不同的離心力，而能進行一次分離和二次分離 。因此，僅使用1台離心分離機就能將比重不同的磨粒（ 一次分離物）和切削屑（二次分離物）予以確實地分離並回收 。因此’在進行分離時，只要確保1台離心分離機的設置 空間即可，其空間效率佳。 上述步驟S1〜S4 ’是進行所謂2段分離模式（將—次分 離物和二次分離物分離出）的情況的步驟。相對於此，在 進行所謂1段分離磨粒回收模式的情況（僅回收磨粒（一次 分離物）的情況），是將上述步驟S 3除外而依序進行步驟 SI、S2、S4。再者’在進行所謂1段分離油料回收模式的 情況（僅回收油料的情況），是僅實施步驟S3。 【圖式簡單說明】 第1圖係本發明的漿料再生裝置的槪略圖。 第2圖係本發明的漿料再生裝置所使用的離心分離機 之槪略俯視圖。 第3圖係本發明的漿料再生裝置所使用的離心分離機 之槪略側視圖。 -18- 201036719 第4圖係本發明的漿料再生裝置所使用的分歧滑槽及 切換手段的關係之槪略圖。 第5圖係分歧滑槽的槪略圖。 第6圖係本發明的漿料再生方法的流程圖。 【主要元件符號說明】 1 :漿料再生裝置 0 2 :離心分離機 3 :第1回收槽 4 :第2回收槽 5 :第3回收槽 6 :第4回收槽 7 :調合槽 8 a :第1路徑 8b :第2路徑 〇 9 :切換手段 10 :第1馬達 1 1 :第2馬達 1 2 :排出口 1 3 :排液口 1 4 :三通閥 15 :泵 1 6 :收容槽 1 7 :攪拌構件 -19- 201036719 1 8 :馬達 1 9 :三通閥 20 :泵 2 1 :分歧管 2 2 :三通閥 23 :三通閥 24 :流量調節器 2 5 :質量流量計 2 6 :三通閥 27 :流體感測器 2 8 a :新分散介質槽 28b :新分散介質槽 2 9 :三通閥 30 :三通閥 3 1 :超音波感測器 32 :三通閥 3 3 :可變控制式定量供應手段 3 4 :質量流量計 35 : PID控制部 36 :泵 3 7 :三通閥 3 8 :分歧管 3 9 :分歧管 40 :分歧管 -20- 201036719 閥 閥 閥 閥 ❹ 流入口 :流入口 :流入口 流入口 輥子 框體 軌道 泵 混合液廢棄槽-16- 201036719 Centrifuge for secondary separation. In this secondary separation, the chips (secondary separation) in the mixture are separated from the dispersion medium. This secondary separation is carried out by centrifugation at a high centrifugal force of 1,500 G or more. The input of the mixed liquid in the centrifugal separator is the same as the flow rate control of the waste slurry in the step S2. In the secondary separation, the inside of the centrifuge and the branch chute (second path) are washed in a timely manner using a new dispersion medium or the like. The separated chips are collected by the second recovery tank 4 (see Fig. 1). The dispersion medium is 0 and is recovered by the third recovery tank 5 (see Fig. 1). When the fourth recovery tank is empty, the fourth recovery tank is washed with a dispersion medium, and the dispersion medium is once again separated. Thus, the chips remaining in the fourth recovery tank can be removed and recovered. Then, the specific gravity in the third recovery tank was measured, and the recovery of the dispersion medium in the secondary separation was confirmed. Step S4: The regenerated slurry is prepared by using the abrasive grains recovered in one separation, the ruthenium dispersion medium recovered by secondary separation, the new abrasive particles added as needed, and the new dispersion medium (new oil). The new abrasive grains and new dispersion media (new oil materials) and other input methods include: • (i) automatic injection of new abrasive grains and new oil materials, (1 i) new abrasive grains are manually put into the 'new oil materials, automatic input, ( Iii) Automatically input only new oil materials, (iv) Automatically introduce new slurry (formed by new abrasive grains and new oil materials in advance) and new oil materials. First, the regenerated abrasive grains from the first recovery tank are transferred to the blending tank. In the transfer operation, the first recovery tank is washed with a dispersion medium, and all the abrasive grains are transferred. After the transfer operation of the abrasive grains is completed, the specific gravity in the tank of the blending -17-201036719 is measured, and the abrasive recovery rate of one separation is determined. This determination may be made after the end of step S2. Set the target volume and specific gravity of the regenerated slurry. When the recovered abrasive particles do not reach this setting, new abrasive particles must be replenished. The dispersion medium is supplied in conjunction with this supplement. After becoming the target specific gravity, it is reused as a regenerated slurry for the wire saw device. According to the above description, the first motor and the second motor can generate different centrifugal forces of low G and high G, and can perform primary separation and secondary separation. Therefore, abrasive grains (primary separation) and chips (secondary separation) having different specific gravities can be reliably separated and recovered by using only one centrifugal separator. Therefore, when the separation is performed, it is only necessary to secure the installation space of one centrifuge, and the space efficiency is good. The above steps S1 to S4' are steps for performing the so-called two-stage separation mode (separating the primary separation and the secondary separation). On the other hand, in the case of performing the so-called one-stage separation abrasive grain recovery mode (in the case where only the abrasive grains (primary separation material) are recovered), steps S1, S2 and S4 are sequentially performed except for the above-described step S3. Further, in the case of performing the so-called one-stage split oil recovery mode (in the case where only the oil is recovered), only step S3 is carried out. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view of a slurry regenerating apparatus of the present invention. Fig. 2 is a schematic plan view of a centrifugal separator used in the slurry regenerating apparatus of the present invention. Fig. 3 is a schematic side view of a centrifugal separator used in the slurry regenerating apparatus of the present invention. -18- 201036719 Fig. 4 is a schematic view showing the relationship between the branch chutes and the switching means used in the slurry regenerating apparatus of the present invention. Figure 5 is a schematic diagram of the differential chute. Fig. 6 is a flow chart showing the slurry regeneration method of the present invention. [Description of main component symbols] 1 : Slurry recycling device 0 2 : Centrifugal separator 3 : First recovery tank 4 : Second recovery tank 5 : Third recovery tank 6 : Fourth recovery tank 7 : Adjustment tank 8 a : 1 path 8b: second path 〇9: switching means 10: first motor 1 1 : second motor 1 2 : discharge port 1 3 : liquid discharge port 1 4 : three-way valve 15 : pump 1 6 : storage groove 1 7 : Stirring member -19- 201036719 1 8 : Motor 1 9 : Three-way valve 20 : Pump 2 1 : Branch pipe 2 2 : Three-way valve 23 : Three-way valve 24 : Flow regulator 2 5 : Mass flow meter 2 6 : Three-way valve 27: fluid sensor 2 8 a : new dispersion medium tank 28b: new dispersion medium tank 2 9 : three-way valve 30: three-way valve 3 1 : ultrasonic sensor 32: three-way valve 3 3 : Variable control type quantitative supply means 3 4 : mass flow meter 35 : PID control unit 36 : pump 3 7 : three-way valve 3 8 : branch pipe 3 9 : branch pipe 40 : branch pipe -20 - 201036719 valve valve valve ❹ Inlet: Inlet: Inlet, Inlet, Inlet, Roller, Orbital, Pump, Mixed Disposal Tank