JP5272404B2 - 磁気浮上推進装置 - Google Patents

磁気浮上推進装置 Download PDF

Info

Publication number
JP5272404B2
JP5272404B2 JP2007336298A JP2007336298A JP5272404B2 JP 5272404 B2 JP5272404 B2 JP 5272404B2 JP 2007336298 A JP2007336298 A JP 2007336298A JP 2007336298 A JP2007336298 A JP 2007336298A JP 5272404 B2 JP5272404 B2 JP 5272404B2
Authority
JP
Japan
Prior art keywords
coil
permanent magnet
mover
propulsion
levitation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007336298A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009159753A (ja
JP2009159753A5 (enExample
Inventor
文農 張
裕司 中村
崇 萬羽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP2007336298A priority Critical patent/JP5272404B2/ja
Publication of JP2009159753A publication Critical patent/JP2009159753A/ja
Publication of JP2009159753A5 publication Critical patent/JP2009159753A5/ja
Application granted granted Critical
Publication of JP5272404B2 publication Critical patent/JP5272404B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Control Of Linear Motors (AREA)
  • Linear Motors (AREA)
JP2007336298A 2007-12-27 2007-12-27 磁気浮上推進装置 Expired - Fee Related JP5272404B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007336298A JP5272404B2 (ja) 2007-12-27 2007-12-27 磁気浮上推進装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007336298A JP5272404B2 (ja) 2007-12-27 2007-12-27 磁気浮上推進装置

Publications (3)

Publication Number Publication Date
JP2009159753A JP2009159753A (ja) 2009-07-16
JP2009159753A5 JP2009159753A5 (enExample) 2011-06-02
JP5272404B2 true JP5272404B2 (ja) 2013-08-28

Family

ID=40963147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007336298A Expired - Fee Related JP5272404B2 (ja) 2007-12-27 2007-12-27 磁気浮上推進装置

Country Status (1)

Country Link
JP (1) JP5272404B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5834523B2 (ja) * 2011-06-20 2015-12-24 株式会社ニコン アクチュエータ、レンズ鏡筒および撮像装置
CN106712582B (zh) * 2017-01-09 2018-07-17 张则羿 两点磁悬浮方法及系统
JP7060995B2 (ja) * 2018-03-30 2022-04-27 キヤノン株式会社 ステージ装置、リソグラフィ装置、および物品の製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54100010A (en) * 1978-01-20 1979-08-07 Toshiba Corp Magnetic floating propulsive device
JPS54100016A (en) * 1978-01-20 1979-08-07 Toshiba Corp Magnetic floating propulsive device
JPS5662063A (en) * 1979-10-25 1981-05-27 Akira Yamamura Sucking-force type magnetic floating propelling device
JPS6041762Y2 (ja) * 1980-10-20 1985-12-19 昌 山村 磁気浮上車
JPH0810961B2 (ja) * 1984-05-01 1996-01-31 松下電工株式会社 リニア誘導モ−タ
JPH01298944A (ja) * 1988-05-26 1989-12-01 Sharp Corp 直線駆動装置
JPH0257203U (enExample) * 1988-10-20 1990-04-25
JP2002186244A (ja) * 2000-12-15 2002-06-28 Mitsubishi Heavy Ind Ltd 永久磁石型リニアモータ
JP5097110B2 (ja) * 2006-04-28 2012-12-12 Ｔｈｋ株式会社 サーボモータの制御装置及び方法

Also Published As

Publication number Publication date
JP2009159753A (ja) 2009-07-16

Similar Documents

Publication Publication Date Title
CN102549912B (zh) 线性电动机的驱动系统及控制方法
US7990084B2 (en) Linear stepping motor
US7687942B2 (en) Iron core linear motor having low detent force with high power density
US7808133B1 (en) Dual-axis planar motor providing force constant and thermal stability
US20190002214A1 (en) Method for operating a transport apparatus in the form of a long stator linear motor
JP5099629B2 (ja) 磁気浮上装置
JP5387570B2 (ja) 多自由度アクチュエータおよびステージ装置
JPH09322518A (ja) 永久磁石使用同期形リニアモータ
JP6970194B2 (ja) リニア電気機械およびリニア電気機械を制御するためのパワーエレクトロニクスコンバータ
KR20140109932A (ko) 선형 동기 모터
US20100164306A1 (en) Linear motor
JPWO2010021168A1 (ja) リニアモータ装置
JP5272404B2 (ja) 磁気浮上推進装置
JP2007228686A (ja) 磁気浮上装置
KR20210102190A (ko) 동극 선형 동기화 장치
CN102447375A (zh) 线性马达及载物台装置
JP5427037B2 (ja) リニアモータシステム
CN116490697A (zh) 载体运输系统、磁稳定单元、载体和用于非接触式运输载体的方法
JP2007274838A (ja) 磁気浮上搬送装置
CN114598119B (zh) 一种磁阻式二维扫描运动装置
US11981355B2 (en) Carrier device and control method for carrier device
JP4631405B2 (ja) 磁気浮上推進装置
WO2009072636A1 (ja) 磁気浮上推進装置
KR100761690B1 (ko) 영구자석 이동형 리니어모터와 공기베어링을 이용한 초소형스테이지 장치
JPH0615441Y2 (ja) 磁気浮上装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100520

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110420

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20120216

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20121025

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20121106

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121225

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130416

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130429

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees