JP2009159753A5 - - Google Patents

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Publication number
JP2009159753A5
JP2009159753A5 JP2007336298A JP2007336298A JP2009159753A5 JP 2009159753 A5 JP2009159753 A5 JP 2009159753A5 JP 2007336298 A JP2007336298 A JP 2007336298A JP 2007336298 A JP2007336298 A JP 2007336298A JP 2009159753 A5 JP2009159753 A5 JP 2009159753A5
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JP
Japan
Prior art keywords
coil
magnetic levitation
mover
stator
propulsion device
Prior art date
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Granted
Application number
JP2007336298A
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English (en)
Japanese (ja)
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JP5272404B2 (ja
JP2009159753A (ja
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Priority to JP2007336298A priority Critical patent/JP5272404B2/ja
Priority claimed from JP2007336298A external-priority patent/JP5272404B2/ja
Publication of JP2009159753A publication Critical patent/JP2009159753A/ja
Publication of JP2009159753A5 publication Critical patent/JP2009159753A5/ja
Application granted granted Critical
Publication of JP5272404B2 publication Critical patent/JP5272404B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007336298A 2007-12-27 2007-12-27 磁気浮上推進装置 Expired - Fee Related JP5272404B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007336298A JP5272404B2 (ja) 2007-12-27 2007-12-27 磁気浮上推進装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007336298A JP5272404B2 (ja) 2007-12-27 2007-12-27 磁気浮上推進装置

Publications (3)

Publication Number Publication Date
JP2009159753A JP2009159753A (ja) 2009-07-16
JP2009159753A5 true JP2009159753A5 (enExample) 2011-06-02
JP5272404B2 JP5272404B2 (ja) 2013-08-28

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ID=40963147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007336298A Expired - Fee Related JP5272404B2 (ja) 2007-12-27 2007-12-27 磁気浮上推進装置

Country Status (1)

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JP (1) JP5272404B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5834523B2 (ja) * 2011-06-20 2015-12-24 株式会社ニコン アクチュエータ、レンズ鏡筒および撮像装置
CN106712582B (zh) * 2017-01-09 2018-07-17 张则羿 两点磁悬浮方法及系统
JP7060995B2 (ja) * 2018-03-30 2022-04-27 キヤノン株式会社 ステージ装置、リソグラフィ装置、および物品の製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54100010A (en) * 1978-01-20 1979-08-07 Toshiba Corp Magnetic floating propulsive device
JPS54100016A (en) * 1978-01-20 1979-08-07 Toshiba Corp Magnetic floating propulsive device
JPS5662063A (en) * 1979-10-25 1981-05-27 Akira Yamamura Sucking-force type magnetic floating propelling device
JPS6041762Y2 (ja) * 1980-10-20 1985-12-19 昌 山村 磁気浮上車
JPH0810961B2 (ja) * 1984-05-01 1996-01-31 松下電工株式会社 リニア誘導モ−タ
JPH01298944A (ja) * 1988-05-26 1989-12-01 Sharp Corp 直線駆動装置
JPH0257203U (enExample) * 1988-10-20 1990-04-25
JP2002186244A (ja) * 2000-12-15 2002-06-28 Mitsubishi Heavy Ind Ltd 永久磁石型リニアモータ
JP5097110B2 (ja) * 2006-04-28 2012-12-12 Thk株式会社 サーボモータの制御装置及び方法

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