JP2009159753A5 - - Google Patents
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- Publication number
- JP2009159753A5 JP2009159753A5 JP2007336298A JP2007336298A JP2009159753A5 JP 2009159753 A5 JP2009159753 A5 JP 2009159753A5 JP 2007336298 A JP2007336298 A JP 2007336298A JP 2007336298 A JP2007336298 A JP 2007336298A JP 2009159753 A5 JP2009159753 A5 JP 2009159753A5
- Authority
- JP
- Japan
- Prior art keywords
- coil
- magnetic levitation
- mover
- stator
- propulsion device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005339 levitation Methods 0.000 claims 8
- 238000006243 chemical reaction Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007336298A JP5272404B2 (ja) | 2007-12-27 | 2007-12-27 | 磁気浮上推進装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007336298A JP5272404B2 (ja) | 2007-12-27 | 2007-12-27 | 磁気浮上推進装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009159753A JP2009159753A (ja) | 2009-07-16 |
| JP2009159753A5 true JP2009159753A5 (enExample) | 2011-06-02 |
| JP5272404B2 JP5272404B2 (ja) | 2013-08-28 |
Family
ID=40963147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007336298A Expired - Fee Related JP5272404B2 (ja) | 2007-12-27 | 2007-12-27 | 磁気浮上推進装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5272404B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5834523B2 (ja) * | 2011-06-20 | 2015-12-24 | 株式会社ニコン | アクチュエータ、レンズ鏡筒および撮像装置 |
| CN106712582B (zh) * | 2017-01-09 | 2018-07-17 | 张则羿 | 两点磁悬浮方法及系统 |
| JP7060995B2 (ja) * | 2018-03-30 | 2022-04-27 | キヤノン株式会社 | ステージ装置、リソグラフィ装置、および物品の製造方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54100010A (en) * | 1978-01-20 | 1979-08-07 | Toshiba Corp | Magnetic floating propulsive device |
| JPS54100016A (en) * | 1978-01-20 | 1979-08-07 | Toshiba Corp | Magnetic floating propulsive device |
| JPS5662063A (en) * | 1979-10-25 | 1981-05-27 | Akira Yamamura | Sucking-force type magnetic floating propelling device |
| JPS6041762Y2 (ja) * | 1980-10-20 | 1985-12-19 | 昌 山村 | 磁気浮上車 |
| JPH0810961B2 (ja) * | 1984-05-01 | 1996-01-31 | 松下電工株式会社 | リニア誘導モ−タ |
| JPH01298944A (ja) * | 1988-05-26 | 1989-12-01 | Sharp Corp | 直線駆動装置 |
| JPH0257203U (enExample) * | 1988-10-20 | 1990-04-25 | ||
| JP2002186244A (ja) * | 2000-12-15 | 2002-06-28 | Mitsubishi Heavy Ind Ltd | 永久磁石型リニアモータ |
| JP5097110B2 (ja) * | 2006-04-28 | 2012-12-12 | Thk株式会社 | サーボモータの制御装置及び方法 |
-
2007
- 2007-12-27 JP JP2007336298A patent/JP5272404B2/ja not_active Expired - Fee Related
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