JP2009159753A5 - - Google Patents

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Publication number
JP2009159753A5
JP2009159753A5 JP2007336298A JP2007336298A JP2009159753A5 JP 2009159753 A5 JP2009159753 A5 JP 2009159753A5 JP 2007336298 A JP2007336298 A JP 2007336298A JP 2007336298 A JP2007336298 A JP 2007336298A JP 2009159753 A5 JP2009159753 A5 JP 2009159753A5
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JP
Japan
Prior art keywords
coil
magnetic levitation
mover
stator
propulsion device
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JP2007336298A
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Japanese (ja)
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JP5272404B2 (en
JP2009159753A (en
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Priority to JP2007336298A priority Critical patent/JP5272404B2/en
Priority claimed from JP2007336298A external-priority patent/JP5272404B2/en
Publication of JP2009159753A publication Critical patent/JP2009159753A/en
Publication of JP2009159753A5 publication Critical patent/JP2009159753A5/ja
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Publication of JP5272404B2 publication Critical patent/JP5272404B2/en
Expired - Fee Related legal-status Critical Current
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Claims (5)

固定子と、可動子と、コイルと、永久磁石とを備えた磁気浮上推進装置において、
前記コイルは前記固定子または前記可動子の左右両側の底面に対称的に設定され、前記永久磁石は前記コイルに上下対向して前記可動子または前記固定子の左右両側に設定され、浮上と推進を同時に制御するように前記コイルを給電することを特徴とする磁気浮上推進装置。 In a magnetic levitation propulsion device comprising a stator, a mover, a coil, and a permanent magnet,
The coils are set symmetrically on the left and right bottom surfaces of the stator or the mover, and the permanent magnets are set on the left and right sides of the mover or the stator so as to be vertically opposed to the coil. The magnetic levitation propulsion device is characterized in that the coil is supplied with power so as to be controlled simultaneously. 固定子と、可動子と、コイルと、永久磁石とを備えた磁気浮上推進装置において、
前記コイルは前記固定子または前記可動子の左右両側の側面に対称的に設定され、前記永久磁石は前記コイルに左右対向して前記可動子または前記固定子の左右両側に設定され、案内と推進を同時に制御するように前記コイルを給電することを特徴とする磁気浮上推進装置。 In a magnetic levitation propulsion device comprising a stator, a mover, a coil, and a permanent magnet,
The coils are set symmetrically on the left and right sides of the stator or the mover, and the permanent magnets are set on the left and right sides of the mover or the stator so as to face the coil. The magnetic levitation propulsion device is characterized in that the coil is supplied with power so as to be controlled simultaneously. 前記コイルは、独立に制御できる相数が４以上であることを特徴とする請求項１または請求項２記載の磁気浮上推進装置。 The coils are magnetic levitation propulsion apparatus according to claim 1 or claim 2, wherein the number of phases can be controlled independently is 4 or more. 前記コイルは、浮上または案内と推進を４相以上のｄｑ変換することで給電することを特徴とする請求項１乃至３のいずれか１つに記載の磁気浮上推進装置。 The magnetic levitation propulsion device according to any one of claims 1 to 3, wherein the coil supplies power by performing dq conversion of levitation or guidance and propulsion of four or more phases. 前記コイルは、ｄ軸を基本軸としたときに、第1の前記コイルと前記ｄ軸との位相は１
極の永久磁石の幅と前記ｄ軸と前記第１のコイルの距離の比率から求められることを特徴とする請求項１乃至４のいずれか１つに記載の磁気浮上推進装置。
When the coil has a d-axis as a basic axis, the phase between the first coil and the d-axis is 1
Magnetic levitation propulsion apparatus according to any one of claims 1 to 4, characterized in that it is determined from the ratio of the distance of the width of the pole of the permanent magnet and the d-axis first coil.
JP2007336298A 2007-12-27 2007-12-27 Magnetic levitation propulsion device Expired - Fee Related JP5272404B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007336298A JP5272404B2 (en) 2007-12-27 2007-12-27 Magnetic levitation propulsion device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007336298A JP5272404B2 (en) 2007-12-27 2007-12-27 Magnetic levitation propulsion device

Publications (3)

Publication Number Publication Date
JP2009159753A JP2009159753A (en) 2009-07-16
JP2009159753A5 true JP2009159753A5 (en) 2011-06-02
JP5272404B2 JP5272404B2 (en) 2013-08-28

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Family Applications (1)

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JP2007336298A Expired - Fee Related JP5272404B2 (en) 2007-12-27 2007-12-27 Magnetic levitation propulsion device

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7060995B2 (en) 2018-03-30 2022-04-27 キヤノン株式会社 Manufacturing methods for stage equipment, lithography equipment, and articles

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5834523B2 (en) * 2011-06-20 2015-12-24 株式会社ニコン Actuator, lens barrel and imaging device
CN106712582B (en) * 2017-01-09 2018-07-17 张则羿 2 magnetic suspension methods and system

Family Cites Families (9)

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Publication number Priority date Publication date Assignee Title
JPS54100010A (en) * 1978-01-20 1979-08-07 Toshiba Corp Magnetic floating propulsive device
JPS54100016A (en) * 1978-01-20 1979-08-07 Toshiba Corp Magnetic floating propulsive device
JPS5662063A (en) * 1979-10-25 1981-05-27 Akira Yamamura Sucking-force type magnetic floating propelling device
JPS6041762Y2 (en) * 1980-10-20 1985-12-19 昌 山村 magnetic levitation vehicle
JPH0810961B2 (en) * 1984-05-01 1996-01-31 松下電工株式会社 Linear induction motor
JPH01298944A (en) * 1988-05-26 1989-12-01 Sharp Corp Linear driver
JPH0257203U (en) * 1988-10-20 1990-04-25
JP2002186244A (en) * 2000-12-15 2002-06-28 Mitsubishi Heavy Ind Ltd Permanent magnet linear motor
WO2007126024A1 (en) * 2006-04-28 2007-11-08 Thk Co., Ltd. Servo motor control device and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7060995B2 (en) 2018-03-30 2022-04-27 キヤノン株式会社 Manufacturing methods for stage equipment, lithography equipment, and articles

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