JP5270280B2 - 近接場光学顕微鏡の信号光測定システム - Google Patents

近接場光学顕微鏡の信号光測定システム Download PDF

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Publication number
JP5270280B2
JP5270280B2 JP2008241151A JP2008241151A JP5270280B2 JP 5270280 B2 JP5270280 B2 JP 5270280B2 JP 2008241151 A JP2008241151 A JP 2008241151A JP 2008241151 A JP2008241151 A JP 2008241151A JP 5270280 B2 JP5270280 B2 JP 5270280B2
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Japan
Prior art keywords
sample
light
probe
signal
signal light
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JP2008241151A
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Japanese (ja)
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JP2010071871A5 (enExample
JP2010071871A (ja
Inventor
垂生 市村
隆章 矢野
康志 井上
聡 河田
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Japan Science and Technology Agency
National Institute of Japan Science and Technology Agency
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Japan Science and Technology Agency
National Institute of Japan Science and Technology Agency
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Priority to JP2008241151A priority Critical patent/JP5270280B2/ja
Priority to PCT/JP2009/004588 priority patent/WO2010032429A1/ja
Publication of JP2010071871A publication Critical patent/JP2010071871A/ja
Publication of JP2010071871A5 publication Critical patent/JP2010071871A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G01N21/6458—Fluorescence microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders

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  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP2008241151A 2008-09-19 2008-09-19 近接場光学顕微鏡の信号光測定システム Active JP5270280B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008241151A JP5270280B2 (ja) 2008-09-19 2008-09-19 近接場光学顕微鏡の信号光測定システム
PCT/JP2009/004588 WO2010032429A1 (ja) 2008-09-19 2009-09-15 近接場光学顕微鏡の信号光測定システム

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Application Number Priority Date Filing Date Title
JP2008241151A JP5270280B2 (ja) 2008-09-19 2008-09-19 近接場光学顕微鏡の信号光測定システム

Publications (3)

Publication Number Publication Date
JP2010071871A JP2010071871A (ja) 2010-04-02
JP2010071871A5 JP2010071871A5 (enExample) 2011-09-15
JP5270280B2 true JP5270280B2 (ja) 2013-08-21

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JP2008241151A Active JP5270280B2 (ja) 2008-09-19 2008-09-19 近接場光学顕微鏡の信号光測定システム

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JP (1) JP5270280B2 (enExample)
WO (1) WO2010032429A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8650660B2 (en) 2008-11-13 2014-02-11 Bruker Nano, Inc. Method and apparatus of using peak force tapping mode to measure physical properties of a sample
US8955161B2 (en) 2008-11-13 2015-02-10 Bruker Nano, Inc. Peakforce photothermal-based detection of IR nanoabsorption
WO2010057052A2 (en) 2008-11-13 2010-05-20 Veeco Instruments Inc. Method and apparatus of operating a scanning probe microscope
KR101990916B1 (ko) 2009-12-01 2019-06-19 브루커 나노, 인코퍼레이션. 스캐닝 프로브 현미경을 작동하는 방법 및 장치
RU2571446C2 (ru) * 2010-11-29 2015-12-20 Брукер Нано, Инк. Способ использования полуконтактного режима с фиксированным пиком силы для измерения физических свойств образца
JP5802417B2 (ja) 2011-04-04 2015-10-28 株式会社日立製作所 走査プローブ顕微鏡およびこれを用いた測定方法
WO2013051094A1 (ja) * 2011-10-03 2013-04-11 株式会社日立製作所 走査プローブ顕微鏡
JP5922240B2 (ja) * 2012-08-28 2016-05-24 株式会社日立製作所 走査プローブ顕微鏡およびそれを用いた計測方法
FR3001294B1 (fr) * 2013-01-24 2015-03-20 Ecole Polytech Microscope a sonde locale multimode, microscope raman exalte par pointe et procede de regulation de la distance entre la sonde locale et l'echantillon
EP3500864A1 (en) 2016-08-22 2019-06-26 Bruker Nano, Inc. Infrared characterization of a sample using peak force tapping

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3425615B2 (ja) * 1994-03-24 2003-07-14 科学技術庁長官官房会計課長 走査型近視野原子間力顕微鏡
JP4361221B2 (ja) * 2001-02-15 2009-11-11 エスアイアイ・ナノテクノロジー株式会社 走査型近接場顕微鏡におけるイルミネーション反射モードの測定方法
WO2004090505A2 (en) * 2003-04-04 2004-10-21 Vp Holding, Llc Method and apparatus for enhanced nano-spectroscopic scanning

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WO2010032429A1 (ja) 2010-03-25
JP2010071871A (ja) 2010-04-02

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