JP5269111B2 - 静電気容量検知型指紋読取りセンサ - Google Patents
静電気容量検知型指紋読取りセンサ Download PDFInfo
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- JP5269111B2 JP5269111B2 JP2011010315A JP2011010315A JP5269111B2 JP 5269111 B2 JP5269111 B2 JP 5269111B2 JP 2011010315 A JP2011010315 A JP 2011010315A JP 2011010315 A JP2011010315 A JP 2011010315A JP 5269111 B2 JP5269111 B2 JP 5269111B2
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- 238000002161 passivation Methods 0.000 claims description 28
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- 230000015556 catabolic process Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 71
- 238000004088 simulation Methods 0.000 description 11
- 230000003071 parasitic effect Effects 0.000 description 10
- 230000003068 static effect Effects 0.000 description 9
- 230000005611 electricity Effects 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
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- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
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- 239000011247 coating layer Substances 0.000 description 2
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- 238000004519 manufacturing process Methods 0.000 description 2
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- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
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- 238000011160 research Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
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- 238000010998 test method Methods 0.000 description 1
Images
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- Image Input (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
Description
静電容量を検知するFPICにとって、このESD保護対策が商品化のためには不可欠であり、多くの方法が報告されている。
図4(a)は、本発明による静電容量検知型指紋センサFPICの断面の一部を拡大したものである。この図に示されたように、パシベーション膜層(以下、IMD層4と記す)はシリコンオキシナイトライドをPECVD法により堆積させることにより膜厚に形成される。
2は容量検知回路
3は図2bの拡大領域
4はパシベーション膜層(IMD層)
11はアース電極
12は寄生容量
13は接地線
20はESD保護用の金属線断面
21は横方向に配列された金属線に施された形状
22はコーティング層
23は層間絶縁層
24はシリコン基板
30は縦方向に配列された金属線に施された形状
40はESDテストに用いるプローブ
41はシミュレーションによる電界分布の第1観測層
42はシミュレーションによる電界分布の第2観測層
43はシミュレーションによる電界分布の第3観測層
44はシミュレーションによる電界分布の第4観測層
Claims (3)
- 絶縁層上に複数のセンサ電極を配列し、該複数のセンサ電極の上面及び側面をパシベーション膜で包むようにした静電容量検知型指紋読み取りセンサにおいて、上記パシベーション膜上に絶縁体を重ねて膜厚に形成すると共に、上記パシベーション膜の上面に上記センサ電極の四辺を金属パターンで包み、且つ互いに同電位になるように接続した静電破壊保護用放電層を設け、更にセンサ電極の四辺を囲む放電層のうち対向状に並ぶ1又は2組の放電層の面内方向に凹部を形成し、該凹部の対向面にその先端部が互いに向き合う突起を形成して電界分布の集中部を形成するようにした静電気容量検知型指紋読み取りセンサ。
- 絶縁層上に複数のセンサ電極を配列し、該複数のセンサ電極の上面及び側面をパシベーション膜で包み、更に各センサ電極の四辺を金属パターンからなる放電層で囲むようにした静電容量検知型指紋読み取りセンサにおいて、上記パシベーション膜上に絶縁体を重ねて膜厚に形成すると共に、上記パシベーション膜の上面に上記センサ電極の四辺を金属パターンで包み、且つ互いに同電位になるように接続した放電層を設け、更にセンサ電極の四辺を囲む放電層のうち対向状に並ぶ1組の放電層の面内方向に凹部を形成し、該凹部の対向面にその先端部が互いに向き合う突起を形成し、他1組の対向状に並ぶ放電層には突起を形成して電界分布の集中部を形成するようにした静電気容量検知型指紋読み取りセンサ。
- 前記放電層が前記センサ電極の設置される領域外で接地に接続された請求項1又は2記載の静電気容量検知型指紋読み取りセンサ。
Priority Applications (1)
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JP2011010315A JP5269111B2 (ja) | 2011-01-21 | 2011-01-21 | 静電気容量検知型指紋読取りセンサ |
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JP2011010315A JP5269111B2 (ja) | 2011-01-21 | 2011-01-21 | 静電気容量検知型指紋読取りセンサ |
Publications (2)
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JP2012150062A JP2012150062A (ja) | 2012-08-09 |
JP5269111B2 true JP5269111B2 (ja) | 2013-08-21 |
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JP2011010315A Active JP5269111B2 (ja) | 2011-01-21 | 2011-01-21 | 静電気容量検知型指紋読取りセンサ |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10121044B2 (en) | 2015-09-16 | 2018-11-06 | Samsung Electronics Co., Ltd. | Fingerprint sensor |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105095855B (zh) | 2015-06-26 | 2018-11-20 | 京东方科技集团股份有限公司 | 一种指纹识别器件、触控面板、输入设备及指纹识别方法 |
KR102573571B1 (ko) * | 2016-03-08 | 2023-09-01 | 삼성전자주식회사 | 지문 센서 장치 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS6380873U (ja) * | 1986-11-14 | 1988-05-27 | ||
JPH0651113B2 (ja) * | 1986-12-01 | 1994-07-06 | 株式会社荏原総合研究所 | 気体放電反応装置 |
GB2244164A (en) * | 1990-05-18 | 1991-11-20 | Philips Electronic Associated | Fingerprint sensing |
EP0661732B1 (en) * | 1993-12-28 | 2004-06-09 | Applied Materials, Inc. | A method of forming silicon oxy-nitride films by plasma-enhanced chemical vapor deposition |
US6483931B2 (en) * | 1997-09-11 | 2002-11-19 | Stmicroelectronics, Inc. | Electrostatic discharge protection of a capacitve type fingerprint sensing array |
US6686546B2 (en) * | 1998-12-30 | 2004-02-03 | Stmicroelectronics, Inc. | Static charge dissipation for an active circuit surface |
JP3426565B2 (ja) * | 1999-06-10 | 2003-07-14 | 日本電信電話株式会社 | 表面形状認識装置 |
GB9922570D0 (en) * | 1999-09-24 | 1999-11-24 | Koninkl Philips Electronics Nv | Capacitive sensing array devices |
US6515488B1 (en) * | 2001-05-07 | 2003-02-04 | Stmicroelectronics, Inc. | Fingerprint detector with scratch resistant surface and embedded ESD protection grid |
US6900644B2 (en) * | 2003-05-06 | 2005-05-31 | Ligh Tuning Tech. Inc. | Capacitive fingerprint sensor against ESD damage and contamination interference |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US10121044B2 (en) | 2015-09-16 | 2018-11-06 | Samsung Electronics Co., Ltd. | Fingerprint sensor |
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