JP5260163B2 - Measuring apparatus and measuring method - Google Patents

Description

  The present invention relates to a measuring apparatus and a measuring method for measuring a predetermined physical quantity of a measurement object.

A substrate inspection apparatus disclosed in Japanese Patent Application Laid-Open No. 2008-8773 is known as this type of measurement apparatus. The substrate inspection apparatus includes a control unit, a first / second current supply unit, a first / second voltage measurement unit, a first / second switching unit, a first / second contact unit, and the like. Yes. In this case, the first and second contact portions are configured to include a plurality of contacts arranged to come into contact with the respective terminals of the board to be inspected. Moreover, each contactor is each provided with a pair of contact terminal. In this board inspection apparatus, each switching unit performs connection switching between each contact terminal of each contact unit and each current supply unit and connection switching between each contact terminal and each voltage measurement unit in accordance with the control of the control unit. Thus, the continuity test (resistance measurement) for the terminal on the front surface side of the substrate and the continuity test for the terminal on the back surface side of the substrate are performed in parallel.
Japanese Patent Laid-Open No. 2008-8773 (page 5-12, FIG. 2)

  However, the above substrate inspection apparatus has the following problems. That is, in this substrate inspection apparatus, each switching unit performs connection switching between each contact terminal and each current supply unit, and connection switching between each contact terminal and each voltage measurement unit, so that the terminals on the surface side of the substrate and Inspects the terminals on the back side in parallel. In this case, generally, at the time of switching the connection between the contact terminal and the current supply unit, a large transient voltage is generated between both terminals at the moment when the current is applied (supplied). For this reason, the substrate inspection apparatus has a problem that the accuracy of the continuity inspection (resistance measurement) may be lowered due to the influence of the transient voltage. In this case, it is possible to improve the accuracy of the continuity test by waiting for a predetermined time until the transient voltage decreases, but when conducting the continuity test for many terminals, each contact terminal, each voltage measuring unit, It is necessary to wait for a predetermined time each time the connection is switched. For this reason, in the above-described substrate inspection apparatus, when this method is adopted, even if a continuity inspection is performed in parallel on the front-side terminal and the back-side terminal of the substrate, it waits for a predetermined time each time connection switching is performed. As a result, the inspection takes a long time.

  The present invention has been made in view of such problems, and a main object of the present invention is to provide a measuring apparatus and a measuring method capable of accurately and efficiently measuring a predetermined physical quantity.

Measuring device according to claim 1 to achieve the above object includes a power supply unit for generating a measuring current, for the first contact terminals and the measurement for outputting the current for measurement in the contacted portion of the measured object A pair of contact terminals each having a pair of second contact terminals for inputting a voltage generated in the contacted part by the output of the current; and a pair of terminals connected to the power supply part to supply the measurement current a first conductor, a voltage detection unit for detecting the voltage, the voltage sensing and a pair of second conductors connected to the output portion, wherein separate from the respective first conductor and the respective second conductor controlling one or more third conductors for energizing the measuring current provided, wherein the disconnection unit which performs disconnection of the contact terminal and the the respective conductor, the disconnection portion A predetermined control unit for measuring the object based on the voltage value. Is measurably constituting the physical quantities, wherein, at the time of measurement of the physical quantity, by controlling the disconnection unit, the contact terminals to said each contacted portion of the plurality of the measured object is A plurality of contact terminals are connected by connecting each of the first contact terminals and the third conductor in each of the contact terminal pairs excluding a predetermined two of the contact terminal pairs. The measurement object bodies are connected in series, and each of the removed two contact terminal pairs in contact with the contacted parts located at both ends of the measurement object bodies connected in series, respectively. Each of the contact terminal pairs each connecting the first contact terminal and each of the first conductors and contacting each of the contacted parts of the plurality of measurement objects. Wherein executing a connection process of connecting the second contact terminal wherein a respective second electrical conductor respectively definitive.

  The measuring device according to claim 2 is the measuring device according to claim 1, wherein the terminal portion is connected by an internal wiring formed inside the circuit board, and one side and the other side of the circuit board are connected. Each of the contact terminal pairs is configured to be able to contact each wiring pattern as the contacted part formed in each, and in the connection process, the control unit is configured to connect the internal wiring as the measurement object and the respective wiring patterns. The connection / disconnection part is controlled so that the wiring patterns are connected in series.

  A measuring device according to a third aspect is the measuring device according to the second aspect, wherein the contact terminal pair brought into contact with the wiring pattern formed on the one surface side of the circuit board and the connection / disconnection portion Are bundled, and the wiring between each contact terminal pair brought into contact with the wiring pattern formed on the other surface side of the circuit board and the connection / disconnection part is bundled.

Further, the measuring method according to claim 4 is connected to the first contact terminal in the terminal portion having a plurality of contact terminal pairs in which the first contact terminal and the second contact terminal are paired and a power supply unit that generates a measurement current. performing disconnection of the first conductor pair and supplies the current for measurement and outputs a measured current to the contacted portion of the measured object through the first contact terminal Te is connected to the voltage detection unit About the measurement object based on the value of the detected voltage by detecting the voltage generated in the contacted part by the output of the measurement current by making a connection between the pair of second conductors and the contact terminals. in the measurement you measure the predetermined physical quantity scheduled, said contacting each of the contact portions on the contact terminal pairs each of a plurality of said measured object, two predetermined among the respective contact terminal pair at that state Except for each contact terminal pair Multiple by connecting takes said third conductor for the respective first contact terminals and each of the first conductor and the respective second conductors energizing the measuring current provided separately each The measurement object bodies are connected in series, and each of the removed two contact terminal pairs that are in contact with the contacted parts located at both ends of the measurement object bodies connected in series are respectively connected to the measurement object bodies. 1 contact terminal and each said 1st electric conductor are connected, respectively, and each said contact terminal pair in each said contacted part which is contacting each one said to-be-contacted part among these measurement object bodies respectively A connection process for connecting each second contact terminal and each second conductor is executed.

  Further, the measurement method according to claim 5 is the measurement method according to claim 4, wherein the measurement method is connected by an internal wiring formed inside the circuit board and formed on one side and the other side of the circuit board, respectively. In the connection process, when measuring the physical quantity of the internal wiring and the wiring patterns as the measurement object by connecting the contact terminal pairs to the wiring patterns as the contacted parts, The first contact terminals and the third conductor are connected so that the internal wiring and the wiring patterns are connected in series.

  According to the measuring apparatus according to claim 1 and the measuring method according to claim 4, each contact terminal excluding a predetermined two of each contact terminal pair in contact with each contacted part of a plurality of measurement objects. By connecting each first contact terminal and the third conductor in each pair and connecting a plurality of measurement objects in series, a measurement current is passed to each measurement object connected in series. Even if a large transient voltage is generated, it is possible to reliably prevent the generation of a new transient voltage after the transient voltage has settled by continuing the series connection of each measurement object and output of the measurement current. Can do. Therefore, according to this measuring apparatus, each second of each contact terminal pair that is in contact with each contacted portion of each measurement object while the serial connection of each measurement object and the output of the measurement current are continued. By simply switching the connection between the contact terminal and each second conductor, the voltage value generated at each contacted part can be continuously measured without being affected by the transient voltage. As a result, based on the voltage value The physical quantity of the measurement object can be measured accurately and efficiently.

  Moreover, according to the measuring apparatus of Claim 2, and the measuring method of Claim 5, each contact terminal pair is connected to each wiring pattern of the one surface side of the circuit board connected by the internal wiring, and the other surface side, and the inside. When measuring the physical quantities of the wiring and each wiring pattern, by connecting each first contact terminal and the third conductor so that the internal wiring and each wiring pattern are connected in series, in this type of circuit board Physical quantities for the internal wiring and each wiring pattern can be accurately and efficiently measured.

  According to the measuring device of claim 3, the wiring between each contact terminal pair to be brought into contact with the wiring pattern formed on the one surface side of the circuit board and the connection portion is bundled, and the other surface side of the circuit board Noise generated when the wiring between each contact terminal pair and the connection part forms a loop by bundling the wiring between each contact terminal pair and the connection part that contacts the wiring pattern formed on As a result, the physical quantity of the measurement object can be measured more accurately.

  Hereinafter, the best mode of a measuring apparatus and a measuring method according to the present invention will be described with reference to the accompanying drawings.

  First, the configuration of the measuring apparatus 1 will be described with reference to the drawings.

  A measuring apparatus 1 shown in FIG. 1 is an example of a measuring apparatus according to the present invention, and includes, for example, a plurality of wiring patterns and a plurality of elements 101 (all of which are measured according to the present invention) disposed on one surface side of a circuit board 100. While measuring the resistance value R (an example of a physical quantity in the present invention) of an object, which is an example of a physical quantity in the present invention, in a four-terminal method, the three elements 101a to 101c are shown in FIG. Based on the measured resistance value R, the wiring pattern and the quality of each element 101 can be inspected. Specifically, the measuring apparatus 1 includes a probe unit 2 and a main body 3.

  The probe unit 2 corresponds to a terminal portion in the present invention, and as shown in FIG. 1, a plurality of probes 21 (corresponding to contact terminal pairs in the present invention) arranged (planted) on a support portion outside the drawing, In the figure, only six probes 21a to 21f are shown). In this case, when the probe unit 2 is brought close to the circuit board 100 by a moving mechanism (not shown), each probe 21 is a terminal of each element 101 on the circuit board 100 (a contacted part in the present invention, The arrangement pattern is defined such that the tip portion contacts the terminals 111a to 111f (hereinafter also referred to as “terminal 111” when not distinguished) shown in the figure. Further, the probe 21 inputs a first contact terminal 31a for outputting a current Im (an example of a measurement current in the present invention), which will be described later, to the terminal 111, and a voltage Vm generated at the terminal 111 by the output of the current Im. The second contact terminal 31b (hereinafter also referred to as “contact terminal 31” when the first contact terminal 31a and the second contact terminal 31b are not distinguished from each other). The probe 21 is configured such that the tip of the contact terminal 31 can be brought into contact with the terminal 111 in a state where the first contact terminal 31a and the second contact terminal 31b are insulated and paired with each other.

  As shown in FIG. 1, the main body 3 includes a power supply unit 11, a voltage detection unit 12, and a pair of first conductive wires 13a and 13b for supplying a current Im (the first conductor in the present invention. If not, also referred to as “first conductor 13”, a pair of second conductors 14a, 14b connected to the voltage detector 12 (the second conductor in the present invention, and hereinafter referred to as “second conductor 14” when not distinguished from each other). Also, a pair of third conductors 15a and 15b (the third conductor in the present invention, which will also be referred to as “third conductor 15” unless otherwise distinguished) for energizing the current Im, scanner unit 16 and control A portion 17 is provided. The power supply unit 11 is configured to be able to generate a measurement current Im (as an example, a constant current). In this case, the current Im generated by the power supply unit 11 is supplied to the element 101 in the circuit board 100 via the first conductors 13a and 13b, the first contact terminal 31a of the probe 21 in the probe unit 2, and the third conductors 15a and 15b. Are output to the terminal 111.

  The voltage detection unit 12 inputs a voltage Vm generated between the terminals 111 and 111 of the element 101 by the output of the current Im via the second contact terminal 31b of the probe 21 and the second conductors 14a and 14b in the probe unit 2. To detect. The scanner unit 16 is an example of a connection / disconnection unit according to the present invention, and includes a plurality of switches. Under the control of the control unit 17, the contact terminals 31 of the probes 21 and the conductive wires 13, 14, 15 are provided. Disconnect (connect and disconnect). The control unit 17 measures the resistance value R of the element 101 in the circuit board 100 based on the value of the current Im generated by the power supply unit 11 and the value of the voltage Vm detected by the voltage detection unit 12, and measures Based on the resistance value R, the quality of the element 101 is inspected. Further, the control unit 17 controls the scanner unit 16 when measuring the resistance value R, thereby connecting each contact terminal 31 of each probe 21 and each of the conductive wires 13, 14, 15 with a predetermined connection pattern. Execute the process.

  Next, with reference to the drawings, a method for measuring the resistance value R of each element 101 on the circuit board 100 using the measuring apparatus 1 (a measuring method according to the present invention) and a method for inspecting the quality of each element 101 will be described. I will explain.

  In this measuring apparatus 1, when a measurement (inspection) start instruction operation is performed, the control unit 17 controls a moving mechanism (not shown) to bring the probe unit 2 close to the circuit board 100. At this time, as shown in FIG. 1, the tips of the contact terminals 31 of the probes 21 of the probe unit 2 come into contact with the terminals 111 and 111 of the elements 101 of the circuit board 100, respectively. Further, the power supply unit 11 generates a measurement current Im.

  Next, the control unit 17 measures the resistance value R of one element 101 (for example, the element 101a shown in FIG. 1) among the elements 101 in the circuit board 100. In this case, the control unit 17 first controls the scanner unit 16 to connect the contact terminals 31 of the probes 21 in the probe unit 2 and the conductive wires 13, 14, 15 with a predetermined connection pattern. Execute. In this connection process, the control unit 17 includes the first contact terminal 31a in each of the probes 21 (probes 21b to 21e) excluding a predetermined two of the probes 21 (probes 21a and 21f in this example). Each element 101a-101c is connected in series by connecting with the 3rd conducting wire 15, respectively.

  In this case, the scanner unit 16 connects the first contact terminal 31a of the probe 21b that is in contact with one terminal (right side in the figure) 111b of the element 101a and the third conductor 15a, and one of the elements 101b ( The first contact terminal 31a of the probe 21c that is in contact with the terminal 111c on the left side in the figure is connected to the third conductor 15a. Further, the scanner unit 16 connects the first contact terminal 31a of the probe 21d that is in contact with the other terminal 111d (right side in the figure) of the element 101b and the third conductor 15b, and also connects one of the elements 101c (same as above). The first contact terminal 31a in the probe 21e that is in contact with the terminal 111e on the left side in the drawing is connected to the third conductor 15b. Thereby, each element 101a-101c is connected in series via each 1st contact terminal 31a and 3rd conducting wire 15a, 15b.

  Subsequently, the control unit 17 controls the scanner unit 16 to each of the two probes 21a and 21f that are in contact with the terminals 111a and 111f located at both ends of each of the elements 101a to 101c connected in series. The first contact terminal 31a and the first conductors 13a and 13b are connected to each other. As a result, as indicated by a broken line in FIG. 1, the current Im generated by the power supply unit 11 is output to the elements 101a to 101c connected in series via the first contact terminals 31a and the third conductors 15a and 15b. (Flowing).

  Next, the control unit 17 controls the scanner unit 16 to perform second contact on each of the probes 21a and 21b that are in contact with the terminals 111a and 111b of the element 101a (any one measurement object in the present invention). The terminal 31b is connected to the second conducting wires 14a and 14b, respectively. Thereby, each 2nd contact terminal 31b of probe 21a, 21b and the voltage detection part 12 are connected via 2nd conducting wire 14a, 14b.

  Subsequently, the voltage detector 12 receives and detects the voltage Vm generated between the terminals 111a and 111b of the element 101a by the output of the current Im. Next, the control unit 17 measures (calculates) the resistance value R of the element 101a based on the value of the current Im generated by the power supply unit 11 and the value of the voltage Vm detected by the voltage detection unit 12, and The measured resistance value R is recorded in a recording unit (not shown).

  Subsequently, the control unit 17 measures the resistance value R of the next (other one) element 101 (for example, the element 101b shown in FIG. 1). In this case, the control unit 17 controls the scanner unit 16 to connect the first contact terminals 31a of the probes 21b and 21c and the third conductor 15a, and connect the first contact terminals 31a of the probes 21d and 21e to the first contact terminals 31a. The connection with the three conductors 15b and the connection between the first contact terminals 31a and the first conductors 13a and 13b in each of the probes 21a and 21f, that is, the series connection of the elements 101a to 101c and the output of the current Im In a continuous state, the connection between the second contact terminal 31b and the second conductors 14a and 14b in each of the probes 21a and 21b that are in contact with the terminals 111a and 111b in the element 101a is released, and the terminal 111c in the element 101b. , 111d, the second contact terminal 31 in each of the probes 21c, 21d. When the second conductor 14a, to connect the 14b respectively. Thereby, each 2nd contact terminal 31b of probe 21c, 21d and the voltage detection part 12 are connected via 2nd conducting wire 14a, 14b.

  Next, the control unit 17 calculates the resistance value R of the element 101b based on the value of the current Im and the value of the voltage Vm detected by the voltage detection unit 12, and records the calculated resistance value R outside the figure. To record. Hereinafter, the control unit 17 controls the scanner unit 16 in the same manner, and continues the serial connection of the elements 101a to 101c and the output of the current Im. By switching the connection between the second contact terminals 31b of the probe 21 and the second conductive wires 14, the resistance value R of each element 101 is measured, and the measured resistance value R is recorded in a recording unit (not shown).

  In this case, in the measurement apparatus 1 and the measurement method, the second connection of each probe 21 that is in contact with each terminal 111 of each element 101 in a state where the series connection of the elements 101a to 101c and the output of the current Im are continued. The resistance value R of each element 101 is measured by switching the connection between the contact terminal 31 b and the second conductive wire 14. For this reason, even if a large transient voltage occurs at the start of the output of the current Im, it is possible to reliably prevent the generation of a new transient voltage after the transient voltage has settled. For this reason, in this measuring apparatus 1 and the measuring method, after waiting for the transient voltage at the time of starting the output of the current Im only once, the second contact terminals 31b are connected to the second conductive wires 14 (switching). It is possible to detect the value of the voltage Vm that is not affected by the transient voltage immediately after.

  Next, when the calculation of the resistance value R for all the elements 101 and the recording of the resistance value R in the recording unit are finished, the control unit 17, for example, the reference range and the resistance value defined by the upper and lower limit values The quality of each element 101 is inspected by comparing with R. In this case, as an example, the control unit 17 determines that the element 101 is a non-defective product when the resistance value R is within the reference range, and determines that the element 101 is defective when the resistance value R is outside the reference value range. . Thus, the pass / fail inspection for each element 101 of the circuit board 100 is completed.

  As described above, in the measurement apparatus 1 and the measurement method, each first contact in each of the probes 21 excluding a predetermined two of the plurality of probes 21 that are in contact with the respective terminals 111 of the plurality of elements 101. A connection process for connecting the elements 101 in series by connecting the terminals 31a and the third conductive wires 15 is performed. For this reason, in this measuring apparatus 1 and the measuring method, even if a large transient voltage is generated when current Im flows through each of the elements 101a to 101c connected in series, the elements 101a to 101c are connected in series and the current Im is output. By continuing the above, generation of a new transient voltage after the transient voltage is settled can be surely prevented. Therefore, according to the measuring apparatus 1 and the measuring method, each of the probes 21 that are in contact with the terminals 111 of the elements 101 in a state where the series connection of the elements 101a to 101c and the output of the current Im are continued. The value of the voltage Vm generated at each terminal 111 can be continuously measured without being affected by the transient voltage by simply switching the connection between the two-contact terminal 31b and each of the second conductive wires 14. As a result, the voltage Vm The resistance value R based on the value can be measured accurately and efficiently.

  In addition, this invention is not limited to said structure and method. For example, the measurement apparatus 1 that performs inspection on a plurality of wiring patterns and a plurality of elements 101 disposed on one surface of the circuit board 100 has been described as an example. However, as illustrated in FIG. A method of measuring the resistance value R of each wiring pattern 201 and each via 202 in the circuit board 200 in which the pattern 201 is disposed and each wiring pattern 201 is connected by a via 202 (internal wiring in the present invention). It is also possible to apply to the measuring device 301 that performs these quality checks based on the resistance value R. In addition, in the following description, the same code | symbol is attached | subjected about the same component as the above-mentioned measuring apparatus 1, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 2, the measuring apparatus 301 includes two probe units 302 a and 302 b (terminal portions in the present invention) and a main body portion 3. In this case, when the probe unit 302a is brought close to the circuit board 200 by a moving mechanism (not shown), the tip portion comes into contact with each wiring pattern 201 on the one surface (upper surface in the drawing) side of the circuit board 200. The plurality of probes 21 whose arrangement pattern is defined (only two probes 21a and 21c are shown in the figure) are provided. Also, the probe unit 302b has an arrangement pattern such that when the probe unit 302b is brought close to the circuit board 200, the tip portion comes into contact with each wiring pattern 201 on the other surface (the lower surface in the figure) of the circuit board 200. A plurality of defined probes 21 (only two probes 21b and 21d are shown in the figure) are provided. That is, in this measuring apparatus 301, the probe units 302a and 302b are configured so that each probe 21 can come into contact with the wiring pattern 201 as a contacted portion disposed on both surfaces of the circuit board 200. In the measuring apparatus 301, the wires between the probes 21 of the probe unit 302a and the scanner unit 16 are bundled, and the wires between the probes 21 of the probe unit 302b and the scanner unit 16 are bundled.

  In this measuring apparatus 301, when a measurement start instruction operation is performed, the control unit 17 controls a moving mechanism (not shown) to bring the probe units 302a and 302b close to the circuit board 200, as shown in FIG. In addition, the tip of each contact terminal 31 in each probe 21 is brought into contact with each wiring pattern 201 on the circuit board 200. Subsequently, the control unit 17 controls the scanner unit 16 (by executing the connection process described above), and as shown in the figure, each via 202 as a measurement object is connected to the probes 21b and 21d. The first contact terminals 31a and the third conductive wires 15a are connected in series.

  Next, as shown in FIG. 2, the control unit 17 controls the scanner unit 16 so that the two probes 21 a and 21 c that are in contact with the wiring patterns 201 positioned at both ends of each of the vias 202 connected in series are connected. The first contact terminal 31a and the first conductive wires 13a and 13b in each are connected. As a result, as indicated by a broken line in the figure, the current Im is output (flows) to each via 202 connected in series via each first contact terminal 31a and the third conductor 15a.

  Subsequently, the control unit 17 controls the scanner unit 16 so that the second contact terminals in each of the probes 21a and 21b that are in contact with the pair of wiring patterns 201 connected to one of the vias 202, respectively. 31b is connected to the second conductors 14a and 14b, respectively. Next, the voltage detection unit 12 inputs and detects the voltage Vm generated in the via 202 by the output of the current Im, and the control unit 17 detects the via based on the value of the current Im and the detected value of the voltage Vm. A resistance value R of 202 is measured and recorded in a recording unit (not shown). Subsequently, the control unit 17 continues the serial connection of the vias 202 and the output of the current Im, and the second contact terminals 31b of the probes 21 that are in contact with the wiring pattern 201 connected to the vias 202. By switching the connection between each of the second conductive wires 14, the resistance value R of each via 202 is measured, and the measured resistance value R is recorded in a recording unit (not shown).

  Next, when the measurement of the resistance value R for all the vias 202 and the recording of the resistance value R to the recording unit are completed, the control unit 17, for example, the reference range and resistance defined by the upper and lower limit values The quality of each via 202 is inspected by comparing with the value R. As described above, also in this measuring apparatus 301 and the measuring method, even if a large transient voltage is generated when the current Im is passed through each of the serially connected vias 202, a new transient voltage is generated after the transient voltage is settled. Therefore, by simply switching the connection between each second contact terminal 31b of each probe 21 in contact with the wiring pattern 201 connected to each via 202 and each second conductor 14, Since the value of the voltage Vm generated in each via 202 can be continuously measured without being affected by the transient voltage, the resistance value R based on the value of the voltage Vm can be accurately and efficiently measured. In the measuring apparatus 301, the wires between the probes 21 of the probe unit 302a and the scanner unit 16 are bundled, and the wires between the probes 21 of the probe unit 302b and the scanner unit 16 are bundled. . For this reason, according to this measuring apparatus 301, the influence of noise generated when the wiring between each probe 21 and the scanner unit 16 forms a loop can be suppressed to a low level. As a result, the resistance value R can be measured more accurately. can do.

  Further, the example in which the quality of the element 101 or the via 202 is inspected based on the resistance value R of the element 101 or the via 202 has been described above, but the present invention is applied to a measuring apparatus that only measures the resistance value R without performing the inspection. You can also. Further, the example of measuring the resistance value R as a physical quantity has been described above. However, the physical quantity in the present invention is not limited to the resistance value R, and includes an inductance, a capacity, an impedance, and the like, and a measuring device that measures these physical quantities. Of course, it can be applied to. Further, the configuration example in which the probe unit 2 having the plurality of probes 21 and the probe units 302a and 302b are moved so that each probe 21 is brought into contact with the terminal 111 and the wiring pattern 201 as the contacted portion at a time has been described above. It is also possible to apply to a flying probe type measuring apparatus that individually moves the probe 21 to contact and separate from the contacted part. Furthermore, although the example provided with a pair of 3rd conducting wire 15 was mentioned above, the number of the 3rd conducting wires 15 is not limited to this, It can change according to the number of measuring objects. Specifically, when the number of measurement objects to be brought into contact with the probe 21 is N, the number of the third conductive wires 15 is defined as an arbitrary number of (N−1) or more.

1 is a configuration diagram showing a configuration of a measuring device 1. FIG. 2 is a configuration diagram showing a configuration of a measuring apparatus 301. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,301 Measuring apparatus 2,302a, 302b Probe unit 12 Voltage detection part 13a, 13b 1st conducting wire 14a, 14b 2nd conducting wire 15a, 15b 3rd conducting wire 16 Scanner unit 17 Control part 21a-21f Probe 31a 1st contact terminal 31b Second contact terminal 100, 200 Circuit board 101a to 101c Element 111a to 111f Terminal 201 Wiring pattern 202 Via 301 Measuring device Im Current R Resistance value Vm Voltage

Claims (5)

A power supply unit for generating a measuring current, for inputting a voltage generated in the driven element by the output of the first contact terminals and the current for measurement for outputting the current for measurement in the contacted portion of the measured object A terminal section having a plurality of contact terminal pairs each having a pair of second contact terminals, a pair of first conductors connected to the power supply section for supplying the measurement current, and a voltage detection section for detecting the voltage , one for energizing a pair of second conductors connected to the electric pressure detector, the said measurement current provided separately and each first conductor and the respective second conductor The measurement based on the value of the voltage, comprising the third conductor described above, a connection part for connecting and disconnecting each contact terminal and each conductor, and a control unit for controlling the connection part. It is configured to be able to measure a predetermined physical quantity about the object ,
In the state in which the contact terminal pairs are in contact with the respective contacted parts in the plurality of measurement objects by controlling the connection / disconnection parts during the measurement of the physical quantity, the control unit While connecting each said 1st contact terminal and each said 3rd conductor in each of each said contact terminal pair except the predetermined two of contact terminal pairs, while connecting the said several measuring object in series The respective first contact terminals and the respective first conductives in each of the removed two contact terminal pairs that are in contact with the respective contacted parts located at both ends of the respective measurement objects connected in series. The second contact terminals in each of the contact terminal pairs, each of which is in contact with the contacted part of any one of the plurality of measurement objects. Serial measurement device for performing a connection process of connecting respectively with each second conductor. The terminal portions are connected by internal wiring formed inside the circuit board, and each contact terminal pair is connected to each wiring pattern as the contacted portion formed on one side and the other side of the circuit board. Each configured to be contactable,
The measurement apparatus according to claim 1, wherein the control unit controls the connection / disconnection unit so that the internal wiring as the measurement object and the wiring patterns are connected in series in the connection process.   The wires formed between the contact terminal pairs to be brought into contact with the wiring pattern formed on the one surface side of the circuit board and the connection portion are bundled, and the wiring formed on the other surface side of the circuit substrate. The measuring device according to claim 2, wherein wiring between each contact terminal pair brought into contact with a pattern and the connection / disconnection part is bundled. A pair supplies connected to the measurement current to the power supply unit for generating the current for measurement from the first contact terminal of the terminal section having a plurality of contact terminals pair of a pair of the first contact terminal and the second contact terminal No. A contact with one conductor is performed, and a current for measurement is output to the contacted part of the measurement object via the first contact terminal, and the pair of second conductors connected to the voltage detection part and the respective contacts performing disconnection of the terminal detects a voltage generated in the contact portions by the output of the current for measurement, the measurement scheduled you measure the predetermined physical quantity for said measured object based on the value of the detected voltage ,
The contact terminal pairs are brought into contact with the contacted parts of the plurality of measurement objects, respectively, and each of the contact terminal pairs in each of the contact terminal pairs excluding a predetermined two of the contact terminal pairs in the state is used. A plurality of measurement objects are provided by connecting one contact terminal and a third conductor that is provided separately from each of the first conductors and the second conductors and that allows the measurement current to flow therethrough. The first contact terminals in each of the two removed contact terminal pairs that are connected in series, and are in contact with the contacted parts located at both ends of the measurement target bodies connected in series, respectively. Each said 2nd contact in each of said each contact terminal pair which is each connected with each said 1st conductor, and is each contacting each said to-be-contacted part of any one of said several measurement object. Measurement method for performing a connection process of connecting the terminal and the second conductor, respectively. The contact terminal pairs are connected to each wiring pattern as the contacted part formed on the one side and the other side of the circuit board and connected by internal wiring formed inside the circuit board, When measuring the physical quantity for the internal wiring and the wiring patterns as the measurement object,
The measurement method according to claim 4, wherein, in the connection process, the first contact terminals and the third conductor are connected so that the internal wiring and the wiring patterns are connected in series.

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