JP5257175B2 - 超純水製造装置 - Google Patents
超純水製造装置 Download PDFInfo
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- JP5257175B2 JP5257175B2 JP2009064625A JP2009064625A JP5257175B2 JP 5257175 B2 JP5257175 B2 JP 5257175B2 JP 2009064625 A JP2009064625 A JP 2009064625A JP 2009064625 A JP2009064625 A JP 2009064625A JP 5257175 B2 JP5257175 B2 JP 5257175B2
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- pure water
- water
- water production
- pump
- production apparatus
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- 238000004519 manufacturing process Methods 0.000 title claims description 124
- 239000012498 ultrapure water Substances 0.000 title claims description 73
- 229910021642 ultra pure water Inorganic materials 0.000 title claims description 70
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 214
- 239000012528 membrane Substances 0.000 claims description 46
- 238000000926 separation method Methods 0.000 claims description 27
- 238000001223 reverse osmosis Methods 0.000 claims description 24
- 238000011144 upstream manufacturing Methods 0.000 claims description 17
- 239000002351 wastewater Substances 0.000 claims description 13
- 238000007789 sealing Methods 0.000 claims description 3
- 238000005342 ion exchange Methods 0.000 description 29
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 18
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 16
- 238000000108 ultra-filtration Methods 0.000 description 16
- 239000002184 metal Substances 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 14
- 230000003647 oxidation Effects 0.000 description 12
- 238000007254 oxidation reaction Methods 0.000 description 12
- 238000011084 recovery Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 8
- 239000010419 fine particle Substances 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 8
- 229910021645 metal ion Inorganic materials 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 7
- 239000007800 oxidant agent Substances 0.000 description 7
- 238000000354 decomposition reaction Methods 0.000 description 6
- 239000003456 ion exchange resin Substances 0.000 description 6
- 229920003303 ion-exchange polymer Polymers 0.000 description 6
- 238000001914 filtration Methods 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- -1 polyethylene Polymers 0.000 description 4
- 230000001172 regenerating effect Effects 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 238000005345 coagulation Methods 0.000 description 3
- 230000015271 coagulation Effects 0.000 description 3
- 238000009296 electrodeionization Methods 0.000 description 3
- 238000001471 micro-filtration Methods 0.000 description 3
- 150000007524 organic acids Chemical class 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000009897 systematic effect Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000005054 agglomeration Methods 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 239000003957 anion exchange resin Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010828 elution Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000005374 membrane filtration Methods 0.000 description 2
- 235000005985 organic acids Nutrition 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005349 anion exchange Methods 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 239000003729 cation exchange resin Substances 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000005115 demineralization Methods 0.000 description 1
- 230000002328 demineralizing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000005188 flotation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 239000008235 industrial water Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 238000004454 trace mineral analysis Methods 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
- 239000002349 well water Substances 0.000 description 1
- 235000020681 well water Nutrition 0.000 description 1
Images
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- Details Of Reciprocating Pumps (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Description
(b)混床式イオン交換装置;紫外線酸化によって分解され、残留した炭酸イオン、有機酸類、アニオン性物質や前段より流入してくる金属イオンやカチオン性物質をイオン交換によって除去する。
(c)脱気装置;混入しているDO(溶存酸素)などの溶存ガスを除去する。
(d)UF膜分離装置;微粒子を除去する。
(A)一次純水
電気比抵抗;10MΩ・cm以上
TOC;5〜50μg/L
(B)二次純水
電気比抵抗;18MΩ・cm以上
(金属イオン濃度:5ng/L以下、残留イオン濃度:10ng/L以下)
微粒子数;1mL中に0.1μm以上の微粒子5個以下
TOC;1〜10μg/L
(C)三次純水
TOC;0.1〜5μg/L
微粒子数;1mL中に0.1μm以上の微粒子5個以下
20 二次純水製造装置
40 ユースポイント
50 超純水返送用配管
60,70 ハウジング
62 インペラ
82 ドレンポート
Claims (3)
- 逆浸透膜分離手段と、該逆浸透膜分離手段の上流側に設けられた熱交換器とを備える一次純水製造装置に原水を通水して一次純水を製造し、この一次純水を二次純水製造装置に通水して超純水を製造する超純水製造装置において、
二次純水製造装置内の送水用のポンプは、二次純水製造装置の系内から引水した純水をポンプ軸受け部のシール水として使用する構造になっており、
該ポンプのシール排水を一次純水製造装置の該熱交換器よりも上流側に返送する送水機構が設けられていることを特徴とする超純水製造装置。 - 請求項1において、前記二次純水を三次純水製造装置に通水して超純水を製造する超純水製造装置であって、
三次純水製造装置内の送水用のポンプは、三次純水製造装置の系内から引水した純水をポンプ軸受け部のシール水として使用する構造になっており、
該三次純水装置の該ポンプのシール排水を一次純水製造装置の逆浸透膜分離手段の分離膜よりも上流側に返送する送水手段が設けられていることを特徴とする超純水製造装置。 - 請求項1において、前記一次純水装置は、前記熱交換器の上流側にタンクを備えており、前記二次純水製造装置の前記ポンプのシール排水は該タンクに返送されることを特徴とする超純水製造装置。
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JP2009064625A JP5257175B2 (ja) | 2009-03-17 | 2009-03-17 | 超純水製造装置 |
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JP2009064625A JP5257175B2 (ja) | 2009-03-17 | 2009-03-17 | 超純水製造装置 |
Publications (2)
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JP2010214300A JP2010214300A (ja) | 2010-09-30 |
JP5257175B2 true JP5257175B2 (ja) | 2013-08-07 |
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JP2009064625A Active JP5257175B2 (ja) | 2009-03-17 | 2009-03-17 | 超純水製造装置 |
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Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5953726B2 (ja) * | 2011-12-07 | 2016-07-20 | 栗田工業株式会社 | 超純水製造方法及び装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61283394A (ja) * | 1985-06-10 | 1986-12-13 | Rohm Co Ltd | 回収水処理システム |
JPS6338804A (ja) * | 1986-07-31 | 1988-02-19 | 株式会社日立製作所 | 復水装置 |
JPH0272395U (ja) * | 1988-11-24 | 1990-06-01 | ||
JP2801722B2 (ja) * | 1990-01-25 | 1998-09-21 | 株式会社ニクニ | ポンプ装置 |
JP3778158B2 (ja) * | 2002-11-18 | 2006-05-24 | 栗田工業株式会社 | 超純水製造装置 |
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- 2009-03-17 JP JP2009064625A patent/JP5257175B2/ja active Active
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