JP5247182B2 - 角速度センサ - Google Patents

角速度センサ Download PDF

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Publication number
JP5247182B2
JP5247182B2 JP2008037619A JP2008037619A JP5247182B2 JP 5247182 B2 JP5247182 B2 JP 5247182B2 JP 2008037619 A JP2008037619 A JP 2008037619A JP 2008037619 A JP2008037619 A JP 2008037619A JP 5247182 B2 JP5247182 B2 JP 5247182B2
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JP
Japan
Prior art keywords
axis
angular velocity
mass
coriolis force
control unit
Prior art date
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Expired - Fee Related
Application number
JP2008037619A
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English (en)
Japanese (ja)
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JP2009198206A5 (enExample
JP2009198206A (ja
Inventor
誠 高木
篤史 香取
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2008037619A priority Critical patent/JP5247182B2/ja
Priority to US12/371,530 priority patent/US8176780B2/en
Publication of JP2009198206A publication Critical patent/JP2009198206A/ja
Publication of JP2009198206A5 publication Critical patent/JP2009198206A5/ja
Application granted granted Critical
Publication of JP5247182B2 publication Critical patent/JP5247182B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2008037619A 2008-02-19 2008-02-19 角速度センサ Expired - Fee Related JP5247182B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008037619A JP5247182B2 (ja) 2008-02-19 2008-02-19 角速度センサ
US12/371,530 US8176780B2 (en) 2008-02-19 2009-02-13 Angular velocity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008037619A JP5247182B2 (ja) 2008-02-19 2008-02-19 角速度センサ

Publications (3)

Publication Number Publication Date
JP2009198206A JP2009198206A (ja) 2009-09-03
JP2009198206A5 JP2009198206A5 (enExample) 2011-04-07
JP5247182B2 true JP5247182B2 (ja) 2013-07-24

Family

ID=40953867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008037619A Expired - Fee Related JP5247182B2 (ja) 2008-02-19 2008-02-19 角速度センサ

Country Status (2)

Country Link
US (1) US8176780B2 (enExample)
JP (1) JP5247182B2 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5432440B2 (ja) * 2007-07-04 2014-03-05 キヤノン株式会社 揺動体装置
JP5473253B2 (ja) * 2008-06-02 2014-04-16 キヤノン株式会社 複数の導電性領域を有する構造体、及びその製造方法
DE102009028623B4 (de) * 2009-08-18 2024-02-15 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
JP5424847B2 (ja) 2009-12-11 2014-02-26 キヤノン株式会社 電気機械変換装置
JP5473579B2 (ja) 2009-12-11 2014-04-16 キヤノン株式会社 静電容量型電気機械変換装置の制御装置、及び静電容量型電気機械変換装置の制御方法
JP5414546B2 (ja) * 2010-01-12 2014-02-12 キヤノン株式会社 容量検出型の電気機械変換素子
JP5603739B2 (ja) 2010-11-02 2014-10-08 キヤノン株式会社 静電容量型電気機械変換装置
JP5947511B2 (ja) 2011-09-08 2016-07-06 キヤノン株式会社 電気機械変換装置
FR2983575B1 (fr) 2011-12-02 2015-03-06 Commissariat Energie Atomique Micro-capteur inertiel de mouvements de rotation
US10349543B2 (en) * 2013-02-22 2019-07-09 Vibrant Composites Inc. Layered assemblies
JP6323034B2 (ja) 2014-01-28 2018-05-16 セイコーエプソン株式会社 機能素子、電子デバイス、電子機器、および移動体
DE102014202053A1 (de) * 2014-02-05 2015-08-06 Robert Bosch Gmbh Sensorvorrichtung und Verfahren zum Betreiben einer Sensorvorrichtung mit mindestens einer seismischen Masse
JP6472313B2 (ja) 2015-04-16 2019-02-20 キヤノン株式会社 探触子及び情報取得装置
DE102015213452A1 (de) * 2015-07-17 2017-02-23 Robert Bosch Gmbh Drehratensensor und Betrieb eines Drehratensensors bei verschiedenen Frequenzen und in verschiedenen Richtungen
EP3908803A4 (en) * 2019-01-08 2022-07-20 Panasonic Intellectual Property Management Co., Ltd. MEASURING DEVICE
JP7516009B2 (ja) 2019-02-20 2024-07-16 キヤノン株式会社 発振器、撮像装置
JP7414428B2 (ja) 2019-08-26 2024-01-16 キヤノン株式会社 発振器、照明装置、撮像装置および装置
JP7493922B2 (ja) 2019-08-26 2024-06-03 キヤノン株式会社 発振器、撮像装置

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62280609A (ja) * 1986-05-29 1987-12-05 Matsushita Electric Ind Co Ltd 循環駆動型レ−トジヤイロの調整方法
JPH02129513A (ja) * 1988-11-09 1990-05-17 Aisin Seiki Co Ltd 二軸回転検出装置
JP2886431B2 (ja) 1993-10-27 1999-04-26 住友精密工業株式会社 振動ジャイロセンサー
DE4442033C2 (de) 1994-11-25 1997-12-18 Bosch Gmbh Robert Drehratensensor
JP3409520B2 (ja) 1995-08-01 2003-05-26 日産自動車株式会社 角速度センサ
JP3307200B2 (ja) 1995-11-01 2002-07-24 株式会社村田製作所 角速度センサ
JP3090024B2 (ja) * 1996-01-22 2000-09-18 株式会社村田製作所 角速度センサ
DE19617666B4 (de) * 1996-05-03 2006-04-20 Robert Bosch Gmbh Mikromechanischer Drehratensensor
JP3873266B2 (ja) * 1998-04-08 2007-01-24 ミツミ電機株式会社 三次元角速度センサ
US7079299B1 (en) 2000-05-31 2006-07-18 The Regents Of The University Of California Staggered torsional electrostatic combdrive and method of forming same
JP2002195832A (ja) * 2000-12-27 2002-07-10 Fujitsu Media Device Kk 角速度検出装置および角速度検出方法
KR100436367B1 (ko) 2001-12-14 2004-06-19 삼성전자주식회사 수직 진동 질량체를 갖는 멤스 자이로스코프
US7026184B2 (en) 2003-02-26 2006-04-11 Carnegie Mellon University Method of fabricating microstructures and devices made therefrom
US6966224B2 (en) * 2003-03-06 2005-11-22 Bei Technologies, Inc. Micromachined vibratory gyroscope with electrostatic coupling
US7085122B2 (en) 2003-05-21 2006-08-01 The Regents Of The University Of California MEMS tunable capacitor based on angular vertical comb drives
DE112005002196B4 (de) * 2004-09-27 2023-12-21 Conti Temic Microelectronic Gmbh Drehratensensor
JP4874067B2 (ja) * 2006-02-07 2012-02-08 セイコーインスツル株式会社 角速度センサ
EP1832841B1 (en) * 2006-03-10 2015-12-30 STMicroelectronics Srl Microelectromechanical integrated sensor structure with rotary driving motion
JP5159062B2 (ja) 2006-08-09 2013-03-06 キヤノン株式会社 角速度センサ
US7401517B2 (en) * 2006-08-18 2008-07-22 Robert Bosch Gmbh Dual-axis yaw rate sensing unit having a tuning fork gyroscope arrangement
JP5105949B2 (ja) 2007-04-27 2012-12-26 キヤノン株式会社 センサ

Also Published As

Publication number Publication date
US8176780B2 (en) 2012-05-15
US20090205423A1 (en) 2009-08-20
JP2009198206A (ja) 2009-09-03

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