JP5233186B2 - Thermosetting light reflecting resin composition, substrate for mounting optical semiconductor element using the same, method for manufacturing the same, and optical semiconductor device - Google Patents
Thermosetting light reflecting resin composition, substrate for mounting optical semiconductor element using the same, method for manufacturing the same, and optical semiconductor device Download PDFInfo
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- JP5233186B2 JP5233186B2 JP2007178405A JP2007178405A JP5233186B2 JP 5233186 B2 JP5233186 B2 JP 5233186B2 JP 2007178405 A JP2007178405 A JP 2007178405A JP 2007178405 A JP2007178405 A JP 2007178405A JP 5233186 B2 JP5233186 B2 JP 5233186B2
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- optical semiconductor
- resin composition
- semiconductor element
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- 239000004065 semiconductor Substances 0.000 title claims description 69
- 230000003287 optical effect Effects 0.000 title claims description 68
- 239000011342 resin composition Substances 0.000 title claims description 53
- 239000000758 substrate Substances 0.000 title claims description 37
- 229920001187 thermosetting polymer Polymers 0.000 title claims description 34
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 238000000034 method Methods 0.000 title claims description 9
- 239000003822 epoxy resin Substances 0.000 claims description 17
- 229920000647 polyepoxide Polymers 0.000 claims description 17
- 239000003795 chemical substances by application Substances 0.000 claims description 15
- 239000012463 white pigment Substances 0.000 claims description 15
- 239000002245 particle Substances 0.000 claims description 13
- 239000011256 inorganic filler Substances 0.000 claims description 12
- 229910003475 inorganic filler Inorganic materials 0.000 claims description 12
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 claims description 11
- 229920005989 resin Polymers 0.000 claims description 11
- 239000011347 resin Substances 0.000 claims description 11
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- -1 3- Carboxypropyl Chemical group 0.000 claims description 8
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 8
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 7
- 150000008065 acid anhydrides Chemical class 0.000 claims description 7
- 229910000410 antimony oxide Inorganic materials 0.000 claims description 7
- 239000000395 magnesium oxide Substances 0.000 claims description 7
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 7
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 7
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 claims description 7
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 7
- 238000007789 sealing Methods 0.000 claims description 7
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 7
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 7
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 claims description 6
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 claims description 6
- 239000007983 Tris buffer Substances 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 5
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 claims description 4
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 claims description 4
- 239000000347 magnesium hydroxide Substances 0.000 claims description 4
- 229910001862 magnesium hydroxide Inorganic materials 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 238000001721 transfer moulding Methods 0.000 claims description 4
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 claims description 3
- 239000001095 magnesium carbonate Substances 0.000 claims description 3
- 229910000021 magnesium carbonate Inorganic materials 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000000465 moulding Methods 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 238000002156 mixing Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 5
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 239000007822 coupling agent Substances 0.000 description 5
- 150000007973 cyanuric acids Chemical class 0.000 description 5
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 5
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 4
- 230000006378 damage Effects 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- OUPZKGBUJRBPGC-UHFFFAOYSA-N 1,3,5-tris(oxiran-2-ylmethyl)-1,3,5-triazinane-2,4,6-trione Chemical compound O=C1N(CC2OC2)C(=O)N(CC2OC2)C(=O)N1CC1CO1 OUPZKGBUJRBPGC-UHFFFAOYSA-N 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 229920003986 novolac Polymers 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 229910000077 silane Inorganic materials 0.000 description 3
- 230000037303 wrinkles Effects 0.000 description 3
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 2
- PAVNZLVXYJDFNR-UHFFFAOYSA-N 3,3-dimethyloxane-2,6-dione Chemical compound CC1(C)CCC(=O)OC1=O PAVNZLVXYJDFNR-UHFFFAOYSA-N 0.000 description 2
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 2
- UVYLEXYRTBDZNM-UHFFFAOYSA-N 4,4-diethyloxane-2,6-dione Chemical compound CCC1(CC)CC(=O)OC(=O)C1 UVYLEXYRTBDZNM-UHFFFAOYSA-N 0.000 description 2
- MWSKJDNQKGCKPA-UHFFFAOYSA-N 6-methyl-3a,4,5,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1CC(C)=CC2C(=O)OC(=O)C12 MWSKJDNQKGCKPA-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- KFSLWBXXFJQRDL-UHFFFAOYSA-N Peracetic acid Chemical compound CC(=O)OO KFSLWBXXFJQRDL-UHFFFAOYSA-N 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 125000003700 epoxy group Chemical group 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- VANNPISTIUFMLH-UHFFFAOYSA-N glutaric anhydride Chemical compound O=C1CCCC(=O)O1 VANNPISTIUFMLH-UHFFFAOYSA-N 0.000 description 2
- 150000002460 imidazoles Chemical class 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- VYKXQOYUCMREIS-UHFFFAOYSA-N methylhexahydrophthalic anhydride Chemical compound C1CCCC2C(=O)OC(=O)C21C VYKXQOYUCMREIS-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 2
- 150000003018 phosphorus compounds Chemical class 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 150000003512 tertiary amines Chemical class 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 description 2
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 2
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 2
- LTVUCOSIZFEASK-MPXCPUAZSA-N (3ar,4s,7r,7as)-3a-methyl-3a,4,7,7a-tetrahydro-4,7-methano-2-benzofuran-1,3-dione Chemical compound C([C@H]1C=C2)[C@H]2[C@H]2[C@]1(C)C(=O)OC2=O LTVUCOSIZFEASK-MPXCPUAZSA-N 0.000 description 1
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 1
- FUIQBJHUESBZNU-UHFFFAOYSA-N 2-[(dimethylazaniumyl)methyl]phenolate Chemical compound CN(C)CC1=CC=CC=C1O FUIQBJHUESBZNU-UHFFFAOYSA-N 0.000 description 1
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 1
- ULKLGIFJWFIQFF-UHFFFAOYSA-N 5K8XI641G3 Chemical compound CCC1=NC=C(C)N1 ULKLGIFJWFIQFF-UHFFFAOYSA-N 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- VYGUBTIWNBFFMQ-UHFFFAOYSA-N [N+](#[C-])N1C(=O)NC=2NC(=O)NC2C1=O Chemical compound [N+](#[C-])N1C(=O)NC=2NC(=O)NC2C1=O VYGUBTIWNBFFMQ-UHFFFAOYSA-N 0.000 description 1
- YKTSYUJCYHOUJP-UHFFFAOYSA-N [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] Chemical compound [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] YKTSYUJCYHOUJP-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 125000004018 acid anhydride group Chemical group 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 150000001299 aldehydes Chemical class 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 239000004844 aliphatic epoxy resin Substances 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- NIDNOXCRFUCAKQ-UHFFFAOYSA-N bicyclo[2.2.1]hept-5-ene-2,3-dicarboxylic acid Chemical compound C1C2C=CC1C(C(=O)O)C2C(O)=O NIDNOXCRFUCAKQ-UHFFFAOYSA-N 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical class C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 1
- ZZTCPWRAHWXWCH-UHFFFAOYSA-N diphenylmethanediamine Chemical compound C=1C=CC=CC=1C(N)(N)C1=CC=CC=C1 ZZTCPWRAHWXWCH-UHFFFAOYSA-N 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- MUTGBJKUEZFXGO-UHFFFAOYSA-N hexahydrophthalic anhydride Chemical compound C1CCCC2C(=O)OC(=O)C21 MUTGBJKUEZFXGO-UHFFFAOYSA-N 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 239000006082 mold release agent Substances 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- AFEQENGXSMURHA-UHFFFAOYSA-N oxiran-2-ylmethanamine Chemical compound NCC1CO1 AFEQENGXSMURHA-UHFFFAOYSA-N 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 150000004965 peroxy acids Chemical class 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 229920000768 polyamine Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229940014800 succinic anhydride Drugs 0.000 description 1
- TXDNPSYEJHXKMK-UHFFFAOYSA-N sulfanylsilane Chemical compound S[SiH3] TXDNPSYEJHXKMK-UHFFFAOYSA-N 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- UKRDPEFKFJNXQM-UHFFFAOYSA-N vinylsilane Chemical compound [SiH3]C=C UKRDPEFKFJNXQM-UHFFFAOYSA-N 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
- 238000004383 yellowing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
Landscapes
- Led Device Packages (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Epoxy Resins (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Description
本発明は、光半導体素子と蛍光体などの波長変換手段とを組み合わせた光半導体装置に用いる熱硬化性光反射用樹脂組成物、および該熱硬化性光反射用樹脂組成物を用いた光半導体素子搭載用基板とその製造方法、ならびに該光半導体素子搭載用基板を用いた光半導体装置に関する。 The present invention relates to a thermosetting light reflecting resin composition used in an optical semiconductor device in which an optical semiconductor element and a wavelength conversion means such as a phosphor are combined, and an optical semiconductor using the thermosetting light reflecting resin composition. The present invention relates to an element mounting substrate, a manufacturing method thereof, and an optical semiconductor device using the optical semiconductor element mounting substrate.
光半導体素子を利用した光半導体装置として、図4に示すような構成のSMD(Surfacemounted device)タイプのLED(Light Emitting Diode)が知られている。このLEDは、通常、マウント基板リフレクター(光半導体素子搭載用基板)403に形成されたカップ状部(凹部)の、リード404が露出している底面にLED素子(発光素子)400が配置され、さらに当該素子が配置されたカップ状部に蛍光体405を含有する透明封止樹脂402が充填されている。リフレクターは、発光素子から側方に放射された光をその表面で拡散反射して軸方向に分配し、これによって軸上強度を高めることを目的として使用されている。特許文献1〜4にはリフレクターが熱可塑性樹脂組成物からなるSMDタイプのLED用形成材料が開示されている。
As an optical semiconductor device using an optical semiconductor element, an SMD (Surface Mounted Device) type LED (Light Emitting Diode) configured as shown in FIG. 4 is known. In this LED, an LED element (light emitting element) 400 is usually disposed on the bottom surface of the cup-shaped part (concave part) formed on the mount substrate reflector (substrate for mounting an optical semiconductor element) 403 where the
このような構造を有するLEDは、高エネルギー効率、長寿命などの利点から、屋外用ディスプレイ、携帯液晶バックライト、車載用途などその需要を拡大しつつあるが、これに伴い、LEDデバイスの高輝度化が進み、素子の発熱量増大によるジャンクション温度の上昇、あるいは直接的な光エネルギーの増大による材料の耐熱劣化・耐光劣化が課題となっている。 LEDs having such a structure are expanding their demand for outdoor displays, portable liquid crystal backlights, in-vehicle applications, etc. due to advantages such as high energy efficiency and long life. As a result, the increase in the junction temperature due to the increase in the amount of heat generated by the device, or the heat resistance degradation and light resistance degradation of the material due to the direct increase in light energy have become problems.
この課題に対し、特許文献5には、エポキシ樹脂としてトリグリシジルイソシアヌレート、硬化剤としてヘキサヒドロ無水フタル酸を含む樹脂組成物の硬化物をリフレクターとして用い、耐熱性および光反射特性に優れるLEDを提供することが開示されている。
しかしながら、上記特許文献5における樹脂組成物は、硬化剤として含まれるヘキサヒドロ無水フタル酸の融点が34〜38℃であるため、タブレット成型性やバリ発生などに課題があった。 However, since the melting point of hexahydrophthalic anhydride contained as a curing agent is 34 to 38 ° C., the resin composition in Patent Document 5 has problems in tablet moldability and generation of burrs.
本発明は、上記に鑑みてなされたものであり、光反射特性、タブレット成型性に優れ、バリを低減することが可能な熱硬化性光反射用樹脂組成物、これを用いた光半導体素子搭載用基板とその製造方法および光半導体装置を提供することを目的とする。 The present invention has been made in view of the above, and is a thermosetting light reflecting resin composition that is excellent in light reflection characteristics and tablet moldability and can reduce burrs, and an optical semiconductor element mounted using the same. An object of the present invention is to provide a manufacturing substrate, a manufacturing method thereof, and an optical semiconductor device.
すなわち、本発明は下記(1)〜(9)に記載の事項をその特徴とするものである。 That is, the present invention is characterized by the following items (1) to (9).
(1)(A)エポキシ樹脂、(B)硬化剤、(C)無機充填剤、および(D)白色顔料を含む樹脂組成物において、硬化後の、波長800nm〜350nmにおける光反射率が90%以上であり、硬化前には室温(0〜35℃)において加圧成型が可能であることを特徴とする熱硬化性光反射用樹脂組成物。 (1) In a resin composition containing (A) an epoxy resin, (B) a curing agent, (C) an inorganic filler, and (D) a white pigment, the light reflectance at a wavelength of 800 nm to 350 nm after curing is 90%. The thermosetting light-reflecting resin composition as described above, which can be pressure-molded at room temperature (0 to 35 ° C.) before curing.
(2)上記(B)硬化剤が、イソシアヌル酸骨格を有する化合物、または、イソシアヌル酸骨格を有する化合物と融点が35℃以上の酸無水物を含む、上記(1)に記載の熱硬化性光反射用樹脂組成物。 (2) The thermosetting light according to (1), wherein the curing agent (B) includes a compound having an isocyanuric acid skeleton, or a compound having an isocyanuric acid skeleton and an acid anhydride having a melting point of 35 ° C. or higher. Reflective resin composition.
(3)上記(C)無機充填剤が、シリカ、アルミナ、酸化マグネシウム、酸化アンチモン、酸化チタン、酸化ジルコニウム、水酸化アルミニウム、水酸化マグネシウム、硫酸バリウム、炭酸マグネシウム、炭酸バリウムからなる群の中から選ばれる1種以上を含むことを特徴とする上記(1)または(2)に記載の熱硬化性光反射用樹脂組成物。 (3) The inorganic filler (C) is selected from the group consisting of silica, alumina, magnesium oxide, antimony oxide, titanium oxide, zirconium oxide, aluminum hydroxide, magnesium hydroxide, barium sulfate, magnesium carbonate, and barium carbonate. The thermosetting light reflecting resin composition as described in (1) or (2) above, comprising one or more selected.
(4)上記(D)白色顔料が、アルミナ、酸化マグネシウム、酸化アンチモン、酸化チタン、酸化ジルコニウム、無機中空粒子からなる群の中から選ばれる1種以上を含むことを特徴とする上記(1)〜(3)のいずれかに記載の熱硬化性光反射用樹脂組成物。 (4) The above (D), wherein the white pigment (D) contains one or more selected from the group consisting of alumina, magnesium oxide, antimony oxide, titanium oxide, zirconium oxide and inorganic hollow particles. The thermosetting light reflecting resin composition according to any one of to (3).
(5)上記(D)白色顔料の平均粒径が、1〜50μmの範囲にあることを特徴とする上記(1)〜(4)のいずれかに記載の熱硬化性光反射用樹脂組成物。 (5) The thermosetting light reflecting resin composition as described in any one of (1) to (4) above, wherein the average particle diameter of the white pigment (D) is in the range of 1 to 50 μm. .
(6)上記(C)無機充填剤と上記(D)白色顔料の合計配合量が、樹脂組成物全体に対して、10体積%〜85体積%の範囲であることを特徴とする上記(1)〜(5)のいずれかに記載の熱硬化性光反射用樹脂組成物。 (6) The above (1), wherein the total blending amount of the (C) inorganic filler and the (D) white pigment is in the range of 10% by volume to 85% by volume with respect to the entire resin composition. ) To (5) The thermosetting resin composition for light reflection.
(7)光半導体素子搭載領域となる凹部が1つ以上形成されている光半導体素子搭載用基板であって、少なくとも上記凹部の内周側面が上記(1)〜(6)のいずれかに記載の熱硬化性光反射用樹脂組成物からなることを特徴とする光半導体素子搭載用基板。 (7) An optical semiconductor element mounting substrate in which one or more recesses to be an optical semiconductor element mounting region are formed, and at least an inner peripheral side surface of the recess is described in any one of (1) to (6). An optical semiconductor element mounting substrate comprising the thermosetting light reflecting resin composition.
(8)光半導体素子搭載領域となる凹部が1つ以上形成されている光半導体素子搭載用基板の製造方法であって、少なくとも上記凹部を、上記(1)〜(6)のいずれかに記載の熱硬化性光反射用樹脂組成物を用いたトランスファー成型により形成することを特徴とする光半導体搭載用基板の製造方法。 (8) A method for manufacturing a substrate for mounting an optical semiconductor element in which at least one recess serving as an optical semiconductor element mounting region is formed, wherein at least the recess is described in any one of (1) to (6) above. A method for producing a substrate for mounting an optical semiconductor, characterized by forming by transfer molding using the thermosetting light reflecting resin composition.
(9)上記(7)に記載の光半導体素子搭載用基板または上記(8)に記載の製造方法により製造された光半導体素子搭載用基板と、
上記光半導体素子搭載用基板の凹部底面に搭載される光半導体素子と、
上記光半導体素子を覆うように上記凹部内に形成される蛍光体含有透明封止樹脂層と、
を備える光半導体装置。
(9) The optical semiconductor element mounting substrate described in (7) above or the optical semiconductor element mounting substrate manufactured by the manufacturing method described in (8) above,
An optical semiconductor element mounted on the bottom of the recess of the optical semiconductor element mounting substrate;
A phosphor-containing transparent sealing resin layer formed in the recess so as to cover the optical semiconductor element;
An optical semiconductor device comprising:
本発明によれば、光反射特性、タブレット成型性に優れ、バリを低減することが可能な熱硬化性光反射用樹脂組成物、これを用いた光半導体素子搭載用基板とその製造方法および光半導体装置を提供することが可能となる。 According to the present invention, a thermosetting light reflecting resin composition that is excellent in light reflection characteristics and tablet moldability and capable of reducing burrs, a substrate for mounting an optical semiconductor element using the same, a method for manufacturing the same, and light A semiconductor device can be provided.
以下、本発明の実施の形態を説明する。 Embodiments of the present invention will be described below.
本発明で用いる(A)エポキシ樹脂としては、電子部品用途として使用されている公知のエポキシ樹脂を用いることができ、特に限定されないが、例えば、フェノールノボラック型エポキシ樹脂、オルソクレゾールノボラック型エポキシ樹脂をはじめとするフェノール類とアルデヒド類のノボラック樹脂をエポキシ化したもの、ビスフェノールA、ビスフェノールF、ビスフェノールS、アルキル置換ビスフェノール等のジグリシジルエーテル、ジアミノジフェニルメタン、イソシアヌル酸等のポリアミンとエピクロルヒドリンの反応により得られるグリシジルアミン型エポキシ樹脂、オレフィン結合を過酢酸等の過酸で酸化して得られる線状脂肪族エポキシ樹脂、及び脂環族エポキシ樹脂等があり、これらを適宜何種類でも併用することができる。また、これらのうち比較的着色のないものが好ましく、例えば、ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ビスフェノールS型エポキシ樹脂、ジグリシジルイソシアヌレート、トリグリシジルイソシアヌレートを挙げることができる。 As the (A) epoxy resin used in the present invention, known epoxy resins used for electronic parts can be used, and are not particularly limited. For example, phenol novolac type epoxy resins and orthocresol novolak type epoxy resins are used. Obtained by reaction of epichlorhydrin with epoxidized novolak resins of phenols and aldehydes such as bisphenol A, bisphenol F, bisphenol S, diglycidyl ethers such as alkyl-substituted bisphenol, polyamines such as diaminodiphenylmethane and isocyanuric acid There are glycidylamine type epoxy resins, linear aliphatic epoxy resins obtained by oxidizing olefinic bonds with peracids such as peracetic acid, and alicyclic epoxy resins. Kill. Among these, those having relatively little color are preferable, and examples thereof include bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, diglycidyl isocyanurate, and triglycidyl isocyanurate.
本発明で用いる(B)硬化剤としては、(A)エポキシ樹脂と反応するものであれば、特に制限なく用いることができ、例えば、酸無水物系硬化剤、イソシアヌル酸骨格を有する化合物(イソシアヌル酸誘導体)、フェノール系硬化剤などが挙げられる。より具体的には、酸無水物系硬化剤として、例えば、無水フタル酸、無水マレイン酸、無水トリメリット酸、無水ピロメリット酸、ヘキサヒドロ無水フタル酸、テトラヒドロ無水フタル酸、無水メチルナジック酸、無水ナジック酸、無水グルタル酸、無水ジメチルグルタル酸、無水ジエチルグルタル酸、無水コハク酸、メチルヘキサヒドロ無水フタル酸、メチルテトラヒドロ無水フタル酸が挙げられ、イソシアヌル酸誘導体として、例えば、1,3,5−トリス(1−カルボキシメチル)イソシアヌレート、1,3,5−トリス(2−カルボキシエチル)イソシアヌレート、1,3,5−トリス(3−カルボキシプロピル)イソシアヌレート、1,3−ビス(2−カルボキシエチル)イソシアヌレートなどが挙げられ、これらは単独で用いても、二種以上併用しても良い。また、上記硬化剤の中では、無水フタル酸、無水トリメリット酸、ヘキサヒドロ無水フタル酸、テトラヒドロ無水フタル酸、メチルヘキサヒドロ無水フタル酸、メチルテトラヒドロ無水フタル酸、無水グルタル酸、無水ジメチルグルタル酸、無水ジエチルグルタル酸、1,3,5−トリス(3−カルボキシプロピル)イソシアヌレートを用いることが好ましい。 The (B) curing agent used in the present invention can be used without particular limitation as long as it reacts with the (A) epoxy resin. For example, an acid anhydride curing agent, a compound having an isocyanuric acid skeleton (isocyanuric) Acid derivatives) and phenolic curing agents. More specifically, as the acid anhydride curing agent, for example, phthalic anhydride, maleic anhydride, trimellitic anhydride, pyromellitic anhydride, hexahydrophthalic anhydride, tetrahydrophthalic anhydride, methyl nadic anhydride, anhydrous Nadic acid, glutaric anhydride, dimethyl glutaric anhydride, diethyl glutaric anhydride, succinic anhydride, methyl hexahydrophthalic anhydride, methyl tetrahydrophthalic anhydride, and isocyanuric acid derivatives include, for example, 1,3,5- Tris (1-carboxymethyl) isocyanurate, 1,3,5-tris (2-carboxyethyl) isocyanurate, 1,3,5-tris (3-carboxypropyl) isocyanurate, 1,3-bis (2- Carboxyethyl) isocyanurate, etc., and these are used alone , It may be used in combination of two or more. Among the above curing agents, phthalic anhydride, trimellitic anhydride, hexahydrophthalic anhydride, tetrahydrophthalic anhydride, methylhexahydrophthalic anhydride, methyltetrahydrophthalic anhydride, glutaric anhydride, dimethylglutaric anhydride, It is preferable to use diethyl glutaric anhydride and 1,3,5-tris (3-carboxypropyl) isocyanurate.
また、上記(B)硬化剤は、その分子量が100〜400程度のものが好ましく、また、無色ないし淡黄色のものが好ましい。また、本発明で用いる(B)硬化剤としては、イソシアヌル酸誘導体単独、またはイソシアヌル酸誘導体と酸無水物を含むもの、またはイソシアヌル酸誘導体と融点が35℃以上の酸無水物を含むものを用いることが特に好ましい。イソシアヌル酸誘導体と酸無水物の配合比は、1:0〜10の範囲が好ましく、1:1〜3の範囲であることが、コスト削減と樹脂の黄変による反射率の低下抑制の観点から好ましい。 The (B) curing agent preferably has a molecular weight of about 100 to 400, and is preferably colorless or light yellow. In addition, as the curing agent (B) used in the present invention, an isocyanuric acid derivative alone, an isocyanuric acid derivative and an acid anhydride, or an isocyanuric acid derivative and an acid anhydride having a melting point of 35 ° C. or higher are used. It is particularly preferred. The blending ratio of the isocyanuric acid derivative and the acid anhydride is preferably in the range of 1: 0 to 10, and is in the range of 1: 1 to 3 from the viewpoint of cost reduction and suppression of reduction in reflectance due to yellowing of the resin. preferable.
(A)エポキシ樹脂と(B)硬化剤の配合比は、エポキシ樹脂中のエポキシ基1当量に対して、硬化剤におけるエポキシ基との反応可能な活性基(酸無水物基または水酸基)が、好ましくは0.5〜1.5当量、さらには、0.7〜1.2当量となるような割合であることが好ましい。活性基が0.5当量未満の場合には、エポキシ樹脂組成物の硬化速度が遅くなるとともに、得られる硬化体のガラス転移温度が低くなる場合があり、一方、1.5当量を超えると、耐湿性が低下する場合がある。 The compounding ratio of (A) epoxy resin and (B) curing agent is such that the active group (an acid anhydride group or hydroxyl group) capable of reacting with the epoxy group in the curing agent is equivalent to 1 equivalent of epoxy group in the epoxy resin. The ratio is preferably 0.5 to 1.5 equivalents, and more preferably 0.7 to 1.2 equivalents. When the active group is less than 0.5 equivalent, the curing rate of the epoxy resin composition is slowed down, and the glass transition temperature of the resulting cured product may be low. On the other hand, when it exceeds 1.5 equivalent, Moisture resistance may be reduced.
本発明で用いる(C)無機充填材としては、特に限定されないが、例えば、シリカ、アルミナ、酸化マグネシウム、酸化アンチモン、酸化チタン、酸化ジルコニウム、水酸化アルミニウム、水酸化マグネシウム、硫酸バリウム、炭酸マグネシウム、炭酸バリウムからなる群の中から選ばれる少なくとも1種以上を用いることができるが、熱伝導性、光反射特性、成型性、難燃性の点からシリカ、アルミナ、酸化マグネシウム、酸化アンチモン、酸化チタン、酸化ジルコニウム、水酸化アルミニウム、水酸化マグネシウムの混合物が好ましい。また、(C)無機充填材の平均粒径は特に限定されるものではないが、(D)白色顔料とのパッキングが効率良くなるように1〜100μmの範囲のものを用いることが好ましい。 The inorganic filler (C) used in the present invention is not particularly limited. For example, silica, alumina, magnesium oxide, antimony oxide, titanium oxide, zirconium oxide, aluminum hydroxide, magnesium hydroxide, barium sulfate, magnesium carbonate, At least one selected from the group consisting of barium carbonate can be used, but silica, alumina, magnesium oxide, antimony oxide, titanium oxide are used in terms of thermal conductivity, light reflection characteristics, moldability, and flame retardancy. A mixture of zirconium oxide, aluminum hydroxide and magnesium hydroxide is preferred. The average particle diameter of the inorganic filler (C) is not particularly limited, but it is preferable to use an inorganic filler in the range of 1 to 100 μm so that packing with the (D) white pigment is efficient.
本発明で用いる(D)白色顔料としては、特に限定されないが、例えば、アルミナ、酸化マグネシウム、酸化アンチモン、酸化チタン、酸化ジルコニウム、無機中空粒子などを用いることができる。無機中空粒子としては、例えば、珪酸ソーダガラス、アルミ珪酸ガラス、硼珪酸ソーダガラス、シラス等が挙げられる。また、(D)白色顔料の平均粒径は、1〜50μmの範囲にあることが好ましい。(D)白色顔料の平均粒径が1μm未満であると粒子が凝集しやすく分散性が悪くなる傾向にあり、50μmを超えると反射特性が十分に得られない傾向にある。なお、上記(D)白色顔料として、アルミナ等の上記(C)無機充填材として使用可能な成分と同一成分を同時に選択することも可能である。但し、同一成分を選択した場合であっても、それらは独立した(C)無機充填材および(D)白色顔料の各成分として区別して考えることを意図している。 Although it does not specifically limit as (D) white pigment used by this invention, For example, an alumina, magnesium oxide, an antimony oxide, a titanium oxide, a zirconium oxide, an inorganic hollow particle etc. can be used. Examples of the inorganic hollow particles include sodium silicate glass, aluminum silicate glass, borosilicate soda glass, and shirasu. Moreover, it is preferable that the average particle diameter of (D) white pigment exists in the range of 1-50 micrometers. (D) When the average particle diameter of the white pigment is less than 1 μm, the particles tend to aggregate and the dispersibility tends to deteriorate, and when it exceeds 50 μm, the reflection characteristics tend not to be sufficiently obtained. In addition, as said (D) white pigment, it is also possible to select simultaneously the same component as the component which can be used as said (C) inorganic fillers, such as an alumina. However, even when the same components are selected, they are intended to be distinguished as independent components of (C) inorganic filler and (D) white pigment.
上記(C)無機充填剤と上記(D)白色顔料の合計配合量は、樹脂組成物全体に対して、10体積%〜85体積%の範囲であることが好ましい。この配合量が10体積%未満であると樹脂組成物の硬化物の光反射特性が不十分になる恐れがあり、85体積%を超えると樹脂組成物の成型性が悪くなり、光半導体搭載用基板の作製が困難となる。 The total amount of the (C) inorganic filler and the (D) white pigment is preferably in the range of 10% to 85% by volume with respect to the entire resin composition. If the blending amount is less than 10% by volume, the light reflection property of the cured product of the resin composition may be insufficient, and if it exceeds 85% by volume, the moldability of the resin composition is deteriorated, and the optical semiconductor mounting. It becomes difficult to produce the substrate.
本発明の樹脂組成物は、上述の(A)〜(D)を必須成分とするが、(E)硬化促進剤および(F)カップリング剤をさらに含むことが好ましい。 The resin composition of the present invention contains the above-mentioned (A) to (D) as essential components, but preferably further includes (E) a curing accelerator and (F) a coupling agent.
本発明で用いる(E)硬化促進剤としては、特に限定されるものではなく、例えば、1,8−ジアザ−ビシクロ(5,4,0)ウンデセン−7、トリエチレンジアミン、トリ−2,4,6−ジメチルアミノメチルフェノールなどの3級アミン類、2−エチル−4メチルイミダゾール、2−メチルイミダゾールなどのイミダゾール類、トリフェニルホスフィン、テトラフェニルホスホニウムテトラフェニルボレート、テトラ−n−ブチルホスホニウム−o,o−ジエチルホスホロジチオエート、テトラ−n−ブチルホスホニウム−テトラフルオロボレート、テトラ−n−ブチルホスホニウム−テトラフェニルボレートなどのリン化合物、4級アンモニウム塩、有機金属塩類、およびこれらの誘導体などが挙げられる。これらは単独で使用してもよく、あるいは、併用してもよい。これらの硬化促進剤の中では、3級アミン類、イミダゾール類、リン化合物を用いることが好ましい。 The (E) curing accelerator used in the present invention is not particularly limited. For example, 1,8-diaza-bicyclo (5,4,0) undecene-7, triethylenediamine, tri-2,4, Tertiary amines such as 6-dimethylaminomethylphenol, imidazoles such as 2-ethyl-4methylimidazole and 2-methylimidazole, triphenylphosphine, tetraphenylphosphonium tetraphenylborate, tetra-n-butylphosphonium-o, Phosphorus compounds such as o-diethyl phosphorodithioate, tetra-n-butylphosphonium-tetrafluoroborate, tetra-n-butylphosphonium-tetraphenylborate, quaternary ammonium salts, organometallic salts, and derivatives thereof It is done. These may be used alone or in combination. Among these curing accelerators, it is preferable to use tertiary amines, imidazoles, and phosphorus compounds.
上記(E)硬化促進剤の含有率は、(A)エポキシ樹脂に対して、0.01〜8.0重量%であることが好ましく、より好ましくは、0.1〜3.0重量%である。硬化促進剤の含有率が、0.01重量%未満では、十分な硬化促進効果を得られない場合があり、また、8.0重量%を超えると、得られる着色体に変色が見られる場合がある。 The content of the (E) curing accelerator is preferably 0.01 to 8.0% by weight, more preferably 0.1 to 3.0% by weight with respect to the (A) epoxy resin. is there. When the content of the curing accelerator is less than 0.01% by weight, a sufficient curing acceleration effect may not be obtained. When the content exceeds 8.0% by weight, discoloration is observed in the resulting colored product. There is.
本発明で用いる(F)カップリング剤としては、特に限定されないが、例えば、シラン系カップリング剤やチタネート系カップリング剤等を用いることができ、シランカップリング剤としては、例えば、エポキシシラン系、アミノシラン系、カチオニックシラン系、ビニルシラン系、アクリルシラン系、メルカプトシラン系、およびこれらの複合系等を用いることができる。カップリング剤の種類や処理条件は特に限定しないが、カップリング剤の配合量は、保存安定性の観点から、樹脂組成物全体に対して、5重量%以下であることが好ましい。 Although it does not specifically limit as (F) coupling agent used by this invention, For example, a silane coupling agent, a titanate coupling agent, etc. can be used, As an silane coupling agent, it is an epoxy silane type, for example. Amino silane, cationic silane, vinyl silane, acrylic silane, mercapto silane, and composites thereof can be used. The type and treatment conditions of the coupling agent are not particularly limited, but the amount of the coupling agent is preferably 5% by weight or less with respect to the entire resin composition from the viewpoint of storage stability.
さらに本発明の樹脂組成物には、上述の成分(A)〜(F)に加え、必要に応じて、酸化防止剤、離型剤、イオン捕捉剤等の公知の添加剤を配合してもよい。 Furthermore, in addition to the above-mentioned components (A) to (F), the resin composition of the present invention may contain known additives such as antioxidants, mold release agents, and ion scavengers as necessary. Good.
本発明の熱硬化性光反射用樹脂組成物は、上記した各種成分を均一に分散混合することで得ることができ、その手段や条件等は特に限定されないが、一般的な手法として、所定配合量の成分をミキサー等によって十分均一に撹拌、混合した後、ミキシングロール、押出機、ニーダー、ロール、エクストルーダー等によって混練し、さらに、冷却、粉砕する方法を挙げることができる。 The thermosetting light reflecting resin composition of the present invention can be obtained by uniformly dispersing and mixing the various components described above, and the means and conditions thereof are not particularly limited. An example is a method in which an amount of components are sufficiently uniformly stirred and mixed by a mixer or the like, then kneaded by a mixing roll, an extruder, a kneader, a roll, an extruder, or the like, and further cooled and pulverized.
また、本発明の熱硬化性光反射用樹脂組成物は、熱硬化前、室温(0〜35℃)において加圧成型可能であり、熱硬化後の、波長350nm〜800nmにおける光反射率が90%以上であることが望ましい。上記加圧成型は、例えば、室温において、0.5〜2MPa、1〜5秒程度の条件下で行うことができればよい。また、上記光反射率が90%未満であると、光半導体装置の輝度向上に十分寄与できない傾向がある。 Moreover, the thermosetting light reflecting resin composition of the present invention can be pressure-molded at room temperature (0 to 35 ° C.) before thermosetting, and has a light reflectance at a wavelength of 350 nm to 800 nm after thermosetting of 90. % Or more is desirable. The said press molding should just be performed on the conditions of about 0.5-2 MPa and about 1-5 second at room temperature, for example. Further, if the light reflectance is less than 90%, there is a tendency that it cannot sufficiently contribute to the improvement of the luminance of the optical semiconductor device.
本発明の光半導体素子搭載用基板は、光半導体素子搭載領域となる凹部が1つ以上形成されており、少なくとも前記凹部の内周側面が本発明の熱硬化性光反射用樹脂組成物からなることを特徴とするものである。図1は、本発明の光半導体素子搭載用基板の一実施形態を示すものであり、(a)は斜視図、(b)は側面断面図である。図1に示す本発明の光半導体素子搭載用基板110では、光半導体素子搭載領域(凹部)200の側壁が本発明の熱硬化性光反射用樹脂組成物からなり、当該凹部底面を形成するように上記樹脂組成物を挟んで対向配置された一対の正負の金属配線105の露出表面がNi/Agめっき104により覆われている。
The substrate for mounting an optical semiconductor element of the present invention has one or more recesses to be an optical semiconductor element mounting region, and at least the inner peripheral side surface of the recess is made of the thermosetting light reflecting resin composition of the present invention. It is characterized by this. FIG. 1 shows one embodiment of a substrate for mounting an optical semiconductor element of the present invention, in which (a) is a perspective view and (b) is a side sectional view. In the optical semiconductor
本発明の光半導体素子搭載用基板の製造方法は、特に限定されないが、例えば、本発明の熱硬化性光反射用樹脂組成物をトランスファー成型により成型し、製造することが好ましい。図2は、本発明の光半導体素子搭載用基板の製造方法を説明する概略図であり、(a)〜(c)はトランスファーモールド成型により基板を製造する場合の各工程に対応する。より具体的には、光半導体素子搭載用基板は、例えば、図2(a)に示すように、金属箔から打ち抜きやエッチング等の公知の方法により金属配線105を形成し、ついで、該金属配線105を所定形状の金型301に配置し(図2(b))、金型301の樹脂注入口300から本発明の熱硬化性光反射用樹脂組成物を注入し、これを好ましくは金型温度170〜190℃、成型圧力2〜8MPaで60〜120秒、アフターキュア温度120℃〜180℃で1〜3時間の条件にて熱硬化させた後、金型301を外し、硬化した熱硬化性光反射用樹脂組成物からなるリフレクター103に周囲を囲まれてなる光半導体素子搭載領域(凹部)200の所定位置に、電気めっきによりNi/銀めっき104を施すことで製造することができる(図2(c))。
Although the manufacturing method of the optical semiconductor element mounting substrate of this invention is not specifically limited, For example, it is preferable to shape | mold and manufacture the thermosetting light reflection resin composition of this invention by transfer molding. FIG. 2 is a schematic diagram for explaining a method for manufacturing a substrate for mounting an optical semiconductor element according to the present invention, and (a) to (c) correspond to respective steps when a substrate is manufactured by transfer molding. More specifically, for example, as shown in FIG. 2A, the substrate for mounting an optical semiconductor element is formed with a
また、本発明の光半導体素子搭載用基板を用いた光半導体装置は、例えば、本発明の光半導体素子搭載用基板と、光半導体素子搭載用基板の凹部底面に搭載される光半導体素子と、光半導体素子を覆うように凹部内に形成される蛍光体含有透明封止樹脂層と、を少なくとも備える。図3(a)および図3(b)は、それぞれ本発明の光半導体装置の一実施形態を示す側面断面図である。より具体的には、図3に示した光半導体装置は、本発明の光半導体素子搭載用基板110の光半導体素子搭載領域(凹部)200の底部所定位置に光半導体素子100が搭載され、該光半導体素子100と金属配線105とがボンディングワイヤ102やはんだバンプ107などの公知の方法により電気的に接続され、該光半導体素子100が公知の蛍光体106を含む透明封止樹脂101により覆われている。
An optical semiconductor device using the optical semiconductor element mounting substrate of the present invention includes, for example, an optical semiconductor element mounting substrate of the present invention, an optical semiconductor element mounted on the bottom surface of the recess of the optical semiconductor element mounting substrate, And a phosphor-containing transparent sealing resin layer formed in the recess so as to cover the optical semiconductor element. FIG. 3A and FIG. 3B are side sectional views showing an embodiment of the optical semiconductor device of the present invention. More specifically, in the optical semiconductor device shown in FIG. 3, the
以下、本発明を実施例により詳述するが、本発明はこれらに限定されるものではない。 EXAMPLES Hereinafter, although an Example explains this invention in full detail, this invention is not limited to these.
<熱硬化性光反射用樹脂組成物の作製>
(実施例1〜3及び比較例1,2)
下記表1に示す組成の材料を配合し、ミキサーによって十分混合した後、ミキシングロールにより溶融混練した後、室温まで冷却し、粉砕して、実施例1〜3、比較例1および2の熱硬化性光反射用樹脂組成物を作製した。
<Preparation of thermosetting light reflecting resin composition>
(Examples 1 to 3 and Comparative Examples 1 and 2)
The materials shown in Table 1 below were blended, mixed thoroughly by a mixer, melt-kneaded by a mixing roll, cooled to room temperature, pulverized, and heat-cured in Examples 1 to 3 and Comparative Examples 1 and 2. The resin composition for reflective light reflection was produced.
<光反射性試験>
実施例1〜3及び比較例1,2の光反射樹脂組成物を、金型温度180℃、成型圧力6.9MPa、キュア時間90秒の条件でトランスファー成型した後、150℃で2時間ポストキュアすることにより、厚み1.0mmのテストピースを作製した。ついで、作製した各テストピースの、波長350〜800nmにおける光反射率を積分球型分光光度計V−750型(日本分光株式会社製)にて測定した。結果を下記表1に示す。
<Light reflectivity test>
The light reflecting resin compositions of Examples 1 to 3 and Comparative Examples 1 and 2 were transfer molded under conditions of a mold temperature of 180 ° C., a molding pressure of 6.9 MPa, and a curing time of 90 seconds, and then post-cured at 150 ° C. for 2 hours. As a result, a test piece having a thickness of 1.0 mm was produced. Subsequently, the light reflectance in the wavelength of 350-800 nm of each produced test piece was measured with the integrating sphere type spectrophotometer V-750 type (made by JASCO Corporation). The results are shown in Table 1 below.
<バリ評価>
実施例1〜3及び比較例1,2の光反射樹脂組成物を、ポットより、それぞれ75,50,30,20,10,2μmの深さのスリットを設けた金型に流し込み、上記光反射性試験のテストピースと同様にして硬化させた後、得られた硬化物のバリ(各スリット内に流れ込んで硬化した樹脂組成物)の長さをノギスで測定した。各スリットにおけるバリ長さが全て2mm未満の場合を良好とし、2mm以上のバリがある場合をNGとして評価した。結果を下記表1に示す。
The light reflecting resin compositions of Examples 1 to 3 and Comparative Examples 1 and 2 were poured from a pot into a mold provided with a slit having a depth of 75, 50, 30, 20, 10, and 2 μm, respectively, and the light reflection was performed. After curing in the same manner as the test piece of the property test, the length of the burrs of the obtained cured product (the resin composition cured by flowing into each slit) was measured with a caliper. The case where the burr length in each slit was all less than 2 mm was good, and the case where there was a burr of 2 mm or more was evaluated as NG. The results are shown in Table 1 below.
注記:
(1)配合量の単位は、全て重量部である。
(2)各成分の詳細は以下のとおりである。
TEPIC−S:トリグリシジルイソシアヌレート(エポキシ当量100、日産化学社製)
HHPA:ヘキサヒドロ無水フタル酸(新日本理化製、リカシッドHH、融点35℃)
C3CIC酸:1,3,5−トリス(3−カルボキシプロピル)イソシアヌレート(四国化成工業社製)
ヒシリコーンPX−4ET:テトラ−n−ブチルホスホニウム−o,o−ジエチルホスホロジチオエート(日本化学工業社製)
FB−301:溶融シリカ(平均粒径5.8μm、電気化学工業社製)
AO−802:アルミナ(平均粒径1μm以下、アドマッテクス社製)
グラスバブルズS60HS:ほう珪酸ガラス(平均粒径20μm以下、住友3M社製)
SH6040:エポキシシラン(東レダウコーニング社製)
HW−E:モンタン酸エステル(クラリアント社製)
ユトニックス420:アルキルポリエーテル(東洋ペトロライト社製)
(3)ロール温度(℃)前/後とは、2本ロールによる混練時の前ロールおよび後ロールにおける各温度を示す。
Note:
(1) The unit of the amount is all parts by weight.
(2) Details of each component are as follows.
TEPIC-S: Triglycidyl isocyanurate (epoxy equivalent 100, manufactured by Nissan Chemical Co., Ltd.)
HHPA: Hexahydrophthalic anhydride (manufactured by Nippon Nippon Chemical Co., Ltd., Ricacid HH, melting point 35 ° C.)
C3CIC acid: 1,3,5-tris (3-carboxypropyl) isocyanurate (manufactured by Shikoku Chemicals)
Hysilicone PX-4ET: Tetra-n-butylphosphonium-o, o-diethyl phosphorodithioate (manufactured by Nippon Chemical Industry Co., Ltd.)
FB-301: fused silica (average particle size 5.8 μm, manufactured by Denki Kagaku Kogyo Co., Ltd.)
AO-802: Alumina (average particle size of 1 μm or less, manufactured by Admatex)
Glass Bubbles S60HS: Borosilicate glass (average particle size of 20 μm or less, manufactured by Sumitomo 3M)
SH6040: Epoxysilane (Toray Dow Corning)
HW-E: Montanate ester (manufactured by Clariant)
Jutonix 420: alkyl polyether (manufactured by Toyo Petrolite)
(3) “Before / after roll temperature (° C.)” indicates each temperature at the front roll and the rear roll during kneading with two rolls.
表1に示したように、本発明による熱硬化性光反射用樹脂組成物は、光反射特性に優れ、バリを低減することが可能である。 As shown in Table 1, the thermosetting light reflecting resin composition according to the present invention is excellent in light reflecting properties and can reduce burrs.
<タブレット成型試験>
各実施例および各比較例で調製した樹脂組成物をタブレット成型用金型に注入し、室温(25℃)、5MPa、10MPa、および30MPaの各成型圧力で、3秒間にわたって加圧することによってタブレットを成型した。なお、成型時には、図5に示すような臼501と、上杵502および下杵503から構成されるアルミナ製金型であり、樹脂組成物504と接触する臼と杵の表面が超硬合金で被覆されているものを使用した。
<Tablet molding test>
The resin composition prepared in each example and each comparative example was poured into a tablet molding die, and the tablet was pressed by pressurizing at room temperature (25 ° C.), 5 MPa, 10 MPa, and 30 MPa for 3 seconds. Molded. At the time of molding, an alumina mold composed of a die 501 as shown in FIG. 5 and an
上述のようして作製した各々のタブレットについて、成型時の杵表面への樹脂組成物の付着、およびそれに伴うタブレットの破壊、ならびにタブレットのひび割れを評価した。評価結果を表2に示す。
注記:
(1)杵表面への樹脂組成物の付着、またはそれに伴う破損に関する評価基準
○:目視にて杵表面への貼り付きが確認できない、またはそれによる破損がない。
×:目視にて杵表面への貼り付きが認められる、またはそれによる破損が認められる。
(2)タブレットのひび割れに関する評価基準
○:目視にてタブレットのひび割れが確認できない。
×:目視にてタブレットのひび割れが認められる。
Note:
(1) Evaluation criteria for adhesion of the resin composition to the surface of the ridge or damage accompanying it
○: Sticking to the surface of the wrinkles cannot be confirmed by visual inspection, or there is no damage caused by it.
X: Sticking on the surface of the wrinkle is recognized visually, or damage by it is recognized.
(2) Evaluation criteria for tablet cracks
○: The tablet cannot be visually confirmed.
X: The crack of a tablet is recognized visually.
100・・・・・光半導体素子(LED素子)
101・・・・・透明封止樹脂
102・・・・・ボンディングワイヤ
103・・・・・リフレクター(熱硬化性光反射用樹脂組成物)
104・・・・・Ni/Agめっき
105・・・・・金属配線
106・・・・・蛍光体
107・・・・・はんだバンプ
110・・・・・光半導体素子搭載用基板
200・・・・・光半導体素子搭載領域(凹部)
300・・・・・樹脂注入口
301・・・・・金型
400・・・・・LED素子
401・・・・・ボンディングワイヤ
402・・・・・透明封止樹脂
403・・・・・リフレクター
404・・・・・リード
405・・・・・蛍光体
406・・・・・ダイボンド材
500・・・・・タブレット成型用金型
501・・・・・臼
502・・・・・上杵
503・・・・・下杵
504・・・・・タブレット(熱硬化性光反射用樹脂組成物)
505・・・・・付着物
100 ... Optical semiconductor element (LED element)
101... Transparent sealing
104... Ni / Ag plating 105...
300 ...
505 ... Deposits
Claims (8)
前記光半導体素子搭載用基板の凹部底面に搭載される光半導体素子と、
前記光半導体素子を覆うように前記凹部内に形成される蛍光体含有透明封止樹脂層と、
を備える光半導体装置。 An optical semiconductor element mounting substrate according to claim 6 or an optical semiconductor element mounting substrate manufactured by the manufacturing method according to claim 7 ;
An optical semiconductor element mounted on the bottom of the recess of the optical semiconductor element mounting substrate;
A phosphor-containing transparent sealing resin layer formed in the recess so as to cover the optical semiconductor element;
An optical semiconductor device comprising:
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US9450158B2 (en) | 2013-05-28 | 2016-09-20 | Nitto Denko Corporation | Epoxy resin composition for optical semiconductor device, and lead frame for optical semiconductor device, encapsulation type optical semiconductor element unit and optical semiconductor device each obtainable by using the epoxy resin composition |
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JP2007297601A (en) * | 2006-04-06 | 2007-11-15 | Hitachi Chem Co Ltd | Thermosetting resin composition for light reflection, substrate for loading photosemiconductor device using the same, method for producing the same, and photosemiconductor device |
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