JP5228170B2 - 温度制御装置 - Google Patents
温度制御装置 Download PDFInfo
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- JP5228170B2 JP5228170B2 JP2007107407A JP2007107407A JP5228170B2 JP 5228170 B2 JP5228170 B2 JP 5228170B2 JP 2007107407 A JP2007107407 A JP 2007107407A JP 2007107407 A JP2007107407 A JP 2007107407A JP 5228170 B2 JP5228170 B2 JP 5228170B2
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- Prior art keywords
- temperature
- refrigerant
- temperature control
- compressor
- bypass
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- 239000003507 refrigerant Substances 0.000 claims description 105
- 238000010992 reflux Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 description 13
- 239000003595 mist Substances 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 10
- 230000020169 heat generation Effects 0.000 description 5
- 238000011056 performance test Methods 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000013021 overheating Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
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- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Description
12 温度制御ヘッド
14b 電気ヒータ
15A、15B、23 バイパス路
18 コンプレッサ
T1P、T2P 温度センサ
31 システムコントローラ
Claims (6)
- テスト対象の電子デバイスに熱接触される温度制御ヘッドと、
この温度制御ヘッドに取り付けられた電気ヒータと、
この温度制御ヘッド内に形成されその内部を貫流する冷媒通路と、
前記電子デバイスの温度を検知する第1の温度センサと、
前記温度制御ヘッドを出た冷媒を圧縮するコンプレッサと、
このコンプレッサの出口側における冷媒の温度を検知する第2の温度センサと、
前記コンプレッサから出た冷媒を凝縮するコンデンサと、
このコンデンサにより凝縮された冷媒を前記温度制御ヘッドに還流させる還流路と、
前記コンデンサにより凝縮された冷媒を前記温度制御ヘッドをバイパスさせて前記コンプレッサに還流させる互いに並列に接続された第1、第2のバイパス路を含むバイパス部と、
前記第1の温度センサの出力に応じて前記電気ヒータの通電量および前記第1のバイパス路を流れる冷媒量および前記温度制御ヘッド内部の冷媒通路を貫流する冷媒量を制御して前記電子デバイスの温度を制御する第1の制御部と、
前記第2の温度センサの出力に応じて前記第2のバイパス路を流れる冷媒量を制御して前記コンプレッサの入り口側における前記冷媒の温度を制御する第2の制御部と、
を具備する温度制御装置。 - 前記第2の制御部は、前記第2の温度センサの出力温度値を予め設定された前記コンプレッサの出口側の冷媒の温度の上限値と比較してこの上限値を越えた時に前記第2のバイパス路に前記冷媒をバイパスさせる手段を含む、請求項1に記載の温度制御装置。
- 前記バイパス部は、前記第2のバイパス路に設けられた電磁バルブと、前記第2のバイパス路を流れる冷媒を前記電磁バルブによりオンオフさせる手段とを含む、請求項1に記載の温度制御装置。
- 前記第1、第2の制御部の少なくとも一方はPID制御のためのコントローラを含む、請求項1に記載の温度制御装置。
- 前記バイパス部は更に、前記コンプレッサの出口側の冷媒を前記コンデンサをバイパスさせて前記還流路に流す第3のバイパス路を含む、請求項1に記載の温度制御装置。
- 前記第3のバイパス路は途中に前記コンプレッサからの冷媒の流量を制御するための制御バルブを含む、請求項5に記載の温度制御装置。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/405,423 US20070240870A1 (en) | 2006-04-18 | 2006-04-18 | Temperature control apparatus |
US11/405,423 | 2006-04-18 | ||
US11/705,452 US7819179B2 (en) | 2006-04-18 | 2007-02-13 | Temperature control apparatus |
US11/705,452 | 2007-02-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007288197A JP2007288197A (ja) | 2007-11-01 |
JP5228170B2 true JP5228170B2 (ja) | 2013-07-03 |
Family
ID=38759610
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007107407A Active JP5228170B2 (ja) | 2006-04-18 | 2007-04-16 | 温度制御装置 |
Country Status (1)
Country | Link |
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JP (1) | JP5228170B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8875528B2 (en) * | 2007-12-14 | 2014-11-04 | Venturedyne, Ltd. | Test chamber with temperature and humidity control |
KR20210018762A (ko) * | 2019-08-09 | 2021-02-18 | 에이에스엠 아이피 홀딩 비.브이. | 온도 제어된 화학물질 전달 시스템 및 이를 포함하는 반응기 시스템 |
CN115167559B (zh) * | 2022-06-23 | 2023-11-17 | 北京京仪自动化装备技术股份有限公司 | 温控系统的控制方法、控制系统及温控系统 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2923133B2 (ja) * | 1992-07-31 | 1999-07-26 | 三菱重工業株式会社 | 冷凍装置 |
JP2002134664A (ja) * | 2000-10-20 | 2002-05-10 | Hitachi Ltd | 半導体冷却装置及びその制御方法 |
US6668570B2 (en) * | 2001-05-31 | 2003-12-30 | Kryotech, Inc. | Apparatus and method for controlling the temperature of an electronic device under test |
JP3662238B2 (ja) * | 2002-01-10 | 2005-06-22 | エスペック株式会社 | 冷却装置及び恒温装置 |
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2007
- 2007-04-16 JP JP2007107407A patent/JP5228170B2/ja active Active
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Publication number | Publication date |
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JP2007288197A (ja) | 2007-11-01 |
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