JP5226271B2 - 微小電子機械デバイス - Google Patents

微小電子機械デバイス Download PDF

Info

Publication number
JP5226271B2
JP5226271B2 JP2007266574A JP2007266574A JP5226271B2 JP 5226271 B2 JP5226271 B2 JP 5226271B2 JP 2007266574 A JP2007266574 A JP 2007266574A JP 2007266574 A JP2007266574 A JP 2007266574A JP 5226271 B2 JP5226271 B2 JP 5226271B2
Authority
JP
Japan
Prior art keywords
comb
proof mass
fixed
fixed comb
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007266574A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008096441A (ja
JP2008096441A5 (enExample
Inventor
マーク・ダブリュー・ウェーバー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of JP2008096441A publication Critical patent/JP2008096441A/ja
Publication of JP2008096441A5 publication Critical patent/JP2008096441A5/ja
Application granted granted Critical
Publication of JP5226271B2 publication Critical patent/JP5226271B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2007266574A 2006-10-12 2007-10-12 微小電子機械デバイス Expired - Fee Related JP5226271B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/548,966 2006-10-12
US11/548,966 US7383729B2 (en) 2006-10-12 2006-10-12 Tuning fork gyro with sense plate read-out

Publications (3)

Publication Number Publication Date
JP2008096441A JP2008096441A (ja) 2008-04-24
JP2008096441A5 JP2008096441A5 (enExample) 2010-11-25
JP5226271B2 true JP5226271B2 (ja) 2013-07-03

Family

ID=38828701

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007266574A Expired - Fee Related JP5226271B2 (ja) 2006-10-12 2007-10-12 微小電子機械デバイス

Country Status (3)

Country Link
US (1) US7383729B2 (enExample)
EP (1) EP1914511B1 (enExample)
JP (1) JP5226271B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8664951B2 (en) 2009-03-30 2014-03-04 Honeywell International Inc. MEMS gyroscope magnetic sensitivity reduction
US8418555B2 (en) * 2009-06-26 2013-04-16 Honeywell International Inc. Bidirectional, out-of-plane, comb drive accelerometer
CN101876547B (zh) * 2009-12-08 2011-11-02 北京大学 一种采用静电平衡梳齿驱动器的水平轴微机械音叉陀螺
CN102798386A (zh) * 2011-05-25 2012-11-28 上海飞恩微电子有限公司 三自由度谐振硅微机械陀螺仪
JP5889396B2 (ja) * 2012-03-19 2016-03-22 日立オートモティブシステムズ株式会社 角速度センサ
SE537998C2 (sv) 2014-05-09 2016-02-02 Per-Axel Uhlin Vibrationssensor av magnetisk typ
CN114740224B (zh) * 2022-05-18 2024-05-07 南京工程学院 一种力平衡式硅微谐振加速度计

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3385688B2 (ja) * 1993-12-13 2003-03-10 株式会社デンソー 半導体ヨーレートセンサおよびその製造方法
US5481914A (en) 1994-03-28 1996-01-09 The Charles Stark Draper Laboratory, Inc. Electronics for coriolis force and other sensors
US5911156A (en) * 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
JP2000131074A (ja) * 1998-10-28 2000-05-12 Aisin Seiki Co Ltd 静電駆動の角速度検出装置
JP2000146592A (ja) * 1998-11-16 2000-05-26 Toyota Central Res & Dev Lab Inc 振動式検出器
KR100316774B1 (ko) * 1999-01-15 2001-12-12 이형도 마이크로 관성 센서의 제작 방법
JP3659160B2 (ja) * 2000-02-18 2005-06-15 株式会社デンソー 角速度センサ
JP4174351B2 (ja) * 2002-03-15 2008-10-29 株式会社豊田中央研究所 可動電極を有する装置、可動ミラー装置、振動型ジャイロスコープ及びこれらの製造方法
US6993969B2 (en) * 2003-03-27 2006-02-07 Denso Corporation Vibration type of micro gyro sensor
US7213458B2 (en) * 2005-03-22 2007-05-08 Honeywell International Inc. Quadrature reduction in MEMS gyro devices using quad steering voltages
US7231824B2 (en) * 2005-03-22 2007-06-19 Honeywell International Inc. Use of electrodes to cancel lift effects in inertial sensors

Also Published As

Publication number Publication date
JP2008096441A (ja) 2008-04-24
EP1914511B1 (en) 2017-08-09
EP1914511A2 (en) 2008-04-23
US20080087081A1 (en) 2008-04-17
US7383729B2 (en) 2008-06-10
EP1914511A3 (en) 2012-07-18

Similar Documents

Publication Publication Date Title
RU2554312C2 (ru) Кориолисов гироскоп, содержащий корректировочные модули, и способ уменьшения квадратурного искажения
JP5226271B2 (ja) 微小電子機械デバイス
US7213458B2 (en) Quadrature reduction in MEMS gyro devices using quad steering voltages
US20060213266A1 (en) Use of electrodes to cancel lift effects in inertial sensors
US10371521B2 (en) Systems and methods for a four-mass vibrating MEMS structure
US9897447B2 (en) Quadrature compensation
JP2006215016A (ja) ジャイロスコープと加速度計との両方の機能を有するセンサ
JP2004518970A (ja) 回転レートセンサー
JP2008122371A (ja) Ｍｅｍｓ慣性センサの力再平衡およびパラメトリック増幅
JP2004518971A (ja) 回転レートセンサー
JP2011141281A (ja) 角速度のための振動マイクロ−メカニカルセンサー
US7134337B2 (en) Micromechanical rotational rate sensor
WO2013179647A2 (ja) 物理量センサ
CN103512571B (zh) 转速传感器
WO2013094208A1 (ja) 振動型角速度センサ
JP4126826B2 (ja) 角速度センサ
KR20000075419A (ko) 마이크로 자이로스코프
JP2005519296A (ja) Ｍｅｍｓジャイロスコープを開始するための雑音源
US11846651B2 (en) Electrostatic actuator and physical quantity sensor
JP4710926B2 (ja) 角速度センサ
CN107850430B (zh) 具有组合的驱动和探测的mems转速传感器
JP2004301575A (ja) 角速度センサ
JP4834092B2 (ja) 角速度センサ
JP5073363B2 (ja) 閉鎖ループ櫛型駆動センサ
CN119063708A (zh) 具有改进的振动抑制的微机电陀螺仪

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20101008

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20101008

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20110912

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120911

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20120912

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121211

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130213

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130314

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20160322

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees