JP5217163B2 - 圧力センサ - Google Patents

圧力センサ Download PDF

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Publication number
JP5217163B2
JP5217163B2 JP2006513032A JP2006513032A JP5217163B2 JP 5217163 B2 JP5217163 B2 JP 5217163B2 JP 2006513032 A JP2006513032 A JP 2006513032A JP 2006513032 A JP2006513032 A JP 2006513032A JP 5217163 B2 JP5217163 B2 JP 5217163B2
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JP
Japan
Prior art keywords
pressure sensor
base
diaphragm
pressure
sensor according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006513032A
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English (en)
Japanese (ja)
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JPWO2005108946A1 (ja
Inventor
潤 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2006513032A priority Critical patent/JP5217163B2/ja
Publication of JPWO2005108946A1 publication Critical patent/JPWO2005108946A1/ja
Application granted granted Critical
Publication of JP5217163B2 publication Critical patent/JP5217163B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP2006513032A 2004-05-12 2005-05-10 圧力センサ Expired - Fee Related JP5217163B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006513032A JP5217163B2 (ja) 2004-05-12 2005-05-10 圧力センサ

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2004142958 2004-05-12
JP2004142958 2004-05-12
PCT/JP2005/008537 WO2005108946A1 (ja) 2004-05-12 2005-05-10 圧力センサ
JP2006513032A JP5217163B2 (ja) 2004-05-12 2005-05-10 圧力センサ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011256246A Division JP5353996B2 (ja) 2004-05-12 2011-11-24 圧力センサー

Publications (2)

Publication Number Publication Date
JPWO2005108946A1 JPWO2005108946A1 (ja) 2008-07-31
JP5217163B2 true JP5217163B2 (ja) 2013-06-19

Family

ID=35320320

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2006513032A Expired - Fee Related JP5217163B2 (ja) 2004-05-12 2005-05-10 圧力センサ
JP2011256246A Expired - Fee Related JP5353996B2 (ja) 2004-05-12 2011-11-24 圧力センサー

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2011256246A Expired - Fee Related JP5353996B2 (ja) 2004-05-12 2011-11-24 圧力センサー

Country Status (2)

Country Link
JP (2) JP5217163B2 (https=)
WO (1) WO2005108946A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2001637C2 (nl) * 2008-05-30 2009-12-01 Nedap Nv Druksensor voor een melktransportstelsel.
JP5865184B2 (ja) * 2012-06-13 2016-02-17 Ntn株式会社 磁気式荷重センサおよび電動ブレーキ装置
JP5708674B2 (ja) 2013-01-24 2015-04-30 トヨタ自動車株式会社 内燃機関の制御装置
US10104270B2 (en) 2014-03-24 2018-10-16 Hideep Inc. Method for operating camera underwater
KR101933049B1 (ko) * 2017-06-23 2018-12-27 주식회사 하이딥 카메라의 수중 조작방법

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63136675A (ja) * 1986-11-28 1988-06-08 Sanken Electric Co Ltd ダイヤフラム式半導体圧力センサ−の製造方法
JPH02256278A (ja) * 1987-04-10 1990-10-17 Mitsubishi Electric Corp 半導体圧力センサ
JPH07501142A (ja) * 1991-11-15 1995-02-02 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 圧力センサ内に使用するシリコンチップ
JPH0982984A (ja) * 1995-09-19 1997-03-28 Denso Corp 半導体力学量センサおよびその製造方法
JP2000214007A (ja) * 1999-01-21 2000-08-04 Polymatech Co Ltd 感圧センサ
JP2002107254A (ja) * 2000-09-28 2002-04-10 Kyocera Corp 圧力検出装置用パッケージ
JP2002195903A (ja) * 2000-12-26 2002-07-10 Fujikura Ltd 圧力センサ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5134887A (en) * 1989-09-22 1992-08-04 Bell Robert L Pressure sensors
US5333504A (en) * 1992-09-01 1994-08-02 Rosemount Inc. High overpressure low range pressure sensor
JP4744088B2 (ja) * 2004-02-24 2011-08-10 京セラ株式会社 圧力検出装置用パッケージ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63136675A (ja) * 1986-11-28 1988-06-08 Sanken Electric Co Ltd ダイヤフラム式半導体圧力センサ−の製造方法
JPH02256278A (ja) * 1987-04-10 1990-10-17 Mitsubishi Electric Corp 半導体圧力センサ
JPH07501142A (ja) * 1991-11-15 1995-02-02 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 圧力センサ内に使用するシリコンチップ
JPH0982984A (ja) * 1995-09-19 1997-03-28 Denso Corp 半導体力学量センサおよびその製造方法
JP2000214007A (ja) * 1999-01-21 2000-08-04 Polymatech Co Ltd 感圧センサ
JP2002107254A (ja) * 2000-09-28 2002-04-10 Kyocera Corp 圧力検出装置用パッケージ
JP2002195903A (ja) * 2000-12-26 2002-07-10 Fujikura Ltd 圧力センサ

Also Published As

Publication number Publication date
JP2012063363A (ja) 2012-03-29
WO2005108946A1 (ja) 2005-11-17
JP5353996B2 (ja) 2013-11-27
JPWO2005108946A1 (ja) 2008-07-31

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