JP5212779B2 - 表面検査装置および表面検査方法 - Google Patents

表面検査装置および表面検査方法 Download PDF

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Publication number
JP5212779B2
JP5212779B2 JP2007325953A JP2007325953A JP5212779B2 JP 5212779 B2 JP5212779 B2 JP 5212779B2 JP 2007325953 A JP2007325953 A JP 2007325953A JP 2007325953 A JP2007325953 A JP 2007325953A JP 5212779 B2 JP5212779 B2 JP 5212779B2
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polarized light
linearly polarized
light component
pattern
vibration direction
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Japanese (ja)
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JP2009145307A (ja
JP2009145307A5 (enExample
Inventor
和彦 深澤
祐司 工藤
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Nikon Corp
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Nikon Corp
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  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2007325953A 2007-12-18 2007-12-18 表面検査装置および表面検査方法 Active JP5212779B2 (ja)

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JP2007325953A JP5212779B2 (ja) 2007-12-18 2007-12-18 表面検査装置および表面検査方法

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JP2007325953A JP5212779B2 (ja) 2007-12-18 2007-12-18 表面検査装置および表面検査方法

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JP2009145307A JP2009145307A (ja) 2009-07-02
JP2009145307A5 JP2009145307A5 (enExample) 2011-05-19
JP5212779B2 true JP5212779B2 (ja) 2013-06-19

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011099822A (ja) * 2009-11-09 2011-05-19 Nikon Corp 表面検査方法および表面検査装置
JP2020088676A (ja) 2018-11-28 2020-06-04 ソニーセミコンダクタソリューションズ株式会社 センサ及び制御方法
CN109856155A (zh) * 2019-01-18 2019-06-07 北京兆维电子(集团)有限责任公司 一种基于偏振光的液晶显示屏表面检测装置及方法
JP2023142884A (ja) * 2022-03-25 2023-10-06 東レエンジニアリング株式会社 欠陥検査装置及び欠陥検査方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4853758B2 (ja) * 2004-06-16 2012-01-11 株式会社ニコン 表面検査装置および表面検査方法
JP4802481B2 (ja) * 2004-11-09 2011-10-26 株式会社ニコン 表面検査装置および表面検査方法および露光システム

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