JP5191678B2 - 光源装置 - Google Patents
光源装置 Download PDFInfo
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- JP5191678B2 JP5191678B2 JP2007077579A JP2007077579A JP5191678B2 JP 5191678 B2 JP5191678 B2 JP 5191678B2 JP 2007077579 A JP2007077579 A JP 2007077579A JP 2007077579 A JP2007077579 A JP 2007077579A JP 5191678 B2 JP5191678 B2 JP 5191678B2
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- light
- phase modulation
- optical phase
- light source
- source device
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- 230000003287 optical effect Effects 0.000 claims description 89
- 230000010355 oscillation Effects 0.000 claims description 15
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- 238000012986 modification Methods 0.000 description 6
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- 238000012545 processing Methods 0.000 description 6
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 5
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- 238000000034 method Methods 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
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- 238000012576 optical tweezer Methods 0.000 description 1
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Description
J. Arlt, et al., Journal ofModern Optics, Vol.45, No.6, pp.1231-1237 (1998). D. G. Grier, Nature, Vol.424,pp.810-816 (2003). M. W. Beijersbergen, et al., Optics Communications, Vol.112,pp.321-327 (1994). K. Sueda, et al., OpticsExpress, Vol.12, No.15, pp.3548-3553 (2004). N. R. Heckenberg, et al., Optics Letters, Vol.17, No.3, pp.221-223 (1992). N. R. Heckenberg, et al., Optical and Quantum Electronics, Vol.24, No.24, pp.155-166 (1992). K. S. Youngworth and T. G. Brown, Optics Express, Vol.7,No.2, pp.77-87 (2000). R. Oron, et al., Applied Physics Letters, Vol.77, No.21,pp.3322-3324 (2000).
Claims (3)
- レーザ発振させるための共振器を有しレーザ光を出射面から出力する面発光レーザ素子と、
前記面発光レーザ素子の出射面または共振器内に設けられ、入力する光のビーム断面上の位置に応じて該光を位相変調して、その位相変調後の光を出力する光位相変調部と、
を備え、
前記光位相変調部に入力される光のビーム断面上において、所定位置を中心とするp個の半径r 1 〜r p (pは自然数、r p >r p−1 >…>r 2 >r 1 )の各円周によって区分される(p+1)個の領域を設定したときに、前記(p+1)個の領域それぞれの径方向の幅が外側の領域ほど広く(すなわち、r p −r p−1 >r p−1 −r p−2 >…>r 3 −r 2 >r 2 −r 1 >r 1 )、前記(p+1)個の領域それぞれにおいて位相変調量が一定であり、前記(p+1)個の領域のうち隣り合う2つの領域の間で位相変調量がπだけ異なる、
ことを特徴とする光源装置。 - 前記面発光レーザ素子の出射面が加工されて前記光位相変調部が形成されていることを特徴とする請求項1記載の光源装置。
- 別途に形成された前記光位相変調部が前記面発光レーザ素子の出射面に固定されていることを特徴とする請求項1記載の光源装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007077579A JP5191678B2 (ja) | 2007-03-23 | 2007-03-23 | 光源装置 |
PCT/JP2008/052971 WO2008105312A1 (ja) | 2007-02-26 | 2008-02-21 | 光源装置、観察装置および加工装置 |
US12/527,618 US8553733B2 (en) | 2007-02-26 | 2008-02-21 | Light source device, observation device, and processing device |
DE112008000450.1T DE112008000450B4 (de) | 2007-02-26 | 2008-02-21 | Lichtquellenvorrichtung, Beobachtungsvorrichtung und Bearbeitungsvorrichtung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007077579A JP5191678B2 (ja) | 2007-03-23 | 2007-03-23 | 光源装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008243834A JP2008243834A (ja) | 2008-10-09 |
JP5191678B2 true JP5191678B2 (ja) | 2013-05-08 |
Family
ID=39914865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007077579A Active JP5191678B2 (ja) | 2007-02-26 | 2007-03-23 | 光源装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5191678B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6133075B2 (ja) * | 2013-02-12 | 2017-05-24 | 古河電気工業株式会社 | 面発光レーザ素子および面発光レーザアレイ素子 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04123017A (ja) * | 1990-09-14 | 1992-04-23 | Canon Inc | 位相シフト素子及びそれを用いたレーザ装置 |
JP2002098930A (ja) * | 2000-09-26 | 2002-04-05 | Nec Corp | レーザ加工機 |
JP4621393B2 (ja) * | 2001-03-27 | 2011-01-26 | 富士ゼロックス株式会社 | 表面発光型半導体レーザ及び表面発光型半導体レーザの製造方法 |
JP2005144524A (ja) * | 2003-11-19 | 2005-06-09 | Laserfront Technologies Inc | レーザ加工装置 |
-
2007
- 2007-03-23 JP JP2007077579A patent/JP5191678B2/ja active Active
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Publication number | Publication date |
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JP2008243834A (ja) | 2008-10-09 |
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