JP5157098B2 - 半導体装置及びその製法 - Google Patents
半導体装置及びその製法 Download PDFInfo
- Publication number
- JP5157098B2 JP5157098B2 JP2006197276A JP2006197276A JP5157098B2 JP 5157098 B2 JP5157098 B2 JP 5157098B2 JP 2006197276 A JP2006197276 A JP 2006197276A JP 2006197276 A JP2006197276 A JP 2006197276A JP 5157098 B2 JP5157098 B2 JP 5157098B2
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- Prior art keywords
- semiconductor element
- adhesive
- support plate
- corner
- semiconductor chip
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83194—Lateral distribution of the layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8338—Bonding interfaces outside the semiconductor or solid-state body
- H01L2224/83385—Shape, e.g. interlocking features
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/07802—Adhesive characteristics other than chemical not being an ohmic electrical conductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Die Bonding (AREA)
- Lead Frames For Integrated Circuits (AREA)
Description
また、図9に示す半導体装置では、半導体チップ(3)、接着剤(2)及び樹脂封止体(4)を形成する各材質の線膨張係数が相違するため、半導体装置の作動時に発生する熱により、半導体チップ(3)と接着剤(2)及び樹脂封止体(4)の熱変形量が相違して、半導体チップ(3)に応力が加えられる。この際、図10及び図11に示すように、半導体チップ(3)の側面(3c)、特に側面(3c)が交差する角部(3d)に応力が集中し、半導体チップ(3)が破損又は電気的特性が劣化することがあった。
そこで、本発明は、半導体素子の角部への応力集中を抑制する半導体装置を提供することを目的とする。また、本発明は、半導体素子の角部への応力集中を抑制すると共に、支持板に半導体素子を固着する際に接着剤内のボイド発生を抑制する半導体装置の製法を提供することを目的とする。
Claims (3)
- 支持板と、単一の接着剤を介して前記支持板の上面に固着された角形の半導体素子と、少なくとも前記支持板の一部、接着剤及び半導体素子を被覆する樹脂封止体とを備え、
単一の前記接着剤は、前記支持板の上面に前記半導体素子の下面を固着する介在部と、前記半導体素子の複数の側面を被覆する側面接着部と、前記半導体素子の複数の角部を被覆する角接着部とを有し且つ前記半導体素子の複数の側面の各々に対向する前記支持板の上面に形成される複数の溝を充填し、
前記角接着部は、前記角部に沿って前記介在部から前記半導体素子の上面に向かって延伸して前記側面接着部より高い位置まで形成され、
前記側面接着部は、前記側面に沿って前記介在部から前記半導体素子の上面に向かって延伸することを特徴とする半導体装置。 - 前記半導体素子の上面に形成された上部電極と前記支持板の周辺に配置された外部リード、前記支持板上の配線導体又は他の素子の電極とを電気的に接続するリード細線を備え、
前記側面接着部より高く且つ前記半導体素子の上面より低い位置に前記角接着部を形成した請求項1に記載の半導体装置。 - 角形の半導体素子の複数の側面の各々に対向する複数の溝を支持板の上面に形成する工程と、
前記半導体素子の下面の中央部に整合して、前記支持板の上面に単一の接着剤を配置する工程と、
単一の前記接着剤上に前記半導体素子を載置して、前記支持板の上面に前記半導体素子を押圧する工程と、
前記半導体素子の押圧により前記半導体素子の側面に向かって前記接着剤を延伸させ且つ前記支持板の溝内に前記接着剤を充填して、前記接着剤を介して前記半導体素子を前記支持板に固着する工程と、
少なくとも前記支持板の一部、接着剤及び半導体素子を樹脂封止体により被覆する工程とを含み、
前記接着剤は、前記支持板の上面に前記半導体素子の下面を固着する介在部と、前記半導体素子の複数の側面を被覆する側面接着部と、前記半導体素子の複数の角部を被覆する角接着部とを有し、
前記角接着部は、前記角部に沿って前記介在部から前記半導体素子の上面に向かって延伸し且つ前記側面接着部より高い位置まで形成され、
前記側面接着部は、前記側面に沿って前記介在部から前記半導体素子の上面に向かって延伸することを特徴とする半導体装置の製法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2006197276A JP5157098B2 (ja) | 2006-07-19 | 2006-07-19 | 半導体装置及びその製法 |
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JP2006197276A JP5157098B2 (ja) | 2006-07-19 | 2006-07-19 | 半導体装置及びその製法 |
Publications (2)
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JP2008028040A JP2008028040A (ja) | 2008-02-07 |
JP5157098B2 true JP5157098B2 (ja) | 2013-03-06 |
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JP2006197276A Expired - Fee Related JP5157098B2 (ja) | 2006-07-19 | 2006-07-19 | 半導体装置及びその製法 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5825880B2 (ja) * | 2011-06-27 | 2015-12-02 | 浜松ホトニクス株式会社 | 分光モジュール |
JP6064845B2 (ja) * | 2013-09-09 | 2017-01-25 | 三菱電機株式会社 | 半導体装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS604246A (ja) * | 1983-06-23 | 1985-01-10 | Toshiba Corp | リ−ドフレ−ム |
JP2679224B2 (ja) * | 1989-03-15 | 1997-11-19 | 松下電器産業株式会社 | 半導体装置の製造方法 |
JPH03238834A (ja) * | 1990-02-15 | 1991-10-24 | Citizen Watch Co Ltd | ペースト塗布方法およびその装置 |
JP2828021B2 (ja) * | 1996-04-22 | 1998-11-25 | 日本電気株式会社 | ベアチップ実装構造及び製造方法 |
JP2003188212A (ja) * | 2001-10-11 | 2003-07-04 | Dt Circuit Technology Co Ltd | 半導体装置及びその製造方法 |
US6661102B1 (en) * | 2002-01-18 | 2003-12-09 | Advance Micro Devices, Inc. | Semiconductor packaging apparatus for controlling die attach fillet height to reduce die shear stress |
JP2007165740A (ja) * | 2005-12-16 | 2007-06-28 | Hitachi Ulsi Systems Co Ltd | 半導体装置の製造方法 |
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- 2006-07-19 JP JP2006197276A patent/JP5157098B2/ja not_active Expired - Fee Related
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