JP5141213B2 - 光学デバイス、波長可変フィルタモジュール、および光スペクトラムアナライザ - Google Patents
光学デバイス、波長可変フィルタモジュール、および光スペクトラムアナライザ Download PDFInfo
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- JP5141213B2 JP5141213B2 JP2007309555A JP2007309555A JP5141213B2 JP 5141213 B2 JP5141213 B2 JP 5141213B2 JP 2007309555 A JP2007309555 A JP 2007309555A JP 2007309555 A JP2007309555 A JP 2007309555A JP 5141213 B2 JP5141213 B2 JP 5141213B2
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| JP6010275B2 (ja) | 2010-03-15 | 2016-10-19 | セイコーエプソン株式会社 | 光フィルター並びにそれを用いた分析機器及び光機器 |
| JP5589459B2 (ja) | 2010-03-15 | 2014-09-17 | セイコーエプソン株式会社 | 光フィルター及び光フィルターモジュール並びに分析機器及び光機器 |
| JP2011191555A (ja) * | 2010-03-15 | 2011-09-29 | Seiko Epson Corp | 光フィルターの製造方法、分析機器および光機器 |
| JP5458983B2 (ja) | 2010-03-15 | 2014-04-02 | セイコーエプソン株式会社 | 光フィルターの製造方法 |
| JP2011232447A (ja) * | 2010-04-26 | 2011-11-17 | Seiko Epson Corp | 光フィルター、光フィルターモジュール、および分析機器 |
| JP5640549B2 (ja) | 2010-08-19 | 2014-12-17 | セイコーエプソン株式会社 | 光フィルター、光フィルターの製造方法および光機器 |
| JP5640659B2 (ja) | 2010-11-02 | 2014-12-17 | セイコーエプソン株式会社 | 光フィルター、光フィルターの製造方法、及び光機器 |
| JP5641220B2 (ja) * | 2010-11-12 | 2014-12-17 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光モジュール、及び光分析装置 |
| JP5630227B2 (ja) * | 2010-11-15 | 2014-11-26 | セイコーエプソン株式会社 | 光フィルターおよび光フィルターの製造方法 |
| KR101183882B1 (ko) | 2010-12-27 | 2012-09-19 | 전자부품연구원 | 정전기력 파장 가변 필터 제작방법 |
| JP5845588B2 (ja) | 2011-02-09 | 2016-01-20 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光モジュール、光分析装置および波長可変干渉フィルターの製造方法 |
| JP5909850B2 (ja) * | 2011-02-15 | 2016-04-27 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光モジュール、及び光分析装置 |
| JP5703813B2 (ja) | 2011-02-16 | 2015-04-22 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光モジュール、及び光分析装置 |
| JP2012173314A (ja) * | 2011-02-17 | 2012-09-10 | Seiko Epson Corp | 波長可変干渉フィルター、光モジュール、および電子機器 |
| JP5987573B2 (ja) * | 2012-09-12 | 2016-09-07 | セイコーエプソン株式会社 | 光学モジュール、電子機器、及び駆動方法 |
| JP5765465B2 (ja) * | 2014-05-02 | 2015-08-19 | セイコーエプソン株式会社 | 光フィルターの製造方法 |
| JP6135707B2 (ja) * | 2015-05-07 | 2017-05-31 | セイコーエプソン株式会社 | 光フィルター並びにそれを用いた分析機器及び光機器 |
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