JP5140635B2 - 薄膜素子の製造方法 - Google Patents
薄膜素子の製造方法 Download PDFInfo
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- JP5140635B2 JP5140635B2 JP2009143737A JP2009143737A JP5140635B2 JP 5140635 B2 JP5140635 B2 JP 5140635B2 JP 2009143737 A JP2009143737 A JP 2009143737A JP 2009143737 A JP2009143737 A JP 2009143737A JP 5140635 B2 JP5140635 B2 JP 5140635B2
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- thin film
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- 239000010409 thin film Substances 0.000 title claims description 127
- 238000004519 manufacturing process Methods 0.000 title claims description 23
- 238000000034 method Methods 0.000 claims description 78
- 239000000758 substrate Substances 0.000 claims description 74
- 239000010408 film Substances 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 20
- 238000001312 dry etching Methods 0.000 claims description 10
- 238000000926 separation method Methods 0.000 claims description 8
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 6
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 6
- 238000005411 Van der Waals force Methods 0.000 claims description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 5
- -1 polydimethylsiloxane Polymers 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims description 3
- 229920002379 silicone rubber Polymers 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 229910010272 inorganic material Inorganic materials 0.000 description 3
- 239000011147 inorganic material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78603—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the insulating substrate or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1262—Multistep manufacturing methods with a particular formation, treatment or coating of the substrate
- H01L27/1266—Multistep manufacturing methods with a particular formation, treatment or coating of the substrate the substrate on which the devices are formed not being the final device substrate, e.g. using a temporary substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1218—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or structure of the substrate
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Thin Film Transistor (AREA)
- Recrystallisation Techniques (AREA)
- Laser Beam Processing (AREA)
Description
Claims (12)
- 第1基板上に犠牲層を形成する段階と、
前記犠牲層上に薄膜積層体を形成する段階と、
前記犠牲層を露出させる分離溝を形成して前記薄膜積層体を少なくともひとつの薄膜素子に分割する段階と、
ドライエッチング工程を利用して前記犠牲層を部分的に除去して、残留した前記犠牲層の領域により前記少なくともひとつの薄膜素子を前記第1基板上に維持させる段階と、
前記少なくともひとつの薄膜素子上に支持構造物を加圧し、ファンデルワールス力により前記薄膜素子の表面と前記支持構造物の表面とを仮付けする段階と、
前記残留した前記犠牲層の領域が除去されて、前記支持構造物に接合された前記少なくともひとつの薄膜素子を前記第1基板から分離させる段階と、
前記支持構造物に接合された前記少なくともひとつの薄膜素子を第2基板上に接合させる段階と、
前記少なくともひとつの薄膜素子から前記支持構造物を分離する段階と、を含む薄膜素子の製造方法。 - 前記犠牲層は、非晶質シリコンであることを特徴とする請求項1に記載の薄膜素子の製造方法。
- 前記ドライエッチング工程は、XeF 2 ガスをエッチャントとして利用して行われることを特徴とする請求項2に記載の薄膜素子の製造方法。
- 前記犠牲層を形成する段階の前に、前記第1基板の上面に前記第1基板を保護するための絶縁膜を形成する段階をさらに含むことを特徴とする請求項1から3の何れか1項に記載の薄膜素子の製造方法。
- 前記薄膜積層体を形成する段階の前に、前記犠牲層上に前記薄膜素子を支持するための絶縁膜を形成する段階をさらに含むことを特徴とする請求項1から4の何れか1項に記載の薄膜素子の製造方法。
- 前記絶縁膜は、酸化膜又は窒化膜であることを特徴とする請求項4又は請求項5に記載の薄膜素子の製造方法。
- 前記支持構造物は、ポリジメチルシロキサン(PDMS)系又はシリコンラバー系ポリマーであることを特徴とする請求項1から6のいずれか1項に記載の薄膜素子の製造方法。
- 前記第1基板から分離させる段階は、前記残留した犠牲層領域が分解されるようにレーザを照射する段階であることを特徴とする請求項1から7の何れか1項に記載の薄膜素子の製造方法。
- 前記第1基板から分離させる段階は、前記残留した犠牲層領域が切断され、前記薄膜素子が前記第1基板から分離されるように物理的な力を印加する段階であることを特徴とする請求項1から7の何れか1項に記載の薄膜素子の製造方法。
- 前記薄膜素子を前記第2基板上に接合させる段階は、接合物質層を利用して前記第2基板上に前記薄膜素子を接合させる段階を含むことを特徴とする請求項1から9の何れか1項に記載の薄膜素子の製造方法。
- 前記第2基板はフレキシブル基板であることを特徴とする請求項1から10の何れか1項に記載の薄膜素子の製造方法。
- 前記薄膜素子は、薄膜トランジスタ、太陽電池及びバイオセンサのうちいずれかひとつであることを特徴とする請求項1から11の何れか1項に記載の薄膜素子の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2008-0112955 | 2008-11-13 | ||
KR1020080112955A KR101026040B1 (ko) | 2008-11-13 | 2008-11-13 | 박막소자 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010118638A JP2010118638A (ja) | 2010-05-27 |
JP5140635B2 true JP5140635B2 (ja) | 2013-02-06 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2009143737A Expired - Fee Related JP5140635B2 (ja) | 2008-11-13 | 2009-06-16 | 薄膜素子の製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7902001B2 (ja) |
JP (1) | JP5140635B2 (ja) |
KR (1) | KR101026040B1 (ja) |
TW (1) | TWI390631B (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2012047071A2 (ko) * | 2010-10-08 | 2012-04-12 | 한국과학기술원 | 플렉서블 나노제너레이터 제조방법 및 이에 의하여 제조된 플렉서블 나노제너레이터 |
KR101909299B1 (ko) | 2010-10-27 | 2018-10-17 | 루미리즈 홀딩 비.브이. | 발광 디바이스의 제조를 위한 적층 지지막 및 그 제조 방법 |
US8552536B2 (en) * | 2010-12-16 | 2013-10-08 | Qualcomm Mems Technologies, Inc. | Flexible integrated circuit device layers and processes |
KR101486890B1 (ko) * | 2013-01-16 | 2015-01-28 | 한국기계연구원 | 이종소재간의 접합공정을 이용한 구조물제조방법 |
KR101674629B1 (ko) * | 2015-11-13 | 2016-11-09 | 광주과학기술원 | 태양전지 제조 방법 |
CN110402189B (zh) * | 2016-12-23 | 2023-04-21 | 德克萨斯大学系统董事会 | 一种用于将异构组件组装至产品衬底上的方法 |
KR102113200B1 (ko) | 2017-12-22 | 2020-06-03 | 엘씨스퀘어(주) | 변형필름을 이용한 전사방법 |
CN113035913B (zh) * | 2021-02-26 | 2022-10-04 | 武汉华星光电半导体显示技术有限公司 | 一种显示面板的制备方法、显示面板及显示装置 |
Family Cites Families (12)
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EP0978872B1 (en) * | 1998-08-03 | 2011-10-12 | STMicroelectronics Srl | An inexpensive method of manufacturing an SOI wafer |
US7425749B2 (en) * | 2002-04-23 | 2008-09-16 | Sharp Laboratories Of America, Inc. | MEMS pixel sensor |
JP5030388B2 (ja) * | 2004-03-22 | 2012-09-19 | 株式会社半導体エネルギー研究所 | 薄膜集積回路の作製方法 |
CH697213A5 (de) | 2004-05-19 | 2008-06-25 | Alphasem Ag | Verfahren und Vorrichtung zum Ablösen eines auf eine flexible Folie geklebten Bauteils. |
JP5041686B2 (ja) * | 2004-07-30 | 2012-10-03 | 株式会社半導体エネルギー研究所 | 薄膜集積回路の剥離方法および半導体装置の作製方法 |
US7927971B2 (en) | 2004-07-30 | 2011-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
JP5025141B2 (ja) * | 2005-02-28 | 2012-09-12 | 株式会社半導体エネルギー研究所 | 半導体装置の製造方法 |
US7687372B2 (en) * | 2005-04-08 | 2010-03-30 | Versatilis Llc | System and method for manufacturing thick and thin film devices using a donee layer cleaved from a crystalline donor |
JP5180820B2 (ja) | 2005-05-03 | 2013-04-10 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | スタンプから基板にパターンを転写する方法及び装置 |
US7560789B2 (en) * | 2005-05-27 | 2009-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2006130721A2 (en) * | 2005-06-02 | 2006-12-07 | The Board Of Trustees Of The University Of Illinois | Printable semiconductor structures and related methods of making and assembling |
JP5196212B2 (ja) * | 2006-03-02 | 2013-05-15 | セイコーエプソン株式会社 | 薄膜デバイスの製造方法 |
-
2008
- 2008-11-13 KR KR1020080112955A patent/KR101026040B1/ko not_active IP Right Cessation
-
2009
- 2009-06-03 TW TW098118319A patent/TWI390631B/zh not_active IP Right Cessation
- 2009-06-05 US US12/479,298 patent/US7902001B2/en not_active Expired - Fee Related
- 2009-06-16 JP JP2009143737A patent/JP5140635B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR101026040B1 (ko) | 2011-03-30 |
JP2010118638A (ja) | 2010-05-27 |
KR20100054030A (ko) | 2010-05-24 |
TW201019395A (en) | 2010-05-16 |
US20100120232A1 (en) | 2010-05-13 |
US7902001B2 (en) | 2011-03-08 |
TWI390631B (zh) | 2013-03-21 |
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