JP5131071B2 - 蛍光顕微鏡装置及び焦点検出装置 - Google Patents

蛍光顕微鏡装置及び焦点検出装置 Download PDF

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Publication number
JP5131071B2
JP5131071B2 JP2008187403A JP2008187403A JP5131071B2 JP 5131071 B2 JP5131071 B2 JP 5131071B2 JP 2008187403 A JP2008187403 A JP 2008187403A JP 2008187403 A JP2008187403 A JP 2008187403A JP 5131071 B2 JP5131071 B2 JP 5131071B2
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wavelength
light
focus detection
optical system
observation
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JP2010026241A (ja
JP2010026241A5 (enrdf_load_stackoverflow
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亮介 小松
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Nikon Corp
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Nikon Corp
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JP2008187403A 2008-07-18 2008-07-18 蛍光顕微鏡装置及び焦点検出装置 Active JP5131071B2 (ja)

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JP2008187403A JP5131071B2 (ja) 2008-07-18 2008-07-18 蛍光顕微鏡装置及び焦点検出装置

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JP2008187403A JP5131071B2 (ja) 2008-07-18 2008-07-18 蛍光顕微鏡装置及び焦点検出装置

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JP2010026241A JP2010026241A (ja) 2010-02-04
JP2010026241A5 JP2010026241A5 (enrdf_load_stackoverflow) 2012-02-16
JP5131071B2 true JP5131071B2 (ja) 2013-01-30

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5969803B2 (ja) * 2012-04-23 2016-08-17 オリンパス株式会社 顕微鏡装置
JP6252598B2 (ja) * 2013-12-09 2017-12-27 株式会社ニコン 光学装置、測定装置、測定方法、スクリーニング装置及びスクリーニング方法
US9804029B2 (en) * 2014-03-05 2017-10-31 Hitachi High-Technologies Corporation Microspectroscopy device
EP3151053B1 (en) 2014-05-30 2023-11-29 Nikon Corporation Focusing device, microscope device, focusing method, and control program

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08240765A (ja) * 1995-03-02 1996-09-17 Nikon Corp 自動焦点検出装置
JP2005062515A (ja) * 2003-08-13 2005-03-10 Nikon Corp 蛍光顕微鏡
JP2007101494A (ja) * 2005-10-07 2007-04-19 Nikon Corp 表面検査装置

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