JP5131012B2 - 積層型圧電素子の製造方法 - Google Patents
積層型圧電素子の製造方法 Download PDFInfo
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- JP5131012B2 JP5131012B2 JP2008111749A JP2008111749A JP5131012B2 JP 5131012 B2 JP5131012 B2 JP 5131012B2 JP 2008111749 A JP2008111749 A JP 2008111749A JP 2008111749 A JP2008111749 A JP 2008111749A JP 5131012 B2 JP5131012 B2 JP 5131012B2
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- organic piezoelectric
- sheet
- layer
- piezoelectric
- organic
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| WO2013183594A1 (ja) * | 2012-06-05 | 2013-12-12 | 三井化学株式会社 | 圧電デバイス、および圧電デバイスの製造方法 |
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