JP5123674B2 - 水晶振動片の製造方法 - Google Patents
水晶振動片の製造方法 Download PDFInfo
- Publication number
- JP5123674B2 JP5123674B2 JP2008010005A JP2008010005A JP5123674B2 JP 5123674 B2 JP5123674 B2 JP 5123674B2 JP 2008010005 A JP2008010005 A JP 2008010005A JP 2008010005 A JP2008010005 A JP 2008010005A JP 5123674 B2 JP5123674 B2 JP 5123674B2
- Authority
- JP
- Japan
- Prior art keywords
- resist
- etching
- vibrating piece
- manufacturing
- crystal vibrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
2 レジスト
3 マスク
4 スキージ
5 テーパ
6 エッチング阻止層
7 レジスト未充填部
8 水晶振動片
9 接合材
10 パッケージ
Claims (7)
- 水晶素板にスクリーン印刷法によりレジスト膜を3次元形状に塗布する工程と、
エッチングまたはブラスト加工により前記水晶素板の断面をベベルまたはコンベックス形状に加工する工程と、
を有することを特徴とする水晶振動片の製造方法。 - 前記スクリーン印刷法で用いるマスクの開口部断面がテーパを有することを特徴とする請求項1に記載の水晶振動片の製造方法。
- 前記スクリーン印刷法による塗布工程が前記レジスト膜を少なくとも1往復して塗布することを特徴とする請求項1または2に記載の水晶振動片の製造方法。
- 前記スクリーン印刷法で用いるマスクの開口部面積あるいは前記レジスト膜の厚みのうち少なくとも一方を変えて前記レジスト膜を再塗布する工程を有することを特徴とする請求項1に記載の水晶振動片の製造方法。
- 前記レジスト膜が非金属無機物を含有することを特徴とする請求項1から4いずれか1項に記載の水晶振動片の製造方法。
- 前記エッチングがドライエッチングであることを特徴とする請求項1から5のいずれか1項に記載の水晶振動片の製造方法。
- 前記エッチングがウェットエッチングであることを特徴とする請求項1から5のいずれか1項に記載の水晶振動片の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008010005A JP5123674B2 (ja) | 2008-01-21 | 2008-01-21 | 水晶振動片の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008010005A JP5123674B2 (ja) | 2008-01-21 | 2008-01-21 | 水晶振動片の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009171481A JP2009171481A (ja) | 2009-07-30 |
JP5123674B2 true JP5123674B2 (ja) | 2013-01-23 |
Family
ID=40972115
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008010005A Expired - Fee Related JP5123674B2 (ja) | 2008-01-21 | 2008-01-21 | 水晶振動片の製造方法 |
Country Status (1)
Country | Link |
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JP (1) | JP5123674B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITVI20110099A1 (it) * | 2011-04-20 | 2012-10-21 | Dws Srl | Metodo per la produzione di un oggetto tridimensionale e macchina stereolitografica impiegante tale metodo |
JP7419947B2 (ja) | 2020-04-15 | 2024-01-23 | セイコーエプソン株式会社 | 水晶素子の製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60170313A (ja) * | 1984-02-14 | 1985-09-03 | Matsushima Kogyo Co Ltd | 圧電発振片の製造方法 |
JPH04322508A (ja) * | 1991-04-22 | 1992-11-12 | Matsushita Electric Ind Co Ltd | 水晶振動子の製造方法 |
JP2003008387A (ja) * | 2001-06-22 | 2003-01-10 | Nippon Dempa Kogyo Co Ltd | 表面実装用の水晶振動子 |
JP4236107B2 (ja) * | 2004-02-27 | 2009-03-11 | 京セラキンセキ株式会社 | 水晶振動板のコンベックス加工方法 |
JP2007097046A (ja) * | 2005-09-30 | 2007-04-12 | Seiko Epson Corp | 水晶素板の加工方法及び水晶振動片 |
-
2008
- 2008-01-21 JP JP2008010005A patent/JP5123674B2/ja not_active Expired - Fee Related
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JP2009171481A (ja) | 2009-07-30 |
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