JP4236107B2 - 水晶振動板のコンベックス加工方法 - Google Patents
水晶振動板のコンベックス加工方法 Download PDFInfo
- Publication number
- JP4236107B2 JP4236107B2 JP2004052669A JP2004052669A JP4236107B2 JP 4236107 B2 JP4236107 B2 JP 4236107B2 JP 2004052669 A JP2004052669 A JP 2004052669A JP 2004052669 A JP2004052669 A JP 2004052669A JP 4236107 B2 JP4236107 B2 JP 4236107B2
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- convex
- crystal
- plate
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
12,カバー
13,水晶振動板
Claims (2)
- 複数の水晶振動板の主面の形状を、凸面状に形成するコンベックス加工方法において、
水晶板主面上に凸面形状のカバーを複数個形成又は配置する工程と、
ドライエッチング加工又はブラスト加工により、複数個の該カバーを主面上に形成又は配置した該水晶板の主面を、該カバーを除去しつつ、該カバーの凸面形状を転写又は相似したコンベックス形状に加工し、且つ該ドライエッチング加工又は該ブラスト加工により、主面形状がコンベックス形状に加工された水晶板を個々の水晶振動板に分割する工程と
を備えたことを特徴とする水晶振動板のコンベックス加工方法。 - 該水晶板の主面上に形成又は配置される該カバーの位置構成として、該水晶板の表裏両主面上に、該水晶板を挟んで相対する位置に配置された2つの該カバーを一組としたカバー組が複数組形成又は配置されていることを特徴とする請求項1記載の水晶振動板のコンベックス加工方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004052669A JP4236107B2 (ja) | 2004-02-27 | 2004-02-27 | 水晶振動板のコンベックス加工方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004052669A JP4236107B2 (ja) | 2004-02-27 | 2004-02-27 | 水晶振動板のコンベックス加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005244677A JP2005244677A (ja) | 2005-09-08 |
JP4236107B2 true JP4236107B2 (ja) | 2009-03-11 |
Family
ID=35025910
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004052669A Expired - Fee Related JP4236107B2 (ja) | 2004-02-27 | 2004-02-27 | 水晶振動板のコンベックス加工方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4236107B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5123674B2 (ja) * | 2008-01-21 | 2013-01-23 | セイコーインスツル株式会社 | 水晶振動片の製造方法 |
JP5285495B2 (ja) * | 2009-04-28 | 2013-09-11 | 京セラクリスタルデバイス株式会社 | 水晶振動子の製造方法 |
-
2004
- 2004-02-27 JP JP2004052669A patent/JP4236107B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2005244677A (ja) | 2005-09-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5296113B2 (ja) | 圧電振動片の製造方法、圧電振動片及び圧電デバイス | |
CN101123423B (zh) | At切割水晶振动片及其制造方法 | |
JP5096425B2 (ja) | 光学フィルタの製造方法 | |
JP2002198772A (ja) | 高周波圧電デバイス | |
JP4997780B2 (ja) | 圧電振動片の製造方法 | |
JP6344677B2 (ja) | 水晶振動片、および水晶振動子 | |
JP4236107B2 (ja) | 水晶振動板のコンベックス加工方法 | |
JP2007104042A (ja) | 水晶振動素子及びその製造方法 | |
JP3663845B2 (ja) | 水晶の表面加工方法及び水晶片の製造方法 | |
JP2009071640A (ja) | 圧電振動素板のベベル加工方法、圧電振動片、及び圧電振動子 | |
JP5234236B2 (ja) | 水晶基板および水晶基板の製造方法 | |
JP2016174328A (ja) | ウェーハの製造方法及びウェーハ | |
JP3979425B2 (ja) | 水晶基板の製造方法 | |
JP5534217B2 (ja) | 圧電基板およびその製造方法、並びに圧電振動片の製造方法 | |
JP5435060B2 (ja) | 振動片 | |
JP2004120508A (ja) | 水晶板のコンベックス加工方法 | |
JPS5890814A (ja) | 小型プラノコンペツクス振動片とその加工方法 | |
JP5936951B2 (ja) | 圧電素子 | |
JP4741280B2 (ja) | 光学ローパスフィルタの製造方法 | |
JP2003017983A (ja) | 弾性波装置用ウエハ及びそれを用いた弾性波装置 | |
JP2001110788A (ja) | 圧電素子及びその加工方法 | |
JPH0230207A (ja) | 水晶振動子及びその製造方法 | |
JP2000301447A (ja) | 水晶振動板の加工方法 | |
JP5024427B2 (ja) | 圧電デバイス | |
JP2018110291A (ja) | 弾性波デバイス |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070223 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080821 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20081009 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20081210 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20081211 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4236107 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111226 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121226 Year of fee payment: 4 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121226 Year of fee payment: 4 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121226 Year of fee payment: 4 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131226 Year of fee payment: 5 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
LAPS | Cancellation because of no payment of annual fees |