JP5113987B2 - 偏光特性の光分析装置 - Google Patents
偏光特性の光分析装置 Download PDFInfo
- Publication number
- JP5113987B2 JP5113987B2 JP2005093388A JP2005093388A JP5113987B2 JP 5113987 B2 JP5113987 B2 JP 5113987B2 JP 2005093388 A JP2005093388 A JP 2005093388A JP 2005093388 A JP2005093388 A JP 2005093388A JP 5113987 B2 JP5113987 B2 JP 5113987B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- polarization
- intensity
- optical
- polarization splitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000010287 polarization Effects 0.000 title claims description 193
- 230000003287 optical effect Effects 0.000 title claims description 111
- 239000013598 vector Substances 0.000 claims description 41
- 230000001902 propagating effect Effects 0.000 claims description 12
- 238000005284 basis set Methods 0.000 claims description 9
- 230000001419 dependent effect Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 230000010363 phase shift Effects 0.000 description 8
- 230000000644 propagated effect Effects 0.000 description 8
- 238000004891 communication Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000002730 additional effect Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000012882 sequential analysis Methods 0.000 description 1
- 230000017105 transposition Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
- G01J4/04—Polarimeters using electric detection means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3066—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state involving the reflection of light at a particular angle of incidence, e.g. Brewster's angle
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Spectrometry And Color Measurement (AREA)
- Optical Communication System (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/812164 | 2004-03-29 | ||
| US10/812,164 US7206069B2 (en) | 2004-03-29 | 2004-03-29 | Optical analyzers of polarization properties |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005283585A JP2005283585A (ja) | 2005-10-13 |
| JP2005283585A5 JP2005283585A5 (enExample) | 2008-04-17 |
| JP5113987B2 true JP5113987B2 (ja) | 2013-01-09 |
Family
ID=34989434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005093388A Expired - Fee Related JP5113987B2 (ja) | 2004-03-29 | 2005-03-29 | 偏光特性の光分析装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US7206069B2 (enExample) |
| JP (1) | JP5113987B2 (enExample) |
| CN (1) | CN1677164B (enExample) |
| CA (1) | CA2497372A1 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102681096A (zh) * | 2011-03-17 | 2012-09-19 | 昂纳信息技术(深圳)有限公司 | 一种偏振光干涉型的梳状滤波器 |
| CN102353325B (zh) * | 2011-07-22 | 2013-08-14 | 中国科学院上海光学精密机械研究所 | 四轴4细分干涉仪 |
| KR20130072535A (ko) * | 2011-12-22 | 2013-07-02 | 삼성전기주식회사 | 비파괴적 결함검사장치 및 이를 이용한 결함검사방법 |
| US9749057B2 (en) * | 2012-12-28 | 2017-08-29 | Juniper Networks, Inc. | Detection and alignment of XY skew |
| US20180045889A1 (en) * | 2015-02-17 | 2018-02-15 | President And Fellows Of Harvard College | Method and system for polarization state generation |
| US9998232B2 (en) | 2016-09-13 | 2018-06-12 | Juniper Networks, Inc. | Detection and compensation of power imbalances for a transmitter |
| CN106500844B (zh) * | 2016-10-19 | 2017-12-15 | 武汉颐光科技有限公司 | 一种六通道分振幅高速斯托克斯偏振仪及其参数测量方法 |
| KR102812104B1 (ko) * | 2019-06-11 | 2025-05-23 | 유니버시티 라발 | 입사 광선의 편광 상태를 결정하는 편광계 및 방법 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4306809A (en) * | 1979-03-26 | 1981-12-22 | The Board Of Regents Of The University Of Nebraska | Polarimeter |
| US4418981A (en) * | 1982-01-19 | 1983-12-06 | Gould Inc. | Quadrature fiber-optic interferometer matrix |
| JPH0663867B2 (ja) * | 1985-05-28 | 1994-08-22 | キヤノン株式会社 | 波面状態検出用の干渉装置 |
| US4681450A (en) * | 1985-06-21 | 1987-07-21 | Research Corporation | Photodetector arrangement for measuring the state of polarization of light |
| JP3109900B2 (ja) * | 1992-04-21 | 2000-11-20 | キヤノン株式会社 | 測定装置 |
| US5282188A (en) * | 1992-02-18 | 1994-01-25 | Eastman Kodak Company | Apparatus and method for optimizing performance in read/write head of an optical storage system with a magneto-optical storage medium |
| US5337146A (en) * | 1992-03-30 | 1994-08-09 | University Of New Orleans | Diffraction-grating photopolarimeters and spectrophotopolarimeters |
| JPH0618332A (ja) * | 1992-07-01 | 1994-01-25 | Kokusai Denshin Denwa Co Ltd <Kdd> | ストークス・パラメータ測定方法及び装置 |
| JP3103954B2 (ja) * | 1992-07-13 | 2000-10-30 | 株式会社応用光電研究室 | 偏光解析器 |
| JP3292314B2 (ja) * | 1992-09-11 | 2002-06-17 | キヤノン株式会社 | 光学的検出装置 |
| JP3382644B2 (ja) * | 1992-09-17 | 2003-03-04 | アンリツ株式会社 | 直交偏光ヘテロダイン干渉計 |
| US5719702A (en) * | 1993-08-03 | 1998-02-17 | The United States Of America As Represented By The United States Department Of Energy | Polarization-balanced beamsplitter |
| US5663793A (en) * | 1995-09-05 | 1997-09-02 | Zygo Corporation | Homodyne interferometric receiver and calibration method having improved accuracy and functionality |
| US5999261A (en) * | 1998-02-10 | 1999-12-07 | Seagate Technology, Inc. | Split phase high performance, high frequency, high dynamic range interferometer |
| US6373614B1 (en) * | 2000-08-31 | 2002-04-16 | Cambridge Research Instrumentation Inc. | High performance polarization controller and polarization sensor |
| US6687008B1 (en) * | 2000-10-19 | 2004-02-03 | Kla-Tencor Corporation | Waveguide based parallel multi-phaseshift interferometry for high speed metrology, optical inspection, and non-contact sensing |
| JP3689681B2 (ja) * | 2002-05-10 | 2005-08-31 | キヤノン株式会社 | 測定装置及びそれを有する装置群 |
| NL1021600C2 (nl) * | 2002-10-08 | 2004-04-13 | Tno | Meten van een optisch weglengteverschil. |
| JP4072717B2 (ja) * | 2002-11-12 | 2008-04-09 | 日本電気株式会社 | 光記録媒体および光学式情報記録再生装置 |
| US7483145B2 (en) * | 2002-11-27 | 2009-01-27 | Trology, Llc | Simultaneous phase shifting module for use in interferometry |
-
2004
- 2004-03-29 US US10/812,164 patent/US7206069B2/en not_active Expired - Fee Related
-
2005
- 2005-02-17 CA CA002497372A patent/CA2497372A1/en not_active Abandoned
- 2005-03-28 CN CN2005100627428A patent/CN1677164B/zh not_active Expired - Fee Related
- 2005-03-29 JP JP2005093388A patent/JP5113987B2/ja not_active Expired - Fee Related
-
2007
- 2007-02-05 US US11/702,451 patent/US7463361B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US7206069B2 (en) | 2007-04-17 |
| US20050213104A1 (en) | 2005-09-29 |
| US20070133005A1 (en) | 2007-06-14 |
| CA2497372A1 (en) | 2005-09-29 |
| US7463361B2 (en) | 2008-12-09 |
| JP2005283585A (ja) | 2005-10-13 |
| CN1677164A (zh) | 2005-10-05 |
| CN1677164B (zh) | 2010-04-28 |
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