JP5081986B2 - 真空システム用のシャッタおよびゲートバルブアセンブリ - Google Patents

真空システム用のシャッタおよびゲートバルブアセンブリ Download PDF

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Publication number
JP5081986B2
JP5081986B2 JP2010547702A JP2010547702A JP5081986B2 JP 5081986 B2 JP5081986 B2 JP 5081986B2 JP 2010547702 A JP2010547702 A JP 2010547702A JP 2010547702 A JP2010547702 A JP 2010547702A JP 5081986 B2 JP5081986 B2 JP 5081986B2
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JP
Japan
Prior art keywords
valve
shutter
vacuum chamber
valve member
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010547702A
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English (en)
Japanese (ja)
Other versions
JP2011512639A5 (enExample
JP2011512639A (ja
Inventor
エヴァン，レイン ハワード，レイン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of JP2011512639A publication Critical patent/JP2011512639A/ja
Publication of JP2011512639A5 publication Critical patent/JP2011512639A5/ja
Application granted granted Critical
Publication of JP5081986B2 publication Critical patent/JP5081986B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0495—Vacuum locks; Valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86928—Sequentially progressive opening or closing of plural valves
    • Y10T137/86936—Pressure equalizing or auxiliary shunt flow
    • Y10T137/86944—One valve seats against other valve [e.g., concentric valves]
    • Y10T137/8696—Gate

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Sliding Valves (AREA)
  • Electron Tubes For Measurement (AREA)
JP2010547702A 2008-02-20 2009-02-13 真空システム用のシャッタおよびゲートバルブアセンブリ Expired - Fee Related JP5081986B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/070,584 US7743790B2 (en) 2008-02-20 2008-02-20 Shutter and gate valve assemblies for vacuum systems
US12/070,584 2008-02-20
PCT/US2009/034099 WO2009105389A1 (en) 2008-02-20 2009-02-13 Shutter and gate valve assemblies for vacuum systems

Publications (3)

Publication Number Publication Date
JP2011512639A JP2011512639A (ja) 2011-04-21
JP2011512639A5 JP2011512639A5 (enExample) 2012-03-29
JP5081986B2 true JP5081986B2 (ja) 2012-11-28

Family

ID=40954230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010547702A Expired - Fee Related JP5081986B2 (ja) 2008-02-20 2009-02-13 真空システム用のシャッタおよびゲートバルブアセンブリ

Country Status (4)

Country Link
US (1) US7743790B2 (enExample)
EP (1) EP2248146A4 (enExample)
JP (1) JP5081986B2 (enExample)
WO (1) WO2009105389A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201109383D0 (en) * 2011-06-03 2011-07-20 Micromass Ltd Aperture gas flow restriction
JP5771456B2 (ja) * 2011-06-24 2015-09-02 株式会社日立ハイテクノロジーズ 質量分析方法
CA2920013C (en) * 2013-07-31 2024-05-07 Smiths Detection Inc. Intermittent mass spectrometer inlet
EP2876341B1 (de) * 2013-11-21 2015-10-21 VAT Holding AG Verfahren zum Betrieb eines Ventils
CN107851550B (zh) * 2015-07-13 2019-06-28 株式会社岛津制作所 闸门
US11168795B1 (en) * 2021-01-18 2021-11-09 Chad Heffernan Eclipse valve assembly
GB202108151D0 (en) * 2021-06-08 2021-07-21 Micromass Ltd Vacuum system for a mass spectrometer
JP7693099B2 (ja) * 2022-03-31 2025-06-16 株式会社日立ハイテク 分析装置
JPWO2024150552A1 (enExample) * 2023-01-10 2024-07-18

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US434796A (en) * 1890-08-19 Throttle-valve
US2873761A (en) * 1955-07-26 1959-02-17 Saint Gobain Flow control apparatus
US3804124A (en) * 1972-10-12 1974-04-16 Bloom Eng Co Inc Three lever valve with relief port
US4193574A (en) * 1978-10-27 1980-03-18 Barnes Johney H Well shut off device
US4524796A (en) * 1982-09-24 1985-06-25 The United States Of America As Represented By The United States Department Of Energy Sliding-gate valve for use with abrasive materials
DE3339441C2 (de) * 1983-10-29 1986-06-12 Schubert & Salzer Maschinenfabrik Ag, 8070 Ingolstadt Schieberventil
CA1272662A (en) * 1985-03-26 1990-08-14 Canon Kabushiki Kaisha Apparatus and process for controlling flow of fine particles
US5052440A (en) * 1989-04-27 1991-10-01 Grumman Aerospace Corporation Liquid droplet generator valve
US5094270A (en) * 1991-03-14 1992-03-10 Dril-Quip Inc. Double gated valve
WO1992016671A1 (fr) * 1991-03-20 1992-10-01 Canon Kabushiki Kaisha Procede et dispositif de formation d'une couche mince par pulverisation
JPH08285133A (ja) * 1995-04-17 1996-11-01 Nec Kansai Ltd 真空プロセス装置用ゲートバルブ
GB2368187B (en) * 1999-06-14 2004-07-21 Isis Pharmaceuticals Inc External shutter for electrospray ionization mass spectrometry
US6325096B1 (en) * 1999-06-24 2001-12-04 Stargaze Corporation Variable orifice valve
DE10033904A1 (de) * 2000-07-12 2002-01-31 Stopinc Ag Huenenberg Schieberverschluss zum Vergiessen von Metallschmelze, sowie eine dazugehörige feuerfeste Platteneinheit
US7090192B2 (en) * 2003-10-21 2006-08-15 Vay Holding Ag Vacuum valve
KR100577561B1 (ko) * 2004-01-12 2006-05-08 삼성전자주식회사 반도체 제조 설비의 배기압력 제어장치
JPWO2009031179A1 (ja) * 2007-09-04 2010-12-09 株式会社島津製作所 質量分析装置

Also Published As

Publication number Publication date
EP2248146A4 (en) 2015-12-02
JP2011512639A (ja) 2011-04-21
EP2248146A1 (en) 2010-11-10
US20090206249A1 (en) 2009-08-20
US7743790B2 (en) 2010-06-29
WO2009105389A1 (en) 2009-08-27

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