JP2011512639A5 - - Google Patents

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Publication number
JP2011512639A5
JP2011512639A5 JP2010547702A JP2010547702A JP2011512639A5 JP 2011512639 A5 JP2011512639 A5 JP 2011512639A5 JP 2010547702 A JP2010547702 A JP 2010547702A JP 2010547702 A JP2010547702 A JP 2010547702A JP 2011512639 A5 JP2011512639 A5 JP 2011512639A5
Authority
JP
Japan
Prior art keywords
valve
shutter
vacuum chamber
valve member
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010547702A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011512639A (ja
JP5081986B2 (ja
Filing date
Publication date
Priority claimed from US12/070,584 external-priority patent/US7743790B2/en
Application filed filed Critical
Publication of JP2011512639A publication Critical patent/JP2011512639A/ja
Publication of JP2011512639A5 publication Critical patent/JP2011512639A5/ja
Application granted granted Critical
Publication of JP5081986B2 publication Critical patent/JP5081986B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2010547702A 2008-02-20 2009-02-13 真空システム用のシャッタおよびゲートバルブアセンブリ Expired - Fee Related JP5081986B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/070,584 US7743790B2 (en) 2008-02-20 2008-02-20 Shutter and gate valve assemblies for vacuum systems
US12/070,584 2008-02-20
PCT/US2009/034099 WO2009105389A1 (en) 2008-02-20 2009-02-13 Shutter and gate valve assemblies for vacuum systems

Publications (3)

Publication Number Publication Date
JP2011512639A JP2011512639A (ja) 2011-04-21
JP2011512639A5 true JP2011512639A5 (enExample) 2012-03-29
JP5081986B2 JP5081986B2 (ja) 2012-11-28

Family

ID=40954230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010547702A Expired - Fee Related JP5081986B2 (ja) 2008-02-20 2009-02-13 真空システム用のシャッタおよびゲートバルブアセンブリ

Country Status (4)

Country Link
US (1) US7743790B2 (enExample)
EP (1) EP2248146A4 (enExample)
JP (1) JP5081986B2 (enExample)
WO (1) WO2009105389A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201109383D0 (en) * 2011-06-03 2011-07-20 Micromass Ltd Aperture gas flow restriction
JP5771456B2 (ja) * 2011-06-24 2015-09-02 株式会社日立ハイテクノロジーズ 質量分析方法
CA2920013C (en) * 2013-07-31 2024-05-07 Smiths Detection Inc. Intermittent mass spectrometer inlet
EP2876341B1 (de) * 2013-11-21 2015-10-21 VAT Holding AG Verfahren zum Betrieb eines Ventils
CN107851550B (zh) * 2015-07-13 2019-06-28 株式会社岛津制作所 闸门
US11168795B1 (en) * 2021-01-18 2021-11-09 Chad Heffernan Eclipse valve assembly
GB202108151D0 (en) * 2021-06-08 2021-07-21 Micromass Ltd Vacuum system for a mass spectrometer
JP7693099B2 (ja) * 2022-03-31 2025-06-16 株式会社日立ハイテク 分析装置
JPWO2024150552A1 (enExample) * 2023-01-10 2024-07-18

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US434796A (en) * 1890-08-19 Throttle-valve
US2873761A (en) * 1955-07-26 1959-02-17 Saint Gobain Flow control apparatus
US3804124A (en) * 1972-10-12 1974-04-16 Bloom Eng Co Inc Three lever valve with relief port
US4193574A (en) * 1978-10-27 1980-03-18 Barnes Johney H Well shut off device
US4524796A (en) * 1982-09-24 1985-06-25 The United States Of America As Represented By The United States Department Of Energy Sliding-gate valve for use with abrasive materials
DE3339441C2 (de) * 1983-10-29 1986-06-12 Schubert & Salzer Maschinenfabrik Ag, 8070 Ingolstadt Schieberventil
CA1272662A (en) * 1985-03-26 1990-08-14 Canon Kabushiki Kaisha Apparatus and process for controlling flow of fine particles
US5052440A (en) * 1989-04-27 1991-10-01 Grumman Aerospace Corporation Liquid droplet generator valve
US5094270A (en) * 1991-03-14 1992-03-10 Dril-Quip Inc. Double gated valve
WO1992016671A1 (fr) * 1991-03-20 1992-10-01 Canon Kabushiki Kaisha Procede et dispositif de formation d'une couche mince par pulverisation
JPH08285133A (ja) * 1995-04-17 1996-11-01 Nec Kansai Ltd 真空プロセス装置用ゲートバルブ
GB2368187B (en) * 1999-06-14 2004-07-21 Isis Pharmaceuticals Inc External shutter for electrospray ionization mass spectrometry
US6325096B1 (en) * 1999-06-24 2001-12-04 Stargaze Corporation Variable orifice valve
DE10033904A1 (de) * 2000-07-12 2002-01-31 Stopinc Ag Huenenberg Schieberverschluss zum Vergiessen von Metallschmelze, sowie eine dazugehörige feuerfeste Platteneinheit
US7090192B2 (en) * 2003-10-21 2006-08-15 Vay Holding Ag Vacuum valve
KR100577561B1 (ko) * 2004-01-12 2006-05-08 삼성전자주식회사 반도체 제조 설비의 배기압력 제어장치
JPWO2009031179A1 (ja) * 2007-09-04 2010-12-09 株式会社島津製作所 質量分析装置

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