JP5080616B2 - 音叉型圧電振動片及び圧電デバイス - Google Patents

音叉型圧電振動片及び圧電デバイス Download PDF

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Publication number
JP5080616B2
JP5080616B2 JP2010146298A JP2010146298A JP5080616B2 JP 5080616 B2 JP5080616 B2 JP 5080616B2 JP 2010146298 A JP2010146298 A JP 2010146298A JP 2010146298 A JP2010146298 A JP 2010146298A JP 5080616 B2 JP5080616 B2 JP 5080616B2
Authority
JP
Japan
Prior art keywords
fork type
type piezoelectric
vibrating piece
base
tuning fork
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010146298A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012010253A (ja
JP2012010253A5 (enExample
Inventor
秀亮 松戸
信吾 川西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP2010146298A priority Critical patent/JP5080616B2/ja
Priority to US13/169,007 priority patent/US20110316391A1/en
Publication of JP2012010253A publication Critical patent/JP2012010253A/ja
Publication of JP2012010253A5 publication Critical patent/JP2012010253A5/ja
Application granted granted Critical
Publication of JP5080616B2 publication Critical patent/JP5080616B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2010146298A 2010-06-28 2010-06-28 音叉型圧電振動片及び圧電デバイス Expired - Fee Related JP5080616B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010146298A JP5080616B2 (ja) 2010-06-28 2010-06-28 音叉型圧電振動片及び圧電デバイス
US13/169,007 US20110316391A1 (en) 2010-06-28 2011-06-26 Tuning-fork-type piezoelectric vibrating plate and piezoelectric device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010146298A JP5080616B2 (ja) 2010-06-28 2010-06-28 音叉型圧電振動片及び圧電デバイス

Publications (3)

Publication Number Publication Date
JP2012010253A JP2012010253A (ja) 2012-01-12
JP2012010253A5 JP2012010253A5 (enExample) 2012-04-05
JP5080616B2 true JP5080616B2 (ja) 2012-11-21

Family

ID=45351861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010146298A Expired - Fee Related JP5080616B2 (ja) 2010-06-28 2010-06-28 音叉型圧電振動片及び圧電デバイス

Country Status (2)

Country Link
US (1) US20110316391A1 (enExample)
JP (1) JP5080616B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101878590B (zh) * 2008-09-26 2014-07-02 株式会社大真空 音叉型压电振动片以及音叉型压电振动装置
JP6571339B2 (ja) * 2015-01-26 2019-09-04 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子
JP6479509B2 (ja) * 2015-03-09 2019-03-06 シチズン時計株式会社 圧電振動子
WO2017221609A1 (ja) * 2016-06-23 2017-12-28 株式会社村田製作所 水晶振動片及び水晶振動子

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4281348B2 (ja) * 2002-12-17 2009-06-17 セイコーエプソン株式会社 圧電振動片と圧電振動片を利用した圧電デバイス、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP4325240B2 (ja) * 2003-03-26 2009-09-02 セイコーエプソン株式会社 音叉型振動片および圧電デバイス
JP2005123828A (ja) * 2003-10-15 2005-05-12 Seiko Epson Corp 音叉型圧電振動片及び圧電デバイス
TW200633377A (en) * 2005-02-02 2006-09-16 Nihon Dempa Kogyo Co Piezo-electric vibrator
JP4235207B2 (ja) * 2005-02-02 2009-03-11 日本電波工業株式会社 圧電振動子、圧電振動子パッケージ及び発振回路
JP4319657B2 (ja) * 2006-01-30 2009-08-26 日本電波工業株式会社 圧電振動子
JP2009152989A (ja) * 2007-12-21 2009-07-09 Nippon Dempa Kogyo Co Ltd 圧電振動片及び圧電デバイス
JP2009165006A (ja) * 2008-01-09 2009-07-23 Nippon Dempa Kogyo Co Ltd 圧電振動片、圧電デバイス及び音叉型圧電振動子の周波数調整方法
JP5175128B2 (ja) * 2008-04-04 2013-04-03 日本電波工業株式会社 音叉型圧電振動片および圧電デバイス
JP5374102B2 (ja) * 2008-08-21 2013-12-25 京セラクリスタルデバイス株式会社 音叉型屈曲水晶振動素子及びその製造方法
JP4709260B2 (ja) * 2008-10-16 2011-06-22 日本電波工業株式会社 圧電振動片および圧電デバイス
JP5155275B2 (ja) * 2008-10-16 2013-03-06 日本電波工業株式会社 音叉型圧電振動片、圧電フレーム及び圧電デバイス

Also Published As

Publication number Publication date
US20110316391A1 (en) 2011-12-29
JP2012010253A (ja) 2012-01-12

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