JP5077253B2 - Pallet automatic changer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a palette automatic replacement device that shortens a palette replacement time. <P>SOLUTION: The palette automatic replacement device includes a palette positioning mechanism 5 which positions a palette 3 stored in a palette storage chamber 2, a palette fixation table 20 which moves to and away from the palette storage chamber 2 in directions for taking the palette 3 in and out, and a first fixation portion 23 which fixes and swivels the palette 3, the palette 3 being swiveled when replaced between the palette fixation table 20 and palette storage chamber 2 while the palette fixation table 20 is moved. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to an automatic pallet changing apparatus for automatically changing a pallet for supplying a die used in a die bonding apparatus or the like.

In a die bonding apparatus that mounts a die peeled from a wafer sheet on a substrate by thermocompression bonding or the like, a flexible wafer sheet is indefinite and inconvenient to handle, so an annular rigid member called a pallet is used. Used in the mounted state. Patent Document 1 discloses an example of a die bonding apparatus using such a pallet. Here, a plurality of pallets are stored in advance in a pallet storage magazine, sequentially taken out as necessary, and a die is supplied. It is configured to be mounted in position. The pallet is moved between the pallet storage magazine and the die supply position by linearly moving the arm engaged with the pallet, and the pallet mounted at the die supply position is returned to the pallet storage magazine and then Pallet replacement work is performed in which the pallet to be mounted is taken out and mounted at the die supply position.
Japanese Patent Laid-Open No. 4-196148

  Ideally, the pallet should be replaced in as short a time as possible without requiring a large occupied area.However, when exchanging by linear movement of the arm, the movement of the pallet follows the movement form of the arm. There is a limit to shortening due to restrictions on the linear motion mechanism. In addition, it is problematic in terms of area productivity and cost to make the linear motion mechanism occupy a limited area in the apparatus only for the movement of the arm.

  Therefore, an object of the present invention is to provide an automatic pallet changing apparatus that realizes a reduction in pallet changing time.

The automatic pallet changing apparatus of the present invention is located on the side of a pallet magazine in which a plurality of pallet storage chambers are arranged in the vertical direction and a pallet in each of the plurality of pallet storage chambers and stored in the pallet storage chambers. a pallet positioning member, said pallet positioning member, a pallet positioning member displacing means for displacing into a position where it does not contact with the position in contact with the side portion of the stored in the pallet storage chamber pallets, the pallets to the pallet magazine A pallet fixing table arranged in the direction of taking in and out, a pallet engaging member arranged on the pallet fixing table and engaged with an engaged portion of the pallet, and a direction in which the pallet fixing table approaches the pallet magazine Pallet moving means for moving in a direction away from the pallet; And a pallet turning means for turning the pallet engaging member. The pallet is moved between the pallet fixing table and the pallet magazine by turning and moving the pallet engaged with the pallet engaging member. Exchange.

  According to the present invention, the turning movement is added in addition to the linear movement of the pallet, so that the linear movement distance of the pallet can be shortened, and further, the time required for the pallet exchange is shortened by performing the linear movement and the turning movement simultaneously. be able to.

  Embodiments of the present invention will be described with reference to the drawings. 1 is a plan view of an automatic pallet changing apparatus according to an embodiment of the present invention, FIG. 2 is a side view of the automatic pallet changing apparatus according to an embodiment of the present invention, and FIG. 3 is a pallet positioning mechanism according to the embodiment of the present invention. FIG. 4 is an explanatory view of the movement of the claw, FIG. 4 is an explanatory view of the pallet fixing mechanism of the first pallet fixing portion in the embodiment of the present invention, FIG. 5 is a plan view of the wafer ring in the embodiment of the present invention, and FIG. FIG. 7 is a plan view of a pallet base in the embodiment of the present invention, and FIG. 8 is a state in which the pallet rotation unit is mounted on the pallet base in the embodiment of the present invention. 9 is a plan view of the pallet, FIG. 9 is a state diagram in which the wafer ring is fixed by the wafer ring fixing member in the embodiment of the present invention, and FIG. 10 is a pallet base in the embodiment of the present invention. FIG. 11 is an explanatory diagram of a pallet rotation restricting mechanism according to the embodiment of the present invention, and FIG. 12 is an explanatory diagram of the pallet fixing mechanism of the second pallet fixing portion according to the embodiment of the present invention. FIG. 13 is an explanatory diagram of the pallet fixing mechanism of the second pallet fixing portion in the embodiment of the present invention, and FIG. 14 is an explanatory diagram of the pallet fixing mechanism of the second pallet fixing portion in the embodiment of the present invention. FIG. 15 is an explanatory view of a pallet fixing mechanism of the second pallet fixing portion in the embodiment of the present invention, FIG. 16 is an explanatory view of a pallet automatic replacement process in the embodiment of the present invention, and FIG. 17 is an embodiment of the present invention. FIG. 18 is an explanatory diagram of a pallet automatic replacement process in the embodiment of the present invention, and FIG. 19 is a pallet automatic replacement process in the embodiment of the present invention. Illustration of steps of automatic exchange, Figure 20 is an explanatory view of a step of automatic pallet exchange in the embodiment of the present invention, FIG 21 is a plan view of the pallet tray is mounted in the embodiment of the present invention.

  First, an automatic pallet changer will be described. 1 and 2, the pallet magazine 1 includes a plurality of pallet storage chambers 2 divided in the vertical direction, and each pallet storage chamber 2 stores one pallet 3. In the uppermost pallet storage chamber 2, the stored pallet 3 is taken out and becomes an empty chamber. The pallet magazine 1 can be moved up and down by an elevating device 4. When the pallet is taken out, the pallet storage chamber 2 containing the pallet 3 to be taken out is positioned at a predetermined height, and when the pallet 3 taken out is stored, the pallet magazine 1 The pallet storage chamber 2 is positioned at a predetermined height.

  A pallet positioning mechanism 5 that regulates the position of each pallet 3 stored in the pallet magazine 1 in the lateral direction (direction perpendicular to the direction in which the pallet 3 is put in and out), and the front-rear direction so that the pallet 3 does not jump out of the magazine ( A pallet pop-out prevention mechanism 6 that is pressed in the direction in which the pallet 3 is put in and out is provided.

  The pallet positioning mechanism 5 positions the pallet 3 in the pallet magazine 1 in the lateral direction by bringing the claws 7 serving as pallet positioning members into contact with both side surfaces of each pallet 3 stored in the pallet magazine 1. Two rotating shafts 8 are vertically arranged on both sides of the pallet magazine 1, and each rotating shaft 8 is positioned at the same height as each pallet 3 stored in the pallet magazine 1. A nail 7 is attached. The claw 7 is mounted at a position eccentric to the rotary shaft 8, and comes into contact with both side surfaces of each pallet 3 by the rotation of the rotary shaft 8. The pallet magazine 1 is closed on three sides other than the pallet loading / unloading side, but openings 9 are formed on both sides so that the pawl 7 can contact the pallet 3.

A cylinder 10 serving as a drive source for rotating the rotary shaft 8 is disposed on the pallet magazine 1. The cylinder 10 expands and contracts the piston rod 11 to rotate the rotating shaft 8 through a link portion 12 by a predetermined angle. When the piston rod 11 is contracted, the claw 7 comes into contact with both side surfaces of the pallet 3 and restricts the movement of the pallet 3 in the lateral direction to be positioned at a predetermined position (see FIG. 3a). On the other hand, when the piston rod 11 is extended, the claw 7 is separated from both side surfaces of the pallet 3, and the pallet 3 is in a state where the regulation is released (see FIG. 3b). In this state, the pallet 3 can be taken out from the pallet magazine 1, and the pallet 3 can be stored in the pallet magazine 1.

  The pallet pop-out preventing mechanism 6 regulates the movement in the front-rear direction by bringing the engaging member 13 into contact with the end of each pallet 3 stored in the pallet magazine 1 and fixes it in the magazine to prevent the pop-out. The engaging member 13 is a vertically-arranged rod-like member that rotates around the rotation shaft 14 and contacts the end of each pallet 3 on the front surface of the pallet magazine 1 on the pallet loading / unloading side. To the position retracted to both side surfaces of the pallet magazine 1. A cylinder mechanism 15 serving as a drive source for moving the engagement member 13 is disposed below the pallet magazine 1. The linear motion of the cylinder mechanism 15 is converted into rotation of the engagement member 13 via a link mechanism (not shown).

  The pallet fixing table 20 is a place for fixing the pallet 3 taken out from the pallet magazine 1 and is arranged on the pallet magazine insertion / removal side. The pallet fixing table 20 can be moved horizontally by two linear motion tables 21 and 22, and includes pallet fixing portions 23 and 24 for fixing the pallet 3. The first linear motion table 21 moves the pallet fixing table 20 in the direction in which the pallet 3 is put in and out by the ball screw mechanism 25. The second linear motion table 22 moves the pallet fixing table 20 in a direction orthogonal to the direction in and out of the pallet 3 by the ball screw mechanism 26.

  The first pallet fixing portion 23 is a pallet engaging member that is disposed on the upper side of the pallet fixing table 20 and close to the pallet magazine 1 so as to be horizontally rotatable, and engages and fixes the pallet 3. The first pallet fixing portion 23 includes two depressed portions 17 into which two projecting portions 16 that are juxtaposed in the horizontal direction at the end of the pallet 3 are inserted. The first pallet fixing part 23 is pivotally supported on the pallet fixing table 20 by a rotating shaft 27, and can be changed in direction by turning horizontally using a motor 28 as a drive source.

  The second pallet fixing part 24 is arranged on the upper side of the pallet fixing table 20 and on the side far from the pallet magazine 1. The second pallet fixing part 24 fixes the side opposite to the side fixed by the first pallet fixing part 23 of the pallet 3. The pallet 3 taken out from the pallet magazine 1 is horizontally fixed at a predetermined position of the pallet fixing table 20 by fixing the front and rear sides by the first pallet fixing part 23 and the second pallet fixing part 24.

  The pickup device 30 and the ejector device 31 have a function of taking out the electronic component 32 from the pallet 3. A space penetrating vertically is formed at the center of the pallet 3, and an electronic component 32 attached to the wafer sheet 33 is located above the space. The electronic component 32 positioned at a predetermined pickup position by the movement of the pallet fixing table 20 is pushed up by the ejector device 31 from below and is picked up from the pallet 3 by being attracted by the nozzle 34 of the pickup device 30 from above.

  The camera 35 images the electronic component 32 positioned at the pickup position. Image data of the electronic component 32 obtained by imaging is used when the electronic component 32 is mounted on the substrate 36. When the direction of the electronic component 32 is inclined, it is corrected by the rotation of the nozzle 34, and the positional deviation is corrected by moving the substrate table 37 that supports the substrate 36.

Next, the pallet fixing mechanism of the first pallet fixing part 23 will be described. As shown in FIG. 4, the first pallet fixing member 23 fixes the pallet 3 by inserting the protrusions 16 provided on the pallet 3 into the depressions 17. The protrusion 16 protrudes horizontally from the end of the pallet 3 and is formed with a cone-shaped portion (cone portion) 40 whose diameter decreases toward the tip. A portion 41 having a smaller diameter than the narrowest portion on the most distal end side of the cone portion 40 is formed at the tip of the cone portion 40, and a portion 42 having a larger diameter than the small diameter portion 41 is formed at the tip.

  An inner peripheral surface 43 having the same shape as the outer peripheral surface of the cone portion 40 is formed in the depressed portion 17 of the first pallet fixing portion 23. The space inside the inner peripheral surface 43 is open to the outside on the large diameter side. A locking member 44 that is movable in the insertion direction of the protruding portion 16 is disposed further to the inner peripheral surface 43. The locking member 44 is hollow, and the large-diameter portion 42 of the protrusion 16 that becomes the engaged member is inserted into the hollow portion. The engaging member 44 is provided with a plurality of engaging elements 45 that engage with the outer periphery of the large-diameter portion 42. On the back side of the depressed portion 17, a tapered surface 46 that is reduced in diameter in the insertion direction of the protrusion 16 is formed. The large diameter portion 42 is formed with a tapered surface 47 having an inclination opposite to the tapered surface 46.

  As shown in FIG. 4B, when the locking member 44 with the large-diameter portion 42 inserted is moved to the back side of the recessed portion 17, the engaging element 45 that contacts the tapered surface 46 moves inward to increase the large diameter. It contacts the tapered surface 47 of the part 42 and plays a role of pressing the large-diameter part 42 against the back side of the locking member 44. Thereby, the outer peripheral surface of the cone part 40 and the inner peripheral surface 43 of the first pallet fixing part 23 are completely adhered, and the pallet 3 is firmly fixed to the first pallet fixing part 23.

  The locking member 44 is connected to the piston rod 48 and fixes the pallet 3 when the piston rod 48 is contracted, and releases the pallet 3 when the piston rod 48 is extended. Further, when the piston rod 48 is extended, the protruding portion 16 can be inserted into the depressed portion 17.

  Next, the structure of the pallet 3 will be described. The pallet 3 includes a wafer ring 50 (see FIG. 5), a pallet base 51 (see FIG. 6), and a pallet rotating unit 52 (see FIG. 7). The wafer ring 50 is an annular rigid ring frame 53 that holds a flexible wafer sheet 54. The wafer sheet 54 is affixed with a semiconductor wafer separated into a plurality of electronic components 32 on an adhesive surface. The wafer ring 50 is fixed on the pallet rotating part 52, and the pallet rotating part 52 is mounted on the pallet base part 51 so as to be rotatable with respect to the pallet base part 51.

  The projection 16 is disposed at the end of the pallet base 51, and a notch 49 is formed on the opposite side. The pallet base 51 is fixed to the pallet fixing table 20 by the protrusions 16 engaging the first pallet fixing part 23 and the notches 49 engaging the second pallet fixing part 24.

  A ring portion 55 having a smaller diameter than the hollow portion of the ring frame 53 is disposed on the top surface of the pallet rotating portion 52, and four wafer ring fixing members 56 are disposed at equal intervals outside the ring portion 55. The inside of the ring portion 55 is a space that penetrates vertically. The wafer ring fixing member 56 includes a finger hook portion 57 and a stopper 58, and is pivotally supported on the pallet rotating portion 52 by a shaft 59. The stopper 58 rotates in parallel with the pallet rotating portion 52 around the shaft 59 near the ring portion 55 from the shaft 59. The wafer ring 50 is stacked on the pallet rotating unit 52 so that the wafer sheet 54 contacts the ring unit 55, and the ring frame 53 is fixed by the wafer ring fixing member 56 (see FIGS. 8 and 9). At this time, the ring frame 53 is pushed down to a position slightly lower than the upper end of the ring portion 55, so that the wafer sheet 54 extends inside the ring frame 53. As a result, the interval between the electronic components 32 adhered to the wafer sheet 54 is widened, so that it is possible to avoid interference with the adjacent electronic component 32 during pickup.

The center of the pallet base 51 is a space penetrating vertically. Around this space, three rollers 60 are arranged at equal intervals. On the outer periphery of the ring portion 55 of the pallet rotating portion 52, a roller receiving portion 61 having a groove that engages with the outer periphery of the roller 60 is disposed (see FIG. 10). The pallet rotating part 52 is mounted on the pallet base part 51 with a slight clearance by engaging the three rollers 60 with the roller receiving part 61. The pallet rotating part 52 is only supported by the three rollers 60 and is rotatable with respect to the pallet base part 51.

  Next, the pallet rotation restricting mechanism will be described with reference to FIG. An engaging member 62 located on the inner peripheral side of the roller receiving portion 61 is disposed on the pallet base portion 51. The engaging member 62 is pressed against the inner peripheral surface of the roller receiving portion 61 by the elastic force of the compression spring 63. A small hole 64 facing the inner periphery of the roller receiving portion 61 is formed in the engaging member 62, and a small protrusion 65 formed on the inner peripheral surface of the roller receiving portion 61 is accommodated inside the hole 64. In this state, the movement of the protrusion 65 is limited by the hole 64, so that the pallet rotating part 52 cannot rotate with respect to the pallet base 51 (see FIG. 11a).

  A push button 66 connected to the engaging member 62 is disposed at the end of the pallet base 51. When the push button 66 is pressed, the engaging member 62 moves against the elastic force of the compression spring 63 and moves away from the inner peripheral surface of the roller receiving portion 61, so that the pallet rotating portion 52 moves relative to the pallet base portion 51. It will be able to rotate freely (see FIG. 11b).

  Next, the pallet fixing mechanism of the second pallet fixing part 24 will be described with reference to FIGS. 12, 13, and 14. FIG. The second pallet fixing portion 24 includes an engaging portion 70 that engages with a notch portion 49 provided in two places on the pallet base portion 51. The two notches 49 are provided at the same height at positions apart from each other. The engaging portions 70 are provided at the same height at two locations corresponding to the respective cutout portions 49.

  A slider 71 is disposed on the lower surface of the second pallet fixing portion 24. The slider 71 is mounted on a rail 72 disposed on the upper surface of the pallet fixing table 20. The second pallet fixing part 24 moves linearly along the rail 72 by the expansion and contraction of the piston rod 73. The second pallet fixing part 24 fixes the pallet base 51 when it moves to the first pallet fixing part 23 side (FIG. 12), and releases the pallet base 51 when it moves to the opposite side (FIG. 13). ).

  FIG. 14 is a side view showing a state where the engaging portion 70 and the cutout portion 49 are engaged. A pin 74 having a circular cross section is mounted laterally in the notch 49. A V-shaped groove 75 that sandwiches the pin 70 up and down is formed at the tip of the engaging portion 70, and when the second pallet fixing portion 24 moves to the first pallet fixing portion 23 side, the V-shaped groove 75. Is in contact with the pin 74 (FIG. 14a). The engaging portion 70 is urged to the side away from the second pallet fixing portion 24 by the compression spring 76, and the pallet base 51 is horizontally moved by pressing each contacted pin 74 against the innermost portion of the V-shaped groove 75. Fix (Fig. 14b).

  Next, a mechanism for rotating the pallet rotating unit 52 will be described. In FIG. 7, the pallet rotating portion 52 is provided with an arc-shaped driven gear 80. In FIG. 12, the second pallet fixing portion 24 includes a drive gear 81 that is screwed with the driven gear 80, and a main drive gear 82 that is screwed with the drive gear 81. The driving gear 81 is engaged with the driven gear 80 when the second pallet fixing part 24 fixes the pallet base part 51. The main driving gear 82 is driven by a motor 83 and transmits a driving force to the driven gear 80 via the driving gear 81. The rotation angle of the pallet rotating unit 52 can be adjusted by driving control of the motor 83.

The second pallet fixing part 24 is provided with a mechanism for regulating the rotation angle of the pallet rotating part 52. A pair of optical sensors 84 and 85 are disposed in the second pallet fixing portion 24 at a position sandwiching the drive gear 81 so as to detect the light shielding plate 86 (FIG. 7) attached to the pallet rotating portion 52. ing. When the light shielding plate 86 that moves with the rotation of the pallet rotating unit 52 interferes with the light emitted from the optical sensors 84 and 85, the rotation of the pallet rotating unit 52 is stopped by stopping the driving of the motor 83.

  Further, the second pallet fixing part 24 is provided with an engagement releasing member 87 for pressing the push button 66 of the pallet base part 51. As shown in FIG. 15, the disengagement member 87 contacts the push button 66 only when the second pallet fixing portion 24 moves to a position where the driving gear 81 and the driven gear 80 interfere with each other. Are arranged to be. As a result, when the engagement by the engaging member 62 is released, the drive gear 81 and the driven gear 80 are engaged with each other, so that the pallet rotating portion 52 can be prevented from rotating unexpectedly.

  Next, automatic pallet exchange will be described. Here, a process until the pallet 3 taken out from the pallet magazine 1 is fixed to the pallet fixing table 20 will be described with reference to the drawings. First, as shown in FIG. 16, the first pallet fixing portion 23 is made to be opposed to the projection portion 16 of the pallet 3 to be taken out. As an operation of the automatic pallet changing device, the horizontal rotation of the first pallet fixing portion 23 (arrow a) and the horizontal movement of the pallet fixing table 20 (arrows b and c) are performed to align both in the horizontal direction. Positioning is performed in the height direction of both by moving up and down 1. The pallet 3 is positioned in a state where it is fixed in the pallet magazine 1 by the pallet positioning mechanism 5, and the movement in the front-rear direction is restricted by the pallet pop-out preventing mechanism 6 so as not to jump out from the pallet magazine 1. It is in the state.

  Then, as shown in FIG. 17, the pallet fixing table 20 is moved horizontally toward the pallet 3 fixed in the pallet magazine 1, and the first pallet fixing portion 23 is engaged with the two protrusions 16. As shown in FIG. 18, the pallet fixing table 20 is moved horizontally after the pallet positioning mechanism 5 and the pallet popping prevention mechanism 6 are fixed, and the pallet 3 is taken out from the pallet magazine 1. At this time, the pallet 3 is held in a cantilever state in which one end is fixed by the first pallet fixing part 23.

  When the pallet 3 is completely taken out from the pallet magazine 1, the first pallet fixing part 23 rotates horizontally and changes the direction of the pallet 3 by 180 degrees as shown in FIG. By this orientation change, the other end side of the pallet 3 (the side not fixed by the first pallet fixing portion 23) is in a positional relationship facing the second pallet fixing portion 24. Thereafter, the second pallet fixing part 24 moves to the pallet 3 side as shown in FIG. 20, engages with the end of the pallet 3 and fixes the pallet 3 from the other end side. At the same time, the drive gear 81 is screwed with the driven gear 80 so that the pallet rotating part 52 can be rotated. At this time, the pallet 3 is fixed on the pallet fixing table 20 in a state where both the opposite sides are held by the first pallet fixing part 23 and the second pallet fixing part 24.

  The advantage of the automatic pallet changing apparatus described above is that the linear movement distance of the pallet can be shortened by performing a horizontal turn in addition to the linear movement at the time of pallet exchange. It can be mentioned that simplification and downsizing can be realized. Moreover, since the linear movement and turning of the pallet can be performed at the same time, the time required for the pallet replacement can be shortened. Then, the pallet has a plurality of protrusions, and each is fixed at a plurality of locations by engaging with the recessed portions of the pallet fixing portion, so that the positioning accuracy and reproducibility are good. Furthermore, by fixing the pallet by bringing the inner peripheral surface into close contact with the outer peripheral surface and the recessed portion of the conical portion of the projection, the pallet can be moved even if inertial force or centrifugal force is applied during movement or turning. The position is kept strong without shifting.

In addition, since the pallet moves in a cantilevered state, the side that is not fixed by its own weight may hang down. However, since the pallet is fixed in a both-sided state on the pallet fixing table, it is kept horizontal. Since the pallet fixed by both ends can effectively suppress vibration and displacement even when the pallet fixing table is moved, the positioning accuracy of the electronic component is improved.

  Furthermore, since the pallet 3 can be fixed to the pallet magazine 1 by the claw 7 provided in the pallet storage chamber 2, both workability when storing the pallet and stability of the pallet 3 when replacing the pallet are possible. Became. The pallet storage chamber 2 is made slightly wider than the width of the pallet 3, thereby eliminating contact resistance between the pallet 3 and the pallet magazine 1, thereby improving workability during pallet storage. However, on the other hand, the pallet 3 is idle in the pallet magazine 1 due to the gap between the two, causing problems such as misalignment and dropping from the pallet magazine 1. Since the claw 7 can be displaced between a position where it contacts both sides of the pallet 3 and a position where it does not contact, the operability is maintained by not contacting the pallet 3 when storing the pallet, and it is kept in contact in other situations. As a result, the position and posture of the pallet 3 in the pallet magazine 1 are stabilized.

  As shown in FIG. 21, the automatic pallet changing apparatus can also use a pallet 91 on which a tray 90 is mounted instead of a wafer sheet. The pallet 91 has the same outer shape as the pallet 3, and further includes a similar protrusion 92. The rectangular tray 90 is fixed to the approximate center of the pallet 91 with the lower right corner applied to the positioning plate 93 at the lower right of the pallet 91 and the upper side and the left side applied to the side plates 94 and 95, respectively. . The close-up plates 94 and 95 are movable along the grooves 96 and 97, respectively, and are biased downward and rightward by coil springs that are biasing means (not shown). The tray 90 has recesses 98 formed in a lattice shape, and the electronic components 99 are stored in the recesses 98 one by one.

  Unlike the pallet 3 in which the electronic component 32 is attached to the wafer sheet 54, the electronic component 99 is only placed in the recess 98 in the pallet 91, so that if there is a gap between the pallet magazine 1 and the pallet 91, the projection Since a horizontal displacement occurs between the portion 16 and the depressed portion 17, vibrations and impacts are easily generated when the pallet is fixed, so that the portion 16 and the tray 99 are likely to jump out. Even in this case, by fixing the pallet 91 with the claws 7, the pallet 91 is not played in the pallet magazine 1, and the occurrence of vibration and impact can be suppressed as much as possible.

  According to the present invention, the turning movement is added in addition to the linear movement of the pallet, so that the linear movement distance of the pallet can be shortened, and further, the time required for the pallet replacement is reduced by performing the linear movement and the turning movement simultaneously. In particular, it is useful for a multi-chip bonder or the like in which chips are mounted using a plurality of pallets.

The top view of the pallet automatic exchange apparatus in embodiment of this invention Side view of automatic pallet changing apparatus according to an embodiment of the present invention Explanatory drawing of the movement of the nail | claw of the pallet positioning mechanism in embodiment of this invention Explanatory drawing of the pallet fixing mechanism of the 1st pallet fixing | fixed part in embodiment of this invention Plan view of wafer ring in the embodiment of the present invention The top view of the pallet rotation part in embodiment of this invention The top view of the pallet base part in embodiment of this invention The top view of the pallet which is the state which mounted | wore with the pallet rotation part in the pallet base in embodiment of this invention The state figure which fixed the wafer ring with the wafer ring fixing member in embodiment of this invention The state figure which attached the pallet rotation part to the pallet base in embodiment of this invention Explanatory drawing of the pallet rotation regulation mechanism in embodiment of this invention Explanatory drawing of the pallet fixing mechanism of the 2nd pallet fixing | fixed part in embodiment of this invention Explanatory drawing of the pallet fixing mechanism of the 2nd pallet fixing | fixed part in embodiment of this invention Explanatory drawing of the pallet fixing mechanism of the 2nd pallet fixing | fixed part in embodiment of this invention Explanatory drawing of the pallet fixing mechanism of the 2nd pallet fixing | fixed part in embodiment of this invention Explanatory drawing of the process of the pallet automatic exchange in embodiment of this invention Explanatory drawing of the process of the pallet automatic exchange in embodiment of this invention Explanatory drawing of the process of the pallet automatic exchange in embodiment of this invention Explanatory drawing of the process of the pallet automatic exchange in embodiment of this invention Explanatory drawing of the process of the pallet automatic exchange in embodiment of this invention The top view of the pallet which attached the tray in embodiment of this invention

1 Pallet Magazine 2 Pallet Storage Room 3, 91 Pallet 7 Claw (Pallet Positioning Member)
16 Protruding part 17 Depressed part 20 Pallet fixing table 23 First pallet fixing part

Claims (1)

A pallet magazine in which a plurality of pallet storage chambers are arranged in the vertical direction, a pallet positioning member that is provided in each of the plurality of pallet storage chambers and is located on the side of the pallet stored in the pallet storage chamber, and the pallet positioning member , said pallet and a position in contact with the side portion of the housing pallet in the storage chamber and the pallet positioning member displacing means for displacing the position and not in contact, arranged pallet fixing in the direction of loading and unloading the pallets to the pallet magazine A table, a pallet engaging member that is disposed on the pallet fixing table and engages with an engaged portion of the pallet, and a pallet that moves the pallet fixing table in a direction toward and away from the pallet magazine A moving means and the pallet fixing table disposed on the pallet fixing table; And a pallet pivot means for pivoting the member,
An automatic pallet exchanging apparatus, wherein a pallet is exchanged between the pallet fixing table and the pallet magazine by rotating and moving a pallet engaged with the pallet engaging member.

Images