JP5083222B2 - Pallet automatic changer - Google Patents

Description

  The present invention relates to an apparatus for automatically changing a pallet for supplying electronic components.

A wafer sheet used for supplying electronic components is a thin film having high flexibility, and an electronic component (die) obtained by dicing a silicon wafer is attached to one surface. When the tension is not applied to the wafer sheet, the side surfaces of the attached electronic components are in contact with each other. When taking out the electronic components, the wafer sheet placed at a predetermined position should be stretched with tension. The interval between adjacent electronic components is increased. When handling various types of electronic components, store them in multiple wafer sheet magazines with different types of electronic components pasted, and take out the wafer sheet with the desired electronic components pasted from the magazine and put it in place Install. If another type of electronic component is required, the currently mounted wafer sheet is returned to the magazine, and a new wafer sheet is taken out and installed (see Patent Documents 1 and 2).
JP-A-2-231740 JP-A-5-29440

  By the way, the wafer sheet to which tension is applied remains stretched after that, and becomes loosened inside the wafer ring holding the outer periphery. For this reason, the loosened electronic components may collide with each other due to vibration or the like when exchanging the wafer sheet, and the edges and corners may be damaged. Further, it takes time to mount the wafer sheet in a state where tension is applied at a predetermined position every time the wafer sheet is replaced, and the production efficiency is lowered.

  SUMMARY OF THE INVENTION An object of the present invention is to provide an automatic pallet changing apparatus that does not cause damage to electronic components or decrease in production efficiency.

The automatic pallet changing apparatus according to claim 1 is a pallet fixing table disposed on a pallet magazine loading / unloading side of the pallet magazine, and a first linear motion table for moving the pallet fixing table in a pallet loading / unloading direction and a direction perpendicular thereto. And a second linear motion table, an upper part of the pallet fixing table, a first pallet fixing part arranged horizontally on the side of the pallet magazine and horizontally turning by a driving source, and an upper part of the pallet fixing table a and a second pallet fixing portion disposed farther part than the first pallet fixing portion of the pallet magazine 1, the first pallet fixing portion holding one end of the pallet in the form of cantilevered Remove the pallet from the pallet magazine, and turn the pallet horizontally 180 degrees from the pallet magazine. In other words, the other end side of the pallet is opposed to the second pallet fixing part, and the second pallet fixing part moves to the pallet side, and the first pallet fixing part and the second pallet fixing part. The pallet is fixed to the pallet fixing table by holding the pallet on the pallet fixing table. The pallet has a pallet rotating part to which a wafer ring for holding a wafer sheet is fixed, and a pallet base to which the pallet rotating part is rotatably mounted. The pallet rotating part has a driven gear, and the second pallet fixing part has a driving gear that engages with the driven gear when the both-end fixed is made, and the pallet base part has a pallet An engaging member that engages with the rotating part to render the pallet rotating part non-rotatable with respect to the pallet base, and the second pallet fixing part The disengagement member provided in the disengagement member releases the engagement by the engagement member, and the drive gear and the driven gear are engaged with each other so that the pallet rotating portion can be rotated.

Since the pallet automatic exchange apparatus of the present invention exchanges the pallet on which the wafer sheet is mounted, the wafer sheet remains in a tension state and no collision between electronic components occurs. In addition, since it is not necessary to apply tension when the wafer sheet is mounted, the time required for replacement can be shortened. Furthermore, it is possible to prevent the pallet rotating unit from rotating during pallet replacement.

Embodiments of the present invention will be described with reference to the drawings. 1 is a plan view of an automatic pallet changing apparatus according to an embodiment of the present invention, FIG. 2 is a side view of the automatic pallet changing apparatus according to an embodiment of the present invention, FIG. 3 is an explanatory view of a pallet positioning mechanism, and FIG. FIG. 5 is a plan view of the wafer ring, FIG. 6 is a plan view of the pallet base , FIG. 7 is a plan view of the pallet rotating unit , and FIG. 8 is a plan view of the entire pallet. FIG. 9 is an explanatory diagram of a mechanism for mounting a wafer ring on the pallet rotating unit, FIG. 10 is an explanatory diagram of a mechanism for mounting the pallet rotating unit on the pallet base, and FIG. 11 is an explanatory diagram of a mechanism for restricting the rotation of the pallet rotating unit. FIG. 12 is an explanatory view of a mechanism for fixing a pallet by the second pallet fixing portion, FIG. 13 is an explanatory view of a mechanism for fixing the pallet by the second pallet fixing portion, and FIG. 14 is an illustration of the second pallet fixing portion. Yo 15 is an explanatory diagram of the mechanism for fixing the pallet, FIG. 15 is an explanatory diagram of the mechanism for fixing the pallet by the second pallet fixing portion, FIG. 16 is an explanatory diagram of the automatic pallet replacement process, and FIG. 17 is the automatic pallet replacement process. FIG. 18 is an explanatory diagram of an automatic pallet exchange process, FIG. 19 is an explanatory diagram of an automatic pallet exchange process, and FIG. 20 is an explanatory diagram of an automatic pallet exchange process.

  First, an automatic pallet changer will be described. 1 and 2, the pallet magazine 1 includes a plurality of pallet storage chambers 2 divided in the vertical direction, and each pallet storage chamber 2 stores one pallet 3. In the uppermost pallet storage chamber 2, the stored pallet 3 is taken out and becomes an empty chamber. The pallet magazine 1 can be moved up and down by an elevating device 4. When the pallet is taken out, the pallet storage chamber 2 containing the pallet 3 to be taken out is positioned at a predetermined height, and when the pallet 3 taken out is stored, the pallet magazine 1 The pallet storage chamber 2 is positioned at a predetermined height.

  A pallet positioning mechanism 5 that regulates the position of each pallet 3 stored in the pallet magazine 1 in the lateral direction (direction perpendicular to the direction in which the pallet 3 is put in and out), and the front-rear direction so that the pallet 3 does not jump out of the magazine ( A pallet pop-out prevention mechanism 6 that is pressed in the direction in which the pallet 3 is put in and out is provided.

  The pallet positioning mechanism 5 performs lateral positioning by bringing the claws 7 into contact with both side surfaces of each pallet 3 stored in the pallet magazine 1. Two rotating shafts 8 are vertically arranged on both sides of the pallet magazine 1, and each rotating shaft 8 is positioned at the same height as each pallet 3 stored in the pallet magazine 1. A nail 7 is attached. The claw 7 is mounted at a position eccentric to the rotary shaft 8, and comes into contact with both side surfaces of each pallet 3 by the rotation of the rotary shaft 8. The pallet magazine 1 is closed on three sides other than the pallet loading / unloading side, but openings 9 are formed on both sides so that the pawl 7 can contact the pallet 3.

  A cylinder 10 serving as a drive source for rotating the rotary shaft 8 is disposed on the pallet magazine 1. The cylinder 10 expands and contracts the piston rod 11 to rotate the rotating shaft 8 through a link portion 12 by a predetermined angle. When the piston rod 11 is contracted, the claw 7 comes into contact with both side surfaces of the pallet 3 and restricts the movement of the pallet 3 in the lateral direction to be positioned at a predetermined position (see FIG. 3a). On the other hand, when the piston rod 11 is extended, the claw 7 is separated from both side surfaces of the pallet 3, and the pallet 3 is in a state where the regulation is released (see FIG. 3b). In this state, the pallet 3 can be taken out from the pallet magazine 1, and the pallet 3 can be stored in the pallet magazine 1.

The pallet pop-out preventing mechanism 6 regulates the movement in the front-rear direction by bringing the engaging member 13 into contact with the end of each pallet 3 stored in the pallet magazine 1 and fixes it in the magazine to prevent the pop-out. The stop portion 13 is a bar-like portion standing in the vertical direction. The stop portion 13 rotates about the rotation shaft 14 and contacts the end of each pallet 3 on the front surface of the pallet magazine 1 on the pallet loading / unloading side. To the position retracted to both side surfaces of the pallet magazine 1. A cylinder mechanism 15 serving as a drive source for moving the engagement member 13 is disposed below the pallet magazine 1. The linear motion of the cylinder mechanism 15 is converted into rotation of the engagement member 13 via a link mechanism (not shown).

  The pallet fixing table 20 is a place for fixing the pallet 3 taken out from the pallet magazine 1 and is arranged on the pallet magazine insertion / removal side. The pallet fixing table 20 can be moved horizontally by two linear motion tables 21 and 22, and includes pallet fixing portions 23 and 24 for fixing the pallet 3. The first linear motion table 21 moves the pallet fixing table 20 in the direction in which the pallet 3 is put in and out by the ball screw mechanism 25. The second linear motion table 22 moves the pallet fixing table 20 in a direction orthogonal to the direction in and out of the pallet 3 by the ball screw mechanism 26.

As shown in FIG. 1, the first pallet fixing portion 23 is disposed on the pallet fixing table 20 on the side portion of the pallet magazine 1 so as to be horizontally rotatable. The first pallet fixing portion 23 includes two depressed portions 17 into which two projecting portions 16 that are juxtaposed in the horizontal direction at the end of the pallet 3 are inserted. The first pallet fixing part 23 is pivotally supported on the pallet fixing table 20 by a rotating shaft 27, and can be changed in direction by turning horizontally using a motor 28 as a drive source.

The second pallet fixing portion 24 is arranged on the far side portion than the first pallet fixing portion 23 of the pallet magazine 1 a top of the pallet fixing table 20. The second pallet fixing part 24 fixes the side opposite to the side fixed by the first pallet fixing part 23 of the pallet 3. The pallet 3 taken out from the pallet magazine 1 is horizontally fixed at a predetermined position of the pallet fixing table 20 by fixing the front and rear sides by the first pallet fixing part 23 and the second pallet fixing part 24.

The pickup device 30 and the ejector device 31 have a function of taking out the electronic component 32 from the pallet 3. A space penetrating vertically is formed in the center of the pallet 3, and the electronic component 32 attached to the wafer sheet 54 is located above the space. The position indicated by the broken line in the drawing is the pickup position of the electronic component 32, and the electronic component 32 positioned at this position by the movement of the pallet fixing table 20 is pushed up by the pin 31a of the ejector device 31 from below and from above. It is picked up from the pallet 3 by being adsorbed by the nozzle 34 of the pickup device 30.

  The camera 35 images the electronic component 32 positioned at the pickup position. Image data of the electronic component 32 obtained by imaging is used when the electronic component 32 is mounted on the substrate 36. When the direction of the electronic component 32 is inclined, it is corrected by the rotation of the nozzle 34, and the positional deviation is corrected by moving the substrate table 37 that supports the substrate 36.

  Next, a mechanism for engaging the depressed portion 17 of the first pallet fixing portion 23 and the protruding portion 16 of the pallet 3 will be described. In FIG. 4A, the protrusion 16 protrudes horizontally from the end of the pallet 3, and a cone-shaped portion (cone portion) 40 having a diameter reduced toward the tip is formed. A portion 41 having a smaller diameter than the narrowest portion on the most distal end side of the cone portion 40 is formed at the tip of the cone portion 40, and a portion 42 having a larger diameter than the small diameter portion 41 is formed at the tip.

An inner peripheral surface 43 having the same shape as the outer peripheral surface of the cone portion 40 is formed in the depressed portion 17 of the first pallet fixing portion 23. The inner space of the inner peripheral surface 43 is open to the outside on the large diameter side. A locking member 44 that is movable in the insertion direction of the protruding portion 16 is disposed further to the inner peripheral surface 43. The locking member 44 includes an engagement element 45 that engages with the large diameter portion 42 of the protrusion 16. The locking member 44 moves in the insertion direction of the protrusion 16 with the large-diameter portion 42 locked by the engagement element 45, and the outer peripheral surface of the cone portion 40 and the inner peripheral surface 43 of the first pallet fixing portion 23. Is completely adhered. The pallet 3 is firmly fixed to the first pallet fixing portion 23 when the outer peripheral surface and the inner peripheral surface 43 of the cone portion 40 are completely in close contact with each other.

  The engaging element 45 is a spherical part, and is inserted into two holes formed in the locking member 44 so as to be movable. A tapered portion 46 that is reduced in diameter in the insertion direction of the protruding portion 16 is formed in a space further inside the inner peripheral surface 43. When the locking member 44 is moved, the engagement element 45 moves inward along the taper portion 46 and engages with a taper portion 47 that is formed in the large-diameter portion 42 so as to be inclined in a direction opposite to the taper portion 46 ( See FIG. 4b).

  The locking member 44 is moved by a piston rod 48 that expands and contracts in the horizontal direction. When the piston rod 48 is contracted, the large-diameter portion 42 is locked to fix the pallet 3, and when the piston rod 48 is extended, the locking is released. The fixation of the pallet 3 is released. In this state, the protrusion 16 can be inserted into the depressed portion 17, and the pallet 3 can be fixed by the first pallet fixing portion 23.

  Next, the structure of the pallet 3 will be described. The pallet 3 includes a wafer ring 50 (see FIG. 5), a pallet base 51 (see FIG. 6), and a pallet rotating unit 52 (see FIG. 7). The wafer ring 50 is an annular rigid ring frame 53 that holds a flexible wafer sheet 54. The wafer sheet 54 is affixed with a semiconductor wafer separated into a plurality of electronic components 32 on an adhesive surface. The wafer ring 50 is fixed on the pallet rotating part 52, and the pallet rotating part 52 is mounted on the pallet base part 51 so as to be rotatable with respect to the pallet base part 51.

  The projection 16 is disposed at the end of the pallet base 51, and a notch 49 is formed on the opposite side. The pallet base 51 is fixed to the pallet fixing table 20 by the protrusions 16 engaging the first pallet fixing part 23 and the notches 49 engaging the second pallet fixing part 24.

  A ring portion 55 having a smaller diameter than the hollow portion of the ring frame 53 is disposed on the upper surface of the pallet rotating portion 52, and four engagement members 56 are disposed on the outer side of the ring portion 55 at equal intervals. The inside of the ring portion 55 is a space that penetrates vertically. The engaging member 56 includes a finger hook portion 57 and a stopper 58, and is pivotally supported on the pallet rotating portion 52 by a shaft 59. The stopper 58 rotates in parallel with the pallet rotating portion 52 around the shaft 59 near the ring portion 55 from the shaft 59. The wafer ring 50 is stacked on the pallet rotating portion 52 so that the wafer sheet 54 contacts the ring portion 55, and the ring frame 53 is fixed by the engaging member 56 (see FIGS. 8 and 9). At this time, the ring frame 53 is pushed down to a position slightly lower than the upper end of the ring portion 55, so that the wafer sheet 54 extends inside the ring frame 53. As a result, the interval between the electronic components 32 adhered to the wafer sheet 54 is widened, so that it is possible to avoid interference with the adjacent electronic component 32 during pickup.

  The center of the pallet base 51 is a space penetrating vertically. Around this space, three rollers 60 are arranged at equal intervals. On the outer periphery of the ring portion 55 of the pallet rotating portion 52, a roller receiving portion 61 having a groove that engages with the outer periphery of the roller 60 is disposed (see FIG. 10). The pallet rotating part 52 is mounted on the pallet base part 51 with a slight clearance by engaging the three rollers 60 with the roller receiving part 61. The pallet rotating part 52 is only supported by the three rollers 60 and is rotatable with respect to the pallet base part 51.

  Next, a structure for restricting the rotation of the pallet rotating part 52 relative to the pallet base part 51 will be described with reference to FIG. An engaging member 62 located on the inner peripheral side of the roller receiving portion 61 is disposed on the pallet base portion 51. The engaging member 62 is pressed against the inner peripheral surface of the roller receiving portion 61 by the elastic force of the compression spring 63. A small hole 64 facing the inner periphery of the roller receiving portion 61 is formed in the engaging member 62, and a small protrusion 65 formed on the inner peripheral surface of the roller receiving portion 61 is accommodated inside the hole 64. In this state, the movement of the protrusion 65 is limited by the hole 64, so that the pallet rotating part 52 cannot rotate with respect to the pallet base 51 (see FIG. 11a).

  A push button 66 connected to the engaging member 62 is disposed at the end of the pallet base 51. When the push button 66 is pressed, the engaging member 62 moves against the elastic force and moves away from the inner peripheral surface of the roller receiving portion 61, whereby the pallet rotating portion 52 freely rotates with respect to the pallet base portion 51. (See FIG. 11b).

  Next, the second pallet fixing part 24 will be described with reference to FIGS. 12, 13, and 14. FIG. The second pallet fixing portion 24 includes an engaging portion 70 that engages with a notch portion 49 provided in two places on the pallet base portion 51. The two notches 49 are provided at the same height at positions apart from each other. The engaging portions 70 are provided at the same height at two locations corresponding to the respective cutout portions 49.

  A slider 71 is disposed on the lower surface of the second pallet fixing portion 24. The slider 71 is mounted on a rail 72 disposed on the upper surface of the pallet fixing table 20. The second pallet fixing part 24 moves linearly along the rail 72 by the expansion and contraction of the piston rod 73. The second pallet fixing part 24 fixes the pallet base 51 when it moves to the first pallet fixing part 23 side (FIG. 12), and releases the pallet base 51 when it moves to the opposite side (FIG. 13). ).

  FIG. 14 is a side view showing a state where the engaging portion 70 and the cutout portion 49 are engaged. A pin 74 having a circular cross section is mounted laterally in the notch 49. A V-shaped groove 75 that sandwiches the pin 74 up and down is formed at the tip of the engaging portion 70, and the V-shaped groove 75 is moved when the second pallet fixing portion 24 moves to the first pallet fixing portion 23 side. Is in contact with the pin 74 (FIG. 14a). The engaging portion 70 is urged to the side away from the second pallet fixing portion 24 by the compression spring 76, and the pallet base 51 is horizontally moved by pressing each contacted pin 74 against the innermost portion of the V-shaped groove 75. Fix (Fig. 14b).

  Next, a mechanism for rotating the pallet rotating unit 52 will be described. In FIG. 7, the pallet rotating portion 52 is provided with an arc-shaped driven gear 80. In FIG. 12, the second pallet fixing portion 24 includes a drive gear 81 that is screwed with the driven gear 80, and a main drive gear 82 that is screwed with the drive gear 81. The driving gear 81 is engaged with the driven gear 80 when the second pallet fixing part 24 fixes the pallet base part 51. The main driving gear 82 is driven by a motor 83 and transmits a driving force to the driven gear 80 via the driving gear 81. The rotation angle of the pallet rotating unit 52 can be adjusted by driving control of the motor 83.

  The second pallet fixing part 24 is provided with a mechanism for regulating the rotation angle of the pallet rotating part 52. A pair of optical sensors 84 and 85 are disposed in the second pallet fixing portion 24 at a position sandwiching the drive gear 81 so as to detect the light shielding plate 86 (FIG. 7) attached to the pallet rotating portion 52. ing. When the light shielding plate 86 that moves with the rotation of the pallet rotating unit 52 interferes with the light emitted from the optical sensors 84 and 85, the rotation of the pallet rotating unit 52 is stopped by stopping the driving of the motor 83.

  Further, the second pallet fixing part 24 is provided with an engagement releasing member 87 for pressing the push button 66 of the pallet base part 51. As shown in FIG. 15, the disengagement member 87 contacts the push button 66 only when the second pallet fixing portion 24 moves to a position where the driving gear 81 and the driven gear 80 interfere with each other. Are arranged to be. As a result, when the engagement by the engaging member 62 is released, the drive gear 81 and the driven gear 80 are engaged with each other, so that the pallet rotating portion 52 can be prevented from rotating unexpectedly.

  Next, automatic pallet exchange will be described. Here, a process until the pallet 3 taken out from the pallet magazine 1 is fixed to the pallet fixing table 20 will be described with reference to the drawings. First, as shown in FIG. 16, the first pallet fixing portion 23 is made to be opposed to the projection portion 16 of the pallet 3 to be taken out. As an operation of the automatic pallet changing device, the horizontal rotation of the first pallet fixing portion 23 (arrow a) and the horizontal movement of the pallet fixing table 20 (arrows b and c) are performed to align both in the horizontal direction. Positioning is performed in the height direction of both by moving up and down 1. The pallet 3 is positioned so as not to move laterally in the pallet magazine 1 by the pallet positioning mechanism 5, and is further moved back and forth so as not to jump out of the pallet magazine 1 by the pallet popping prevention mechanism 6. Is in a restricted state.

Then, as shown in FIG. 17, the pallet fixing table 20 is horizontally moved toward the pallet 3, and the first pallet fixing portion 23 is engaged with the two protrusions 16 . Then, as shown in FIG. 18, after the movement restriction of the pallet 3 by the pallet positioning mechanism 5 and the pallet pop-out preventing mechanism 6 is released, the pallet fixing table 20 is moved horizontally and the pallet 3 is taken out from the pallet magazine 1. At this time, the pallet 3 is held in a cantilever state in which one end is fixed by the first pallet fixing part 23 .

  When the pallet 3 is completely taken out from the pallet magazine 1, the first pallet fixing part 23 rotates horizontally and changes the direction of the pallet 3 by 180 degrees as shown in FIG. By this orientation change, the other end side of the pallet 3 (the side not fixed by the first pallet fixing portion 23) is in a positional relationship facing the second pallet fixing portion 24. Thereafter, the second pallet fixing part 24 moves to the pallet 3 side as shown in FIG. 20, engages with the end of the pallet 3 and fixes the pallet 3 from the other end side. At the same time, the drive gear 81 is screwed with the driven gear 80 so that the pallet rotating part 52 can be rotated. At this time, the pallet 3 is fixed on the pallet fixing table 20 in a state where both the opposite sides are held by the first pallet fixing part 23 and the second pallet fixing part 24.

  The advantage of the automatic pallet changing apparatus described above is that the linear movement distance of the pallet can be shortened by performing a horizontal turn in addition to the linear movement at the time of pallet exchange. It can be mentioned that simplification and downsizing can be realized. Moreover, since the linear movement and turning of the pallet can be performed at the same time, the time required for the pallet replacement can be shortened. Then, the pallet has a plurality of protrusions, and each is fixed at a plurality of locations by engaging with the recessed portions of the pallet fixing portion, so that the positioning accuracy and reproducibility are good. Furthermore, by fixing the pallet by bringing the inner peripheral surface into close contact with the outer peripheral surface and the recessed portion of the conical portion of the projection, the pallet can be moved even if inertial force or centrifugal force is applied during movement or turning. The position is kept strong without shifting.

  In addition, since the pallet moves in a cantilevered state, the side that is not fixed by its own weight may hang down. However, since the pallet is fixed in a both-sided state on the pallet fixing table, it is kept horizontal. Since the pallet fixed by both ends can effectively suppress vibration and displacement even when the pallet fixing table is moved, the positioning accuracy of the electronic component is improved.

  The present invention is particularly useful for a multi-chip bonder in which chips are mounted using a plurality of pallets while exchanging them.

The top view of the pallet automatic exchange apparatus of embodiment of this invention Side view of an automatic pallet changer according to an embodiment of the present invention Explanation of pallet positioning mechanism Explanatory drawing of the mechanism which fixes a pallet by the 1st pallet fixing | fixed part. Top view of wafer ring Plan view of pallet base Plan view of pallet rotating part Top view of the entire pallet Explanatory drawing of the mechanism to attach the wafer ring to the pallet rotating part Explanatory drawing of the mechanism to mount the pallet rotating part on the pallet base Explanatory drawing of the mechanism that regulates the rotation of the pallet rotating part Explanatory drawing of the mechanism which fixes a pallet by the 2nd pallet fixing | fixed part Explanatory drawing of the mechanism which fixes a pallet by the 2nd pallet fixing | fixed part Explanatory drawing of the mechanism which fixes a pallet by the 2nd pallet fixing | fixed part Explanatory drawing of the mechanism which fixes a pallet by the 2nd pallet fixing | fixed part Illustration of automatic pallet exchange process Illustration of automatic pallet exchange process Illustration of automatic pallet exchange process Illustration of automatic pallet exchange process Illustration of automatic pallet exchange process

3 Pallet 20 Pallet fixing table 23 First pallet fixing part 24 Second pallet fixing part 25 Ball screw mechanism 27 Rotating shaft 28 Motor 51 Pallet base part 52 Pallet rotating part 54 Wafer sheet 62 Engaging member 66 Push button 80 Driven gear 81 Drive gear 82 Main drive gear

Claims (1)

A pallet fixing table disposed on the pallet magazine loading / unloading side, a first linear movement table and a second linear movement table for moving the pallet fixing table in the pallet loading / unloading direction and a direction perpendicular thereto, and a pallet fixing table a first pallet fixing portion of the first pallet fixing portion of the pallet magazine 1 a top of the pallet fixing table horizontal pivoting on the side of the upper and a by pallet magazine by horizontally pivotally disposed in the drive source of and a second pallet fixing portion disposed farther part than,
The first pallet fixing part holds one end of the pallet in a cantilever state to take out the pallet from the pallet magazine, and horizontally rotates the pallet taken out from the pallet magazine by 180 ° to change the other end of the pallet. The second pallet fixing part is moved to the pallet side, and the pallet is moved onto the pallet fixing table by the first pallet fixing part and the second pallet fixing part. To fix both
The pallet comprises a pallet rotating part to which a wafer ring holding a wafer sheet is fixed, and a pallet base to which the pallet rotating part is rotatably mounted,
The pallet rotating part has a driven gear, and the second pallet fixing part has a driving gear that engages with the driven gear when the both-end fixing is performed,
The pallet base has an engaging member that engages with the pallet rotating part and makes the pallet rotating part non-rotatable with respect to the pallet base. When the both-end fixing is performed, the second pallet fixing part The automatic release of the pallet is characterized in that the engagement by the engagement member is released by the engagement release member provided on the pallet and the drive gear and the driven gear are engaged with each other so that the pallet rotating part can be rotated. apparatus.

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