JPS6074542A - Automatic inspecting device for integrated circuit parts - Google Patents

Abstract

PURPOSE:To contrive to simplify handling of plural integrated circuit parts and to automate the titled device by a method wherein a conveying jig, which is capable of mounting the parts or detaching them in a state supporting pin terminals for the parts, is used, and rise temperature and inspection of the parts and sorting of non-defective and defective are performed in a unit of conveying jig. CONSTITUTION:Integrated circuit parts 1 are mounted on the plate-shaped member 7 of a conveying jig 6 and the conveying jig 6 is conveyed by a conveying unit 18 and is positioned at a positioning position 19. The conveying jig 6 is held by the holding means 21 of a supply unit 20, is transferred to a fixed unit 23 on a rotary table 22 and is continuously conducted by a conducting unit 24. At this time, some of the parts 1, which generated overcurrent, are detected indicated by an overcurrent detecting means 29. The conveying jig 6 is transferred on an inspecting unit proper 30 by a transferring unit 31 having a conveying jig holding means 2' and inspection of non-defective and defective is performed. The conveying jig 6 is delivered to a conveying belt unit 39 and is con- veyed to the next process B by a sorting means 42 using a belt conveyor 43 for non-defective recovery and a belt conveyor 44 for defective product recovery.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an automatic inspection device for integrated circuit components that automatically inspects integrated circuit components and sorts them into non-defective products and defective products.

[Background of the invention]

FIG. 1 is a perspective view of a conventionally used general integrated circuit component testing device. In FIG. 1, when inspecting an integrated circuit component 1, an operator attaches a large number of lead terminals 2 provided to each integrated circuit component 1 to a jig connector 3, and then connects a switch 5 of a measuring instrument 4. This was to visually read the Roscoso waveform, the pointer of the meter, etc. by operating the measuring instrument 3, and thereby determine the quality of each integrated circuit component 1.

However, in such an inspection method, the integrated circuit component 1
There are multiple lead terminals 2, and since they are long and thin members, it is necessary to handle the lead terminals 2 carefully so as not to bend them when attaching them to the connector 3, and this has to be done manually. . Therefore, in addition to the fact that the operation of the switch 5 of the measuring instrument 4 and the judgment of the quality of the integrated circuit component 1 are performed manually, and the fact that these operations have to be performed for each integrated circuit component 1 one by one, Work efficiency was extremely poor, and mass production was a bottleneck.

Also, the reliability of the test was low.

[Purpose of the invention]

The present invention has been made in view of the above-mentioned circumstances.The present invention has been developed to improve work efficiency by automating the process up to the sorting of defective products. It is an object of the present invention to provide a six-page motion testing device for integrated circuit components which greatly improves the reliability of testing.

[Summary of the invention]

The present invention provides a transport jig that can mount and remove a plurality of integrated circuit components while supporting at least the pin terminals of each integrated circuit component, and a transport jig that can move the integrated circuit components mounted on the transport jig. A temperature raising means for heating, an inspection device body that automatically inspects the quality of the characteristics of the integrated circuit components that have passed through the temperature raising means, and a sorting of non-defective products and defective products according to the inspection results by the inspection device body. and a transfer and conveying means for transferring and conveying the conveying jig between the means for sorting good and defective products from the temperature raising means, The temperature increase, inspection, and sorting of good and defective products are carried out for each transport jig.

[Embodiments of the invention]

The present invention will be described in detail below with reference to FIGS. 2 to 16.

FIG. 2 is a perspective view showing the overall configuration of an embodiment of an automatic inspection device for integrated circuit components according to the present invention, and FIG. A plan view showing an example of the jig, FIG.
FIG. FIG. 5 is an enlarged view showing the v-v line cross section in FIG. 3 in an inspection state, and FIG. 6 is a view showing a state when the integrated circuit component is taken out from the transport jig in FIG. 5.

First, the conveyance jig 6 used in the apparatus of the present invention will be explained with reference to FIGS. 3 to 6. In each figure, 7 is a plate-like member forming the main body of the transport jig 6. On this plate-like member 7, a plurality of integrated circuit components 1 are placed at regular intervals, in this case, a third
Five units are mounted and positioned as shown in the figure. This plate member 7 is provided with a through hole 8 into which the lead terminal 2 of the integrated circuit component 1 is inserted. As shown in FIG. 5, the lead terminal 2 passes through the through hole 8'f and protrudes downward, and the lead terminal 20 faces each other by a pair of fixed walls 9 formed on the lower surface side of the plate member 7. The spread of the interval is restricted. Furthermore, a T-shaped rod-like member 1o is provided at the center of the lower surface of the plate-like member 7 along its longitudinal direction. In this case, the T-shaped rod-like member 1o is fitted and fixed in an inverted T-shape into a notched groove 17 formed along the longitudinal direction at the center of the lower surface of the plate-like member 7. Further, a tapered expanded portion 16 is formed at the entrance of each of the through holes 8 to serve as a guide when the lead terminal 2 is inserted.

A pair of slide plates 1] are provided between the lower surfaces of each of the T-shaped rod-like members 10 and the plate-like member 7, respectively, so as to be slidable in the left-right direction in FIG. In addition, the T-shaped rod member 10
includes a compression coil spring 12 corresponding to each integrated circuit component l.
is provided through the entire through hole 12, and the slide plate 11
is pressed against the fixed wall 9 side @Furthermore, the plate-like member 7
, a hole 13 penetrating toward both fixed walls 9 from a direction perpendicular to the longitudinal direction thereof and a hole 13' penetrating in the vertical direction.
is provided.

With the above configuration, the lead terminals 2 of the integrated circuit component 1 inserted into the through holes 8 of the plate member 7 are connected to the slide plate 11.
The test circuit board 15 is connected to the test circuit board 15 through a contact pin 14 of the test device main body, which will be described below, below the plate member 7.

Next, if the entire device of the present invention is different based on Fig. 2,
First, the transport jig 6 on which the integrated circuit component 1 is mounted is transported from the previous process A by the transport device 18 and positioned at a positioning position 19. The supply unit 20 is activated by a positioning completion signal generated when positioning is completed. The supply unit) 20 is provided with a gripping means 21 for the conveying jig 6, and the gripping means 21 grips and fixes the conveying jig 6, and raises and rotates it to the fixed unit) 23 on the rotary table n. Transferred to. The transport jig 6 is held fixedly by a fixing unit 23 and is continuously energized by an energizing unit 24. On the outer periphery of the rotary table 22, there is a rotary table driving device 5 and a plurality of rotary table horizontal holding device reservoirs. Also·
The rotary table n is fixedly held via a pedestal table 27, and in the space below the pedestal table n there is a current collector array for continuous energization. Furthermore, a rotary table n is placed in the upper center of the rotary table B.
Among the above-mentioned conveyance jigs 6, there is an overcurrent detection means 4 for detecting and displaying an overcurrent. In the center of FIG. 2, there is a transfer device 31 for transferring the conveying jig 6 that has been continuously energized to the stop on the side of the main body of the inspection device (page 10), and the movable unit 32 has the above-mentioned transfer jig 6. There is a gripping means 21' for the transport jig 6. The transfer device 31 has two guide rails 34 fixedly mounted on a frame 33, a motor screw 36 connected to a motor 35, and the motor 35 rotating the motor screw 36 to move the movable unit 32 to the guide rails. 34. Furthermore, the movable unit 32 has a structure in which the conveying jig gripping means 21' is moved vertically by means of an air cylinder via a guide shaft 37.

The integrated circuit component 1 is inspected for quality by the inspection device main body (9) while being mounted on the transportation jig 6. After the inspection is completed, the conveying jig 6, which was fixedly held by the conveying jig gripping means 21' in FIG. hand over. At the center of the conveyor belt unit 39, there is a conveyor jig positioning means fi40.
It is fixedly installed on the lower side of 9.

The transport jig pressing means 41 is located at the position that has been positioned and raised by the transport jig positioning means 4o. There is a means 42 for this immediate side pressure sorting of good and defective products, and non-defective products are placed on a belt conveyor 43 for collecting non-defective products, and defective products are placed on a belt conveyor 44 for collecting defective products, and are transported to the next process B. It is.

Hereinafter, the configuration of each part of the above-mentioned device of the present invention will be explained in detail.

First, a rotary indexing device consisting of the rotary table 22, rotary table driving device 25, rotary table horizontal holding device, etc. will be explained with reference to FIGS. 7 and 8. In FIG. 7, the rotary table n is horizontally supported by a bearing 46. As shown in FIG. Positioning holes 47 are formed through the outer periphery of the rotary table n at positions where the outer periphery is divided into a plurality of equal intervals. The rotary table horizontal holding device holds the thin disk-shaped rotary table 22 horizontally, and is disposed at three locations on the outer circumferential side of the rotary table 4, for example at the positions shown in FIG. Further, in FIG. 7, a friction wheel ω of a rotary table drive unit is engaged with the outer peripheral side of rotary table B. The rotary table drive device 5 includes
A suppressing means composed of a spring 49 and the like is provided, and is brought into close contact with the outer periphery of the friction wheel 60' (i-rotary table n).A bracket 52 is attached to the mount table 27 on the upper surface side of the mount 51. A bearing support bracket 53 is provided inside.A rotating shaft 54 provided at the center of the rotary table 22 is pivotally supported by a bearing 46 and a shaft 48 inserted into the bearing support bracket 53. The table holding pulley 55 of the rotary table horizontal holding device 26 has a V groove.
It is formed in a gooey shape and comes into close contact with the peripheral edge of the V shape formed on the outer periphery of the rotary table n. Further, the table holding pulley 55 is pivotally attached to the upper part of a shaft that stands upright on a block 56 on the gantry table n, and prevents the outer peripheral side of the rotary table 4 from drooping and holds it in a horizontal state.

. The block portion is slidable on the mount table n in the radial direction of the rotary table 220 by means of a push port 57, thereby making it possible to adjust the contact pressure between the table holding pulley 55 and the outer periphery of the rotary table 22.

Next, with reference to FIGS. 9 to 11, the rotary table driving device 5, the pressing means 67, and the positioning pin part 71, which together with the rotary table horizontal holding device 5 constitute the rotary indexing device, will be described with reference to FIGS. and the separation means 79 will be explained. First, the rotary table driving device 5 includes a friction wheel 60° motor bracket 61. It is composed of a drive motor 62 and the like. The friction wheel ω is made of a material such as rubber to increase the frictional resistance.
And, as mentioned above, it is formed in a V-groove shape with a V-groove,
It is arranged at a position where it is closely joined to the V-shaped peripheral edge of the outer periphery of rotary table n. The friction wheel ω is the motor bracket 61
The drive motor 62 is directly connected to the output shaft of a drive motor 62 fixedly attached to the drive motor 62, and rotates. Support metal fittings 63 are fixedly provided on the gantry table n so as to face each other, and guide blocks 64 are provided on the support metal fittings 63 so as to face each other.

A groove parallel to the n-plane of the gantry table is formed in the guide block, and a protrusion 65 provided on the outer side of the motor bracket 61 and facing each other is slidably engaged with this groove. A grate 66 is installed across one end of the support fittings 63.

The suppressing means 67 consists of hold pins 67', 69, and L-shaped fittings 14? r 68, spring 70, etc. That is, a hold pin 67' is formed protruding from the outside (right side in the figure) of the motor bracket 61, and a hold pin 69 is provided on the L-shaped fitting 68 at a position facing and away from this. be.

In this case, the L-shaped metal fittings are fixedly mounted on the mount table n. A spring 7o is interposed between the hold pin 67' and the hold pin 69, and presses the drive device 25 toward the rotary table n.

The positioning pin portion 71 is composed of a positioning pin 72, a pin block 73o, an air cylinder 74, and the like. Of these, the positioning pin 72 has an outer diameter that can be fitted into the positioning hole 47 of the rotary table n, is provided upright below the positioning hole 47 of the rotary table n, and is attached to the upper side of the pin block 73. An air cylinder 74 is connected to the lower side of the pin block 73 via a joint 75.
are connected. Air cylinder 74 is attached to a support plate 76 attached to plate 66. Protrusions 77 are provided on opposite sides of the pin block 73, and the protrusions 7715 and 77 are slidably supported in grooves of a guide block 78 attached to the support fitting 63.

The separating means 79 includes inclined blocks 80, 81 and port 82.
and an adjustment screw 83. That is, the motor bracket 61 has an inclined block 80 that forms an inclined angle that narrows in the direction in which the positioning pin 72 is inserted. On the other hand, on the outer surface side of the positioning bin portion 71 that is perpendicular to the side surface on which the protruding portion 77 of the bin block 73 is formed, a K inclined block 81 is attached by a bolt 82 so as to face the inclined block 80 . The tilt block 81 is movable in the vertical direction by an adjustment screw 83.

Next, the above-mentioned rotary table drive unit and pressing means 67
, the functions of the positioning bin portion 71 and the separating means 790 will be explained. As shown in FIG.
2 is engaged with a drive device 5, which applies rotational force to the rotary table 22 by means of a friction wheel ω.

The rotary table 22 rotates smoothly due to the pressing force of the suppressing means 67 and the frictional force of the friction wheel 60. At this time, the positioning bin part 71 is moved by the operation of the air cylinder 74.
As shown in FIG. 9, it is positioned at the lowest end. Therefore, as shown in the figure, a gap a is formed between the inclined blocks 80 and 81 of the separating means 79. Next, in FIG. 10, in response to a signal from a photoelectric switch or the like (not shown) indicating that the positioning hole 47 of the rotary table 4 has come to a predetermined position, the air cylinder 74 is activated to completely raise the positioning bin 72. When the positioning bin 72 rises and is inserted into the positioning hole 47, the tilt block 81
The inclined block 80 is pushed, and the friction wheel 60 of the drive device 5 is separated from the rotary table 4 with a gap. Therefore, the rotary table 22 stops and positioning is completed. Thereafter, when the positioning bin 72 is removed from the positioning hole 47 by the downward operation of the air cylinder 74, the drive device 5 engages with the rotary table 22 again by the action of the spring 70 of the pressing means 67, and the drive motor that is constantly rotating is engaged with the rotary table 22 again. 62, the rotary table n starts rotating smoothly. As described above, by sequentially inserting the positioning pins 72 into the positioning holes 47 accurately formed in the rotary table 22, positioning accuracy can be ensured.
By forming an appropriate number of 7, it is possible to set an arbitrary number of indexes.

Next, the fixing unit 23 and the transport jig gripping means 2], 2]' installed on the rotary table n will be explained based on FIGS. 12 to 14. A fixing unit) 23 is a unit for fixing and holding the conveying jig 6, which is located on the energizing unit 24 fixedly installed on the rotary table 22. As shown in FIG. Twelve pieces are fixedly installed at equal intervals on table n. On the rotary table 22, a contact bin (not shown) is provided for connection in order to continuously energize the lead terminals 5 of the integrated circuit component 1 mounted on the transport jig 6.
A fixing means that can overcome the reaction force caused by the spring force and prevent the conveying jig 6 from floating is required, and the unit for this purpose is the fixing unit 23. As can be seen from FIGS. 13 and 14, the fixed unit Z3 has a stepped through hole 85 in the center, and a pace 8 for positioning the conveyance jig 6.
I have 6. On the lower surface of the pace 86, there are a pair of brackets 87 on both sides of the through hole 85, page 18.
A pair of shafts 88 are supported by. Each pair of clampers 89 is supported on these shafts 88 at a predetermined interval. An arm 90 protruding toward the through hole 85 is formed at the center of each of the clampers 89, and a pole planter 91 is supported at the upper part. The metal fitting 92 is arranged parallel to and close to the rotating surface of the graph 2890, and this metal fitting 92 has a pair of conical holes 93m and 93b into which the collar of the sol plunger 91 fits. . On the upper side of the fixed unit) 23, along the arrow C in FIG. There is. The main grate 94 has a chuck 9 that holds the transport jig 6.
5, and a push rod 96 facing the upper surface of the arm hood is supported.

In the above configuration, the conveyance jig holding means 21 holding the conveyance jig 6 moves above the pace 86, and from there descends toward the pace 86, so that the conveyance jig 6 is moved to the opposite surface of the tip of the arm. When passing through, the push rod 96 comes into contact with the 19-fI arm. When the conveyance jig gripping means 21 further descends, the conveyance jig 6 is inserted into the through hole 85 of the pace 86 and positioned, and placed on the stepped portion of the through hole 850. At the same time, the clamper 89 whose arm is pushed by the push rod 96 rotates until the leading edge of the sol plunger 91 supported at its free end passes over the green of the hole 93a. Then, the clamper 8 slides toward the center of the pole hole 93a.
9 also rotates further and holds the conveying jig 6 with its arm, and is fixed to the fixing unit B. Next, the main play)
When taking out the transport jig 6 from the transport jig 94, the transport jig 6 is held by the chuck 95, and the transport jig holding means 21 is held as it is.
Just raise it. At this time, the arm holder is pushed up by the transport jig 6, so the clamper 89 rotates. And the goal of Paul plunger 91 is hole 93
It exits from a and moves to 93b, and the clamper f89 becomes open. In this way, the transport jig 6 can be attached to and detached from the fixing unit 23 without using a special drive source.

Next, the current collector 28 disposed in the space below the rotary table 4 and the current supply to the conveyance jig 6 by the current collector 28 will be explained based on FIG. 15. As shown in FIG. 15, on the outer periphery of the rotating shaft 101 that supports the rotary table 22, there are conductive rings 102 concentrically with the rotating shaft 101.
, 103 , 104 i are provided. This conductor ring 10
2, 103, and 104 are each integrated circuit component 1 (
(see FIG. 3), which correspond to three types a, b, and e here, and each integrated circuit component 1 on the transport jig 6.
supply a power supply to the That is, this conductor ring 102
104 are opened and closed by switches 110 , 111 , and 112 and connected to the + side of a power source 135 . Further, a conductor ring 105 different from the conductor rings 102 to 104 is used to connect the ground terminal of each integrated circuit component 1 to one side of the power supply 135. The controller 106 controls the switches 107-112. The same number of current collecting brushes 113 to 116 and 117 to 120 are provided corresponding to the positions of the respective sockets (in the illustrated example, sockets 124 to 126) provided in the current supply unit 24 on the rotary table 22. The conductor rings 102 to 105 are fixedly attached to the conductor rings 102 to 105 and rotated at 21 degrees to bring them into contact with the outer circumferences of the conductor rings 102 to 105, respectively. The integrated circuit components 1 are inserted into the sockets 124 to 126 via the transport jig 6 and the fixing unit I, respectively.
socket 124 is inserted into terminal 1.
27 to 130, and each terminal 127 to 130 is connected to a current collecting brush 113 to 116, respectively. socket 1
25 has terminals 131 to 134, each terminal 131 to 13
4 is connected to current collecting brushes 117-120. Each terminal 1
Among terminals 127 to 134, terminals 127 are connected to the current collecting brushes 113 and 117 that are in contact with the conductor ring 102K.
, 131 are power supply terminals for type a. Conductor ring 10
The terminals 128 and 132 connected to the current collecting brushes IL4 and 118 connected to the terminals 3 and 3 are power supply terminals for each type, respectively,
Current collector brushes 115 and 11 in contact with the conductor ring 104
Terminals 129 and 133 connected to each of the 9K are power supply terminals for type C. terminals 130 connected to current collector brushes 116 and 120, respectively, in contact with conductor ring 105;
134 is a ground terminal. Note that the current collector brush connected to the socket 126 is also in contact with each of the conductor rings 102 to 105, but is not shown here because it is the same as the sockets 124 and 125η.

Further, the conductor ring 102 has three conductor parts 102a,
102b.

It is divided into 102c. Each conductor part 102a
102c are made of conductors made of the same material, and are insulated from each other by an insulating portion 102d. Here, the conductor part 102a corresponds to the transport jig supply position 141, the conductor part 102b corresponds to the transport jig take-out position 142,
The conductor portion 102c corresponds to other positions.Next, the operation of the above-mentioned current collector will be explained.

In FIG. 15, switches 107, 108.10 are operated by the controller 106 to supply power to type a.
9 to the a terminal side, and then switch 111, 112
t-Inject. At the transport jig supply position 141, when supplying the transport jig 6, switch 110'i OF
F and then turn on the switch 110 after supplying. Then, 102a of the conductor ring 102 via the switch 109
The + side of the power supply is connected to the + side of the JC power supply, and the + side of the JC power supply is connected to the terminal 127 for terminal a for 1240 type a. On the other hand, the conductor ring 105 and the
3rd f: Contacting current collector brush 116 f: Through socket 124
σ) Since the ground terminal 130 is always connected to the negative side of the power supply, the power supply to the type a supplied to the socket 124 starts from the moment the switch 110 is turned on. When the rotary table n rotates, the current collector brushes 1]3 are removed from the component supply position 102a, and immediately contact the next other position 102cIc, and through the switches 112 and 107e, which have already been turned on and are Power is supplied continuously. Therefore, the integrated circuit component 1 of type a is continuously energized while the rotary table 4 is rotating. In the conductor portion 102b corresponding to the transport jig removal position 142,
When taking out the transfer jig 6'1 with the transfer jig gripping means 21' at the transfer position 31, it is necessary to cut off the power to the conductor part 102b.For this purpose, open the switch 111 and turn off the power supply on the + side. Stop the connection. For example, when the socket 124 into which the integrated circuit component 1 is inserted comes to the transport jig removal position 142, the current collecting brush 113 is moved to the corresponding position 102.
It is in contact with b. Therefore, if you stop the rotary table 22 at this time and then open the switch 111t- to stop the current supply to this position 102b-\,
It is possible to stop energizing only the integrated circuit component 1 to be removed without affecting the energization of other integrated circuit components 1. When energizing the product type S or C, the controller 106 turns on the switches 107 to 109e.
Flip it to the B side or C side and perform the same operation as above.

Although FIG. 15 shows an example in which there are three sockets, the same applies to a case where there are more sockets.

Note that the energization described above applies to the integrated circuit component 1 to be inspected.
This is done with the purpose of keeping the integrated circuit component 1 in a thermally and electrically balanced state by continuously energizing it, and maintaining a stable state before inspection. As a method, a method may be adopted in which a heat block or the like is used to directly thermally raise the temperature of the integrated circuit component 1 and maintain a stable state.

In FIGS. 2, 5 and 15, the energized transport jig 6 is moved from the transport jig take-out position 142 on the rotary table ρ to the transport jig gripping means attached to the transfer device 31. After being gripped by 21', it is moved to a predetermined position by the movable unit 32 of the loading device 31 (transfer 25). When the transport jig gripping means 21' is lowered at a predetermined position and the transport jig 6 is lowered, the lead terminals 2 of the integrated circuit component 1 come into contact with the contact bins 14 between the test apparatus bodies.

After this, the characteristics of each integrated circuit component 1 are inspected.
The inspection apparatus main body 30i that performs this inspection will be explained below based on FIG. 16. In FIG. 16, in the pace plate 145, a positioning pin 147 that fits into a positioning hole 146 provided in the pace plate 145 is fixed to the mount table n, and the pace plate 145 is attached to the transfer device 31. Side plates 14B are erected at the left and right ends of the O-pace grate 145, and face plates 149 are erected at the front and rear, respectively, and a main plate 150 is fixedly installed above these. Contact bins 14 are provided on the main plate 150 in correspondence with the respective lead terminals 2 of the integrated circuit component 1 on the conveying jig 6. In this case, the main plate 150 and the contact bin 14 are insulated.

Further, the position of the contact pin 14 is set accurately with respect to the positioning hole page 146. and side plate 1
48 is provided with a connector 151, and this σ] connector 1
51 is connected to the inspection circuit board 15 (see FIG. 5) in the inspection device main body I connected to the contact bin 14, and connected to the measurement control device (not shown) via the connector and cord that may be shown. be done. The inspection circuit board 15 and the measurement control device inspect the quality of the integrated circuit component 1 connected to the contact pin 14 via the lead terminal 2,
The results are sent to means 42 for sorting good and defective products.

The conveyance jig positioning means 40 positions the conveyance jig 6 by inserting the pin at its tip into the hole 13' of the conveyance jig 6 (see the arrow in FIG. 6).

The conveying jig pressing means 41 inserts the pin at its tip into the hole 13 of the positioned conveying jig 6 and slides the conveying jig 6) against the pressing force of the coil spring 12. The pin terminals 2 of the integrated circuit component 1 are released from being supported by the fixing wall 9 (see arrow E in FIG. 6).

For sorting non-defective products and defective products, the means 42 transfers each of the integrated circuit components 1 on the released conveying jig 6 to the conveyor 42 or 43 according to a signal from the inspection device main body. Supply is divided into good and defective products.

[Effects of the Invention] As described above, the present invention uses a transport jig that can mount and remove a plurality of integrated circuit components while supporting at least the bin terminal of each integrated circuit component, and Since the integrated circuit components are heated, inspected, and sorted into non-defective products and defective products on a jig-by-jig basis, the handling of the integrated circuit components during quality inspection is simplified. Therefore, automation up to the sorting of good and defective products can be easily achieved, for example, as in the above-mentioned embodiment, and work efficiency can be greatly increased compared to conventional visual inspection, as well as highly reliable inspection. It has the effect of being measurable.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of a conventional inspection device, FIG. 2 is a perspective view showing the overall configuration of an embodiment of an automatic inspection device for integrated circuit components according to the present invention, and FIG. A plan view showing an example of a transport jig for mounting and positioning integrated circuit components, FIG. 4 is a front view of FIG. 3, and FIG.
6 is a diagram showing the state when the integrated circuit component is taken out from the transport jig in FIG. 5, and FIG. 7 is the rotary indexing device in FIG. 2. FIG. 8 is a plan view of FIG. 7, and FIG. 9 is an enlarged view of the rotary table drive device and its surroundings in FIG. 2 in a rotary table drive state. Sectional side view, No. 10
The figure is also a partially cutaway side view showing the rotary table in a stopped state, and FIG. 11 is a plan view of FIG. 9.
Figure 2 is a plan view showing a state in which the transport jig is fixed on the rotary table in Figure 2 via the fixing unit;
The figure is an enlarged cross-sectional view taken along the line ■-XI in Figure 12, Figure 14 is an enlarged cross-sectional view taken along the line XIV-XIV in Figure 13, with some parts omitted, and Figure 15 is the rotary table and current collector in Figure 2. FIG. 16 is an enlarged perspective view of the inspection apparatus main body shown in FIG. 2 with the entire part broken out and shown on page 29. 1... Integrated circuit component, 2... Lead terminal, 6...
Conveyance jig, 7... Plate member, 8... Through hole, 9...
Fixed wall, 11... Slide grate, 12... Compression coil spring, 21° 21'... Transfer jig gripping means, 2
2... Rotary table, field... Fixed unit, Sae... Energizing unit, 5... Rotary table drive device, 26... Rotary table horizontal holding device, Ah...
・Current collector, (9)... Inspection device main body, 31... Transfer device, 39... Conveyance belt unit, 41... Conveyance jig pressing means, 42... Good product/defective product sorting is a means,
47... Positioning hole, luster... Pressing means, 54 Rotating shaft, 60... Friction wheel, 62... Drive motor, 71...
...Positioning bin part, 72...Positioning bin, 79.
... Separation means, 102-105 ... Conductor ring, 10
6... Controller, 107-112... Switch, 113-120... Current collection brush, 124-126.
...Socket, 127-134...Terminal, 135...
·power supply. Representative patent attorney Tadashi Akimoto Younger brother 1 Figure 188 Figure 26 Figure 9 Figure 13 C JP-A-Sho GO-74542 (13) 30 146 147

Claims (1)

[Scope of Claims] 1. A transport jig that supports at least the bin terminal of each integrated circuit component and is capable of mounting and removing a plurality of integrated circuit components in the following state; A temperature raising means for raising the temperature of an integrated circuit component, an inspection device body that automatically inspects the quality of the characteristics of the integrated circuit component that has passed through the temperature raising means, and a test device that determines whether the product is good or defective according to the inspection result by the inspection device body. The apparatus includes a means for sorting good products and defective products for sorting non-defective products, and a transfer and conveying means for transferring and transporting the transfer jig between the means for sorting non-defective products and defective products from the temperature raising means. , temperature rise, inspection, and inspection of the integrated circuit components.
An automatic inspection device for integrated circuit components, characterized in that defective products are sorted for each of the transport jigs. 2. When a through hole into which a lead terminal of an integrated circuit component is inserted is formed, the conveying jig has a two-page terminal that protrudes from the through hole at the end of the through hole on the rear surface side. firmly so that it comes into contact with one side of the part excluding the tip. A plate-shaped member forming a fixed wall, a slide plate slidably provided on the back side of the plate-shaped member and movable toward and away from the fixed wall, and a biasing member that biases the slide grate toward the fixed wall. a biasing means, by inserting a suppressor into the plate-shaped member, the plate-shaped member abuts the slide plate, and the plate-like member is configured to push the plate-shaped member away from the fixed wall against the biasing force of the biasing unit. 2. The automatic inspection device according to claim 1, wherein a through hole is formed facing toward. 3. The temperature raising means includes a rotary index device that rotates a rotary dimple held in a horizontal state by a predetermined angle each time a conveyance jig on which an integrated circuit component is mounted is supplied, and a rotary index device mounted on the conveyance jig. a socket on the rotary table into which the lead terminal of the integrated circuit component is inserted; Claim 1 or 3 is an automatic inspection device according to claim 2, comprising a current collector for supplying power. 4. The rotary indexing device is a rotary table horizontal holding device that is installed on the outer periphery of the rotary table, which has a rotating shaft fixed in the center and a positioning hole formed near the outer periphery, and holds the rotary table in a horizontal state. , a rotary table drive device having a friction wheel provided on the outer circumferential portion of the rotary table and a drive motor for driving the friction wheel; a positioning bin part having a bottle that can be moved in and out of the positioning hole; and a positioning bin part having a bottle that can be moved in and out of the positioning hole; 4. The automatic inspection device according to claim 3, further comprising a separating means for separating the friction wheel from the outer periphery of the rotary table by pressing in a direction opposite to the suppressing direction. 5. The current collector includes a conductor ring fitted to a shaft that pivotally supports the rotary table, and a predetermined socket of the rotary table into which the lead terminal of the integrated circuit component mounted on the transport jig is inserted. A current collector brush that is connected to a terminal and slides on the outer periphery of the conductor ring as the rotary table rotates, the conductor ring, the current collector brush, and the socket? 4. The automatic inspection apparatus according to claim 3, further comprising a power supply means for supplying power to the integrated circuit component at a predetermined timing via the integrated circuit component.