JPH0480347B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an automatic inspection device for integrated circuit components that automatically inspects integrated circuit components and sorts them into non-defective products and defective products.

[Background of the invention]

FIG. 1 is a perspective view of a conventionally used general integrated circuit component testing device. In FIG. 1, when inspecting integrated circuit components 1, one
An operator attaches a large number of lead terminals 2 provided on one integrated circuit component 1 to a jig connector 3, operates the switch 5 of the measuring instrument 4, and visually checks the waveform of the oscilloscope of the measuring instrument 4, the pointer of the instrument, etc. This was used to determine the quality of each integrated circuit 1.

However, in such an inspection method, since there are multiple lead terminals 2 of the integrated circuit component 1 and they are long and thin members, it is necessary to handle them carefully so as not to bend the lead terminals 2 when attaching them to the connector 3. It was necessary and had to be done manually. Therefore, the operation of the switch 5 of the measuring instrument 4 and the judgment of the quality of the integrated circuit component 1 are performed manually, and these operations must be performed for each integrated circuit component 1 one by one. Work efficiency was extremely poor, and it became a bottleneck in mass production. In addition, the reliability of the test was low.

[Purpose of the invention]

In view of the above circumstances, it is an object of the present invention to simplify the automatic handling of integrated circuit components, to efficiently supply energy to the integrated circuit components, to inspect the quality of the integrated circuit components, and to sort out good and defective products. An object of the present invention is to provide an automatic inspection device for integrated circuit components that is realized with high reliability.

[Summary of the invention]

In order to achieve the above object, the present invention forms a row of through holes into which each of the lead terminals implanted in a row in each integrated circuit component is inserted from the surface side. A fixed wall is formed near the back end,
a plate-like member having a lead terminal inserted into the through hole from the front side and protruding to the back side; and a plate-like member that is slidably supported on the back side of the plate-like member opposite to the fixing groove. A slide plate; and a biasing means for biasing the slide plate toward the fixed wall to press, position, and hold the lead terminal inserted into the through hole from the front side against the fixed wall. , a supply means for sequentially supplying a transport jig on which a plurality of integrated circuit components are mounted side by side, and a plurality of integrated circuits mounted on the transport jig while conveying the transport jig sequentially supplied by the supply means. An energy supply/transfer means for maintaining an integrated circuit component in a stable state by applying energy to the component; a transfer means for sequentially taking out a transport jig from the energy supply/transport means and transporting it to an inspection position; The conveyance figures that are sequentially transferred are positioned at the inspection position, and the plate-shaped member is mounted on the conveyance jig and connected to contact pins that are electrically connected to the rotating board and insulated and erected on the main plate. A testing device for testing the characteristics of each integrated circuit component through the circuit board by contacting lead terminals protruding from the backside thereof to determine pass/fail, and a plurality of integrated circuit components tested by the testing device. The conveying jig is moved to a sorting position, the conveying jig is positioned at the sorting position, and a pressing member is used to push the attached The slide plate is pressed against the biasing force of the biasing means to release the lead terminals, and each of the released integrated circuit components is removed from the transport jig according to the quality determined by the inspection device. It is characterized by comprising a good/defective product sorting means for taking out and sorting into good products and defective products, and configured to sequentially perform energy supply, inspection, and sorting to the integrated circuit components for each transport jig unit. This is an automatic inspection device for integrated circuit components.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to FIGS. 2 to 16.

FIG. 2 is a perspective view showing the overall configuration of an embodiment of an automatic inspection device for integrated circuit components according to the present invention, and FIG. 3 is an example of a transport jig for mounting and positioning integrated circuit components used in the device according to the present invention. FIG. 4 is a front view of FIG. 3. Figure 5 shows a state in which the quality of the characteristics of multiple integrated circuit components mounted on the transport jig is inspected at the location where the main body of the inspection device is installed, as shown in the cross section taken along the line - in Figure 3. The enlarged view of FIG. 6 is a diagram showing a state in which the integrated circuit component is taken out from the transport jig in FIG. 5.

First, the conveyance jig 6 used in the apparatus of the present invention will be explained with reference to FIGS. 3 to 6. In each figure, 7 is a plate-like member forming the main body of the transport jig 6. On this plate-like member 7, a plurality of integrated circuit components 1 are mounted at regular intervals, in this case five integrated circuit components 1 as shown in FIG. Positioned. This plate member 7 has a through hole 8 into which the lead terminal 2 of the integrated circuit component 1 is inserted.
is drilled. As shown in FIG. 5, the lead terminals 2 pass through the through hole 8 and protrude downward, and a pair of fixed walls 9 formed on the lower surface side of the plate-like member 7 maintain the distance between the opposing lead terminals 2. Spread is restricted. In addition, at the center of the lower surface of the plate member 7,
A T-shaped rod-like member 10 is provided along its longitudinal direction. In this case, the T-shaped rod-like member 10 is fitted and fixed in an inverted T-shape into a cutout groove 17 formed along the longitudinal direction at the center of the lower surface of the plate-like member 7. Further, a tapered expanded portion 16 is formed at the entrance of each of the through holes 8 to serve as a guide when the lead terminal 2 is inserted.

A pair of slide plates 11 are provided between the lower surfaces of each T-shaped rod member 10 and the plate member 7.
is provided so as to be slidable in the left and right directions in FIG. Furthermore, compression coil springs 12 are provided through the through holes 12 in the T-shaped rod member 10 in correspondence with each integrated circuit component 1, and press the slide plate 11 toward the fixed wall 9 side. Furthermore, the plate member 7 includes:
A hole 13 penetrating toward both fixed walls 9 rather than perpendicular to the longitudinal direction and a hole 1 penetrating in the vertical direction.
3' is provided.

With the above configuration, the transport jig 6 can transport the plurality of integrated circuit components 1 to the lead terminals 2 of each integrated circuit component 1.
It can be installed while supporting the This will be explained in detail below.

First, before the integrated circuit component 1 is mounted on the transport jig 6, that is, before the lead terminal 2 is inserted between the slide plate 11 and the fixing tab 9 of the transport jig 6 (usually), The slide plate 11 is pressed against the fixed wall 9 of the plate member 7 by the restoring spring force of the compression coil spring 12 and is in contact with the fixed wall 9, so that there is no space between the slide plate 11 and the fixed wall 9. is not formed.

When mounting the integrated circuit component 1 on the transport jig 6, the tip of the transport jig positioning means 40 is inserted into the hole 13' of the transport jig 6 to position the transport jig 6, and then the transport jig 6 is positioned. Jig pressing means 41, 41 into hole 1
3, 13 and slide plates 11, 11
toward the center of the transport jig and press against the spring force of the compression coil spring 12. As a result, the slide plates 11, 11 are slightly moved toward the center of the conveying jig, and a gap is formed between them and the fixed walls 9, 9. During this time, the lead terminals 2 of the integrated circuit component 1 which are inserted into the through holes 8 of the transport jig 6 and protrude from the back side of the transport jig 6 are inserted. After the insertion, when the conveying jig pressing means 41, 41 are returned to their original positions (the positions shown in FIG. 6), the slide plates 11, 11 are moved by the restoring spring force of the compression coil spring 12 to the fixed walls 9, 41.
Pressed to the 9 side. At this time, the lead terminals 2 of the integrated circuit component 1 are inserted between each slide plate 11 and the fixed wall 9, and the lead terminals 2 are fixed to the slide plate 11 and fixed by the restoring spring force of the compression coil spring 12. The walls 9 are held and fixed between each other. Note that the tips of the held and fixed lead terminals 2 are connected to the testing circuit board 15 via contact pins 14 of the testing device main body, which will be described below, below the plate member 7.

Holding and unfixing of the lead terminal 2 can be done by inserting the conveying jig pressing means 41, 41 into the holes 13, 13, in the same way as when inserting the lead terminal 2 between the slide plate 11 and the fixed wall 9 (between). Insert the slide plate 11 against the spring force of the compression coil spring 12 toward the center of the transport jig, and press the fixed wall 9.
All you have to do is create a gap again between them. If the integrated circuit component 1 is pulled up in this state, the integrated circuit component 1 will be separated from the transport jig 6.

Next, the entire apparatus of the present invention will be briefly described based on FIG. Ru. The supply unit 20 is actuated by a positioning completion signal generated when positioning is completed. Supply unit 2
0 is provided with a gripping means 21 for the conveyance jig 6, and the gripping means 21 grips and fixes the conveyance jig 6, and lifts and rotates the rotary table 22.
Transfer it to the upper fixing unit 23. The conveyance jig 6 is fixedly held by a fixing unit 23 and is continuously energized by an energizing unit 24. On the outer periphery of the rotary table 222, there is a rotary table driving device 25 and a plurality of rotary table horizontal holding devices 26. Further, the rotary table 22 is fixedly held via a pedestal table 27, and in a space below the pedestal table 27 there is a current collector 28 for continuous energization.
Further, in the upper central part of the rotary table 22, there is an overcurrent detection means 29 for detecting and displaying which of the conveying jigs 6 on the rotary table 22 has an overcurrent. A transfer device 31 for transferring the transfer jig 6 after continuous energization onto the inspection device main body 30 is located approximately in the center of FIG.
The movable unit 32 has a gripping means 21' for the conveying jig 6. The transfer device 31 has two guide rails 34 fixed on a frame 33, a ball screw 36 connected to a motor 35, and the ball screw 36 rotated by the motor 35 to move the movable unit 32 onto the guide rails 34. The object is to be moved along the Furthermore, the movable unit 32 has a structure in which the transport jig gripping means 21' is moved vertically by an air cylinder 38 via a guide shaft 37.

The integrated circuit component 1 is inspected for quality by the inspection device main body 30 while being mounted on the transportation jig 6. After the inspection, the transport jig 6, which was fixedly held by the transport jig gripping means 21' in FIG.
is raised and advanced, mounted on the conveyor belt unit 39, and delivered to the conveyor belt unit 39.
At the center of the conveyor belt unit 39, a conveyance jig positioning means 40 is fixedly provided on the lower side of the conveyor belt unit 39. A transport jig pressing means 41 is located at a position that has been positioned and raised by the transport jig positioning means 40. Immediately to the side of this, there is a means 42 for sorting non-defective products and non-defective products, and non-defective products are placed on a belt conveyor 43 for collecting non-defective products, and defective products are placed on a belt conveyor 44 for collecting defective products, and are transported to the next process B.

Hereinafter, the configuration of each part of the above-mentioned device of the present invention will be explained in detail.
First, a rotary indexing device consisting of the rotary table 22, rotary table driving device 25, rotary table horizontal holding device 26, etc. will be explained with reference to FIGS. 7 and 8. 7th
In the figure, the rotary table 22 is horizontally supported by a bearing 46. Positioning holes 47 are formed through the outer periphery of the rotary table 22 at positions where the outer periphery is divided into a plurality of equal intervals. The rotary table horizontal holding device 26 is
They hold the thin disc-shaped rotary table 22 horizontally, and are arranged at three locations on the outer circumferential side of the rotary table 22, for example, at the positions shown in FIG. 8. In addition, in FIG. 7, a friction wheel 6 of a rotary table drive device 25 is provided on the outer peripheral side of the rotary table 22.
0 is engaged. Rotary table drive device 2
5 is provided with a pressing means 50 consisting of a spring 49 or the like, and brings the friction wheel 60 into close contact with the outer periphery of the rotary table 22. A bracket 52 is attached to the gantry table 27 on the upper surface side of the gantry 51, and a bearing support bracket 53 is provided within the bracket 52. rotary table 2
A rotating shaft 54 provided at the center of the bearing 4 is inserted into the bearing support bracket 53.
6. Pivotally supported by spacer 48. Table holding pulley 5 of rotary table horizontal holding device 26
5 is formed in the shape of a V pulley having a V groove, and is in close contact with the peripheral end of the V shape formed on the outer periphery of the rotary table 22. In addition, the table holding pulley 55 is
The rotary table 22 is attached to the upper part of the upright shaft on the block 56 on the gantry table 27 to prevent the outer peripheral side of the rotary table 22 from drooping and to maintain it in a horizontal state. The block 56 is slidable on the mount table 27 in the radial direction of the rotary table 22 by means of push bolts 57, thereby making it possible to adjust the contact pressure between the table holding pulley 55 and the outer periphery of the rotary table 22.

Next, with reference to FIGS. 9 to 11, the rotary table driving device 25, the pressing means 67, the positioning pin part 71, and the separating means which together with the rotary table 22 and the rotary table horizontal holding device 26 constitute a rotary indexing device. 79
Explain. First, rotary table drive device 2
5 is composed of a friction wheel 60, a motor bracket 61, a drive motor 62, and the like. The friction wheel 60 is made of a material such as rubber in order to increase the frictional resistance, is formed in the shape of a V-pulley with a V-groove as described above, and is closely joined to the V-shaped peripheral end of the outer periphery of the rotary table 22. Place in position. Friction wheel 6
0 is directly connected to the output shaft of a drive motor 62 fixed to a motor bracket 61 and rotates. Support metal fittings 63 are fixedly provided on the gantry table 27 so as to face each other, and guide blocks 64 are provided on the support metal fittings 63 so as to face each other. A groove parallel to the surface of the gantry table 27 is formed in the guide block 64, and a protrusion 65 provided oppositely on the outer side of the motor bracket 61 is formed in this groove.
are slidably engaged. A plate 66 is installed across one end of the support fittings 63.

The pressing means 67 includes hold pins 67', 69,
It consists of L-shaped fittings 68 and 70, etc. That is,
A hold pin 67' is formed protruding from the outside (right side in the figure) of the motor bracket 61, and a hold pin 69 is provided on an L-shaped metal fitting 68 at a position facing and away from this. In this case, the L-shaped metal fitting 68 is fixedly installed on the mount table 27. A spring 70 is interposed between the hold pin 67' and the hold pin 69, and urges the drive device 25 described above toward the rotary table 22.

The positioning pin portion 71 is composed of a positioning pin 72, a pin block 73, an air cylinder 74, and the like. Of these, the positioning pin 72 has an outer diameter that can be fitted into the positioning hole 47 of the rotary table 22, is provided upright below the positioning hole 47 of the rotary table 22, and is connected to the pin block 7.
It is attached to the upper side of 3. pin block 73
An air cylinder 7 is connected to the lower side of the air cylinder 7 via a joint 75.
4 are connected. Air cylinder 74 is attached to a support plate 76 attached to plate 66. Projections 77 are provided on opposite sides of the pin block 73, and the projections 77 are connected to the guide block 7 attached to the support fitting 63.
It is slidably supported in the groove section 8.

The separating means 79 consists of inclined blocks 80, 81, bolts 82, adjusting screws 83, and the like. That is, the motor bracket 61 has a positioning pin 7.
There is a bevel block 80 forming a bevel angle that narrows towards the direction of insertion of the two. On the other hand, an inclined block 81 is attached by a bolt 82 to the outer surface of the positioning pin portion 71, which is perpendicular to the side surface on which the protrusion 77 of the pin block 73 is formed, at a position facing the inclined block 80. Tilt block 8
1 is movable in the vertical direction by an adjustment screw 83.

Next, the functions of the rotary table driving device 25, the pressing means 67, the positioning pin portion 71, and the separating means 79 will be explained. As shown in FIG. 9, a drive device 25 is engaged with the rotary table 22, and a friction wheel 60 applies rotational force to the rotary table 22. The rotary table 22 rotates smoothly by the pressing force of the pressing means 67 and the frictional force of the friction wheel 60. At this time, the positioning pin part 71
is positioned at the lowest end by operating the air cylinder 74 as shown in FIG. Therefore,
As shown, a gap a is formed between the inclined blocks 80 and 81 of the separating means 79. next,
In FIG. 10, the positioning hole 47 of the rotary table 22 is
In response to a signal indicating that the positioning pin 72 has reached a predetermined position, the air cylinder 74 is actuated to raise the positioning pin 72. The positioning pin 72 rises and the positioning hole 4
7, the tilting block 80 is simultaneously pushed by the tilting block 81, and the drive device 25 and the friction wheel 60 are separated from the rotary table 22 by a gap b. Therefore, the rotary table 22 stops, and positioning is completed. Thereafter, when the positioning pin 72 comes out of the positioning hole 47 due to the lowering operation of the air cylinder 74, the spring 70 of the pressing means 67
As a result of this action, the drive device 25 engages with the rotary table 22 again, and the rotary table 22 starts to rotate smoothly due to the drive motor 62 which is constantly rotating. As mentioned above, rotary table 2
Positioning accuracy can be ensured by sequentially inserting the positioning pins 72 into the positioning holes 47 accurately formed in the positioning holes 47, and by forming an appropriate number of positioning holes 47, it is possible to set an arbitrary number of indexes. It is possible.

Next, the fixing unit 23 and the transport jig gripping means 21 and 2 installed on the rotary table 22 are
1' will be explained based on FIGS. 12 to 14. The fixed unit 23 is the rotary table 2
on the energizing unit 24 fixedly mounted on the
This is a unit for fixing and holding the conveyance jig 6, and as shown in FIG. 12, 12 of these are fixedly installed on the rotary table 22 at equal intervals. On the rotary table 22, in order to continuously energize the lead terminals 5 of the integrated circuit component 1 mounted on the transport jig 6, a counter force is used to overcome the reaction force due to the spring force of a connecting contact pin (not shown). A fixing means is required to prevent the transport jig 6 from floating up, and the unit for this purpose is the fixing unit 23.
It is. As can be seen from FIGS. 13 and 14, the fixing unit 23 has a stepped through hole 85 in the center.
a base 86 for positioning the transport jig 6;
have The through hole 85 is provided on the lower surface of the base 86.
A pair of shafts 88 are supported by a pair of brackets 87 on both sides of the shaft. Each pair of clampers 89 is supported on these shafts 88 at a predetermined interval. At the center of each of these clampers 89 is an arm 90 that protrudes toward the through hole 85.
is formed, and a ball plunger 91 is supported at the top. The metal fittings 92 are arranged parallel to and close to each other in opposition to the rotating surface of the clamper 89.
A pair of conical holes 93a and 93b into which the ball plunger 91 is fitted are formed in. Above the fixed unit 23, there is a main plate 94 of the transport jig gripping means 21 attached to the moving means, that is, the movable unit 32 of the transfer device 31 in FIG. 2, along the arrow C in FIG. . A chuck 95 for holding the conveying jig 6 and a push rod 96 facing the upper surface of the arm 90 are supported on the main plate 94 .

In the above configuration, the conveyance graphic gripping means 21 holding the conveyance jig 6 moves above the base 86, and the conveyance jig 6 descends from there toward the base 86 and grips the opposing surface of the tip of the arm 90. Upon passing, the push rod 96 comes into contact with the arm 90. When the conveyance jig gripping means 21 further descends, the conveyance jig 6 is inserted into the through hole 85 of the base 86 and positioned, and placed on the stepped portion of the through hole 85. At the same time, a clamper 89 whose arm 90 is pushed by a push rod 96
However, the ball plunger 91 supported at its free end
The tip of the ball rotates until it passes over the edge of the hole 93a. Then, since it slides toward the center of the ball hole 93a, the clamper 89 also rotates further, and the arm 90 holds down the transfer jig 6, and the fixing unit 2
It is fixed at 3. Next, when taking out the conveying jig 6 from the main plate 94, the conveying jig 6 is held by the chuck 95, and the conveying jig holding means 2
1' should be increased. At this time, the arm 90 is pushed up by the transport jig 6, so the clamper 89 rotates. and ball plunger 9
The ball No. 11 comes out of the hole 93a and moves to 93b, and the clamper 89 becomes open. In this way, the transport jig 6 can be attached to and detached from the fixing unit 23 without using a special drive source.

Next, the power supply to the current collector 28 disposed in the space below the rotary table 22 and the conveyance jig 6 by the current collector 28 will be explained based on FIG. 15. As shown in FIG. 15, the rotary table 2
2, conductor rings 102, 103,
104 is provided. This conductor ring 102, 10
3 and 104 respectively correspond to the types of each integrated circuit component 1 (see FIG. 3), here three types a, b, and c, and the power supply + of each integrated circuit component 1 on the transport jig 6 is supply. That is, the conductor rings 102 to 104 are connected to the switches 110 and 11.
1, 112 and connected to the + side of the power supply 135. Further, a conductor ring 105 different from the conductor rings 102 to 104 is used to connect the ground terminal of each integrated circuit component 1 to the negative side of the power supply 135. The controller 106 controls the switches 107-112. The current collecting brushes 113 to 116 and 117 to 120 are connected to each socket provided in the current supply unit 24 on the rotary table 22, in the illustrated example, a socket 124.
The same number of conductor rings are provided corresponding to positions 126 to 126, fixed to the rotary table 22, rotated together, and brought into contact with the outer periphery of the conductor rings 102 to 105, respectively. The integrated circuit components 1 are inserted into the sockets 124 to 126 via the transport jig 6 and the fixing unit 23, respectively.
4 has terminals 127-130, each terminal 127-1
30 are connected to current collecting brushes 113 to 116, respectively. Socket 125 has terminals 131 to 134
Each terminal 131 to 134 has a current collecting brush 11
7 to 120. Each terminal 127-134
Current collector brush 1 in contact with conductor ring 102
Terminals 127 and 13 connected to terminals 13 and 117, respectively.
1 is a power supply terminal for type a. Conductor ring 10
The terminals 128 and 132 to which the current collecting brushes 114 and 118 connected to the conductor ring 104 are respectively connected are power terminals for type b, and the terminals 129 and 132 are respectively connected to the current collecting brushes 115 and 119 which are in contact with the conductor ring 104.
133 is a power supply terminal for type c. Terminals 130 and 134 connected to current collecting brushes 116 and 120, which contact conductor ring 105, respectively, are ground terminals. Note that the current collector brush connected to the socket 126 is also in contact with each of the conductor rings 102 to 105, but is not shown here because it is similar to the sockets 124 and 125. Further, the conductor ring 102 has three conductor parts 102a, 102b, 1
It is constructed by dividing into 02c. Each conductor part 102
The conductors a to 102c are made of the same material, and are insulated from each other by an insulating portion 102d.
Here, the conductor portion 2a corresponds to the transport jig supply position 141, the conductor portion 102b corresponds to the transport jig take-out device 142, and the conductor portion 102c corresponds to other positions.

Next, the operation of the above-mentioned current collector 28 will be explained. In FIG. 15, switch 10 is activated by controller 106 to supply power to type a.
7, 108, and 109 to the a terminal side, and then turn on switches 111 and 112. In the transport jig supply device 141, the switch 110 is turned off when the transport jig 6 is supplied, and the switch 110 is turned on after supply. Then switch 10
Power supply + to 102a of the conductor ring 102 via 9
The + side of the power supply is connected to the power supply terminal 127 for type a of the socket 124 via the current collecting brush 113. On the other hand, the socket 12 is
Since the ground terminal 130 of No. 4 is always connected to the negative side of the power supply, from the moment the switch 110 is turned on, power is supplied to the socket 124 and begins to supply power to the type A. When the rotary table 22 rotates, the current collector brush 113 is removed from the component supply position 102a and immediately comes into contact with the next other position 102c, and the current collector brush 113 is removed from the parts supply position 102a and immediately contacts the next other position 102c.
7, power is continuously supplied to type a. Therefore, the integrated circuit component 1 of type a is continuously energized while the rotary table 22 is rotating. In the conductor part 102b corresponding to the transport jig take-out position 142, when the transport jig 6 is taken out by the transport jig gripping means 21' of the transfer position 31, the conductor part 102b
It is necessary to cut off the power supply to the power supply, and for this purpose, the switch 111 is opened and the connection to the + side of the power supply is stopped. For example, when the socket 124 into which the integrated circuit component 1 is inserted reaches the transport jig removal position 142,
The current collecting brush 113 is located at the corresponding position 102b.
is in contact with. Therefore, if the rotary table 22 is stopped at this time and then the switch 111 is opened to stop the power supply to this position 102b, the power supply to the other integrated circuit components 1 will not be affected. It is possible to stop energizing only the integrated circuit component 1 to be removed. When energizing type b or c, controller 10
6, the switches 107 to 109 are moved to the b side or c side and the same operation as described above is performed. 15th
Although the figure shows an example in which there are three sockets, the same applies to a case where there are more sockets.

Note that the above-mentioned energization is performed by continuously energizing the integrated circuit component 1 to be inspected.
This is done with the purpose of maintaining thermal and electrical equilibrium and maintaining a stable state before inspection.Another method for achieving this purpose is to use a heat block or the like to Alternatively, a method may be adopted in which the temperature of the circuit component 1 is directly raised thermally to maintain a stable state.

The carrying jig 6 that has been energized as described above is
5 and 15, the movable unit 32 of the transfer device 31 is held from the transfer jig take-out position 142 on the rotary table 22 by the transfer gripping means 21' attached to the transfer device 13. is moved to the specified position. When the transport jig holding means 21' is lowered at a predetermined position and the transport jig 6 is lowered, the lead terminals 2 of the integrated circuit component 1 come into contact with the contact pins 14 of the inspection apparatus main body 30.

After this, the characteristics of each integrated circuit component 1 are inspected.
will be explained based on FIG. The inspection device main body 30 is for automatically inspecting the quality of the characteristics of the integrated circuit component 1, and is a known device such as LSI.
A test (see Monthly "Electronics" magazine, July issue, 1981, pages (61) 717 to (71) 727, etc.) is used. In FIG. 16, 145 is a base plate, and a positioning pin 147 that fits into a positioning hole 146 provided in this base plate 145.
is fixed to the mount table 27 and the transfer device 31
The position of the base plate 145 is determined.
Side plates 14 are attached to the left and right ends of the base plate 145.
8. Face plates 149 are erected at the front and rear, and a main plate 150 is fixed on top of these. Contact pins 14 are provided upright on the main plate 150 in correspondence with each lead terminal 2 of the integrated circuit component 1 on the anti-sweeping jig 6. In this case, main plate 150 and contact pins 14 are insulated. Further, the position of the contact pin 14 is set accurately with respect to the positioning hole 146. And the connector 15 is on the side plate 148.
1 is provided, and this connector 151 is used as an external relay connector in the inspection device main body 30, and one side is connected to the inspection circuit board 15 (see FIG. 5) in the inspection device main body 30, The other side is connected to a measurement control device (not shown) via a connector and cord (not shown). The testing circuit board 15 automatically tests the quality of the characteristics of each integrated circuit component 1 whose lead terminals 2 are connected to the contact pins 14 according to instructions from the measurement control device. The inspection results are sent from the inspection device main body 30 (inspection circuit board 15) to the pass/fail/defective product sorting means 42 via the measurement control device.

The transport jig positioning means 40 positions the transport jig 6 by inserting the pin at its tip into the hole 13' of the transport jig 6 (see arrow D in FIG. 6).

The conveyance jig pressing means 41 inserts the pin at the tip thereof into the positioned hole 13 of the conveyance jig 6 and presses the slight plate 11 of the conveyance jig 6 against the pressing force of the coil spring 12. Release the support of the pin terminals 2 of the integrated circuit component 1 by the fixed wall 9 (6th
(See arrow E in the figure).

The non-defective/defective product sorting means 42 sorts each of the integrated circuit components 1 on the conveying jig 6 from which the support of the pin terminals 2 is released into a non-defective product or a non-defective product on the conveyor 42 or 43 according to a signal from the inspection device main body 30. Separate and supply defective products.

〔Effect of the invention〕

As explained above, according to the present invention, since energy supply to the integrated circuit components, inspection of the quality of the integrated circuit components, and sorting of good products and defective products are sequentially performed for each transport jig, the integrated circuit This has the effect of simplifying automatic handling of parts, efficiently supplying energy to integrated circuit parts, inspecting the quality of integrated circuit parts, and sorting into good and defective parts with high efficiency and high reliability.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of a conventional inspection device, FIG. 2 is a perspective view showing the overall configuration of an embodiment of an automatic inspection device for integrated circuit components according to the present invention, and FIG. 3 is a perspective view of an integrated circuit used in the device of the present invention. A plan view showing an example of a transport jig for mounting and positioning circuit components, FIG. 4 is a front view of FIG. 3, and FIG. 5 shows a plurality of integrated circuit components mounted on the transport jig as shown in FIG. 3. Figure 6 is an enlarged cross-sectional view taken along the - line in Figure 3, showing a state in which the quality of the characteristics of the integrated circuit is inspected at the location where the inspection equipment main body is installed. Diagram showing the state when taking out parts, No. 7
The figure is a partially cutaway side view showing the rotary indexing device part in FIG. 2, FIG. 8 is a plan view of FIG. 7, and FIG. 9 is the rotary table drive device in FIG. 2 and its surrounding parts. A partially cutaway side view showing the rotary table drive state enlarged.
FIG. 10 is a partially cutaway side view showing the rotary table in a stopped state in an enlarged manner, FIG. 11 is a plan view of FIG. 9, and FIG. FIG. 13 is an enlarged cross-sectional view taken along the line - in FIG. 12, FIG. 14 is an enlarged cross-sectional view taken along the line - in FIG. 13, and FIG. Part 1 is a partially cutaway perspective view showing the rotary table and current collector part in Figure 2 taken out and enlarged.
FIG. 6 is an enlarged perspective view of the main body of the inspection device in FIG. 2. 1... integrated circuit component, 2... lead terminal, 6...
...Conveyance jig, 7...Plate member, 8...Through hole, 9...
...Fixed wall, 11...Slide plate, 12...
Compression coil spring, 21, 21'... Transfer jig gripping means, 22... Rotary table, 23... Fixing unit, 24... Energizing unit, 25... Rotary table driving device, 26... Rotary table horizontal holding device , 28... Current collector, 30... Inspection device main body, 31... Transfer device, 39... Conveyance belt unit, 41... Conveyance jig pressing means, 42
... Good product/defective product sorting means, 47 ... Positioning hole, 50 ... Pressing means, 54 ... Rotating shaft, 60 ...
... Friction wheel, 62 ... Drive motor, 71 ... Positioning pin section, 72 ... Positioning pin, 79 ... Separation means, 102-105 ... Conductor ring, 106 ...
...Controller, 107-112...Switch,
113-120... Current collector brush, 124-126
...Socket, 127-134 ...Terminal, 135
……power supply.

Claims (1)

[Claims] 1. Forming in a row a through hole into which each of the lead terminals implanted in a row in each integrated circuit component is inserted from the front side, and near the back end of each of the through holes. a plate-like member forming a fixed wall and having a lead terminal inserted into the through hole from the front side protruding to the back side; and a plate-like member that slides opposite the fixed wall on the back side of the plate member. A movably supported slide plate and the slide plate are biased toward the fixed wall to press and position the lead terminals inserted into the through holes from the surface side against the fixed wall and to hold them between them. a supply means comprising a biasing means and sequentially supplying a transport jig on which a plurality of integrated circuit components are mounted side by side;
an energy supply/transfer means for supplying energy to a plurality of integrated circuit components mounted on the transport jig to maintain the integrated circuit components in a stable state while transporting the transport jig sequentially supplied by the supply means; ,
A transfer means for sequentially taking out transfer jigs from the energy supply/transfer means and transferring them to an inspection position, and a transfer means that sequentially transfers the transfer jigs by the transfer means are positioned at the inspection position, and electrically connected to the rotating board. The lead terminals protruding from the back side of the plate member mounted on the transport jig are brought into contact with the connected contact pins that are insulated and erected on the main plate, and the integrated circuit components are passed through the circuit board. An inspection device that inspects characteristics to determine pass/fail, and a transportation jig loaded with a plurality of integrated circuit components inspected by the inspection device are transported to a sorting position, and the transportation jig is positioned at the sorting position. , a pressing member presses the slide plate against the biasing force of the biasing means through a hole bored in a side surface between the respective integrated circuit components on the plate-like member, thereby pinching the lead terminal. and a non-defective/defective sorting means for removing each released integrated circuit component from the transport jig and sorting it into non-defective products and defective products according to the quality determined by the inspection device, An automatic inspection device for integrated circuit components, characterized in that the integrated circuit components are configured to be supplied with energy, inspected, and sorted in sequence for each transport jig. 2. The energy supply/transport means includes a rotary table that is rotatably supported in a horizontal state and has a current collector on the rotary shaft that is supported, and a rotary table that drives the rotary table to rotate intermittently at a predetermined angle. an index drive device, a plurality of energization devices arranged on the rotary table at predetermined angle intervals that are intermittently rotated by the rotary index drive device and connected to the current collector, and a plurality of energization devices that are sequentially supplied from the supply means. The transport jig is lowered and the transport jig is placed on a rotary table in such a state that lead terminals protruding from the back side of the plate member of the plurality of integrated circuit components mounted side by side on the transport jig can be energized with the energizing device. and a fixed holding means for holding the current collector fixedly against the current collector, and is configured to supply electrical energy from the current collector to each integrated circuit component mounted side by side on the conveying jig via the energizing device. An automatic inspection device for integrated circuit components according to claim 1. 3. The rotary index drive device includes a friction wheel connected to a drive motor and in contact with the outer periphery of the rotary reable, a pressing means for pressing the friction wheel against the outer periphery of the rotary table, and a friction wheel connected to the rotary table at predetermined angle intervals. positioning means for positioning the rotary table each time the rotary table is rotated intermittently by engaging a positioning member with a positioning portion formed in the positioning portion; 3. The automatic inspection device for integrated circuit components according to claim 2, further comprising separating means for separating from the outer periphery of the rotary table against the pressing force of the pressing means. 4. The current collector is connected to a plurality of conductor rings installed on the rotating shaft of the rotary table and each energizing device arranged on the rotary table corresponding to each of the plurality of conductor rings, and The present invention is characterized by comprising: an energized brush that is intermittently rotated together with a table; a power source connected to the plurality of conductor rings; and a control means for switching and controlling connections from the power source to each of the conductor rings. An automatic inspection device for integrated circuit components according to scope 2.