JP5076842B2 - 光学デバイス、波長可変フィルタモジュール、および光スペクトラムアナライザ - Google Patents
光学デバイス、波長可変フィルタモジュール、および光スペクトラムアナライザ Download PDFInfo
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- JP5076842B2 JP5076842B2 JP2007309552A JP2007309552A JP5076842B2 JP 5076842 B2 JP5076842 B2 JP 5076842B2 JP 2007309552 A JP2007309552 A JP 2007309552A JP 2007309552 A JP2007309552 A JP 2007309552A JP 5076842 B2 JP5076842 B2 JP 5076842B2
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| JP5640659B2 (ja) * | 2010-11-02 | 2014-12-17 | セイコーエプソン株式会社 | 光フィルター、光フィルターの製造方法、及び光機器 |
| JP5630227B2 (ja) | 2010-11-15 | 2014-11-26 | セイコーエプソン株式会社 | 光フィルターおよび光フィルターの製造方法 |
| JP5545190B2 (ja) * | 2010-11-26 | 2014-07-09 | セイコーエプソン株式会社 | 波長可変干渉フィルターの製造方法 |
| JP2012145675A (ja) * | 2011-01-11 | 2012-08-02 | Seiko Epson Corp | 光フィルター、光フィルターの製造方法および光機器 |
| JP5923912B2 (ja) * | 2011-09-27 | 2016-05-25 | セイコーエプソン株式会社 | 干渉フィルターの製造方法 |
| JP6119325B2 (ja) * | 2013-03-14 | 2017-04-26 | セイコーエプソン株式会社 | 干渉フィルター、干渉フィルターの製造方法、光学モジュール、電子機器、及び接合基板 |
| JP6264356B2 (ja) * | 2015-11-02 | 2018-01-24 | セイコーエプソン株式会社 | 光フィルター、光フィルターモジュール、分析機器及び光機器 |
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| JP3714338B2 (ja) * | 2003-04-23 | 2005-11-09 | ウシオ電機株式会社 | 接合方法 |
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