JP5075459B2 - 搬送装置 - Google Patents

搬送装置 Download PDF

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Publication number
JP5075459B2
JP5075459B2 JP2007107845A JP2007107845A JP5075459B2 JP 5075459 B2 JP5075459 B2 JP 5075459B2 JP 2007107845 A JP2007107845 A JP 2007107845A JP 2007107845 A JP2007107845 A JP 2007107845A JP 5075459 B2 JP5075459 B2 JP 5075459B2
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Japan
Prior art keywords
arms
arm
pair
gear
dead center
Prior art date
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Application number
JP2007107845A
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English (en)
Japanese (ja)
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JP2008264894A5 (enExample
JP2008264894A (ja
Inventor
和博 武者
展史 南
隆 浅石
土志夫 小池
健二 吾郷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Priority to JP2007107845A priority Critical patent/JP5075459B2/ja
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to CN200880011092.6A priority patent/CN101652228B/zh
Priority to DE112008000908T priority patent/DE112008000908T5/de
Priority to KR1020097020641A priority patent/KR101071606B1/ko
Priority to PCT/JP2008/054352 priority patent/WO2008126556A1/ja
Priority to TW097110814A priority patent/TWI463592B/zh
Publication of JP2008264894A publication Critical patent/JP2008264894A/ja
Publication of JP2008264894A5 publication Critical patent/JP2008264894A5/ja
Priority to US12/564,572 priority patent/US8382421B2/en
Application granted granted Critical
Publication of JP5075459B2 publication Critical patent/JP5075459B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2007107845A 2007-04-05 2007-04-17 搬送装置 Active JP5075459B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2007107845A JP5075459B2 (ja) 2007-04-17 2007-04-17 搬送装置
DE112008000908T DE112008000908T5 (de) 2007-04-05 2008-03-11 Transportvorrichtung
KR1020097020641A KR101071606B1 (ko) 2007-04-05 2008-03-11 반송 장치
PCT/JP2008/054352 WO2008126556A1 (ja) 2007-04-05 2008-03-11 搬送装置
CN200880011092.6A CN101652228B (zh) 2007-04-05 2008-03-11 搬送装置
TW097110814A TWI463592B (zh) 2007-04-05 2008-03-26 搬送裝置
US12/564,572 US8382421B2 (en) 2007-04-05 2009-09-22 Transport apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007107845A JP5075459B2 (ja) 2007-04-17 2007-04-17 搬送装置

Publications (3)

Publication Number Publication Date
JP2008264894A JP2008264894A (ja) 2008-11-06
JP2008264894A5 JP2008264894A5 (enExample) 2009-09-03
JP5075459B2 true JP5075459B2 (ja) 2012-11-21

Family

ID=40045130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007107845A Active JP5075459B2 (ja) 2007-04-05 2007-04-17 搬送装置

Country Status (1)

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JP (1) JP5075459B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101851493B1 (ko) 2017-02-08 2018-04-25 신대호 스택커 로봇

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111856088B (zh) * 2020-08-05 2025-06-03 长园精密自动化科技(苏州)有限公司 自夹紧探针载板组件

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000042952A (ja) * 1998-07-27 2000-02-15 Hitachi Ltd 搬送装置及び搬送方法
JP4463409B2 (ja) * 2000-10-24 2010-05-19 株式会社アルバック 搬送装置及び真空処理装置
JP4291709B2 (ja) * 2003-04-16 2009-07-08 株式会社ダイヘン 直線移動機構およびこれを用いた搬送ロボット

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101851493B1 (ko) 2017-02-08 2018-04-25 신대호 스택커 로봇

Also Published As

Publication number Publication date
JP2008264894A (ja) 2008-11-06

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