JP2008264894A5 - - Google Patents

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Publication number
JP2008264894A5
JP2008264894A5 JP2007107845A JP2007107845A JP2008264894A5 JP 2008264894 A5 JP2008264894 A5 JP 2008264894A5 JP 2007107845 A JP2007107845 A JP 2007107845A JP 2007107845 A JP2007107845 A JP 2007107845A JP 2008264894 A5 JP2008264894 A5 JP 2008264894A5
Authority
JP
Japan
Prior art keywords
arm
pair
arms
gear
substrate support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007107845A
Other languages
English (en)
Japanese (ja)
Other versions
JP5075459B2 (ja
JP2008264894A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2007107845A external-priority patent/JP5075459B2/ja
Priority to JP2007107845A priority Critical patent/JP5075459B2/ja
Priority to CN200880011092.6A priority patent/CN101652228B/zh
Priority to KR1020097020641A priority patent/KR101071606B1/ko
Priority to PCT/JP2008/054352 priority patent/WO2008126556A1/ja
Priority to DE112008000908T priority patent/DE112008000908T5/de
Priority to TW097110814A priority patent/TWI463592B/zh
Publication of JP2008264894A publication Critical patent/JP2008264894A/ja
Publication of JP2008264894A5 publication Critical patent/JP2008264894A5/ja
Priority to US12/564,572 priority patent/US8382421B2/en
Publication of JP5075459B2 publication Critical patent/JP5075459B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007107845A 2007-04-05 2007-04-17 搬送装置 Active JP5075459B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2007107845A JP5075459B2 (ja) 2007-04-17 2007-04-17 搬送装置
DE112008000908T DE112008000908T5 (de) 2007-04-05 2008-03-11 Transportvorrichtung
KR1020097020641A KR101071606B1 (ko) 2007-04-05 2008-03-11 반송 장치
PCT/JP2008/054352 WO2008126556A1 (ja) 2007-04-05 2008-03-11 搬送装置
CN200880011092.6A CN101652228B (zh) 2007-04-05 2008-03-11 搬送装置
TW097110814A TWI463592B (zh) 2007-04-05 2008-03-26 搬送裝置
US12/564,572 US8382421B2 (en) 2007-04-05 2009-09-22 Transport apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007107845A JP5075459B2 (ja) 2007-04-17 2007-04-17 搬送装置

Publications (3)

Publication Number Publication Date
JP2008264894A JP2008264894A (ja) 2008-11-06
JP2008264894A5 true JP2008264894A5 (enExample) 2009-09-03
JP5075459B2 JP5075459B2 (ja) 2012-11-21

Family

ID=40045130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007107845A Active JP5075459B2 (ja) 2007-04-05 2007-04-17 搬送装置

Country Status (1)

Country Link
JP (1) JP5075459B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101851493B1 (ko) 2017-02-08 2018-04-25 신대호 스택커 로봇
CN111856088B (zh) * 2020-08-05 2025-06-03 长园精密自动化科技(苏州)有限公司 自夹紧探针载板组件

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000042952A (ja) * 1998-07-27 2000-02-15 Hitachi Ltd 搬送装置及び搬送方法
JP4463409B2 (ja) * 2000-10-24 2010-05-19 株式会社アルバック 搬送装置及び真空処理装置
JP4291709B2 (ja) * 2003-04-16 2009-07-08 株式会社ダイヘン 直線移動機構およびこれを用いた搬送ロボット

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