JP5064725B2 - 形状測定方法 - Google Patents

形状測定方法 Download PDF

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Publication number
JP5064725B2
JP5064725B2 JP2006162988A JP2006162988A JP5064725B2 JP 5064725 B2 JP5064725 B2 JP 5064725B2 JP 2006162988 A JP2006162988 A JP 2006162988A JP 2006162988 A JP2006162988 A JP 2006162988A JP 5064725 B2 JP5064725 B2 JP 5064725B2
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Prior art keywords
measurement
shape
probe
measured
data
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Japanese (ja)
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JP2007333442A5 (enrdf_load_stackoverflow
JP2007333442A (ja
Inventor
雅普 大野
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Canon Inc
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Canon Inc
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Publication of JP2007333442A5 publication Critical patent/JP2007333442A5/ja
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  • A Measuring Device Byusing Mechanical Method (AREA)
JP2006162988A 2006-06-13 2006-06-13 形状測定方法 Expired - Fee Related JP5064725B2 (ja)

Priority Applications (1)

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JP2006162988A JP5064725B2 (ja) 2006-06-13 2006-06-13 形状測定方法

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Application Number Priority Date Filing Date Title
JP2006162988A JP5064725B2 (ja) 2006-06-13 2006-06-13 形状測定方法

Publications (3)

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JP2007333442A JP2007333442A (ja) 2007-12-27
JP2007333442A5 JP2007333442A5 (enrdf_load_stackoverflow) 2009-07-30
JP5064725B2 true JP5064725B2 (ja) 2012-10-31

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JP2006162988A Expired - Fee Related JP5064725B2 (ja) 2006-06-13 2006-06-13 形状測定方法

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013007669A (ja) * 2011-06-24 2013-01-10 Ulvac Japan Ltd 表面形状測定用触針式段差計における針飛び抑制方法
JP2013019835A (ja) * 2011-07-13 2013-01-31 Olympus Corp 形状測定方法
ITMI20121061A1 (it) 2012-06-18 2013-12-19 Clay Paky Spa Proiettore da palcoscenico, in particolare proiettore seguipersona da palcoscenico

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3215325B2 (ja) * 1996-06-07 2001-10-02 株式会社東京精密 測定機の校正方法及びその装置
JPH10253346A (ja) * 1997-01-07 1998-09-25 Nikon Corp 非球面形状測定器および非球面光学部材の製造方法
JP3679582B2 (ja) * 1997-12-08 2005-08-03 キヤノン株式会社 形状測定装置及びその方法
JP3722464B2 (ja) * 2000-05-01 2005-11-30 株式会社リコー レンズ面形状評価方法及び形状評価装置
JP4794753B2 (ja) * 2001-06-04 2011-10-19 パナソニック株式会社 形状測定方法
JP2005037197A (ja) * 2003-07-18 2005-02-10 Ricoh Co Ltd 接触式表面形状測定装置及び測定方法
JP2005055282A (ja) * 2003-08-04 2005-03-03 Tokyo Seimitsu Co Ltd 測定方法及び測定装置
JP2006098251A (ja) * 2004-09-30 2006-04-13 Canon Inc 形状測定装置および形状測定方法

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JP2007333442A (ja) 2007-12-27

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