JP5064654B2 - 平面光導波路組立品、およびその製造方法 - Google Patents

平面光導波路組立品、およびその製造方法 Download PDF

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Publication number
JP5064654B2
JP5064654B2 JP2004515620A JP2004515620A JP5064654B2 JP 5064654 B2 JP5064654 B2 JP 5064654B2 JP 2004515620 A JP2004515620 A JP 2004515620A JP 2004515620 A JP2004515620 A JP 2004515620A JP 5064654 B2 JP5064654 B2 JP 5064654B2
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Japan
Prior art keywords
sio
units
film
silicone
composition
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Expired - Fee Related
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JP2004515620A
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Japanese (ja)
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JP2005531028A5 (enExample
JP2005531028A (ja
Inventor
ガードナー、ジェフリー
シュミット、ランドール
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Silicones Corp
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Dow Corning Corp
Dow Silicones Corp
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G02B1/045—Light guides
    • G02B1/046—Light guides characterised by the core material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12069—Organic material

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Optical Integrated Circuits (AREA)
JP2004515620A 2002-06-24 2003-03-28 平面光導波路組立品、およびその製造方法 Expired - Fee Related JP5064654B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/178,975 US6907176B2 (en) 2002-06-24 2002-06-24 Planar optical waveguide assembly and method of preparing same
US10/178,975 2002-06-24
PCT/US2003/009598 WO2004000942A1 (en) 2002-06-24 2003-03-28 Planar optical waveguide assembly and method of preparing same

Publications (3)

Publication Number Publication Date
JP2005531028A JP2005531028A (ja) 2005-10-13
JP2005531028A5 JP2005531028A5 (enExample) 2010-11-11
JP5064654B2 true JP5064654B2 (ja) 2012-10-31

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Family Applications (1)

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JP2004515620A Expired - Fee Related JP5064654B2 (ja) 2002-06-24 2003-03-28 平面光導波路組立品、およびその製造方法

Country Status (5)

Country Link
US (2) US6907176B2 (enExample)
EP (1) EP1523525B1 (enExample)
JP (1) JP5064654B2 (enExample)
AU (1) AU2003218445A1 (enExample)
WO (1) WO2004000942A1 (enExample)

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WO2006023037A2 (en) * 2004-08-11 2006-03-02 Dow Corning Corporation Photopolymerizable silicone materials forming semipermeable membranes for sensor applications
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KR101278460B1 (ko) * 2005-03-01 2013-07-02 다우 코닝 코포레이션 반도체 가공을 위한 임시 웨이퍼 접착방법
JP4800383B2 (ja) * 2005-05-26 2011-10-26 ダウ・コーニング・コーポレイション 小さい形状を成形するための方法およびシリコーン封止剤組成物
MY144041A (en) * 2006-01-17 2011-07-29 Dow Corning Thermally stable transparent silicone resin compositions and methods for their preparation and use
CN101336383B (zh) * 2006-02-01 2012-05-09 陶氏康宁公司 抗冲击的光波导管及其制造方法
CN101389695B (zh) * 2006-02-24 2012-07-04 陶氏康宁公司 用硅氧烷包封的发光器件和用于制备该硅氧烷的可固化的硅氧烷组合物
JP2007279237A (ja) * 2006-04-04 2007-10-25 Nitto Denko Corp 光導波路の製法
ATE536558T1 (de) * 2006-08-28 2011-12-15 Dow Corning Optische bauelemente und silikonzusammensetzungen sowie verfahren zur herstellung der optischen bauelemente
JP4458136B2 (ja) * 2007-09-06 2010-04-28 オムロン株式会社 有機デバイス、及び有機デバイスの製造方法
US7944781B2 (en) * 2007-10-16 2011-05-17 Seagate Technology Llc Flexible waveguide with adjustable index of refraction
JP2009186577A (ja) * 2008-02-04 2009-08-20 Oki Semiconductor Co Ltd 光集積回路、光電子集積回路およびこれらの製造方法
JP5353407B2 (ja) * 2009-04-22 2013-11-27 Ｊｓｒ株式会社 ネガ型感放射線性組成物、硬化パターン形成方法及び硬化パターン
US9080077B2 (en) 2009-12-21 2015-07-14 Dow Corning Corporation Methods for fabricating flexible waveguides using alkyl-functional silsesquioxane resins
CN102753636B (zh) 2010-02-12 2014-02-12 道康宁公司 用于半导体加工的暂时晶片粘结方法
US8742009B2 (en) * 2010-06-04 2014-06-03 Shin-Etsu Chemical Co., Ltd. Temporary adhesive composition, and method of producing thin wafer
DE102010043149A1 (de) * 2010-10-29 2012-05-03 Wacker Chemie Ag Hochtransparente durch Licht vernetzbare Siliconmischungen
US9354518B2 (en) 2011-05-25 2016-05-31 Dow Corning Corporation Epoxy-functional radiation-curable composition containing an epoxy-functional siloxane oligomer for enhanced film retention and adhesion during solvent development
JP5592330B2 (ja) * 2011-10-07 2014-09-17 信越化学工業株式会社 仮接着剤組成物、及びそれを用いた薄型ウエハの製造方法
KR101774984B1 (ko) * 2013-12-09 2017-09-05 쓰리엠 이노베이티브 프로퍼티즈 컴파니 경화성 실세스퀴옥산 중합체, 조성물, 물품, 및 방법
WO2016048736A1 (en) 2014-09-22 2016-03-31 3M Innovative Properties Company Curable polymers comprising silsesquioxane polymer core silsesquioxane polymer outer layer, and reactive groups
US9957416B2 (en) * 2014-09-22 2018-05-01 3M Innovative Properties Company Curable end-capped silsesquioxane polymer comprising reactive groups
KR102620913B1 (ko) * 2017-08-24 2024-01-05 다우 글로벌 테크놀로지스 엘엘씨 광학 도파관 제작 방법
WO2019040582A1 (en) * 2017-08-25 2019-02-28 Arizona Board Of Regents On Behalf Of The University Of Arizona HIGH-EFFICIENCY FABRICATION OF PHOTONIC INTEGRATED CIRCUIT (PIC) WAVEGUIDES USING MULTIPLE EXHIBITIONS

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JPH09124793A (ja) 1995-11-02 1997-05-13 Nippon Telegr & Teleph Corp <Ntt> 高分子光学材料及びその製造方法及び高分子光導波路
US5972516A (en) * 1996-02-29 1999-10-26 Kyocera Corporation Method for manufacturing optical waveguide using siloxane polymer, and optoelectronic hybrid substrate using the optical waveguide
JPH10148729A (ja) 1996-11-21 1998-06-02 Nippon Telegr & Teleph Corp <Ntt> 高分子光導波路コア部のリッジ・パターン形成方法
JP2000090643A (ja) 1998-09-08 2000-03-31 Matsushita Electric Ind Co Ltd 記憶装置
US6344520B1 (en) * 1999-06-24 2002-02-05 Wacker Silicones Corporation Addition-crosslinkable epoxy-functional organopolysiloxane polymer and coating compositions
WO2001037049A1 (en) 1999-11-12 2001-05-25 Nippon Sheet Glass Co., Ltd. Photosensitive composition, and optical waveguide element and process for producing the same
US6415093B1 (en) * 2000-08-17 2002-07-02 Nippon Sheet Glass Co., Ltd. Optical device and adhesive composition used therefor
JP4885351B2 (ja) * 2000-11-10 2012-02-29 東レ・ダウコーニング株式会社 有機樹脂用添加剤および有機樹脂組成物
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JP4803884B2 (ja) * 2001-01-31 2011-10-26 キヤノン株式会社 薄膜半導体装置の製造方法
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US6905904B2 (en) * 2002-06-24 2005-06-14 Dow Corning Corporation Planar optical waveguide assembly and method of preparing same
JP2004186168A (ja) * 2002-11-29 2004-07-02 Shin Etsu Chem Co Ltd 発光ダイオード素子用シリコーン樹脂組成物

Also Published As

Publication number Publication date
US20030234458A1 (en) 2003-12-25
EP1523525A1 (en) 2005-04-20
WO2004000942A1 (en) 2003-12-31
AU2003218445A1 (en) 2004-01-06
EP1523525B1 (en) 2014-11-05
JP2005531028A (ja) 2005-10-13
US6907176B2 (en) 2005-06-14
US20050232557A1 (en) 2005-10-20

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