JP5049249B2 - 研磨液組成物 - Google Patents

研磨液組成物 Download PDF

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Publication number
JP5049249B2
JP5049249B2 JP2008281509A JP2008281509A JP5049249B2 JP 5049249 B2 JP5049249 B2 JP 5049249B2 JP 2008281509 A JP2008281509 A JP 2008281509A JP 2008281509 A JP2008281509 A JP 2008281509A JP 5049249 B2 JP5049249 B2 JP 5049249B2
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JP
Japan
Prior art keywords
polishing
acid
weight
alumina
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2008281509A
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English (en)
Japanese (ja)
Other versions
JP2009079228A5 (enrdf_load_stackoverflow
JP2009079228A (ja
Inventor
博昭 北山
滋夫 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kao Corp
Original Assignee
Kao Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Kao Corp filed Critical Kao Corp
Priority to JP2008281509A priority Critical patent/JP5049249B2/ja
Publication of JP2009079228A publication Critical patent/JP2009079228A/ja
Publication of JP2009079228A5 publication Critical patent/JP2009079228A5/ja
Application granted granted Critical
Publication of JP5049249B2 publication Critical patent/JP5049249B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP2008281509A 2008-10-31 2008-10-31 研磨液組成物 Expired - Lifetime JP5049249B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008281509A JP5049249B2 (ja) 2008-10-31 2008-10-31 研磨液組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008281509A JP5049249B2 (ja) 2008-10-31 2008-10-31 研磨液組成物

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2003270150A Division JP4339034B2 (ja) 2003-07-01 2003-07-01 研磨液組成物

Publications (3)

Publication Number Publication Date
JP2009079228A JP2009079228A (ja) 2009-04-16
JP2009079228A5 JP2009079228A5 (enrdf_load_stackoverflow) 2011-01-06
JP5049249B2 true JP5049249B2 (ja) 2012-10-17

Family

ID=40654215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008281509A Expired - Lifetime JP5049249B2 (ja) 2008-10-31 2008-10-31 研磨液組成物

Country Status (1)

Country Link
JP (1) JP5049249B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5484782B2 (ja) * 2009-04-30 2014-05-07 花王株式会社 研磨材スラリーの製造方法
JP5710158B2 (ja) * 2010-06-18 2015-04-30 山口精研工業株式会社 研磨剤組成物および磁気ディスク基板の研磨方法
JP6734018B2 (ja) * 2014-09-17 2020-08-05 株式会社フジミインコーポレーテッド 研磨材、研磨用組成物、及び研磨方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4021133B2 (ja) * 1999-07-22 2007-12-12 花王株式会社 研磨液組成物
TW528645B (en) * 2000-04-17 2003-04-21 Showa Denko Kk Composition for polishing magnetic disk substrate
JP4231632B2 (ja) * 2001-04-27 2009-03-04 花王株式会社 研磨液組成物
JP4339034B2 (ja) * 2003-07-01 2009-10-07 花王株式会社 研磨液組成物

Also Published As

Publication number Publication date
JP2009079228A (ja) 2009-04-16

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