JP5047887B2 - 短波長光源 - Google Patents

短波長光源 Download PDF

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Publication number
JP5047887B2
JP5047887B2 JP2008159025A JP2008159025A JP5047887B2 JP 5047887 B2 JP5047887 B2 JP 5047887B2 JP 2008159025 A JP2008159025 A JP 2008159025A JP 2008159025 A JP2008159025 A JP 2008159025A JP 5047887 B2 JP5047887 B2 JP 5047887B2
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JP
Japan
Prior art keywords
wavelength conversion
fundamental wave
harmonic
wavelength
conversion element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008159025A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009025811A5 (enExample
JP2009025811A (ja
Inventor
公典 水内
博之 古屋
弘一 楠亀
研一 笠澄
和久 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2008159025A priority Critical patent/JP5047887B2/ja
Publication of JP2009025811A publication Critical patent/JP2009025811A/ja
Publication of JP2009025811A5 publication Critical patent/JP2009025811A5/ja
Application granted granted Critical
Publication of JP5047887B2 publication Critical patent/JP5047887B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/37—Non-linear optics for second-harmonic generation
    • G02F1/377—Non-linear optics for second-harmonic generation in an optical waveguide structure
    • G02F1/3775—Non-linear optics for second-harmonic generation in an optical waveguide structure with a periodic structure, e.g. domain inversion, for quasi-phase-matching [QPM]
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
    • G02F1/3503—Structural association of optical elements, e.g. lenses, with the non-linear optical device
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
    • G02F1/3507—Arrangements comprising two or more nonlinear optical devices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/16—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 series; tandem

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
JP2008159025A 2007-06-21 2008-06-18 短波長光源 Expired - Fee Related JP5047887B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008159025A JP5047887B2 (ja) 2007-06-21 2008-06-18 短波長光源

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007163492 2007-06-21
JP2007163492 2007-06-21
JP2008159025A JP5047887B2 (ja) 2007-06-21 2008-06-18 短波長光源

Publications (3)

Publication Number Publication Date
JP2009025811A JP2009025811A (ja) 2009-02-05
JP2009025811A5 JP2009025811A5 (enExample) 2011-01-13
JP5047887B2 true JP5047887B2 (ja) 2012-10-10

Family

ID=40136188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008159025A Expired - Fee Related JP5047887B2 (ja) 2007-06-21 2008-06-18 短波長光源

Country Status (2)

Country Link
US (1) US7738162B2 (enExample)
JP (1) JP5047887B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4849417B2 (ja) * 2007-11-20 2012-01-11 三菱電機株式会社 波長変換装置および波長変換レーザ装置
JP5170572B2 (ja) * 2009-05-25 2013-03-27 国立大学法人福井大学 波長変換装置
EP2317377B1 (en) * 2009-10-14 2013-07-24 Advalight ApS High-power electromagnetic sum frequency generator system
JP5232884B2 (ja) * 2011-02-25 2013-07-10 昭和オプトロニクス株式会社 紫外レーザ装置
TWI533072B (zh) * 2012-08-23 2016-05-11 Ngk Insulators Ltd Wavelength conversion element
EP3417515B1 (en) * 2016-03-30 2023-11-29 IPG Photonics Corporation High efficiency laser system for third harmonic generation
EP3296723A1 (en) * 2016-09-14 2018-03-21 ASML Netherlands B.V. Illumination source for an inspection apparatus, inspection apparatus and inspection method
JP7265771B2 (ja) * 2018-11-13 2023-04-27 国立大学法人電気通信大学 波長変換デバイス、及びこれを用いたレーザ装置
DE112019004938T5 (de) 2018-11-26 2021-06-17 Phoseon Technology, Inc. Verfahren und systeme zur effizienten trennung von polarisiertem uv-licht
US11404841B2 (en) * 2019-08-20 2022-08-02 Coherent, Inc. Optical parametric chirped-pulse amplifier
JP7417160B2 (ja) * 2020-04-21 2024-01-18 日本電信電話株式会社 波長変換装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2704341B2 (ja) * 1991-12-02 1998-01-26 富士写真フイルム株式会社 光波長変換装置
JP3944959B2 (ja) * 1997-07-25 2007-07-18 三菱電機株式会社 波長変換レーザ装置
JPH11271823A (ja) * 1998-03-19 1999-10-08 Mitsubishi Electric Corp 波長変換器
JP2000250083A (ja) * 1999-03-03 2000-09-14 Fuji Photo Film Co Ltd 光波長変換モジュール及び画像記録方法
AU2002306542A1 (en) * 2001-02-15 2002-08-28 Aculight Corporation Methods and devices for efficient generation of ultraviolet light
JP2002350914A (ja) 2001-05-30 2002-12-04 Nikon Corp 光源装置及び光照射装置
US6982999B1 (en) * 2003-01-21 2006-01-03 Picarro,Inc. Multipass second harmonic generation
US7583431B2 (en) * 2005-02-25 2009-09-01 Panasonic Corporation Wavelength conversion optical device, laser light source, and image display optical device
JP2007058191A (ja) * 2005-07-25 2007-03-08 Optoquest Co Ltd 波長変換素子、波長変換装置ならびに波長変換方法
WO2007013513A1 (ja) * 2005-07-28 2007-02-01 Matsushita Electric Industrial Co., Ltd. 波長変換素子、レーザ光源装置、２次元画像表示装置及びレーザ加工装置
JP2007086101A (ja) * 2005-09-20 2007-04-05 Megaopto Co Ltd 深紫外レーザー装置
US7570676B2 (en) * 2006-05-09 2009-08-04 Spectralus Corporation Compact efficient and robust ultraviolet solid-state laser sources based on nonlinear frequency conversion in periodically poled materials
JP2007094424A (ja) * 2006-11-30 2007-04-12 Mitsubishi Electric Corp 波長変換レーザ装置

Also Published As

Publication number Publication date
US20080316590A1 (en) 2008-12-25
JP2009025811A (ja) 2009-02-05
US7738162B2 (en) 2010-06-15

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