JP5042503B2 - 欠陥検出方法 - Google Patents
欠陥検出方法 Download PDFInfo
- Publication number
- JP5042503B2 JP5042503B2 JP2006014519A JP2006014519A JP5042503B2 JP 5042503 B2 JP5042503 B2 JP 5042503B2 JP 2006014519 A JP2006014519 A JP 2006014519A JP 2006014519 A JP2006014519 A JP 2006014519A JP 5042503 B2 JP5042503 B2 JP 5042503B2
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- light
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- image
- defect
- imaging device
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- 230000007547 defect Effects 0.000 title claims description 46
- 238000001514 detection method Methods 0.000 title claims description 12
- 238000003384 imaging method Methods 0.000 claims description 51
- 238000012545 processing Methods 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 23
- 238000004140 cleaning Methods 0.000 claims description 17
- 230000008569 process Effects 0.000 claims description 14
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 238000007689 inspection Methods 0.000 description 28
- 230000002950 deficient Effects 0.000 description 19
- 239000000047 product Substances 0.000 description 8
- 230000008859 change Effects 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000000605 extraction Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003340 mental effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006014519A JP5042503B2 (ja) | 2006-01-24 | 2006-01-24 | 欠陥検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006014519A JP5042503B2 (ja) | 2006-01-24 | 2006-01-24 | 欠陥検出方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007198761A JP2007198761A (ja) | 2007-08-09 |
| JP2007198761A5 JP2007198761A5 (enrdf_load_stackoverflow) | 2009-03-12 |
| JP5042503B2 true JP5042503B2 (ja) | 2012-10-03 |
Family
ID=38453518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006014519A Expired - Fee Related JP5042503B2 (ja) | 2006-01-24 | 2006-01-24 | 欠陥検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5042503B2 (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5297717B2 (ja) * | 2008-08-11 | 2013-09-25 | キヤノン化成株式会社 | 欠陥検出装置及び欠陥検出方法 |
| JP2011203132A (ja) * | 2010-03-25 | 2011-10-13 | Seiko Epson Corp | 外観検査装置 |
| CN104297264A (zh) * | 2014-11-03 | 2015-01-21 | 苏州精创光学仪器有限公司 | 玻璃表面缺陷在线检测系统 |
| JP2020085587A (ja) * | 2018-11-21 | 2020-06-04 | 日本電気硝子株式会社 | ガラス板の製造方法、及びガラス板の製造装置 |
| CN113083733B (zh) * | 2021-03-24 | 2021-12-10 | 江苏利宇剃须刀有限公司 | 一种基于机器视觉的剃须刀刀刃检测装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03160349A (ja) * | 1989-11-20 | 1991-07-10 | Tokimec Inc | ひび検出装置 |
| JPH1194751A (ja) * | 1997-09-16 | 1999-04-09 | Mitsubishi Chemical Corp | 被測定体内異物の測定装置 |
| JP2004212202A (ja) * | 2002-12-27 | 2004-07-29 | Dainippon Printing Co Ltd | 透光体の外観検査方法及び装置 |
-
2006
- 2006-01-24 JP JP2006014519A patent/JP5042503B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007198761A (ja) | 2007-08-09 |
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